CN105004511B - A kind of wide range Wavefront detecting device for low order aberration measurement - Google Patents
A kind of wide range Wavefront detecting device for low order aberration measurement Download PDFInfo
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- CN105004511B CN105004511B CN201510412125.XA CN201510412125A CN105004511B CN 105004511 B CN105004511 B CN 105004511B CN 201510412125 A CN201510412125 A CN 201510412125A CN 105004511 B CN105004511 B CN 105004511B
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- focus lens
- beam focus
- shrink beam
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Abstract
The invention discloses a kind of wide range Wavefront detecting device that can be used for low order aberration measurement, purpose is to provide a kind of Wavefront detecting device that rapidly accurate measurement can be realized to low order aberrations such as defocus present in high power laser system and astigmatisms, and the present invention is arranged on fixed support and is constituted by six hole diaphragms, six shrink beam focus lens groups and six position sensitive detectors;Six hole diaphragms are vertically arranged in six fronts of shrink beam focus lens group, and six circular holes keep center of circle coaxial relation with six shrink beam focus lens groups respectively, the axis of six shrink beam focus lens groups is parallel to each other, and six position sensitive detectors and six shrink beam focus lens groups keep one-to-one coaxial relation.The achievable precision of the present invention is higher and quick wide range low order aberration measurement, for the optical property for improving high power laser system provides technical guarantee.
Description
Technical field
The invention belongs to superpower laser adaptive optics field, it is related to a kind of high power laser system optical property to join
Several detection devices.
Background technology
For high power laser system, the optics such as laser mirror, laser mirror, spectroscope swashs in high power
Light irradiates lower meeting generating device thermal deformation, and thus caused fuel factor aberration then seriously reduces the far-field analysis of laser.
In order to improve the optical property of high power laser system, adaptive optics method is typically taken to be corrected fuel factor aberration,
Aberration detection is then the particularly important ring that can implement effectively aberration correction process.Fuel factor in high power laser system
Aberration is main based on low order aberration, such as defocus and astigmatism, and resolution ratio in time and spatially is relatively low, and aberration
Value is general in tens to up to a hundred wave-length coverages.
At present, it is Hartmann wave front sensor that relatively broad Wavefront detecting device is used in high power laser system,
The device critical piece includes microlens array and CCD camera, and its key technology is by being measured through micro- using CCD camera
Lens array focus on after pinhole difiration picture center, with the characteristics of spatial resolution is high and the speed of response is fast, extensively
For the caused aberration detection such as thermal blooming or atmospheric turbulance, and on the other hand, because microlens requirements machining accuracy is high, lens array
Row depth of parallelism calibration difficulties, cause that its is relatively costly the problems such as lens array physical dimension is small, operability is poor, especially because micro-
Lens permutation focal length is short, the small detectable range for causing Hartmann wave front sensor of unit size is smaller, typically in ten wavelength
Within scope, it is impossible to meet the wide range detection demand of low order aberration in high power laser system, the problem also becomes restriction
One of key issue that high power laser system optical property is improved, thus design is filled for the Wavefront detecting of low order aberration measurement
It is technical problem that those skilled in the art extremely pay close attention to put, there is presently no the wavefront that can be used for the measurement of wide range low order aberration
The correlation technique data of detection device is announced.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of Wavefront detecting that can be used for the measurement of wide range low order aberration and fills
Put, the present invention can realize rapidly accurate measurement to low order aberrations such as defocus present in high power laser system and astigmatisms.
The present invention is made up of six hole diaphragms, six shrink beam focus lens groups and six position sensitive detector three parts,
This three part constitutes the optical detection unit of invention.Each several part carries out installation fixation by fixed support, can be used if necessary
Outer lens barrel is packaged, and the structure snd size of outer lens barrel can be according to using area flexible design, without particular/special requirement.Six hole diaphragms hang down
Disposed upright makes six circular holes be contracted with six respectively in six fronts of shrink beam focus lens group (the normal incidence direction of incident light)
Beam focus lens group keeps center of circle coaxial relation, the axis of six shrink beam focus lens groups to be parallel to each other, and six position sensitives are visited
Survey device and the one-to-one coaxial relations of six shrink beam focus lens groups holding (i.e. each position sensitive detector with its phase
Corresponding shrink beam focus lens group is coaxial), and the focal plane of each shrink beam focus lens group is respectively placed in, the spirit of accurate adjustment each position
The position of quick detector and inclination so that the output voltage of six position sensitive detectors is 0, six hole diaphragms, six shrink beams
Focus lens group and six position sensitive detectors are directly installed on fixed support, it is ensured that six hole diaphragms, six shrink beams are gathered
Focus lens group and six position sensitive detectors can keep relative position relation after installation calibrating.
