CN105043524B - A kind of method for detecting vibration based on the imaging of laser speckle defocus - Google Patents

A kind of method for detecting vibration based on the imaging of laser speckle defocus Download PDF

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CN105043524B
CN105043524B CN201510220596.0A CN201510220596A CN105043524B CN 105043524 B CN105043524 B CN 105043524B CN 201510220596 A CN201510220596 A CN 201510220596A CN 105043524 B CN105043524 B CN 105043524B
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laser
defocus
photoelectric sensor
imaging
vibration
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CN105043524A (en
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高秀敏
李楠
逯鑫淼
林君
张辉朝
瞿青玲
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Shanghai Weiyuan Electronic Technology Co ltd
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Hangzhou Dianzi University
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Abstract

The present invention relates to a kind of method for detecting vibration based on the imaging of laser speckle defocus.It is existing to cannot achieve the lossless telemetering of vibration information.The present invention is based on laser speckle defocus image-forming principles, in conjunction with two-dimension photoelectric sensor line sweep technique, laser beam is irradiated to detected region, laser speckle is imaged by defocus optical imaging system, the image space of defocus optical imaging system is provided with spectroscope, imaging beam is divided into two beams, there are one two-dimension photoelectric sensors for setting in the image plane of each imaging beam, photoelectric sensor work is expert at scanning imagery pattern, vibration analysis unit obtains the vibration information of detection zone into every trade scanning imagery signal processing.The present invention have the function of Poul Dorset Sheep, non-destructive testing, telemetering may be implemented, high sensitivity, reliability height, strong antijamming capability, frequency response characteristic is wide, information content is high, system is easy to structure, it is easy-to-use, have a wide range of application, be easy to expand, convenient for integrating, build the features such as flexible, at low cost.

