CN104991298A - Vacuum coating equipment target material cavity containing boron nitride coating and preparation method - Google Patents
Vacuum coating equipment target material cavity containing boron nitride coating and preparation method Download PDFInfo
- Publication number
- CN104991298A CN104991298A CN201510137528.8A CN201510137528A CN104991298A CN 104991298 A CN104991298 A CN 104991298A CN 201510137528 A CN201510137528 A CN 201510137528A CN 104991298 A CN104991298 A CN 104991298A
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- CN
- China
- Prior art keywords
- boron nitride
- parts
- containing boron
- vacuum coating
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D1/00—Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
- C09D7/40—Additives
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Abstract
The invention discloses a vacuum coating equipment target material cavity containing a boron nitride coating and a preparation method. The vacuum coating equipment target material cavity has the surface coated with boron nitride paint, and a dried target material cavity contains the boron nitride paint comprising: 100 parts by weight of ethyl alcohol, 15-30 parts by weight of boron nitride powder, 0-10 parts by weight of auxiliary materials and 0-10 parts by weight of binders. The vacuum coating equipment target material cavity is internally provided with a smooth coating with a target material dust adsorption function; the coating has no adverse impact on target materials and products produced by vacuum coating equipment, can be cleaned rapidly in maintenance of the vacuum coating equipment, and is reusable, thereby increasing the yield of products generated by the vacuum coating equipment, and meanwhile increasing the work efficiency of the equipment in maintenance.
Description
Technical field
The present invention relates to a kind of vacuum coating equipment and the preparation method that contain boron nitride coating.
Background technology
At field of vacuum coating, traditional vacuum coating equipment, for settling in the cavity of target, generally without any additional applicator.In the vacuum coating equipment use procedure of reality, target put in cavity and all can gather because of the target dust fall produced in production run and cover the thick or thin residue of last layer.This layer of use of residue to vacuum coating equipment affects, and even more serious even has influence on the yield rate that filming equipment produces product.Therefore in vacuum coating equipment servicing operations, need by some mode, the operating procedures such as such as sandblasting operation process described residue.At field of vacuum coating, particularly glass evacuated plated film field, major part target can produce dust fall in vacuum sputtering process, and described dust fall is often difficult to remove at the residue of filming equipment cavity inner accumulated, therefore vacuum coating equipment, particularly apparatus cavity generally all needs the time and efforts of at substantial in servicing operations, and also may cause certain damage to apparatus cavity, the even more serious use that may have influence on equipment when removing this layer of residue.
Seek a kind of can the technique of simple operations, the problem solved as possible in above-mentioned vacuum coating equipment servicing operations has become one of those skilled in the art's technical matters urgently to be resolved hurrily.
Summary of the invention
The object of this invention is to provide a kind of target cavity and preparation method of the vacuum coating equipment containing boron nitride coating, to overcome the defect that prior art exists, to meet the needs of people.
First the present invention relates to a kind of containing boron nitride coating, and described contains boron nitride coating, comprises the component of following parts by weight:
Ethanol 100 parts
Boron nitride powder 15 ~ 30 parts
Auxiliary material 0 ~ 10 part
Cementing agent 0 ~ 10 part
Preferably, described contains boron nitride coating, comprises the component of following parts by weight:
Ethanol 100 parts
Boron nitride powder 17 ~ 20 parts
Auxiliary material 0 ~ 5 part
Cementing agent 3 ~ 4 parts
The particle diameter of described boron nitride powder is 1 ~ 15 micron;
Described auxiliary material is selected from polyacrylic acid, sodium polyacrylate, polyoxyethylene, polyacrylamide, polyoxyethylene oleic acid ester, AEO methyl-monosilane, sodium sulfate of polyethenoxy ether of fatty alcohol, cellulose sulfate is received, alkyl diphenyl ether sulfonic acid is received, more than one in APES phosphoric acid ester salt, methylcellulose, potassium pyrophosphate, sodium hexametaphosphate, optimization polypropylene acid;
Described cementing agent be selected from casein, guar gum, polyvinyl alcohol (PVA) or carboxymethyl cellulose more than one, preferably polyethylene alcohol;
The effect of described auxiliary material is the viscosity improving coating, and the effect of described cementing agent is the adhesive force increasing coating and vacuum coating equipment;
The invention still further relates to a kind of target cavity of the vacuum coating equipment containing boron nitride coating, the target cavity of the described vacuum coating equipment containing boron nitride coating, for surface is coated with described containing boron nitride coating and dried target cavity, wherein: the parts by weight of each component are:
Boron nitride powder 15 ~ 30 parts
Auxiliary material 0 ~ 10 part
Cementing agent 0 ~ 10 part
Preferably, the parts by weight of each component are:
Boron nitride powder 17 ~ 20 parts
Auxiliary material 0 ~ 5 part
Cementing agent 3 ~ 4 parts
The target cavity of the described vacuum coating equipment containing boron nitride coating, comprises and covers base plate, is arranged on the L-type of covering base plate both sides and covers baffle plate and be arranged on L-type and cover setscrew nut on baffle plate;
The preparation method of the target cavity of the described vacuum coating equipment containing boron nitride coating, comprises the steps:
(1) boron nitride powder dispersed with stirring is added in ethanol;
(2) adding auxiliary material is stirred to thick;
(3) add the adhesive solution that weight concentration is 1% ~ 25%, stir, described in acquisition containing boron nitride coating;
(4) by the described target cavity being coated on described vacuum coating equipment containing boron nitride coating, comprise all dismountable parts, as L-type is covered baffle plate, covered base plate and L plate setscrew nut etc., dry, preferred natural air drying, can obtain the target cavity of the described vacuum coating equipment containing boron nitride coating;
The invention has the beneficial effects as follows: put in cavity at the target of vacuum coating equipment, the parts such as L-type is covered baffle plate, covered base plate, L plate setscrew nut are formed one deck smooth and there is the coating of absorption target dust fall function, this coating can not cause any adverse effect to target, the product can not produced equipment causes any adverse effect, and described coating can rapid cleaning reusing when vacuum coating equipment maintains, thus not only can improve vacuum coating equipment produce the yield rate of product, also improve work efficiency during corrective maintenance simultaneously.
