CN104979256B - A kind of base plate transfer device - Google Patents
A kind of base plate transfer device Download PDFInfo
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- CN104979256B CN104979256B CN201510463524.9A CN201510463524A CN104979256B CN 104979256 B CN104979256 B CN 104979256B CN 201510463524 A CN201510463524 A CN 201510463524A CN 104979256 B CN104979256 B CN 104979256B
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- substrate
- weighing
- detected
- base plate
- transfer device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention provides a kind of base plate transfer device, including：Transport mechanism, Weighing mechanism, elevating mechanism, controlling organization and processing mechanism；The transport mechanism is made up of multiple transfer rollers, and has gap between adjacent two transfer rollers；The Weighing mechanism is arranged on the elevating mechanism, and in the gap of the transfer roller；The controlling organization is used to control the elevating mechanism to rise, so that the Weighing mechanism can hold up the substrate to be detected in the transport mechanism, and obtains the weight data of the substrate to be detected；The weight data that the processing mechanism can obtain according to the Weighing mechanism, determine whether the substrate to be detected is abnormal.The base plate transfer device of the present invention is applied to streamline, can carry out quality examination to substrate, prevent breakage or the substrate that residue be present to be transported to upstream device, so as to influence the yields of final product.
Description
Technical field
The present invention relates to the manufacturing field of display device, particularly a kind of base plate transfer device.
Background technology
TFT-LCD liquid crystal displays are parent using glass substrate, and specific pattern is formed in substrate surface.In production process
In, it is necessary to substrate is transported into ad-hoc location using conveyer, it is even more thin because substrate thickness only has 0.5mm, thus
During conveying, substrate collides with conveyer, frequently results in the broken angle of glass or breakage.Because damage location is not fixed, operator
Member possibly can not find in time and arrestment.So, impaired substrate is easily caused to enter in the upstream device of production.This
Outside, the substrate of liquid crystal display and functional pattern above are mostly transparent material, be difficult in producing line find the very first time it is broken
Piece.
Therefore, it is currently needed for a kind of device that can find substrate damage in time on a production line.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of base plate transfer device, can carry out quality examination to substrate,
Breakage or the substrate that residue be present is prevented to be transported to upstream device, so as to influence the yields of final product.
In order to solve the above technical problems, embodiments of the invention provide a kind of base plate transfer device, including：
Transport mechanism, Weighing mechanism, elevating mechanism, controlling organization and processing mechanism；
The transport mechanism is made up of multiple transfer rollers, and has gap between adjacent two transfer rollers；
The Weighing mechanism is arranged on the elevating mechanism, and in the gap of the transfer roller；
The controlling organization is used to control the elevating mechanism to rise, so that the Weighing mechanism can hold up the biography
The substrate to be detected in mechanism is sent, and obtains the weight data of the substrate to be detected；
Whether the weight data that the processing mechanism can obtain according to the Weighing mechanism, determine the substrate to be detected
It is abnormal.
Wherein, the controlling organization is additionally operable to, and when the processing mechanism determines that the substrate to be detected is normal, controls institute
Elevating mechanism decline is stated, so that the Weighing mechanism puts back to the substrate to be detected of picking-up in the transport mechanism.
Wherein, the base plate transfer device also includes：
For the actuating unit for driving the multiple transfer roller to rotate；
The controlling organization is additionally operable to, and after the processing mechanism determines the substrate disorder to be detected, is controlled described dynamic
Force mechanisms are stopped.
Wherein, the Weighing mechanism has multiple weighing units, and the multiple weighing unit forms a corresponding base to be detected
The rectangle weighing area of plate shape；
Wherein, the weighing unit includes：
Respectively positioned at four first weighing units in four corners of the rectangle weighing area, and positioned at the rectangle
Multiple second weighing units of the middle part of weighing area.
Wherein, the supporting surface that first weighing unit is used to hold up substrate to be detected is L-type, second weighing unit
For holding up the supporting surface of substrate to be detected to be round.
