CN105043524A - Laser speckle defocused imaging-based vibration detection method - Google Patents

Laser speckle defocused imaging-based vibration detection method Download PDF

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CN105043524A
CN105043524A CN201510220596.0A CN201510220596A CN105043524A CN 105043524 A CN105043524 A CN 105043524A CN 201510220596 A CN201510220596 A CN 201510220596A CN 105043524 A CN105043524 A CN 105043524A
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laser
imaging
photoelectric sensor
vibration
focus
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CN105043524B (en
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高秀敏
李楠
逯鑫淼
林君
张辉朝
瞿青玲
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Shanghai Weiyuan Electronic Technology Co ltd
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Hangzhou Dianzi University
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Abstract

The invention relates to a laser speckle defocused imaging-based vibration detection method. In the prior art, the lossless remote measurement of the vibration information cannot be realized. The method is designed based on the laser speckle defocused imaging principle and integrates the line scanning technique of a two-dimensional photoelectric sensor, wherein a laser beam is irradiated onto a to-be-detected region. Laser speckles are imaged by means of a defocused optical imaging system. A spectroscope is arranged in the image space of the defocused optical imaging system to divide the laser beam into two beams. The image plane of each imaging beam is provided with a two-dimensional photoelectric sensor and the photoelectric sensor is set to run in the line-scanning and imaging mode. A vibration analysis unit is used for processing line-scanning and imaging signals to obtain the vibration information of the to-be-detected region. The laser speckle defocused imaging-based vibration detection method has the advantages of non-contact detection, non-damage detection, remote measurement, high sensitivity, high reliability, strong anti-interference capability, wide frequency response range, large information amount, easy construction, convenient usage, wide application range, easily extended function, convenient integration, flexible construction, low cost and the like.