Each circular hole center of circle of six hole diaphragms is located at six summits of regular hexagon respectively, and circular hole size is identical, diaphragm
A diameter of D1, Circularhole diameter is d1, the regular hexagon length of side is L1, diaphragm thickness without quantitative requirement, not influence optic path to be
Preferably.For a diameter of D0Incident beam for, six hole aperture stop sizes must are fulfilled for following condition:1)0.8D0≤D1≤D0;2)L1
+d1/2≤D1/2;3)L1/2≤d1< L1。
Six shrink beam focus lens group materials and structure all same, by three block of material for the lens of K9 glass are constituted, and
It is packaged using inner lens cone, entire length is L after encapsulation2.Shrink beam focus lens group can be divided into two by optical texture
Part:(1) front lens group:Front lens group is made up of a face convex lens and the first concavees lens, and convex lens and the first concavees lens keep coaxial,
Diameter is identical to be D2, condition D need to be met2≥d1;(2) rear lenses:Rear lenses are the second concavees lens, and its exit surface is plane,
Its diameter is d2, meet condition d2≤d1.During installation, first with Zemax optical design softwares to convex lens, first recessed
Lens, the front and rear surfaces radius of curvature of the second concavees lens and thickness carry out geometry design and parameter optimization, are λ for wavelength
Incident light, it is necessary to meet condition:Shrink beam focus lens group system optics aberration Φ<λ/4, and it is saturating to realize that shrink beam is focused on
The equivalent focal length of microscope group is the optical focus function of f, and equivalent focal length f need to meet design condition f<11L2.Finally, convex lens,
One concavees lens, the second concavees lens are customized processing according to structure design, and shrink beam focus lens group can be dry using Zigo during installation
Interferometer is debug, it is ensured that the optical aberration and equivalent focal length of shrink beam focus lens group meet design requirement, i.e. Φ<λ/4 and f<
11L2。
Six position sensitive detectors are that two bottom surfaces are foursquare cuboid, and the bottom surface length of side of cuboid two is L6, six
The photosurface size of individual position sensitive detector is L3×L3, the key technical indexes is:L6≥L3≥d2, certainty of measurement is 1um,
Detectable centre wavelength is λ.When using, six position sensitive detectors are utilized respectively four hex(agonal)screws installed in fixed support
On, and ensure the one-to-one relationship of six position sensitive detectors and corresponding six shrink beam focus lens groups, it is right to realize
The focus shift measurement of six beam focus on light beam.
As shown in figure 1, the present invention is by six hole diaphragms, shrink beam focus lens group and the big parts group of position sensitive detector three
Into when using, the relative displacement of adjusting position sensitive detector and two-dimensional deflection make high-power laser beams pass through six hole diaphragms
After be divided into six beam beamlets, six way light beams focus on six position sensitive detectors by six shrink beam focus lens groups respectively
On, six position sensitive detectors measure the focus of six road light beams relative to calibration origin (as position sensitive detector respectively
Test surface center) in the slope data in horizontally and vertically direction.Slope number is being measured using position sensitive detector
After, then calculated using two groups of linear matrix equations, be quickly obtained each low order aberration coefficient of high-power laser beam
Size, realizes the wide range low order aberration detection that scope is 0.1 λ~50 λ, and the matrix equation for using is as follows:
Formula one
Formula two
(the x in above formulaa, ya)、(xb, yb)、(xc, yc)、WithIt is known quantity, A3、
A4And A5It is unknown quantity.The geometric center of six hole diaphragms is taken for the origin of coordinates, (xa, ya)、(xb, yb) and (xc, yc) it is respectively six holes
The relative coordinate in any three circular hole centers of circle in diaphragm,WithFor corresponding position sensitive is visited
Survey the slope data of device measurement, A3、A4And A5Respectively three low order aberration coefficients of high-power laser beam.
The present invention for the low order aberration value in fuel factor aberration in current high power laser system it is larger the characteristics of, design
A kind of wide range Wavefront detecting device that can be used for low order aberration measurement, using six groups of optical detection units in device (i.e.
Six+six position sensitive detectors of the shrink beam focus lens group of hole diaphragm+six) it is capable of achieving that precision is higher and quick wide range is low
Rank aberration measurement, for the optical property for improving high power laser system provides technical guarantee.
Following technique effect can be reached using the present invention:
Apparatus of the present invention can be realized to the detection of the wide range low order aberration of high power laser system, with infusion of financial resources compared with
Less, simple structure, the features such as be easy to carry about with one, there is the degree of accuracy and antijamming capability higher, improving high power laser system
The aspects such as optical property have important application value.
Brief description of the drawings
Fig. 1 is axis sectional view of the present invention.
Fig. 2 is front view of the present invention.