Description

A kind of method for detecting vibration based on the imaging of laser speckle defocus
Technical field
The invention belongs to optical technical fields, are related to a kind of method for detecting vibration, it is especially a kind of based on laser speckle from Coke imaging method for detecting vibration, be mainly used in voice collecting, health detection, vibration monitoring, quality testing, noise analysis, Vibration detection in the fields such as environmental monitoring.
Background technology
Vibration detection is widely present machine diagnostic, voice collecting, health detection, vibration monitoring, quality testing, noise point Analysis, environmental monitoring, resource exploration, biological study, life science, medical, process control, national defense safety, engineering test, danger In the fields such as danger assessment, environment sensing, Internet of Things, process control, advanced manufacture, and the demand to vibration detection is more and more tighter Compel, testing requirements are also higher and higher, for example, in voice collecting field, voice is also a kind of performance of vibration, generally use wheat Gram wind carries out voice messaging acquisition, however microphone is difficult to realize in remote speech acquisition, and performance is bad, therefore needs Want the remote collector of high quality;In health detection, human body life can be carried out by body vibration detection caused by heart The analysis of characteristic and health status is managed, vibration detection technology is essential.
There are vibration information detection method in first technology, a kind of piezoelectric vibration sensors,(Referring to United States Patent (USP), patent Title:Piezoelectric vibration sensor, inventor:Orten Birger, the patent No.:US7656524B2, specially Profit authorizes the time:On May 06th, 2008)Although this first technology haves the characteristics that certain, there are still essence is insufficient: 1)Vibration detection is carried out using piezoelectric principle, vibrating sensor is fabricated to based on piezoelectric material, then vibrating sensor with it is tested It surveys object and carries out contact perception vibration information, therefore substantially cannot achieve remote vibration telemetering;2)Since piezoelectric vibration senses Device is mutually used in the presence of short distance with detected material, and detected material and local environment can influence piezoelectric vibration sensing process, shadow The correctness for influencing testing result and sensitivity are rung, and then influences the reliability of vibration detection process;3)Due to piezoelectric material with And the vibrating sensor being fabricated to based on piezoelectric material, there are itself intrinsic mechanical frequency characteristic, intrinsic frequency characteristic, which limits, shakes The frequency response behavior of dynamic infomation detection, had both influenced vibration detection information content, and had again limited frequency detecting application range;4)Formerly Vibration detecting system structure is complicated, sharp, function inconvenient for use is not easy to expand;5)Piezoelectric vibration sensors are not easy to be collected At.
Invention content
It is an object of the invention to deficiencies in view of the above technology, provide a kind of vibration being imaged based on laser speckle defocus Detection method, have Poul Dorset Sheep, non-destructive testing, telemetering may be implemented, high spirit goes out sensitivity, reliability is high, anti-interference ability By force, frequency response characteristic is wide, information content is high, system be easy to structure, it is easy-to-use, have a wide range of application, function is easy to expand, be convenient for It integrates, build feature flexible, at low cost.
The present invention basic conception be:Based on laser speckle defocus image-forming principle, scanned in conjunction with two-dimension photoelectric sensor row Technology, laser beam are irradiated to detected region;Laser speckle is imaged by defocus optical imaging system, defocus optics at Imaging beam is divided into two beams as the image space of system is provided with spectroscope, one is provided in the image plane of each imaging beam A two-dimension photoelectric sensor, photoelectric sensor are two-dimension photoelectric sensor;Photoelectric sensor work is expert at scanning imagery pattern, First photoelectric sensor and the second photoelectric sensor are imaged the same laser speckle defocused image, the first photoelectric sensor and The scanning direction of second photoelectric sensor into every trade scanning imagery is not parallel;Vibration analysis unit is at every trade scanning imagery signal Reason, comprehensive analysis photo-sensor signal go forward side by side row information fusion and feature extraction, obtain the vibration information of detection zone.
A kind of method for detecting vibration based on the imaging of laser speckle defocus of the present invention, specific technical solution are as follows:
Light beam adjustment component is provided in the light path of step (1) laser light source outgoing beam, light beam adjusts component and adjusts light Beam parameter or dissemination characteristic realize laser beam and the direction of propagation of vibration detection;
Step (2) laser beam is irradiated to detected region, and there are optical interfaces in detected region, and laser beam is in optics Interface is scattered, and laser light scattering effect occurs, and forms laser light scattering light field, realizes laser transmission speckle light field;
Step (3) laser speckle is imaged by defocus optical imaging system, empty in the picture of defocus optical imaging system Between be provided with spectroscope imaging beam be divided into two beams, there are one 2 D photoelectrics to pass for setting in the image plane of each imaging beam Sensor, photoelectric sensor are two-dimension photoelectric sensor;
The work of step (4) photoelectric sensor is expert at scanning imagery pattern, the first photoelectric sensor and the second photoelectric sensor The same laser speckle defocused image is imaged, the first photoelectric sensor and the second photoelectric sensor are into every trade scanning imagery Scanning direction is not parallel;
The row scanning imagery signal of step (5) first photoelectric sensor of vibration analysis unit pair and the second photoelectric sensor into Row processing, comprehensive analysis photo-sensor signal go forward side by side row information fusion and feature extraction, obtain the vibration information of detection zone.
The laser light source is laser diode, diode laser, gas laser, solid-state laser, dyestuff swash One kind in light device, semiconductor laser.
The light beam adjustment component is that transmission-type light beam adjusts component, reflected light beams adjust component, liquid crystal beam tune One kind in integeral part, micro-nano structure light beam adjustment component.
The defocus optical imaging system is refractive optical imaging system, reflective optic imaging system, hybrid One kind in optical imaging system.
The photoelectric sensor is charge coupling device or complementary metal oxide semiconductor electric transducer.
The vibration analysis unit is in computer, embedded system, digital signal processor, mobile terminal device It is a kind of.
Speckle principle, image processing techniques, sensor use in the present invention, multi-information merging technology is mature technology. The inventive point of the present invention is to provide in conjunction with two-dimension photoelectric sensor line sweep technique based on laser speckle defocus image-forming principle Non-destructive testing, telemetering, high sensitivity, reliability height, strong antijamming capability, frequency response may be implemented in a kind of Poul Dorset Sheep Characteristic is wide, information content is high, system is easy to structure, it is easy-to-use, have a wide range of application, function is easy to expand, convenient for integrated, structure spirit Method for detecting vibration living, at low cost based on the imaging of laser speckle defocus.
Compared with prior art, advantages of the present invention:
1)First technology carries out vibration detection using piezoelectric principle, is fabricated to vibrating sensor based on piezoelectric material, then Vibrating sensor carries out contacting perception vibration information with detected material, therefore substantially cannot achieve remote vibration telemetering.This Invention is based on laser speckle defocus image-forming principle, and in conjunction with two-dimension photoelectric sensor line sweep technique, laser beam is irradiated to detected Region, laser speckle are imaged by defocus optical imaging system, obtain vibration information by analysis, the present invention gives full play to Speckle principle and be imaged remote working characteristics, thus with Poul Dorset Sheep, non-destructive testing, telemetering may be implemented, highly sensitive The features such as spending;