Wherein, the processing mechanism includes：
First processing units, for the weight data and the ratio of the first expected value got when any first weighing unit
When value is more than the first thresholding, the substrate disorder to be detected is determined；
Second processing unit, for the weight data and the ratio of the second default value got when any second weighing unit
When value is more than the second thresholding, the substrate disorder to be detected is determined.
Wherein, first thresholding is less than second thresholding.
Wherein, first thresholding is more than 0.05% to 0.1%；Second thresholding is more than 0.15% to 0.2%.
Wherein, the base plate transfer device also includes：
Indication mechanism, the weight data obtained for showing the Weighing mechanism.
Wherein, the base plate transfer device also includes：
Alarm mechanism；
The controlling organization is additionally operable to, and when the processing mechanism determines the substrate disorder to be detected, controls the report
Jing Qi mechanisms are alarmed.
The above-mentioned technical proposal of the present invention has the beneficial effect that：
The scheme of invention sets liftable Weighing mechanism in the gap between transfer roller, so as on a production line can
To be detected by gravity, judge that substrate whether there is mass defect.For example, in the case where not considering error condition, when substrate to be detected
When weight data is less than expected value, then substrate to be detected is can determine that there occurs breakage, or when substrate weight data to be detected
During more than expected value, then it can determine that on substrate to be detected residue be present.Now, controlling organization can close actuating unit in time,
Defective substrate to be detected is prevented to be sent to upstream device.
Brief description of the drawings
Fig. 1 is the framework schematic diagram of the substrate detection apparatus of the present invention；
Fig. 2-6 is that the substrate detection apparatus of the present invention is directed to the structural representation of different implementations.
Embodiment
To make the technical problem to be solved in the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing and tool
Body embodiment is described in detail.
For existing issue, the present invention provides a kind of base plate transfer device suitable on streamline, and substrate can be entered
Row quality examination, breakage or the substrate that residue be present is prevented to be transported to upstream device, so as to influence the yields of final product.
As shown in figure 1, embodiments of the invention provide a kind of base plate transfer device, including：
Transport mechanism 1, Weighing mechanism 2, elevating mechanism 3, controlling organization 4 and processing mechanism 5.
Referring to figs. 2 and 3 the transport mechanism 1 is made up of multiple transmission rod structures 11, and any two adjacent transfer rollers
There is gap between 11；
The Weighing mechanism 2 is arranged on the elevating mechanism 3, and in the gap of the transfer roller 11；As showing
Example property introduction, in actual applications, elevating mechanism 3 can be the lifts of hydraulic pressure or atmospheric pressure, and Weighing mechanism 2 can be set
High-precision electronic scale on elevating mechanism 3；
The controlling organization 4 is used to control the elevating mechanism 3 to rise, so that the Weighing mechanism 2 can hold up institute
The substrate to be detected 6 in transport mechanism 1 is stated, and obtains the weight data of the substrate 6 to be detected；
The weight data that the processing mechanism 5 can obtain according to the Weighing mechanism 2, determines the substrate to be detected 6
It is whether abnormal.For example, in the case where not considering error condition, when the weight data of acquisition is less than expected value, then can determine that to be checked
Substrate 6 is surveyed there occurs breakage, or when weight data is more than expected value, then can determine that residual on substrate 6 to be detected be present
Thing.
The present embodiment sets liftable Weighing mechanism in the gap between transfer roller, so as on a production line
It can judge that substrate whether there is mass defect by gravity detection, to ensure that person skilled can be solved in time
Problem.
The base plate transfer device operation principle of the present invention is described in detail with reference to a practical application.
Assuming that the transporting substrates, device of the present invention is set to a processing node on array base palte production line, substrate to be detected exists
Related processing is carried out on the processing node.
As shown in Figures 2 and 3, the transfer roller 11 of the present embodiment is responsible for driving by an actuating unit 7.When substrate 6 to be detected
After reaching Working position by transfer roller 11, now Weighing mechanism 2 is in holding state, after substrate 6 to be detected is stable, waits and claiming
Re-detection.