Fig. 3 is rearview of the present invention
Fig. 4 is six hole mechanism of diaphragm figures in the present invention.
Fig. 5 is shrink beam focus lens group light path schematic diagram in the present invention.
Specific embodiment
Fig. 1 is axis sectional view of the present invention.The present invention is by six hole diaphragms, 1, six shrink beam focus lens groups 2 and six positions
The three parts of sensitive detector 3 are constituted, and this three part constitutes optical detection unit of the invention.Each several part passes through fixed support
4 carry out installation fixation, can be used outer lens barrel 5 to be packaged if necessary, and the structure snd size of outer lens barrel 5 can be according to using area spirit
Design living, without particular/special requirement.Six hole diaphragms 1 are vertically arranged in six front of shrink beam focus lens group 2 (normal incidences of incident light
Direction), and six circular holes is kept center of circle coaxial relation, six shrink beam condenser lenses with six shrink beam focus lens groups 2 respectively
The axis of group 2 is parallel to each other, and six position sensitive detectors 3 keep one-to-one coaxial with six shrink beam focus lens groups 2
Relation (i.e. each position sensitive detector 3 shrink beam focus lens group 2 corresponding thereto is coaxial), and it is respectively placed in each contracting
The focal plane of beam focus lens group 2, position and the inclination of accurate adjustment each position sensitive detector 3 so that six position sensitives are visited
The output voltage for surveying device 3 is 0, and the six shrink beam focus lens groups 2 of hole diaphragm 1, six and six position sensitive detections 3 are directly pacified
On fixed support 4, it is ensured that the six shrink beam focus lens groups 2 of hole diaphragm 1, six and six position sensitive detectors 3 are being installed
Relative position relation can be kept after calibration.
Fig. 2 is front view of the present invention.Six hole diaphragms 1 are vertically arranged in six front (incident lights of shrink beam focus lens group 2
Normal incidence direction), and six circular holes is kept center of circle coaxial relations, six shrink beams with six shrink beam focus lens groups 2 respectively
The axis of focus lens group 2 is parallel to each other.
Fig. 3 is rearview of the present invention.Six position sensitive detectors 3 are that two bottom surfaces are foursquare cuboid, rectangular
The bottom surface length of side of body two is L6, the photosurface size of six position sensitive detectors 3 is L3×L3, the key technical indexes is:L6≥
L3≥d2, certainty of measurement is 1um, and detectable centre wavelength is λ.When using, six position sensitive detectors 3 are utilized respectively four
Hex(agonal)screw is arranged on fixed support 4, and ensures six position sensitive detectors 3 and corresponding six shrink beam focus lens groups 2
One-to-one relationship, can realize to the focus shift of six beam focus on light beam measurement.
Fig. 4 is six hole mechanism of diaphragm figures in the present invention.Each circular hole center of circle of six hole diaphragm 1 is located at regular hexagon respectively
Six summits, and circular hole size is identical, diaphragm diameter is D1, Circularhole diameter is d1, the regular hexagon length of side is L1, diaphragm thickness without
Quantitative requirement, not influence optic path to be advisable.For a diameter of D0Incident beam for, six hole aperture stop sizes must are fulfilled for
Following condition:1)0.8D0≤D1≤D0;2)L1+d1/2≤D1/2;3)L1/2≤d1< L1。
Fig. 5 is shrink beam focus lens group light path schematic diagram in the present invention.Six materials of shrink beam focus lens group 2 and structure are equal
It is identical, by three block of material for the lens of K9 glass are constituted, and it is packaged using inner lens cone 10, entire length is after encapsulation
L2.Shrink beam focus lens group 2 can be divided into two parts by optical texture:(1) front lens group:Front lens group is by a face convex lens 7
Constituted with the first concavees lens 8, the concavees lens 8 of convex lens 7 and first keep coaxial, and diameter is identical to be D2, condition D need to be met2≥
d1;(2) rear lenses:Rear lenses are the second concavees lens 9, and its exit surface is plane, and its diameter is d2, meet condition d2≤
d1.During installation, first with Zemax optical design softwares to convex lens 7, first recessed 8, the front and rear surfaces of the second concavees lens 9
Radius of curvature and thickness carry out geometry design and parameter optimization, are the incident light of λ for wavelength, it is necessary to meet condition:Contracting
The system optics aberration Φ of beam focus lens group 2<λ/4, and can realize that the equivalent focal length of shrink beam focus lens group 2 is the light of f
Focusing function is learned, equivalent focal length f need to meet design condition f<11L2.Finally, convex lens 7, the first concavees lens 8, the second concavees lens 9
Processing is customized according to structure design, shrink beam focus lens group 2 can be debug using Zigo interferometers during installation, it is ensured that
The optical aberration and equivalent focal length of shrink beam focus lens group 2 meet design requirement, i.e. Φ<λ/4 and f<11L2。
Claims (7)
1. it is a kind of for low order aberration measurement wide range Wavefront detecting device, it is characterised in that can be used for low order aberration measurement
Wide range Wavefront detecting device is by six hole diaphragms (1), six shrink beam focus lens groups (2) and six position sensitive detectors (3)
Three parts are constituted;Six hole diaphragms (1) are vertically arranged in six front i.e. normal incidences of incident light of shrink beam focus lens group (2)
Direction, and six circular holes is kept center of circle coaxial relation, six shrink beam condenser lenses with six shrink beam focus lens groups (2) respectively
The axis of group (2) is parallel to each other, and six position sensitive detectors (3) keep one-to-one same with six shrink beam focus lens groups
Axle relation, i.e. each position sensitive detector (3) shrink beam focus lens group (2) corresponding thereto are coaxial, and are respectively placed in
The focal plane of each shrink beam focus lens group (2), position and the inclination of accurate adjustment each position sensitive detector (3) so that six
The output voltage of position sensitive detector (3) is 0, six hole diaphragms (1), six shrink beam focus lens groups (2) and six positions
Sensitive detector (3) is installed on fixed support (4), it is ensured that six hole diaphragms (1), six shrink beam focus lens groups (2) and six
Individual position sensitive detector (3) can keep relative position relation after installation calibrating.