2)Due in first technology piezoelectric vibration sensors and detected material exist it is closely mutually used, detected material with And local environment can influence piezoelectric vibration sensing process, influence the correctness and the sensitivity that influence testing result, and then influence to shake The reliability of dynamic detection process.The present invention is essentially laser speckle telemetering principle, is substantially avoided straight with detected material Contact, optical detection principle are affected by the external environment small, and the image space of defocus optical imaging system are provided with light splitting Imaging beam is divided into two beams by mirror, and there are one two-dimension photoelectric sensor, photoelectric transfers for setting in the image plane of each imaging beam Sensor is two-dimension photoelectric sensor;Photoelectric sensor work is expert at scanning imagery pattern, so high, anti-interference with reliability The features such as ability is strong, detected material form and substance are various, information content is high;
3)There are itself intrinsic mechanical frequencies for the vibrating sensor being fabricated to due to piezoelectric material and based on piezoelectric material Characteristic, intrinsic frequency characteristic limit the frequency response behavior of vibration information detection, have not only influenced vibration detection information content, but also limitation Frequency detecting application range.In the present invention, the first photoelectric sensor and the second photoelectric sensor to the same laser speckle from Burnt picture is imaged, and the scanning direction of the first photoelectric sensor and the second photoelectric sensor into every trade scanning imagery is not parallel;It shakes Dynamic analytic unit is into every trade scanning imagery signal processing, and comprehensive analysis photo-sensor signal goes forward side by side row information fusion and feature carries It takes, obtains the vibration information of detection zone, therefore, frequency characteristic of the present invention is not only restricted to device engineering properties, and optical telecommunications Number processing speed is fast, frequency range is wide, and therefore, the present invention has frequency response characteristic wide, further increases information content;
4)Vibration detecting system structure complexity, profit inconvenient for use, function in first technology are not easy to expand.The present invention adopts With speckle photoelectricity telemetering principle and optical fiber technology, and simple for structure so that it is of the invention be imaged based on laser speckle defocus it is former Reason, in conjunction with two-dimension photoelectric sensor line sweep technique, vibration information detection method, which has, is easy to structure, application convenient using spy The features such as range is wide, function is easy to expand.
5)First technology piezoelectric vibration sensors are not easy to be integrated.Point of the present invention is to provide a kind of scattered based on laser The method for detecting vibration of spot defocus imaging, the testing principle of invention determine that existing low price may be used in vibration information detection method Ripe processing module and element, the present invention is convenient for integrated, and method realization is required at low cost.
Description of the drawings
Fig. 1 is a kind of example structure schematic diagram of the present invention.
Specific implementation mode
The invention will be further described with reference to the accompanying drawings and examples.
As shown in Figure 1, a kind of embodiment of the method for detecting vibration based on the imaging of laser speckle defocus, is based on laser speckle Defocus image-forming principle, in conjunction with two-dimension photoelectric sensor line sweep technique, laser beam is irradiated to detected region, and laser speckle passes through Defocus optical imaging system is imaged, and the image space of defocus optical imaging system, which is provided with spectroscope, is divided into imaging beam Two beams, there are one two-dimension photoelectric sensor, photoelectric sensor work is expert at scanning for setting in the image plane of each imaging beam The scanning direction of imaging pattern, two photoelectric sensors into every trade scanning imageries is not parallel;Vibration analysis unit is into line scans Imaging signal processing, obtains the vibration information of detection zone.
The specific implementation step of the present embodiment is:
Light beam adjustment component 2 is provided in the light path of 1 outgoing beam of step (1) laser light source, light beam adjusts component 2 and adjusts Light beam parameters or dissemination characteristic realize laser beam and the direction of propagation of vibration detection;In the present embodiment, laser light source 1 is the solid state laser of 532 nano wave lengths, and light beam adjusts component 2 and adjusts component using reflected light beams, is plane mirror, Light beam adjusts component 2 for changing the direction of propagation of 1 outgoing beam of laser light source;
Step (2) laser beam is irradiated to detected region, and detected region is there are optical interface 3, and laser beam is in light It learns interface to be scattered, laser light scattering effect occurs, form laser light scattering light field, realize laser transmission speckle light field;This implementation In example, optical interface 3 is cell phone rear cover in the communication process at 10 meters of distances;
Step (3) laser speckle is imaged by defocus optical imaging system 4, in the picture of defocus optical imaging system 4 Space is provided with spectroscope 5 and imaging beam is divided into two beams, and there are one two-dimentional light for setting in the image plane of each imaging beam Electric transducer, photoelectric sensor are two-dimension photoelectric sensor;In the present embodiment, the image plane on the transmitted light path of spectroscope 5 On be provided with the first electric transducer 6, be provided with the second photoelectric sensor 7 in the image plane on the reflected light path of spectroscope 5, first Photoelectric sensor 6 and the second photoelectric sensor 7 are all made of complementary metal oxide semiconductor electric transducer;
(4) first photoelectric sensor 6 of step and the second photoelectric sensor 7 work scanning imagery pattern of being expert at, the first light Electric transducer 6 and the second photoelectric sensor 7 are imaged the same laser speckle defocused image, the first photoelectric sensor 6 and The scanning direction of two photoelectric sensor 7 into every trade scanning imageries is not parallel;First photoelectric sensor 6 and the second light in the present embodiment The scanning direction of electric transducer 7 into every trade scanning imagery is mutually perpendicular to;
Step (5) vibration analysis unit 8 into every trade scanning imagery signal processing, go forward side by side by comprehensive analysis photo-sensor signal Row information merges and feature extraction, obtains the vibration information of detection zone, and vibration analysis unit 8 is using embedded in the present embodiment System.
The present embodiment is successfully realized cell phone rear cover vibration characteristics in the communication process at 10 meters of distances and detects, including vibration Frequency characteristic and amplitude response.The present invention has Poul Dorset Sheep, non-destructive testing, telemetering, high sensitivity, reliability may be implemented Height, strong antijamming capability, frequency response characteristic are wide, information content is high, system be easy to structure, it is easy-to-use, have a wide range of application, function It is easy to expand, convenient for integrating, build the features such as flexible, at low cost.
Technical scheme of the present invention and advantageous effect is described in detail in above-described specific implementation mode, Ying Li Solution is not intended to restrict the invention the foregoing is merely presently most preferred embodiment of the invention, all principle models in the present invention Interior done any modification, supplementary, and equivalent replacement etc. are enclosed, should all be included in the protection scope of the present invention.