Under normal condition before detection of weighing, it is assumed that the lifting height of elevating mechanism 3 now is h1, and Weighing mechanism 2 should
Less than the support surface that transfer roller 11 is directed to substrate 6 to be detected, i.e., substrate 6 to be detected is supported by transfer roller 11 completely.
When testing process is weighed in execution, as shown in figure 4, the elevating mechanism 3 of controlling organization 4 is begun to ramp up, reach target height
After spending h2, Weighing mechanism 2 is caused to hold up substrate 6 to be detected completely, so as to measure the weight data of substrate 6 to be detected.
Weighing mechanism 2 transmits weight data is obtained to processing mechanism 5 afterwards, by processing mechanism 5 according to pre-setting
The one intact due weight of substrate institute, is contrasted with the weight data got, so that it is determined that substrate to be detected 6 is
It is no to occur broken or residue be present.
If processing mechanism 5 determines that substrate to be detected has no problem, controlling organization 4 controls elevating mechanism 3 to drop to Fig. 3 institutes
The height h1 shown so that substrate 6 to be detected is put back on transfer roller 11.
Conversely, if processing mechanism 5 determines that substrate to be detected is problematic, to avoid sending substrate 6 to be detected to production line
Upstream device, then controlling organization 4 can close the actuating unit 7 that driving transfer roller 11 is rotated, and wait operator
Member is handled.
Certainly, for above-mentioned application scenarios, the weight detecting in the present embodiment can be carried out before substrate is processed, can also
Carried out after substrate processing.Detected before processing, then relevant device can be prevented to make problematic substrates, so as to keep away
Exempt from waste of resource.Detected, then the manufacture craft of this node can be checked, and avoid defective product quilt after processing
It is sent to upstream device.
In addition, being found in practical application, for substrate in Transportation Engineering, four angles are easily impaired and are difficult to find, therefore make
For preferred scheme, 4 angles of the further pin substrate of embodiments of the invention carry out more accurate weight detecting, and detailed protocol is such as
Under.
The Weighing mechanism of the present embodiment is further made up of multiple weighing units.The rectangle of all weighing unit arrangements is weighed
Region is corresponding with the rectangular shape of substrate to be detected；
Wherein, as shown in Figure 5 and Figure 6, weighing unit specifically includes：
Respectively positioned at four first weighing units 21 in four corners of rectangle weighing area, positioned at the rectangle Weighing Area
Multiple second weighing units 22 of the middle part in domain.
When assessing the quality of substrate to be detected, because the breakage at four angles is not easy to be detected, therefore four angles
Weight assessment standard is higher than the assessment of intermediate weight definitely.That is, processing mechanism 4 is specifically provided with：For detecting substrate four
The first processing units at angle, and for detecting the second processing unit of substrate center section.First processing units are used for：When appoint
It is (exemplary that the weight data that one first weighing unit 21 is got and the ratio of the first expected value are more than 0.05% to 0.1%
Numerical value), it is determined that substrate disorder to be detected；Second control unit, for the weight got when any second weighing unit 22
When data and the ratio of the second default value are more than 0.15% to 0.2% (exemplary value), it is determined that substrate disorder to be detected.
As exemplary introduction, it is assumed that a residue 10 as shown in Figure 5 on substrate to be detected be present, then the lower right corner
Second weighing unit 22 measures weight data and is greater than the standard figures that the second control unit is pre-set, and now the second control is single
It is first then actuating unit 2 can be closed in time.
It can be seen that the preferred scheme of above-mentioned Weighing mechanism, allows the second weighing unit in center section to undertake base to be measured
Most of weight of plate, so as to reduce the numerical value of weighing of first weighing unit at four angles, and it is further on this basis
For the first weighing unit, the higher evaluation criteria (that is, smaller amount of deflection standard) of accuracy is set, it is even to be detected
There are slight breakage or residue in four angles of substrate, also can accurately be identified.
In addition, to avoid elevating mechanism during rise, there is shake, causes position to shift in substrate to be detected,
Preferably, the supporting surface that each first weighing unit 21 is used to hold up substrate to be detected is L-type, does not have the second weighing unit
22 supporting surfaces for being used to hold up substrate to be detected are round, are treated by the supporting surface of the first weighing unit L-type with more steady hold up
Detect substrate 6.