Description

A kind of method for detecting vibration based on the imaging of laser speckle out of focus
Technical field
The invention belongs to optical technical field, relate to a kind of method for detecting vibration, particularly based on a method for detecting vibration for laser speckle out of focus imaging, be mainly used in the vibration detection in the fields such as voice collecting, health detection, vibration monitoring, quality testing, noise analysis, environmental monitoring.
Background technology
Extensively there is machine diagnostic in vibration detection, voice collecting, health detection, vibration monitoring, quality testing, noise analysis, environmental monitoring, resource exploration, biological study, life science, medical, process control, national defense safety, engineering test, assessment of risks, environment sensing, Internet of Things, process control, in the fields such as advanced manufacture, and it is more and more urgent to the demand of vibration detection, testing requirement is also more and more higher, such as, in voice collecting field, voice are also the one performances of vibration, usual employing microphone carries out voice messaging collection, but microphone is difficult to realize in remote speech collection, and performance is not good, therefore the remote collector of high-quality is needed, in health detection, the health vibration detection that can be caused by heart, carry out the analysis of Human Physiology characteristic and health status, vibration detection technology is essential.
Vibration information detection method is there is in first technology, a kind of piezoelectric vibration sensors, (see United States Patent (USP), patent name: Piezoelectricvibrationsensor, inventor: OrtenBirger, the patent No.: US7656524B2, the license time: on 05 06th, 2008), although there is certain feature in first technology in this, but it is not enough still to there is essence: 1) adopt piezoelectric principle to carry out vibration detection, vibration transducer is made into based on piezoelectric, then vibration transducer and detected material carry out contacting perception vibration information, therefore cannot realize in essence vibrating remote measurement at a distance, 2) because piezoelectric vibration sensors and detected material exist closely mutually used, detected material and residing environment can affect piezoelectric vibration sensing process, affect correctness and the sensitivity of testing result, and then affect the reliability of vibration detection process, 3) there is self intrinsic mechanical frequency characteristic due to piezoelectric and based on the vibration transducer that piezoelectric is made into, natural frequency characteristic limits the frequency response behavior that vibration information detects, both affect vibration detection quantity of information, again limit frequency detecting range of application, 4) first vibration detecting system build complicated, use not convenient, function to be not easy to expand, 5) piezoelectric vibration sensors is not easy to carry out integrated.
Summary of the invention
The object of the invention is to the deficiency for above-mentioned technology, a kind of method for detecting vibration based on the imaging of laser speckle out of focus is provided, there is Poul Dorset Sheep, Non-Destructive Testing, remote measurement can be realized, high spirit goes out sensitivity, reliability is high, antijamming capability is strong, frequency response characteristic is wide, quantity of information is high, system is easy to build, easy-to-use, applied range, function are easy to expand, it is integrated to be convenient to, build flexibly, the low feature of cost.
Basic conception of the present invention is: based on laser speckle out of focus image-forming principle, in conjunction with two-dimension photoelectric sensor line sweep technique, and laser beam irradiation is to detected region; Laser speckle carries out imaging through out of focus optical imaging system, the image space of out of focus optical imaging system is provided with spectroscope imaging beam is divided into two bundles, each imaging beam as plane being provided with a two-dimension photoelectric sensor, photoelectric sensor is two-dimension photoelectric sensor; Photoelectric sensor is operated in line scanning imaging pattern, and the first photoelectric sensor and the second photoelectric sensor carry out imaging to same laser speckle defocused image, and the direction of scanning that the first photoelectric sensor and the second photoelectric sensor carry out line scanning imaging is not parallel; Vibration analysis unit carries out the process of line scanning imaging signal, and comprehensive analysis photo-sensor signal will also carries out information fusion and feature extraction, obtains the vibration information of surveyed area.
A kind of method for detecting vibration based on the imaging of laser speckle out of focus of the present invention, its concrete technical scheme is as follows:
The light path of step (1) LASER Light Source outgoing beam is provided with light beam adjustment component, and light beam adjustment component regulates light beam parameters or dissemination characteristic, realizes laser beam and the direction of propagation of vibration detection;
Step (2) laser beam irradiation is to detected region, and detected region exists optical interface, and laser beam is scattered at optical interface place, and laser light scattering effect occurs, and forms laser light scattering light field, realizes Laser Transmission speckle light field;
Step (3) laser speckle carries out imaging through out of focus optical imaging system, the image space of out of focus optical imaging system is provided with spectroscope imaging beam is divided into two bundles, each imaging beam as plane being provided with a two-dimension photoelectric sensor, photoelectric sensor is two-dimension photoelectric sensor;
Step (4) photoelectric sensor is operated in line scanning imaging pattern, first photoelectric sensor and the second photoelectric sensor carry out imaging to same laser speckle defocused image, and the direction of scanning that the first photoelectric sensor and the second photoelectric sensor carry out line scanning imaging is not parallel;
The line scanning imaging signal of step (5) vibration analysis unit to the first photoelectric sensor and the second photoelectric sensor processes, and comprehensive analysis photo-sensor signal will also carries out information fusion and feature extraction, obtains the vibration information of surveyed area.
Described LASER Light Source is the one in laser diode, diode laser, gas laser, solid-state laser, dye laser, semiconductor laser.
Described light beam adjustment component is the one in transmission-type light beam adjustment component, reflected light beams adjustment component, liquid crystal beam adjustment component, micro-nano structure light beam adjustment component.
Described out of focus optical imaging system is the one in refractive optical imaging system, reflective optic imaging system, hybrid optical imaging system.
Described photoelectric sensor is charge-coupled image sensor or complementary metal oxide semiconductor (CMOS) electric transducer.
Described vibration analysis unit is the one in computing machine, embedded system, digital signal processor, mobile terminal device.
In the present invention, speckle principle, image processing techniques, sensor use, multi-information merging technology are mature technology.Inventive point of the present invention is based on laser speckle out of focus image-forming principle, in conjunction with two-dimension photoelectric sensor line sweep technique, provide a kind of Poul Dorset Sheep, Non-Destructive Testing, remote measurement can be realized, high sensitivity, reliability is high, antijamming capability is strong, frequency response characteristic is wide, quantity of information is high, system is easy to build, easy-to-use, applied range, function are easy to expand, it is integrated to be convenient to, build flexibly, the method for detecting vibration based on the imaging of laser speckle out of focus that cost is low.
Compared with prior art, advantage of the present invention:
1) adopt piezoelectric principle to carry out vibration detection in first technology, be made into vibration transducer based on piezoelectric, then vibration transducer and detected material carry out contacting perception vibration information, therefore cannot realize in essence vibrating remote measurement at a distance.The present invention is based on laser speckle out of focus image-forming principle, in conjunction with two-dimension photoelectric sensor line sweep technique, laser beam irradiation is to detected region, laser speckle carries out imaging through out of focus optical imaging system, vibration information is obtained by analyzing, the present invention has given full play to speckle principle and imaging telecommute characteristic, therefore has Poul Dorset Sheep, Non-Destructive Testing, can realize the feature such as remote measurement, high sensitivity;
2) due in first technology piezoelectric vibration sensors and detected material exist closely mutually used, detected material and residing environment can affect piezoelectric vibration sensing process, affect correctness and the sensitivity of testing result, and then affect the reliability of vibration detection process.The present invention is essentially laser speckle remote measurement principle, avoid in essence and contact with the direct of detected material, optical detection principle is affected by the external environment little, and the image space of out of focus optical imaging system is provided with spectroscope imaging beam is divided into two bundles, each imaging beam as plane being provided with a two-dimension photoelectric sensor, photoelectric sensor is two-dimension photoelectric sensor; Photoelectric sensor is operated in line scanning imaging pattern, thus have that reliability is high, antijamming capability is strong, detected material form and material is various, quantity of information high;
3) there is self intrinsic mechanical frequency characteristic due to piezoelectric and based on the vibration transducer that piezoelectric is made into, natural frequency characteristic limits the frequency response behavior that vibration information detects, both affect vibration detection quantity of information, again limit frequency detecting range of application.In the present invention, the first photoelectric sensor and the second photoelectric sensor carry out imaging to same laser speckle defocused image, and the direction of scanning that the first photoelectric sensor and the second photoelectric sensor carry out line scanning imaging is not parallel; Vibration analysis unit carries out the process of line scanning imaging signal, comprehensive analysis photo-sensor signal will also carries out information fusion and feature extraction, obtain the vibration information of surveyed area, therefore, frequency characteristic of the present invention is not limited to device engineering properties, and Photoelectric Signal Processing speed is fast, frequency range wide, therefore, it is wide that the present invention has frequency response characteristic, further increases quantity of information;
4) vibration detecting system in first technology build complicated, use not convenient, function to be not easy to expand.The present invention adopts speckle photoelectricity remote measurement principle and optical fiber technology, and it is simple for structure, make of the present invention based on laser speckle out of focus image-forming principle, in conjunction with two-dimension photoelectric sensor line sweep technique, vibration information detection method has and is easy to build, use special facility, applied range, function to be easy to the features such as expansion.
5) be not easy to carry out in first technology piezoelectric vibration sensors integrated.Point of the present invention is to provide a kind of method for detecting vibration based on the imaging of laser speckle out of focus, the Cleaning Principle of invention determines to adopt the ripe processing module of existing low price and element in vibration information detection method, the present invention is convenient to integrated, and the required cost of method realization is low.
Accompanying drawing explanation
Fig. 1 is a kind of example structure schematic diagram of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
As shown in Figure 1, a kind of embodiment of the method for detecting vibration based on the imaging of laser speckle out of focus, based on laser speckle out of focus image-forming principle, in conjunction with two-dimension photoelectric sensor line sweep technique, laser beam irradiation is to detected region, laser speckle carries out imaging through out of focus optical imaging system, the image space of out of focus optical imaging system is provided with spectroscope imaging beam is divided into two bundles, each imaging beam as plane being provided with a two-dimension photoelectric sensor, photoelectric sensor is operated in line scanning imaging pattern, the direction of scanning that two photoelectric sensors carry out line scanning imaging is not parallel, vibration analysis unit carries out the process of line scanning imaging signal, obtains the vibration information of surveyed area.
The specific implementation step of the present embodiment is:
The light path of step (1) LASER Light Source 1 outgoing beam is provided with light beam adjustment component 2, and light beam adjustment component 2 regulates light beam parameters or dissemination characteristic, realizes laser beam and the direction of propagation of vibration detection; In the present embodiment, LASER Light Source 1 is the solid state laser of 532 nano wave lengths, and light beam adjustment component 2 adopts reflected light beams adjustment component, is plane mirror, and light beam adjustment component 2 is for changing the direction of propagation of LASER Light Source 1 outgoing beam;
Step (2) laser beam irradiation is to detected region, and detected region exists optical interface 3, and laser beam is scattered at optical interface place, and laser light scattering effect occurs, and forms laser light scattering light field, realizes Laser Transmission speckle light field; In the present embodiment, optical interface 3 is cell phone rear cover in the communication process of 10 meters of distances;
Step (3) laser speckle carries out imaging through out of focus optical imaging system 4, the image space of out of focus optical imaging system 4 is provided with spectroscope 5 imaging beam is divided into two bundles, each imaging beam as plane being provided with a two-dimension photoelectric sensor, photoelectric sensor is two-dimension photoelectric sensor; In the present embodiment, on the transmitted light path of spectroscope 5 as plane being provided with the first electric transducer 6, on the reflected light path of spectroscope 5 as plane being provided with the second photoelectric sensor 7, first photoelectric sensor 6 and the second photoelectric sensor 7 all adopts complementary metal oxide semiconductor (CMOS) electric transducer;
Step (4) first photoelectric sensor 6 and the second photoelectric sensor 7 are all operated in line scanning imaging pattern, first photoelectric sensor 6 and the second photoelectric sensor 7 carry out imaging to same laser speckle defocused image, and the direction of scanning that the first photoelectric sensor 6 and the second photoelectric sensor 7 carry out line scanning imaging is not parallel; The direction of scanning that in the present embodiment, the first photoelectric sensor 6 and the second photoelectric sensor 7 carry out line scanning imaging is mutually vertical;
Step (5) vibration analysis unit 8 carries out the process of line scanning imaging signal, comprehensive analysis photo-sensor signal will also carries out information fusion and feature extraction, obtain the vibration information of surveyed area, in the present embodiment, vibration analysis unit 8 adopts embedded system.
The present embodiment successfully achieves cell phone rear cover vibration characteristics in the communication process of 10 meters of distances and detects, involving vibrations frequency characteristic and amplitude characteristic.The features such as the present invention has Poul Dorset Sheep, Non-Destructive Testing, can realize remote measurement, high sensitivity, reliability is high, antijamming capability is strong, frequency response characteristic is wide, quantity of information is high, system is easy to build, easy-to-use, applied range, function are easy to expand, it is integrated to be convenient to, build flexibly, cost is low.
Above-described embodiment has been described in detail technical scheme of the present invention and beneficial effect; be understood that and the foregoing is only most preferred embodiment of the present invention; be not limited to the present invention; all make in spirit of the present invention any amendment, supplement and equivalent to replace, all should be included within protection scope of the present invention.