Accompanying drawing explanation
Fig. 1 is the structural representation of the target cavity of vacuum coating equipment containing boron nitride coating.
See Fig. 1, the target cavity of the described vacuum coating equipment containing boron nitride coating, comprises and covers base plate 3, is arranged on the L-type of covering base plate 3 both sides and covers baffle plate 1 and be arranged on L-type and cover setscrew nut 3 on baffle plate 1.
Embodiment
Embodiment 1
Formula: (weight)
Ethanol 100 parts
Boron nitride powder 20 parts
Auxiliary material 5 parts
Cementing agent 3 parts
The particle diameter of described boron nitride powder is 2.5 microns;
Described auxiliary material is polyacrylic acid;
Described cementing agent is polyvinyl alcohol (PVA);
Preparation method:
(1) boron nitride powder dispersed with stirring is added in ethanol;
(2) adding auxiliary material is stirred to thick;
(3) add the adhesive solution that weight concentration is 1%, stir, described in acquisition containing boron nitride coating;
(4) by the described surface being coated on the target cavity of described vacuum coating equipment as shown in Figure 1 containing boron nitride coating, natural air drying, can obtain the target cavity of the described vacuum coating equipment containing boron nitride coating.
The target of the vacuum coating equipment obtained is put in cavity, comprises that the parts such as L-type is covered baffle plate, covered base plate, L plate setscrew nut to be formed one deck smooth and have the coating of absorption target dust fall function.
Embodiment 2
Formula: (weight)
Ethanol 100 parts
Boron nitride powder 17 parts
Auxiliary material 0 part
Cementing agent 4 parts
The particle diameter of described boron nitride powder is 2.5 microns;
Described cementing agent is casein;
Preparation method:
(1) boron nitride powder dispersed with stirring is added in ethanol;
(2) add the adhesive solution that weight concentration is 25%, stir, described in acquisition containing boron nitride coating;
(3) by the described surface being coated on the target cavity of described vacuum coating equipment as shown in Figure 1 containing boron nitride coating, natural air drying, can obtain the target cavity of the described vacuum coating equipment containing boron nitride coating.
The target of the vacuum coating equipment obtained is put in cavity, comprises that the parts such as L-type is covered baffle plate, covered base plate, L plate setscrew nut to be formed one deck smooth and have the coating of absorption target dust fall function.
Just preferred embodiment of the present invention described in this instructions, above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art, all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (10)
1., containing boron nitride coating, it is characterized in that, comprise the component of following parts by weight:
Ethanol 100 parts
Boron nitride powder 15 ~ 30 parts
Auxiliary material 0 ~ 10 part
Cementing agent 0 ~ 10 part.
2. according to claim 1 containing boron nitride coating, it is characterized in that, comprise the component of following parts by weight:
Ethanol 100 parts
Boron nitride powder 17 ~ 20 parts
Auxiliary material 0 ~ 5 part
Cementing agent 3 ~ 4 parts.
3. according to claim 1 containing boron nitride coating, it is characterized in that, the particle diameter of described boron nitride powder is 1 ~ 15 micron.
4. according to any one of claim 1 ~ 3 containing boron nitride coating, it is characterized in that, described auxiliary material is selected from polyacrylic acid, sodium polyacrylate, polyoxyethylene, polyacrylamide, polyoxyethylene oleic acid ester, AEO methyl-monosilane, sodium sulfate of polyethenoxy ether of fatty alcohol, cellulose sulfate is received, alkyl diphenyl ether sulfonic acid is received, more than one in APES phosphoric acid ester salt, methylcellulose, potassium pyrophosphate, sodium hexametaphosphate.