Certainly, as other feasible schemes, the Weighing mechanism of the present embodiment can also include multiple weighing units, and first
The weighing unit 22 of weighing unit 21 and second, which can be arranged on different weighing units, to be lifted.
In addition, for convenience of technical staff can timely processing problematic substrates, as shown in Fig. 2 the present invention substrate detection dress
Put and still further comprise：Alarm mechanism 8.After processing mechanism 5 determines that substrate goes wrong, then the control of controlling organization 4 alarm
Device mechanism 8 is alarmed.As exemplary introduction, the alarm mechanism 8 of the present embodiment can be that loudspeaker, loudspeaker etc. can be sent out
Go out the warning system of the hardware or installation of alarm sound on computers.
In addition, the defects of substrate is determined for convenience of technical staff, as shown in Fig. 2 the substrate detection apparatus of the present invention is also
Further comprise：The indication mechanism 9 of the weight data obtained for showing Weighing mechanism 2., can be to each as exemplary introduction
The weighing unit of Weighing mechanism 2 sets identification information, and indication mechanism 9 can be directed to identification information, shows that corresponding weighing unit obtains
The weight data got.The information that technical staff is shown by indication mechanism 9, the weight of which weighing unit can be intuitive to see
Data exception is measured, so as to position corresponding in fast positioning to substrate 6 to be detected.
Described above is the preferred embodiment of the present invention, it is noted that for those skilled in the art
For, on the premise of principle of the present invention is not departed from, some improvements and modifications can also be made, these improvements and modifications
It should be regarded as protection scope of the present invention.Such as shown in Fig. 6, the transfer roller 11 of base plate transfer device of the invention can be strip
Shape, the first weighing unit 21 and the second weighing unit 22 are arranged in the gap between transfer roller 11.
Claims (8)
- A kind of 1. base plate transfer device, it is characterised in that including：Transport mechanism, Weighing mechanism, elevating mechanism, controlling organization and processing mechanism；The transport mechanism is made up of multiple transfer rollers, and has gap between adjacent two transfer rollers；The Weighing mechanism is arranged on the elevating mechanism, and in the gap of the transfer roller；The controlling organization is used to control the elevating mechanism to rise, so that the Weighing mechanism can hold up the conveyer Substrate to be detected on structure, and obtain the weight data of the substrate to be detected；The weight data that the processing mechanism can obtain according to the Weighing mechanism, determines whether the substrate to be detected is different Often；Wherein, the Weighing mechanism has multiple weighing units, and the multiple weighing unit forms a corresponding substrate shape to be detected The rectangle weighing area of shape；Wherein, the weighing unit includes：Respectively positioned at four first weighing units in four corners of the rectangle weighing area, and weighed positioned at the rectangle Multiple second weighing units of the middle part in region；The processing mechanism includes：First processing units, the weight data and the ratio of the first expected value for being got when any first weighing unit are big When the first thresholding, the substrate disorder to be detected is determined；Second processing unit, the ratio of weight data and the second default value for being got when any second weighing unit are big When the second thresholding, the substrate disorder to be detected is determined.
- 2. base plate transfer device according to claim 1, it is characterised in thatThe controlling organization is additionally operable to, and when the processing mechanism determines that the substrate to be detected is normal, controls the lift Structure declines, so that the Weighing mechanism puts back to the substrate to be detected of picking-up in the transport mechanism.
- 3. base plate transfer device according to claim 1, it is characterised in that also include：For the actuating unit for driving the multiple transfer roller to rotate；The controlling organization is additionally operable to, and after the processing mechanism determines the substrate disorder to be detected, controls the engine Structure is stopped.
- 4. base plate transfer device according to claim 1, it is characterised in thatThe supporting surface that first weighing unit is used to hold up substrate to be detected is L-type, and second weighing unit is used to hold up The supporting surface of substrate to be detected is round.
- 5. base plate transfer device according to claim 1, it is characterised in thatFirst thresholding is less than second thresholding.
