CN104993250A - Infrared super enhanced collection antenna based on electromagnetically induced transparency - Google Patents
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Abstract
本发明提供了一种基于电磁感应透明的红外超增强收集天线，包括多个周期性阵列排布的天线单元，所述天线单元包括第一谐振单元和第二谐振单元；所述第一谐振单元的谐振频率与所述第二谐振单元的谐振频率相同或相近；通过所述第一谐振单元与所述第二谐振单元之间的耦合作用实现了在红外波段的电磁感应透明现象，提高了对目标频率红外辐射的收集效率。本发明提供的电磁感应透明红外超增强收集天线能使入射的偏振光能量重新分布，将能量转移至与入射偏振方向垂直的方向，实现了对入射电磁波的偏振转换，此时在该频率处形成的局域电场明显比直接激发的局域电场大，在实现超增强收集的同时也可以在目标频率处实现偏振无关探测。
The present invention provides an infrared super-enhanced collection antenna based on electromagnetic induction transparency, which includes a plurality of antenna units arranged in a periodic array, and the antenna unit includes a first resonant unit and a second resonant unit; the first resonant unit The resonant frequency is the same or close to the resonant frequency of the second resonant unit; through the coupling between the first resonant unit and the second resonant unit, the electromagnetic induction transparency phenomenon in the infrared band is realized, which improves the sensitivity to Collection efficiency of target frequency infrared radiation. The electromagnetic induction transparent infrared super-enhanced collecting antenna provided by the present invention can redistribute the incident polarized light energy, transfer the energy to a direction perpendicular to the incident polarization direction, and realize the polarization conversion of the incident electromagnetic wave. At this time, a The local electric field is obviously larger than that of direct excitation, and polarization-independent detection can also be achieved at the target frequency while achieving ultra-enhanced collection.
Description
技术领域technical field
本发明属于红外探测技术领域，具体涉及一种基于电磁感应透明的红外超增强收集天线。The invention belongs to the technical field of infrared detection, and in particular relates to an infrared super-enhanced collection antenna based on electromagnetic induction transparency.
背景技术Background technique
数十年来，在军事应用的牵引及推动下，红外光电技术得到快速发展，目前该技术正朝着高性能红外探测方向发展，设计各种不同天线结构是提高红外探测器性能的有效方法。然而，在发展高性能红外光子天线时，天线电极间距由于工作波长的增大而进一步增大，在载流子迁移率不变的条件下，电极间距的增大将导致光敏材料光生载流子渡越时间的延长、光电导增益与响应率的降低，从而导致光电导探测器性能上的退化。For decades, under the traction and promotion of military applications, infrared photoelectric technology has developed rapidly. At present, this technology is developing in the direction of high-performance infrared detection. Designing various antenna structures is an effective way to improve the performance of infrared detectors. However, when developing high-performance infrared photonic antennas, the distance between the antenna electrodes will be further increased due to the increase of the working wavelength. Under the condition of constant carrier mobility, the increase of the distance between the electrodes will lead to the transition of photo-generated carriers in photosensitive materials. The prolongation of time, the reduction of photoconductive gain and responsivity will lead to the degradation of photoconductive detector performance.
基于表面等离子体谐振的光学天线可以突破衍射极限，实现小尺寸单元响应大面积辐照的特性，目前已公开的资料中有利用金属表面等离子体谐振产生的焦耳热来实现红外多普勒信号探测(CN20140455227.5)。光电导探测器通常利用表面等离子体天线的收集作用，将入射辐射场聚集在天线两端，相邻天线的狭缝处产生明显增强的局域电场(Nano Lett.14，3749-3754，2014)。金属在红外波段的欧姆损耗可严重影响天线的收集效率，同时该种结构天线仅能对特定偏振方向的红外辐射响应，其他偏振态的红外辐射则不能被有效收集，这些都为提升红外天线性能留下了空间。Optical antennas based on surface plasmon resonance can break through the diffraction limit and realize the characteristics of small-sized units responding to large-area irradiation. In the published data, Joule heat generated by metal surface plasmon resonance is used to realize infrared Doppler signal detection. (CN20140455227.5). Photoconductive detectors usually use the collection effect of the surface plasmon antenna to concentrate the incident radiation field at both ends of the antenna, and the slits of adjacent antennas generate a significantly enhanced local electric field (Nano Lett.14, 3749-3754, 2014) . The ohmic loss of metal in the infrared band can seriously affect the collection efficiency of the antenna. At the same time, the antenna with this structure can only respond to infrared radiation in a specific polarization direction, and infrared radiation in other polarization states cannot be effectively collected. These are all for improving the performance of infrared antennas. Space is left.