5. according to any one of claim 1 ~ 3 containing boron nitride coating, it is characterized in that, described cementing agent be selected from casein, guar gum, polyvinyl alcohol (PVA) or carboxymethyl cellulose more than one.
6. the target cavity of the vacuum coating equipment containing boron nitride coating, it is characterized in that, the target cavity of the described vacuum coating equipment containing boron nitride coating, for surface be coated with described in any one of claim 1 ~ 5 containing boron nitride coating and dried target cavity.
7. the target cavity of the vacuum coating equipment containing boron nitride coating according to claim 6, it is characterized in that, the parts by weight of each component are:
Boron nitride powder 15 ~ 30 parts
Auxiliary material 0 ~ 10 part
Cementing agent 0 ~ 10 part.
8. the target cavity of the vacuum coating equipment containing boron nitride coating according to claim 6, it is characterized in that, the parts by weight of each component are:
Boron nitride powder 17 ~ 20 parts
Auxiliary material 0 ~ 5 part
Cementing agent 3 ~ 4 parts.
9. the target cavity of vacuum coating equipment containing boron nitride coating according to any one of claim 6 ~ 8, is characterized in that, comprises covering base plate, being arranged on the L-type of covering base plate both sides and covering baffle plate and be arranged on L-type and cover setscrew nut on baffle plate.
10. the preparation method of the target cavity of the vacuum coating equipment containing boron nitride coating according to any one of claim 6 ~ 9, is characterized in that, comprise the steps:
(1) boron nitride powder dispersed with stirring is added in ethanol;
(2) adding auxiliary material is stirred to thick;
(3) add the adhesive solution that weight concentration is 1% ~ 25%, stir, described in acquisition containing boron nitride coating;
(4) by the described target cavity being coated on described vacuum coating equipment containing boron nitride coating, dry, the target cavity of the described vacuum coating equipment containing boron nitride coating can be obtained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510137528.8A CN104991298A (en) | 2015-03-27 | 2015-03-27 | Vacuum coating equipment target material cavity containing boron nitride coating and preparation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510137528.8A CN104991298A (en) | 2015-03-27 | 2015-03-27 | Vacuum coating equipment target material cavity containing boron nitride coating and preparation method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104991298A true CN104991298A (en) | 2015-10-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510137528.8A Pending CN104991298A (en) | 2015-03-27 | 2015-03-27 | Vacuum coating equipment target material cavity containing boron nitride coating and preparation method |
Country Status (1)
| Country | Link |
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| CN (1) | CN104991298A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110669364A (en) * | 2019-10-22 | 2020-01-10 | 嘉兴凤翼特种材料科技有限公司 | Hexagonal boron nitride coating for removing laser processing metal slag and preparation method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1255519A (en) * | 1998-11-27 | 2000-06-07 | 曲树蓁 | Antiscaling and antiwear paint |
| WO2006070021A1 (en) * | 2004-12-31 | 2006-07-06 | Viking Advanced Materials Gmbh | Coating system |
| CN2898056Y (en) * | 2006-03-14 | 2007-05-09 | 北京实力源科技开发有限责任公司 | Winding film coating machine |
| CN102747321A (en) * | 2011-04-18 | 2012-10-24 | 鸿富锦精密工业（深圳）有限公司 | Coating part and preparation method thereof |
| CN103708843A (en) * | 2013-12-20 | 2014-04-09 | 中钢集团洛阳耐火材料研究院有限公司 | Boron nitride coating and application method |
-
2015
- 2015-03-27 CN CN201510137528.8A patent/CN104991298A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1255519A (en) * | 1998-11-27 | 2000-06-07 | 曲树蓁 | Antiscaling and antiwear paint |
| WO2006070021A1 (en) * | 2004-12-31 | 2006-07-06 | Viking Advanced Materials Gmbh | Coating system |
| CN2898056Y (en) * | 2006-03-14 | 2007-05-09 | 北京实力源科技开发有限责任公司 | Winding film coating machine |
| CN102747321A (en) * | 2011-04-18 | 2012-10-24 | 鸿富锦精密工业（深圳）有限公司 | Coating part and preparation method thereof |
| CN103708843A (en) * | 2013-12-20 | 2014-04-09 | 中钢集团洛阳耐火材料研究院有限公司 | Boron nitride coating and application method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110669364A (en) * | 2019-10-22 | 2020-01-10 | 嘉兴凤翼特种材料科技有限公司 | Hexagonal boron nitride coating for removing laser processing metal slag and preparation method thereof |
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| PB01 | Publication | ||
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| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20151021 |