- 6. base plate transfer device according to claim 1, it is characterised in thatFirst thresholding is the value in the range of 0.05% to 0.1%；Second thresholding is in the range of 0.15% to 0.2% Value.
- 7. base plate transfer device according to claim 1, it is characterised in that also include：Indication mechanism, the weight data obtained for showing the Weighing mechanism.
- 8. base plate transfer device according to claim 1, it is characterised in that also include：Alarm mechanism；The controlling organization is additionally operable to, and when the processing mechanism determines the substrate disorder to be detected, controls the alarm Mechanism is alarmed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510463524.9A CN104979256B (en) | 2015-07-31 | 2015-07-31 | A kind of base plate transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510463524.9A CN104979256B (en) | 2015-07-31 | 2015-07-31 | A kind of base plate transfer device |
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| Publication Number | Publication Date |
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| CN104979256A CN104979256A (en) | 2015-10-14 |
| CN104979256B true CN104979256B (en) | 2017-12-26 |
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| CN201510463524.9A Expired - Fee Related CN104979256B (en) | 2015-07-31 | 2015-07-31 | A kind of base plate transfer device |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108521778B (en) * | 2017-05-17 | 2020-10-02 | 深圳市柔宇科技有限公司 | Method for judging stress condition of substrate and transportation system |
| US10325796B2 (en) * | 2017-10-30 | 2019-06-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus and system for detecting wafer damage |
| JP7186225B2 (en) * | 2017-11-30 | 2022-12-08 | チャイナ トライアンフ インターナショナル エンジニアリング カンパニー リミテッド | Method and Apparatus for Performing the Method for Determining Substrate Position in an Enclosed Chamber |
| CN108872005A (en) * | 2018-07-03 | 2018-11-23 | 京东方科技集团股份有限公司 | A kind of testing agency and transmission equipment |
| CN111855669B (en) * | 2020-07-21 | 2023-05-12 | 苏州精濑光电有限公司 | Substrate detection device |
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| CN1818572A (en) * | 2006-03-06 | 2006-08-16 | 河南安彩高科股份有限公司 | Planar glass on-line weighing method, system and liftable weighing device |
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| CN203254434U (en) * | 2013-05-23 | 2013-10-30 | 河南职业技术学院 | Glass substrate conveying mechanical arm |
| CN203811252U (en) * | 2014-04-24 | 2014-09-03 | 东旭集团有限公司 | Glass substrate weighing apparatus |
| CN104176333A (en) * | 2014-09-19 | 2014-12-03 | 山东华鹏玻璃股份有限公司 | Glassware boxing and weighing detection device |
| CN104609137A (en) * | 2015-01-04 | 2015-05-13 | 京东方科技集团股份有限公司 | Glass substrate conveying device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5347667B2 (en) * | 2009-04-09 | 2013-11-20 | 株式会社Ｉｈｉ | Robot hand and transfer robot |
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2015
- 2015-07-31 CN CN201510463524.9A patent/CN104979256B/en not_active Expired - Fee Related
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|---|---|---|---|---|
| CN1818572A (en) * | 2006-03-06 | 2006-08-16 | 河南安彩高科股份有限公司 | Planar glass on-line weighing method, system and liftable weighing device |
| CN202582687U (en) * | 2012-04-10 | 2012-12-05 | 百力达太阳能股份有限公司 | Calculating instrument for calculating quantity of work-in-process solar silicon wafers |
| CN203254434U (en) * | 2013-05-23 | 2013-10-30 | 河南职业技术学院 | Glass substrate conveying mechanical arm |
| CN203811252U (en) * | 2014-04-24 | 2014-09-03 | 东旭集团有限公司 | Glass substrate weighing apparatus |
| CN104176333A (en) * | 2014-09-19 | 2014-12-03 | 山东华鹏玻璃股份有限公司 | Glassware boxing and weighing detection device |
| CN104609137A (en) * | 2015-01-04 | 2015-05-13 | 京东方科技集团股份有限公司 | Glass substrate conveying device |
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| CN104979256A (en) | 2015-10-14 |
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