2. a kind of wide range Wavefront detecting device for low order aberration measurement as claimed in claim 1, it is characterised in that six
Hole diaphragm (1), six shrink beam focus lens groups (2) and six position sensitive detector (3) three parts pass through fixed support (4)
Install after fixing, be packaged using outer lens barrel (5).
3. a kind of wide range Wavefront detecting device for low order aberration measurement as claimed in claim 1, it is characterised in that six
Each circular hole center of circle of hole diaphragm (1) is located at six summits of regular hexagon respectively, and circular hole size is identical, and diaphragm diameter is
D1, Circularhole diameter is d1, the regular hexagon length of side is L1As long as diaphragm thickness does not influence optic path, for a diameter of D0's
For incident beam, six hole aperture stop sizes meet following condition:1)0.8D0≤D1≤D0;2)L1+d1/2≤D1/2;3)L1/2≤d1
< L1。
4. as described in claim 1 or 3 it is a kind of for low order aberration measurement wide range Wavefront detecting device, it is characterised in that
Six shrink beam focus lens group (2) materials and structure all same, by three block of material for the lens of K9 glass are constituted, and in
Lens barrel (10) is packaged;Shrink beam focus lens group (2) is divided into two parts of front lens group and rear lenses by optical texture:Preceding mirror
Group is made up of a face convex lens (7) and the first concavees lens (8), and convex lens (7) and the first concavees lens (8) keep coaxial, diameter phase
It is same to be D2, meet condition D2≥d1;Rear lenses are the second concavees lens (9), and its exit surface is plane, and its diameter is d2,
Meet condition d2≤d1;Convex lens (7), the first concavees lens (8), the front and rear surfaces radius of curvature of the second concavees lens (9) and thickness profit
Geometry design and parameter optimization, shrink beam focus lens group (2) system optics aberration Φ are carried out with Zemax optical design softwares
<λ/4, and can realize that the equivalent focal length of shrink beam focus lens group (2) is the optical focus function of f, equivalent focal length f meets f<
11L2, λ is the wavelength of incident light, L2Entire length after being encapsulated using inner lens cone (10) for six shrink beam focus lens groups (2).
5. a kind of wide range Wavefront detecting device for low order aberration measurement as claimed in claim 4, it is characterised in that peace
Shrink beam focus lens group (2) is debug using Zigo interferometers during dress.
6. a kind of wide range Wavefront detecting device for low order aberration measurement as claimed in claim 1, it is characterised in that six
The photosurface size of individual position sensitive detector (3) is L3×L3, L3≥d2, certainty of measurement is 1um, position sensitive detector
(3) detectable centre wavelength is λ, d2It is the diameter of the second concavees lens (9).
7. a kind of wide range Wavefront detecting device for low order aberration measurement as claimed in claim 1, it is characterised in that six
Individual position sensitive detector (3) is that two bottom surfaces are foursquare cuboid, and the bottom surface length of side of cuboid two is L6, six position spirits
The photosurface size of quick detector (3) is L3×L3, the key technical indexes is:L6≥L3≥d2, certainty of measurement is 1um, can be visited
Measured center wavelength is λ;Six position sensitive detectors (3) are utilized respectively four hex(agonal)screws on fixed support (4), protect
Demonstrate,prove the one-to-one relationship of six position sensitive detectors (3) and corresponding six shrink beam focus lens groups (2).
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