发明内容Contents of the invention
针对现有技术的缺陷，本发明的目的在于提供一种基于电磁感应透明的红外超增强收集天线，旨在解决现有技术中由于红外光子探测器电极间距增大导致的光电探测器性能退化的技术问题，并且提供偏振无关探测方案。Aiming at the defects of the prior art, the purpose of the present invention is to provide a transparent infrared super-enhanced collection antenna based on electromagnetic induction, aiming to solve the problem of photodetector performance degradation caused by the increase of the electrode spacing of infrared photon detectors in the prior art. technical issues, and provide a polarization-independent detection scheme.
本发明提供了一种基于电磁感应透明的红外超增强收集天线，包括多个周期性阵列排布的天线单元，所述天线单元包括第一谐振单元和第二谐振单元；所述第一谐振单元的谐振频率与所述第二谐振单元的谐振频率相同或相近；通过所述第一谐振单元与所述第二谐振单元之间的耦合作用实现了在红外波段的电磁感应透明现象，在目标频率处实现了偏振超增强探测，并且发明所提供的方案可以在任意偏振方向实现增强吸收，即偏振无关探测，提高了对目标频率红外辐射的收集效率。The present invention provides an infrared super-enhanced collection antenna based on electromagnetic induction transparency, which includes a plurality of antenna units arranged in a periodic array, and the antenna unit includes a first resonant unit and a second resonant unit; the first resonant unit The resonant frequency is the same or close to the resonant frequency of the second resonant unit; through the coupling between the first resonant unit and the second resonant unit, the electromagnetic induction transparency phenomenon in the infrared band is realized, and at the target frequency Polarized ultra-enhanced detection is realized, and the scheme provided by the invention can realize enhanced absorption in any polarization direction, that is, polarization-independent detection, and improves the collection efficiency of infrared radiation of the target frequency.
更进一步地，所述第二谐振单元包括第一金属杆和第二金属杆，所述第一金属杆和所述第二金属杆相互平行且沿x轴放置；所述第一谐振单元包括第三金属杆，所述第三金属杆沿y轴放置且位于所述第一金属杆和所述第二金属杆之间；所述第三金属杆的两端分别与所述第一金属杆和所述第二金属杆之间留有间隙；所述第一谐振单元与所述第二谐振单元之间的耦合效率随着该间隙的增大而减小；所述x轴为水平方向，所述y轴为竖直方向。Furthermore, the second resonance unit includes a first metal rod and a second metal rod, and the first metal rod and the second metal rod are placed parallel to each other and along the x-axis; the first resonance unit includes a second metal rod Three metal rods, the third metal rod is placed along the y-axis and located between the first metal rod and the second metal rod; the two ends of the third metal rod are connected to the first metal rod and the second metal rod respectively There is a gap between the second metal rods; the coupling efficiency between the first resonant unit and the second resonant unit decreases as the gap increases; the x-axis is in the horizontal direction, so The y-axis is the vertical direction.
更进一步地，所述第一金属杆和所述第二金属杆尺寸相同；所述第一谐振单元和第二谐振单元的长度范围接近，为0.5微米～5.0微米，宽度为0.1微米～1.0微米，周期为0.6微米～5.5微米；其中谐振单元的周期是指相邻谐振单元的间距，x轴与y轴方向的周期可能不同。Furthermore, the first metal rod and the second metal rod have the same size; the length range of the first resonant unit and the second resonant unit is close to each other, which is 0.5 micron to 5.0 micron, and the width is 0.1 micron to 1.0 micron , with a period of 0.6 microns to 5.5 microns; wherein the period of the resonant unit refers to the distance between adjacent resonant units, and the periods in the x-axis and y-axis directions may be different.
更进一步地，所述第一金属杆、所述第二金属杆和所述第三金属杆的材料相同；金属杆的材料为金、银、铜或铝等在红外具有高电导率的金属材料；金属材料与衬底之间镀一层其他金属材料作为过度黏附层，材料可选择钛、镍等金属材料，厚度为20纳米～30纳米；两种金属材料组成的天线总厚度为50纳米～200纳米。Furthermore, the materials of the first metal rod, the second metal rod and the third metal rod are the same; the materials of the metal rods are gold, silver, copper or aluminum and other metal materials with high electrical conductivity in the infrared A layer of other metal materials is plated between the metal material and the substrate as an excessive adhesion layer. The material can be titanium, nickel and other metal materials, with a thickness of 20 nanometers to 30 nanometers; the total thickness of the antenna composed of two metal materials is 50 nanometers to 50 nanometers. 200 nm.