Claims (6)

1., based on a method for detecting vibration for laser speckle out of focus imaging, it is characterized in that comprising the following steps:
The light path of step (1) LASER Light Source outgoing beam is provided with light beam adjustment component, and light beam adjustment component regulates light beam parameters or dissemination characteristic, realizes laser beam and the direction of propagation of vibration detection;
Step (2) laser beam irradiation is to detected region, and detected region exists optical interface, and laser beam is scattered at optical interface place, and laser light scattering effect occurs, and forms laser light scattering light field, realizes Laser Transmission speckle light field;
Step (3) laser speckle carries out imaging through out of focus optical imaging system, the image space of out of focus optical imaging system is provided with spectroscope imaging beam is divided into two bundles, each imaging beam as plane being provided with a two-dimension photoelectric sensor, photoelectric sensor is two-dimension photoelectric sensor;
Step (4) photoelectric sensor is operated in line scanning imaging pattern, first photoelectric sensor and the second photoelectric sensor carry out imaging to same laser speckle defocused image, and the direction of scanning that the first photoelectric sensor and the second photoelectric sensor carry out line scanning imaging is not parallel;
The line scanning imaging signal of step (5) vibration analysis unit to the first photoelectric sensor and the second photoelectric sensor processes, and comprehensive analysis photo-sensor signal will also carries out information fusion and feature extraction, obtains the vibration information of surveyed area.
2. a kind of method for detecting vibration based on the imaging of laser speckle out of focus as claimed in claim 1, is characterized in that: described LASER Light Source is the middle one of laser diode, diode laser, gas laser, solid-state laser, dye laser, semiconductor laser.
3. a kind of method for detecting vibration based on the imaging of laser speckle out of focus as claimed in claim 1, is characterized in that: described light beam adjustment component is the middle one of transmission-type light beam adjustment component, reflected light beams adjustment component, liquid crystal beam adjustment component, micro-nano structure light beam adjustment component.
4. a kind of method for detecting vibration based on the imaging of laser speckle out of focus as claimed in claim 1, is characterized in that: described out of focus optical imaging system is the one in refractive optical imaging system, reflective optic imaging system, hybrid optical imaging system.
5. a kind of method for detecting vibration based on the imaging of laser speckle out of focus as claimed in claim 1, is characterized in that: described photoelectric sensor is charge-coupled image sensor or complementary metal oxide semiconductor (CMOS) electric transducer.
6. a kind of method for detecting vibration based on the imaging of laser speckle out of focus as claimed in claim 1, is characterized in that: described vibration analysis unit is the one in computing machine, embedded system, digital signal processor, mobile terminal device.
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105258783A (en) * 2015-11-16 2016-01-20 杭州电子科技大学 Vibration detection method based on laser wavefront coding technique
CN105258783B (en) * 2015-11-16 2019-01-18 杭州电子科技大学 A kind of method for detecting vibration based on laser wavefront coding technology
CN113063755A (en) * 2015-11-17 2021-07-02 韩国科学技术院 Sample characteristic detection device using chaotic wave sensor
CN105737965A (en) * 2016-02-29 2016-07-06 莆田学院 Aerogenerator vibration detection device and analysis method
CN105737965B (en) * 2016-02-29 2018-11-13 莆田学院 A kind of vibration detecting device of wind-driven generator and analysis method
CN106225909A (en) * 2016-08-18 2016-12-14 福建福晶科技股份有限公司 A kind of laser frequency meter of compact
WO2021017828A1 (en) * 2019-07-27 2021-02-04 复旦大学 High-precision method for measuring high-frequency standing wave amplitude distribution

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