Claims (6)

1. a kind of method for detecting vibration based on the imaging of laser speckle defocus, it is characterised in that include the following steps:
Light beam adjustment component is provided in the light path of step (1) laser light source outgoing beam, light beam adjusts component and adjusts light beam ginseng Number or dissemination characteristic realize laser beam and the direction of propagation of vibration detection;
Step (2) laser beam is irradiated to detected region, and there are optical interfaces in detected region, and laser beam is in optical interface Place is scattered, and laser light scattering effect occurs, and forms laser light scattering light field, realizes laser transmission speckle light field;
Step (3) laser speckle is imaged by defocus optical imaging system, is set in the image space of defocus optical imaging system It is equipped with spectroscope and imaging beam is divided into two beams, there are one photoelectric sensor, light for setting in the image plane of each imaging beam Electric transducer is two-dimension photoelectric sensor;
The work of step (4) photoelectric sensor is expert at scanning imagery pattern, and the first photoelectric sensor and the second photoelectric sensor are to same One laser speckle defocused image is imaged, the scanning of the first photoelectric sensor and the second photoelectric sensor into every trade scanning imagery Direction is not parallel;
At the row scanning imagery signal of step (5) first photoelectric sensor of vibration analysis unit pair and the second photoelectric sensor Reason, comprehensive analysis photo-sensor signal go forward side by side row information fusion and feature extraction, obtain the vibration information of detection zone.
2. a kind of method for detecting vibration based on the imaging of laser speckle defocus as described in claim 1, it is characterised in that:It is described Laser light source be gas laser, solid-state laser, one kind in dye laser.
3. a kind of method for detecting vibration based on the imaging of laser speckle defocus as described in claim 1, it is characterised in that:It is described Light beam adjustment component be transmission-type light beam adjust component, reflected light beams adjust component, liquid crystal beam adjust component, micro-nano knot Structure light beam adjusts one kind in component.
4. a kind of method for detecting vibration based on the imaging of laser speckle defocus as described in claim 1, it is characterised in that:It is described Defocus optical imaging system be refractive optical imaging system, reflective optic imaging system, hybrid optical imaging system In one kind.
5. a kind of method for detecting vibration based on the imaging of laser speckle defocus as described in claim 1, it is characterised in that:It is described Photoelectric sensor be charge coupling device or complementary metal oxide semiconductor electric transducer.
6. a kind of method for detecting vibration based on the imaging of laser speckle defocus as described in claim 1, it is characterised in that:It is described Vibration analysis unit be mobile terminal device.
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CN105258783B (en) * 2015-11-16 2019-01-18 杭州电子科技大学 A kind of method for detecting vibration based on laser wavefront coding technology
CN113063755A (en) * 2015-11-17 2021-07-02 韩国科学技术院 Sample characteristic detection device using chaotic wave sensor
CN105737965B (en) * 2016-02-29 2018-11-13 莆田学院 A kind of vibration detecting device of wind-driven generator and analysis method
CN106225909A (en) * 2016-08-18 2016-12-14 福建福晶科技股份有限公司 A kind of laser frequency meter of compact
CN110501063B (en) * 2019-07-27 2021-06-04 复旦大学 High-precision measurement method for high-frequency standing wave amplitude distribution

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