更进一步地，所述第二谐振单元包括第一金属杆和第二金属杆，所述第一金属杆和所述第二金属杆相互平行且沿x轴放置；所述第一谐振单元包括第三金属杆和第四金属杆，所述第三金属杆沿y轴放置且位于所述第一金属杆和所述第二金属杆之间；所述第三金属杆的两端分别与所述第一金属杆和所述第二金属杆之间留有间隙；所述第四金属杆沿y轴放置，所述第四金属杆与所述第三金属杆关于所述第二金属杆中心对称；所述第四金属杆的一端与所述第二金属杆之间留有间隙；所述第一谐振单元与所述第二谐振单元之间的耦合效率随着该间隙的增大而减小；所述x轴为水平方向，所述y轴为竖直方向。Furthermore, the second resonance unit includes a first metal rod and a second metal rod, and the first metal rod and the second metal rod are placed parallel to each other and along the x-axis; the first resonance unit includes a second metal rod Three metal rods and a fourth metal rod, the third metal rod is placed along the y-axis and located between the first metal rod and the second metal rod; the two ends of the third metal rod are respectively connected to the There is a gap between the first metal rod and the second metal rod; the fourth metal rod is placed along the y-axis, and the fourth metal rod and the third metal rod are symmetrical about the center of the second metal rod ; There is a gap between one end of the fourth metal rod and the second metal rod; the coupling efficiency between the first resonant unit and the second resonant unit decreases as the gap increases ; The x-axis is a horizontal direction, and the y-axis is a vertical direction.
更进一步地，所述第一金属杆和所述第二金属杆的尺寸相同；所述第三金属杆和所述第四金属杆的尺寸相同；所述第一谐振单元和第二谐振单元的长度为0.5微米～5.0微米，宽度为0.1微米～1.0微米，周期为0.6微米～5.5微米。Furthermore, the dimensions of the first metal rod and the second metal rod are the same; the dimensions of the third metal rod and the fourth metal rod are the same; the dimensions of the first resonance unit and the second resonance unit are The length is 0.5 micron to 5.0 micron, the width is 0.1 micron to 1.0 micron, and the period is 0.6 micron to 5.5 micron.
更进一步地，所述第一金属杆、所述第二金属杆、所述第三金属杆和所述第四金属杆的材料相同；所述金属杆的材料可以但不限于是金、银、铜或铝等高电导率的材料。Furthermore, the materials of the first metal rod, the second metal rod, the third metal rod and the fourth metal rod are the same; the materials of the metal rods can be but not limited to gold, silver, Materials with high electrical conductivity such as copper or aluminum.
更进一步地，金属材料与衬底之间镀一层其他金属材料作为过度黏附层，材料可选择钛、镍等金属材料，厚度为20纳米～30纳米；两种金属材料组成的天线总厚度为50纳米～200纳米。Furthermore, a layer of other metal materials is plated between the metal material and the substrate as an excessive adhesion layer. The material can be titanium, nickel and other metal materials, with a thickness of 20 nm to 30 nm; the total thickness of the antenna composed of two metal materials is 50 nanometers to 200 nanometers.
更进一步地，偏振方向沿y轴的红外辐射电场入射时，所述第一谐振单元被入射电场直接激发，其产生的感应电场激发所述第二谐振单元，从而产生电磁感应透明现象；在电磁感应透明窗口处，入射的红外辐射电场与所述第一谐振单元耦合的能量转移到所述第二谐振单元上，并在所述第二谐振单元的两端产生局域超增强电场；偏振方向沿x轴的红外辐射电场入射时，所述第一谐振单元不能被激发，所述第二谐振单元被直接激发，并在其两端产生局域增强电场；在两种偏振状态下，所述第二谐振单元两端激发局域电场强，辐射电场偏振方向沿y轴时所激发的电场强度强于辐射电场偏振方向沿x轴时所激发的电场强度，实现了偏振探测时红外天线的超增强吸收功能和偏振无关探测功能。Furthermore, when the infrared radiation electric field with the polarization direction along the y-axis is incident, the first resonant unit is directly excited by the incident electric field, and the induced electric field generated by it excites the second resonant unit, thereby producing electromagnetically induced transparency; At the magnetic induction transparent window, the energy coupled by the incident infrared radiation electric field and the first resonant unit is transferred to the second resonant unit, and a local super-enhanced electric field is generated at both ends of the second resonant unit; the polarization direction When the infrared radiation electric field along the x-axis is incident, the first resonant unit cannot be excited, and the second resonant unit is directly excited to generate a locally enhanced electric field at both ends; in two polarization states, the The local electric field strength is excited at both ends of the second resonant unit, and the electric field strength excited when the polarization direction of the radiation electric field is along the y-axis is stronger than that excited when the polarization direction of the radiation electric field is along the x-axis, realizing the ultra-high performance of the infrared antenna during polarization detection Enhanced absorption and polarization-independent detection capabilities.
通过本发明所构思的以上技术方案与现有技术相比，能够取得下列有益效果：Compared with the prior art, the above technical solutions conceived by the present invention can achieve the following beneficial effects:
(1)利用电磁波辐射与金属(局域)天线表面等离子体耦合得到极度增强的局域近场，实现小尺寸光敏元响应大辐照面积的辐射能量、增大光电导增益，提高响应率。(1) Using electromagnetic wave radiation and metal (local) antenna surface plasmon coupling to obtain extremely enhanced local near-field, realize small-sized photosensitive element responding to radiation energy of large irradiation area, increase photoconductive gain, and improve responsivity.
(2)本发明提供的电磁感应透明红外超增强收集天线能使入射的偏振光能量重新分布，将能量转移至与入射偏振方向垂直的方向，实现对入射电磁波实现了偏振转换，并且在该频率的局域电场明显比直接激发的局域电场大，实现了超增强收集。(2) The electromagnetic induction transparent infrared super-enhanced collecting antenna provided by the present invention can redistribute the incident polarized light energy, transfer the energy to a direction perpendicular to the incident polarization direction, and realize polarization conversion to the incident electromagnetic wave, and at this frequency The localized electric field of the laser is significantly larger than that of the direct excitation, realizing super-enhanced collection.
(3)本发明提供的电磁感应透明红外超增强收集天线结构在相互垂直的两个方向上都会产生谐振，改变第一和第二谐振结构的尺寸，可将两个方向的谐振频率调整至相同或十分相近的频率，实现特定频率红外波的偏振无关探测。(3) The electromagnetic induction transparent infrared super-enhanced collection antenna structure provided by the present invention will resonate in two directions perpendicular to each other, changing the size of the first and second resonant structures can adjust the resonant frequencies in the two directions to the same Or a very similar frequency to achieve polarization-independent detection of infrared waves of a specific frequency.
(4)本发明提供的基于电磁感应透明的红外超增强收集天线与探测器的金属电极采用相同材料与制作工艺，这极大的简化了探测器天线部分的加工工艺。(4) The infrared super-enhanced collection antenna based on electromagnetic induction transparency provided by the present invention adopts the same material and manufacturing process as the metal electrode of the detector, which greatly simplifies the processing technology of the detector antenna part.
附图说明Description of drawings
图1本发明实施例提供的基于电磁感应透明的红外超增强收集天线结构的纵向剖面示意图；Fig. 1 is a schematic longitudinal sectional view of an infrared super-enhanced collection antenna structure based on electromagnetic induction transparency provided by an embodiment of the present invention;
图2本发明实施例提供的基于电磁感应透明的红外超增强收集天线结构的俯视示意图；Fig. 2 is a schematic top view of an infrared super-enhanced collection antenna structure based on electromagnetic induction transparency provided by an embodiment of the present invention;
图3本发明的实施例1提供的基于电磁感应透明的红外超增强收集天线结构示意图；Fig. 3 is a schematic structural diagram of an infrared super-enhanced collection antenna based on electromagnetic induction transparency provided by Embodiment 1 of the present invention;
图4本发明的实施例2提供的基于电磁感应透明的红外超增强收集天线结构示意图。FIG. 4 is a schematic structural diagram of an infrared super-enhanced collection antenna based on electromagnetic induction transparency provided by Embodiment 2 of the present invention.
具体实施方式Detailed ways
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
本发明提出的基于电磁感应透明的红外超增强收集天线中，光学天线尺寸一般为设计波长的1/10至1/5，利用这种光学天线，可以激发起金属表面等离子体谐振效应，突破光学衍射极限，可有效地消除由于光子探测器电极间距增大所导致的光电导探测器光敏材料光生载流子渡越时间的延长、光电导增益与响应率的降低等光电导探测器性能上的退化。电磁感应透明为一种量子效应，采用经典系统可以模拟实现该现象，目前在空间上主要采用两个谐振频率相近的谐振单元，通过两个谐振单元的互相耦合作用实现电磁感应透明，两谐振之间形成一个透射峰，称之为电磁感应透明窗口，在电磁感应透明窗口处实现对入射电磁波的超增强吸收。该天线主要由两部分谐振单元组成，第一谐振单元可直接被入射电场激发，产生明模式，称之为直接激发部分；第二谐振单元可以被明模式感应激发，产生暗模式，称之为间接激发部分。In the infrared super-enhanced collection antenna based on electromagnetic induction and transparency proposed by the present invention, the size of the optical antenna is generally 1/10 to 1/5 of the design wavelength. Using this optical antenna can stimulate the metal surface plasmon resonance effect, breaking through the optical Diffraction limit can effectively eliminate the performance of photoconductive detectors such as the prolongation of the transit time of photogenerated carriers in the photosensitive material of photoconductive detectors, the reduction of photoconductive gain and responsivity due to the increase of the electrode spacing of photon detectors. degradation. Electromagnetic induction transparency is a quantum effect. This phenomenon can be simulated by using a classical system. At present, two resonant units with similar resonant frequencies are mainly used in space. The electromagnetic induction transparency is realized through the mutual coupling of the two resonant units. A transmission peak is formed between them, which is called the electromagnetic induction transparent window, and the super-enhanced absorption of incident electromagnetic waves is realized at the electromagnetic induction transparent window. The antenna is mainly composed of two resonant units. The first resonant unit can be directly excited by the incident electric field to generate a bright mode, which is called the direct excitation part; the second resonant unit can be induced by the bright mode to generate a dark mode, which is called Indirect excitation part.
本发明提出的电磁感应透明天线的两部分谐振单元的结构可以但并不限于是金属杆、“工”字形金属杆(以下统称金属杆)。金属结构可以等效为LC回路，其中金属杆等效为电感L，金属杆之间狭缝等效为电感C，通过该改变金属感的结构参数，可以调整金属感的谐振频率在红外波段，金属杆的长度范围0.5微米～5.0微米，宽0.1微米～1.0微米，周期0.6微米～5.5微米，金属杆的材料可选金、银、铜或铝等在红外具有较高电导率的金属材料，厚度50纳米～200纳米。在天线单元中，第二谐振单元为平行放置的金属杆，第一谐振单元方向与第二谐振单元方向垂直，置于第二谐振单元平行金属杆之间；第一谐振单元不与第二谐振单元交叠，两谐振单元的耦合效率随着它们之间的距离增大而减小；通过数值仿真计算，将两谐振单元的谐振频率设计在相同或者相近频率，利用两谐振单元的耦合作用，实现红外波段的电磁感应透明现象；在电磁感应透明窗口处，耦合到直接激发部分的入射电场能量转移到间接激发部分中，使得能量重新分布，被第一谐振单元捕获的能量都集中在第二谐振单元两端，金属杆阵列之间的狭缝中，实现了对入射电场偏振的转换；更重要的是，在电磁感应透明窗口的局域电场强度强于直接激发红外天线产生的局域电场强度，使电磁感应透明红外天线对红外辐射的收集能力强于常规红外天线，实现了红外天线的超增强收集特性。当入射电场偏振方向可以直接激发天线的第二谐振单元时，不能产生电磁感应透明现象，此时天线的第二谐振单元可作为常规红外天线阵列，若将由两谐振单元耦合作用产生的电磁感应透明窗口的频率设计到与只有第二谐振单元被直接激发产生的谐振频率相同或十分相近，则可以在预设的目标频率处实现偏振无关探测，提高了对目标频率红外辐射的收集效率；其中目标频率为设计人员想要的频率，目标频率根据两个谐振单元的谐振峰的位置可确定。The structure of the two-part resonant unit of the electromagnetic induction transparent antenna proposed by the present invention can be, but not limited to, a metal rod or an "I"-shaped metal rod (hereinafter collectively referred to as a metal rod). The metal structure can be equivalent to an LC circuit, in which the metal rod is equivalent to the inductance L, and the slit between the metal rods is equivalent to the inductance C. By changing the structural parameters of the metal sense, the resonant frequency of the metal sense can be adjusted. In the infrared band, the length of the metal rod ranges from 0.5 microns to 5.0 microns, the width from 0.1 microns to 1.0 microns, and the period from 0.6 microns to 5.5 microns. The material of the metal rods can be gold, silver, copper or aluminum, etc., which have high conductivity in the infrared. Metal material with a thickness of 50 nanometers to 200 nanometers. In the antenna unit, the second resonant unit is a metal rod placed in parallel, the direction of the first resonant unit is perpendicular to the direction of the second resonant unit, and is placed between the parallel metal rods of the second resonant unit; the first resonant unit does not resonate with the second resonant unit The units overlap, and the coupling efficiency of the two resonant units decreases as the distance between them increases; through numerical simulation calculations, the resonant frequencies of the two resonant units are designed at the same or similar frequency, and the coupling effect of the two resonant units is utilized. Realize the electromagnetic induction transparency phenomenon in the infrared band; at the electromagnetic induction transparent window, the incident electric field energy coupled to the direct excitation part is transferred to the indirect excitation part, so that the energy is redistributed, and the energy captured by the first resonance unit is concentrated in the second At both ends of the resonance unit, in the slit between the metal rod arrays, the polarization conversion of the incident electric field is realized; more importantly, the local electric field intensity in the electromagnetic induction transparent window is stronger than that generated by directly exciting the infrared antenna Intensity, so that the electromagnetic induction transparent infrared antenna has a stronger ability to collect infrared radiation than conventional infrared antennas, and realizes the super-enhanced collection characteristics of infrared antennas. When the polarization direction of the incident electric field can directly excite the second resonant unit of the antenna, the phenomenon of electromagnetic induction transparency cannot be produced. At this time, the second resonant unit of the antenna can be used as a conventional infrared antenna array. If the electromagnetic induction transparency produced by the coupling of the two resonant units If the frequency of the window is designed to be the same or very close to the resonance frequency generated by the direct excitation of only the second resonance unit, polarization-independent detection can be realized at the preset target frequency, which improves the collection efficiency of infrared radiation at the target frequency; the target The frequency is the frequency desired by the designer, and the target frequency can be determined according to the positions of the resonance peaks of the two resonance units.
按照本发明的另一方面，提供了一种基于电磁感应透明的红外超增强收集天线的制备方法，包括如下步骤：According to another aspect of the present invention, there is provided a method for preparing an infrared super-enhanced collection antenna based on electromagnetic induction transparency, comprising the following steps:
(1)在附着有光敏材料的衬底上旋涂负光刻胶；(1) Spin-coat negative photoresist on a substrate attached with a photosensitive material;
(2)利用电子束曝光机对所述负光刻胶进行曝光，并制作出基于电磁感应透明的红外超增强收集天线阵列和金属电极图形的样品；(2) Utilize an electron beam exposure machine to expose the negative photoresist, and make a sample based on electromagnetic induction transparent infrared super-enhanced collection antenna array and metal electrode pattern;
(3)对已曝光的样品进行显影；(3) developing the exposed sample;
(4)利用电子束蒸发沉积基于电磁感应透明的红外超增强收集天线阵列和金属电极材料，材料可选但不限于镍/钛(黏附层)和金/银/铜/铝；(4) Use electron beam evaporation to deposit infrared super-enhanced collection antenna arrays and metal electrode materials based on electromagnetic induction transparency. The materials can be selected but not limited to nickel/titanium (adhesion layer) and gold/silver/copper/aluminum;
(5)剥离光刻胶后获得基于电磁感应透明的红外超增强收集天线阵列和金属电极。(5) After peeling off the photoresist, an infrared super-enhanced collection antenna array and metal electrodes based on electromagnetic induction transparency are obtained.
为了更进一步的说明本发明实施例提供的基于电磁感应透明的红外超增强收集天线，下面结合附图阐述本发明的具体实施方式。In order to further illustrate the infrared super-enhanced collection antenna based on electromagnetic induction transparency provided by the embodiment of the present invention, the specific implementation manner of the present invention will be described below with reference to the accompanying drawings.
如图1所示，金属电极2和基于电磁感应透明的红外超增强收集天线3采用相同加工工艺同时制作在具有光敏材料衬底1上。入射的红外电磁辐射4垂直于探测器正面入射。As shown in FIG. 1 , the metal electrode 2 and the infrared super-enhanced collection antenna 3 based on electromagnetic induction transparency are simultaneously fabricated on the substrate 1 with photosensitive material by the same processing technology. The incident infrared electromagnetic radiation 4 is incident perpendicularly to the front of the detector.
如图2所示，金属电极2的正负极分别置于具有光敏材料衬底层1的两端，红外天线层3置于金属电极2正负极之间。As shown in FIG. 2 , the positive and negative poles of the metal electrode 2 are placed at both ends of the substrate layer 1 with photosensitive material, and the infrared antenna layer 3 is placed between the positive and negative poles of the metal electrode 2 .
实施例1：Example 1:
如图3所示，基于电磁感应透明的红外超增强收集天线3为周期性排列的金属杆阵列，其中水平方向为x轴方向，竖直方向为y轴方向。阵列中每个天线单元包含两种谐振单元，第一谐振单元31沿y轴放置，第二谐振单元32为两个平行放置的金属杆，第一谐振单元31置于第二谐振单元32中两个金属杆之间，方向与之垂直。天线尺寸一般为设计波长的1/10至1/5，因此在红外波段，第一谐振单元金属杆的长度L1和第二谐振单元金属杆长度L2范围0.5微米～5.0微米，宽w1和w2的范围为0.1微米～1.0微米，周期的P范围为0.6微米～5.5微米。金属杆的材料可以为金，金与衬底之间镀一层钛做为黏附层，厚度为20纳米～30纳米；金属天线的总厚度为50纳米～200纳米。As shown in FIG. 3 , the infrared super-enhanced collection antenna 3 based on electromagnetic induction transparency is an array of metal rods arranged periodically, wherein the horizontal direction is the x-axis direction, and the vertical direction is the y-axis direction. Each antenna unit in the array includes two kinds of resonant units, the first resonant unit 31 is placed along the y-axis, the second resonant unit 32 is two metal rods placed in parallel, and the first resonant unit 31 is placed in the second resonant unit 32. Between two metal rods, the direction is perpendicular to it. The antenna size is generally 1/10 to 1/5 of the design wavelength, so in the infrared band, the length L 1 of the metal rod of the first resonant unit and the length L 2 of the metal rod of the second resonant unit range from 0.5 microns to 5.0 microns, and the width w 1 and w 2 range from 0.1 micron to 1.0 micron, and the period P ranges from 0.6 micron to 5.5 micron. The material of the metal rod can be gold, and a layer of titanium is plated between the gold and the substrate as an adhesive layer with a thickness of 20 nm to 30 nm; the total thickness of the metal antenna is 50 nm to 200 nm.
入射的红外辐射电场偏振方向沿y轴方向时，第一谐振单元31被入射电场直接激发，激发起明模式，其产生的感应电场激发第二谐振单元32，暗模式被激发，产生电磁感应透明现象。在电磁感应透明窗口处，入射电场与第一谐振单元31耦合的能量转移到第二谐振单元32上，能量发生了重新分布，在第二谐振单元32的两端产生局域超增强电场；当入射红外辐射电场偏振方向沿x轴方向时，第一谐振单元31不能被激发，第二谐振单元32被直接激发，并在其两端产生局域增强电场。对比两种偏振状态下在第二谐振单元两端激发局域电场强度，辐射电场偏振方向沿y轴时的强度强于辐射电场偏振方向沿x轴时的强度，实现了偏振探测时红外天线的超增强吸收功能；同时，若改变第一谐振单元31与第二谐振单元32的结构尺寸，将两种入射辐射偏振场激发的谐振频率调整至相同或者十分相近的频率，可以实现偏振探测或者偏振无关探测。When the polarization direction of the incident infrared radiation electric field is along the y-axis direction, the first resonant unit 31 is directly excited by the incident electric field, and the bright mode is excited, and the induced electric field generated by it excites the second resonant unit 32, and the dark mode is excited, resulting in electromagnetically induced transparency Phenomenon. At the electromagnetic induction transparent window, the energy coupled by the incident electric field and the first resonant unit 31 is transferred to the second resonant unit 32, the energy is redistributed, and a local super-enhanced electric field is generated at both ends of the second resonant unit 32; When the polarization direction of the incident infrared radiation electric field is along the x-axis direction, the first resonant unit 31 cannot be excited, and the second resonant unit 32 is directly excited to generate a locally enhanced electric field at its two ends. Comparing the intensity of the local electric field excited at both ends of the second resonant unit under the two polarization states, the intensity of the radiation electric field polarization direction along the y-axis is stronger than that of the radiation electric field polarization direction along the x-axis, realizing the polarization detection of the infrared antenna Super-enhanced absorption function; at the same time, if the structural dimensions of the first resonance unit 31 and the second resonance unit 32 are changed, the resonance frequencies excited by the two incident radiation polarization fields are adjusted to the same or very similar frequencies, which can realize polarization detection or polarization Nothing to detect.
实施例2：Example 2:
如图4，基于电磁感应透明的红外超增强收集天线3为周期性排列的金属杆阵列，其中水平方向为x轴方向，竖直方向为y轴方向。阵列中每个单元包含两种谐振单元，第一谐振单元31沿y轴放置，第二谐振单元32为沿x轴放置的金属杆，第一谐振单元31置于两个第二谐振单元32之间，方向与之垂直，并且y方向相邻的第一谐振单元31相对于他们之间的第二谐振单元中心对称。天线尺寸一般为设计波长的1/10至1/5，在红外波段，第一谐振单元金属杆的长度L1和第二谐振单元金属杆长度L2范围0.5微米～5.0微米，宽w1和w2范围为0.1微米～1.0微米，周期P范围0.6微米～5.5微米。金属杆的材料可以为金，金与衬底之间镀一层钛作为黏附层，厚度为20纳米～30纳米；金属天线的总厚度为50纳米～200纳米。As shown in FIG. 4 , the infrared super-enhanced collection antenna 3 based on electromagnetic induction transparency is an array of metal rods arranged periodically, wherein the horizontal direction is the x-axis direction, and the vertical direction is the y-axis direction. Each unit in the array includes two kinds of resonant units, the first resonant unit 31 is placed along the y-axis, the second resonant unit 32 is a metal rod placed along the x-axis, and the first resonant unit 31 is placed between the two second resonant units 32 , the direction is perpendicular thereto, and the first resonant unit 31 adjacent in the y direction is symmetrical to the center of the second resonant unit between them. The antenna size is generally 1/10 to 1/5 of the design wavelength. In the infrared band, the length L 1 of the metal rod of the first resonant unit and the length L 2 of the metal rod of the second resonant unit range from 0.5 microns to 5.0 microns, and the width w 1 and w 2 ranges from 0.1 micron to 1.0 micron, and the period P ranges from 0.6 micron to 5.5 micron. The material of the metal rod can be gold, and a layer of titanium is plated between the gold and the substrate as an adhesive layer with a thickness of 20 nm to 30 nm; the total thickness of the metal antenna is 50 nm to 200 nm.
当入射的红外辐射电场偏振方向沿y轴方向时，第一子谐振单元31与被入射电场直接激发，激发起明模式，它们产生的感应电场激发第二子谐振单元32，暗模式被激发，产生电磁感应透明现象。在电磁感应透明窗口处，入射电场与第一谐振单元31耦合的能量转移到第二谐振单元32上，能量发生了重新分布，在第二谐振单元32的两端产生局域超增强电场；当入射红外辐射电场偏振方向沿x轴方向时，第一子谐振单元31不能被激发，第二子谐振单元32被直接激发，并在其两端产生局域增强电场。对比两种偏振状态下在第二谐振单元两端激发局域电场强度，辐射电场偏振方向沿y轴时的强度强于辐射电场偏振方向沿x轴时的强度，实现了偏振探测时红外天线的增强吸收功能；同时，调整第一谐振单元31与第二谐振单元32的结构尺寸，将两种入射辐射偏振场激发的谐振频率调整至相同或者十分相近的频率，可以实现偏振探测或者偏振无关探测。When the polarization direction of the incident infrared radiation electric field is along the y-axis direction, the first sub-resonance unit 31 is directly excited by the incident electric field, and the bright mode is excited, and the induced electric field generated by them excites the second sub-resonance unit 32, and the dark mode is excited. Electromagnetically induced transparency occurs. At the electromagnetic induction transparent window, the energy coupled by the incident electric field and the first resonant unit 31 is transferred to the second resonant unit 32, the energy is redistributed, and a local super-enhanced electric field is generated at both ends of the second resonant unit 32; When the polarization direction of the incident infrared radiation electric field is along the x-axis, the first sub-resonant unit 31 cannot be excited, and the second sub-resonant unit 32 is directly excited to generate a locally enhanced electric field at its two ends. Comparing the intensity of the local electric field excited at both ends of the second resonant unit under the two polarization states, the intensity of the radiation electric field polarization direction along the y-axis is stronger than that of the radiation electric field polarization direction along the x-axis, realizing the polarization detection of the infrared antenna Enhance the absorption function; at the same time, adjust the structural size of the first resonant unit 31 and the second resonant unit 32, and adjust the resonant frequencies excited by the two incident radiation polarization fields to the same or very similar frequencies, so that polarization detection or polarization-independent detection can be realized .
本发明的制备方法包括如下步骤：The preparation method of the present invention comprises the steps:
(1)在附着有光敏材料的衬底上旋涂负光刻胶；(1) Spin-coat negative photoresist on a substrate attached with a photosensitive material;
(2)利用电子束曝光机对负光刻胶进行曝光；(2) Utilize an electron beam exposure machine to expose the negative photoresist;
(3)对已曝光的样品进行显影；(3) developing the exposed sample;
(4)利用电子束蒸发沉积基于电磁感应透明的红外超增强收集天线阵列和金属电极材料，金属天线和电极材料可选但不限于金/银/铜/铝，黏附层可选但不限于镍/钛；(4) Electron beam evaporation is used to deposit infrared super-enhanced collection antenna arrays and metal electrode materials based on electromagnetic induction transparency. Metal antennas and electrode materials can be selected but not limited to gold/silver/copper/aluminum, and the adhesion layer is optional but not limited to nickel /titanium;
(5)剥离光刻胶制作出基于电磁感应透明的红外超增强收集天线阵列和金属电极。(5) The photoresist was stripped off to produce an infrared super-enhanced collection antenna array and metal electrodes based on electromagnetic induction transparency.
本发明提出了一种基于电磁感应透明的红外超增强收集天线，利用电磁感应透明红外天线的局域表面等离子体谐振，突破衍射极限，将入射红外电磁辐射聚集在金属杆两端的开口处，实现小尺寸光敏元响应大辐照面积的辐射能量，增大光电导增益，实现对红外波的偏振相关和偏振无关探测。The invention proposes an infrared super-enhanced collection antenna based on electromagnetic induction transparency, which uses the local surface plasmon resonance of the electromagnetic induction transparent infrared antenna to break through the diffraction limit, and gathers the incident infrared electromagnetic radiation at the openings at both ends of the metal rod to realize The small-sized photosensitive element responds to the radiation energy of the large irradiation area, increases the photoconductive gain, and realizes the polarization-dependent and polarization-independent detection of infrared waves.
本领域的技术人员容易理解，以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。It is easy for those skilled in the art to understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, All should be included within the protection scope of the present invention.
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| CN105182462A (en) * | 2015-10-23 | 2015-12-23 | 电子科技大学 | Intermediate infrared polarization converter based on double-pole antenna structure |
| CN110289502A (en) * | 2019-07-30 | 2019-09-27 | 广东工业大学 | An array antenna |
| CN116666949A (en) * | 2023-06-07 | 2023-08-29 | 广东工业大学 | A Photoconductive Antenna with Enhanced Resonator Coupling |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105182462A (en) * | 2015-10-23 | 2015-12-23 | 电子科技大学 | Intermediate infrared polarization converter based on double-pole antenna structure |
| CN105182462B (en) * | 2015-10-23 | 2017-10-24 | 电子科技大学 | A kind of middle infrared polarization converter based on double-rod antenna structure |
| CN110289502A (en) * | 2019-07-30 | 2019-09-27 | 广东工业大学 | An array antenna |
| CN116666949A (en) * | 2023-06-07 | 2023-08-29 | 广东工业大学 | A Photoconductive Antenna with Enhanced Resonator Coupling |
| CN116666949B (en) * | 2023-06-07 | 2024-05-28 | 广东工业大学 | A photoconductive antenna with enhanced resonant coupling |
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