CN104971921A - Glass substrate cleaning device - Google Patents
Glass substrate cleaning device Download PDFInfo
- Publication number
- CN104971921A CN104971921A CN201410138570.7A CN201410138570A CN104971921A CN 104971921 A CN104971921 A CN 104971921A CN 201410138570 A CN201410138570 A CN 201410138570A CN 104971921 A CN104971921 A CN 104971921A
- Authority
- CN
- China
- Prior art keywords
- glass substrate
- vibration plate
- work nest
- washing device
- hydraulic fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
- B08B3/123—Cleaning travelling work, e.g. webs, articles on a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/048—Overflow-type cleaning, e.g. tanks in which the liquid flows over the tank in which the articles are placed
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention belongs to the technical field of cleaning and provides a glass substrate cleaning device. The glass substrate cleaning device comprises a cleaning tank, an ultrasonic generator, upper vibrating plates, a lower vibrating plate, a delivery mechanism and a circulatory liquid feeding system, wherein partitions are arranged in the cleaning tank and divide the interior of the cleaning tank into a working tank and liquid draining tanks, and an overflow hole is formed in each of the partition; the ultrasonic generator is arranged outside the cleaning tank; the upper vibrating plates and the lower vibrating plate are electrically connected with the ultrasonic generator, the lower vibrating plate is arranged at the bottom of the working tank, the upper vibrating plates are arranged above the lower vibrating plate, and a channel is formed between the upper vibrating plates and the lower vibrating plate; the delivery mechanism is used for delivering glass substrates to be cleaned and is arranged in the channel; and the circulatory liquid feeding system is used for providing working liquid for the working tank and reclaiming the working liquid in the liquid draining tanks and connected with the cleaning tank. The principle that huge energy is produced at the breakage instant of cavitation bubbles is utilized, and the upper vibrating plates and the lower vibrating plate are arranged to enable that both sides of the glass substrates are impacted by the cavitation bubble flow, so that foreign objects on the glass substrates can be effectively eliminated.
Description
Technical field
The invention belongs to cleaning technique field, particularly relate to a kind of glass substrate washing device.
Background technology
(English: Liquid Crystal Display, abbreviation: LCD) be the display device of thin plane are made up of the colour of some or monochrome pixels, are positioned over light source or reflecting surface front liquid crystal display.Liquid crystal display is low in energy consumption, therefore extremely engineer's favor, is applicable to the electronic equipment using battery.
Along with the development of technology, LCD is widely used, and therefore market is also improved the production efficiency of LCD and the requirement of the quality of production thereupon.Glass substrate is the main building block of LCD, it is coated with indium oxide layer tin (ITO) film, it is for the electrode as LCD, the cleanliness factor of ITO layer to the yields of LCD and reliability effect very big, therefore, when producing LCD, needing to clean glass substrate, removing the dirt and foreign matter that invest above.Prior art the cleaning of glass substrate is normally adopted scrub, the mode of ultrasonic wave and spray, the cleaning performance of these modes is not good, and also easily wipes in cleaning process and touch glass substrate, damages its ITO layer, finally affects the quality of LCD.
Summary of the invention
The object of the invention is to the defect overcoming prior art, provide a kind of glass substrate washing device effectively can removing foreign matter on glass substrate two sides.
The present invention is achieved in that a kind of glass substrate washing device, comprising:
Cleaning case, it has cavity, dividing plate is provided with in described cavity, described cavity is divided into the work nest that can hold hydraulic fluid and the sump pit being used for holding the hydraulic fluid overflowed in described work nest by described dividing plate, described dividing plate is provided with the overfolw hole for regulating hydraulic fluid liquid level in described work nest, the through described work nest of described overfolw hole and described sump pit;
Supersonic generator, it is located at outside described cleaning case;
Upper vibration plate and lower vibration plate, it makes hydraulic fluid produce cavitation bubble for launching ultrasonic wave, described upper vibration plate and described lower vibration plate are all electrically connected with described supersonic generator, described lower vibration plate is located at bottom described work nest, described upper vibration plate to be located in described work nest and to be positioned at above described lower vibration plate, and the gap between described upper vibration plate and described lower vibration plate forms the passage holding glass substrate to be cleaned and pass through;
Connecting gear, it is for transmitting described glass substrate to be cleaned, and described connecting gear is located in described passage;
Circulation fluid infusion system, it is for providing hydraulic fluid for described work nest, and for reclaiming the hydraulic fluid in described sump pit, described circulation fluid infusion system is connected with described cleaning case.
Further, described glass substrate washing device also comprises for supplementing hydraulic fluid for described work nest and providing the fluid infusion cutter of pressure current for described glass substrate to be cleaned, described fluid infusion cutter to be located in described work nest and to be positioned at the side periphery of described upper vibration plate, described fluid infusion cutter is connected with described circulation fluid infusion system and is provided with the mouth spray penetrating hydraulic fluid stream, and described mouth spray vertically down.
Further, be provided with two described upper vibration plates in described work nest, described in two, upper vibration plate becomes spacing to be arranged side by side, and the gap described in two between upper vibration plate is provided with described fluid infusion cutter.
Preferably, be provided with two described upper vibration plates in described work nest, described in two, upper vibration plate is arranged side by side.
Particularly, described connecting gear comprises multiple upper roller bearing and multiple lower roller bearing, multiple described lower roller bearing becomes spacing setting arranged in parallel and is positioned on described lower vibration plate, and multiple described upper roller bearing becomes spacing setting arranged in parallel and on described between vibration plate and described lower roller bearing.
More specifically, described glass substrate washing device also comprises the regulating part for regulating described upper vibration plate height and position, and described regulating part is located at the inwall of described cleaning case, and described upper vibration plate is located on described regulating part.
Further, described dividing plate is provided with the adjustable plate for regulating described overfolw hole size and height, and described adjustable plate is located at below described overfolw hole.
More specifically, be provided with two described dividing plates in the cavity of described cleaning case, two described dividing plates are parallel to be oppositely arranged and described cavity to be divided into a described work nest and two described sump pits, and two described sump pits lay respectively at described work nest both sides.
Particularly, dividing plate described in one of them is provided with and holds described glass substrate to be cleaned is entered described work nest feeding mouth by described sump pit, dividing plate described in another is provided with and holds described glass substrate to be cleaned is exported to described sump pit discharging opening by described work nest, and described feeding mouth and described discharging opening are oppositely arranged.
Further, described glass substrate washing device also comprises frame, and described cleaning case, described supersonic generator and described circulation fluid infusion system are all located in described frame; Described circulation fluid infusion system comprises liquid reserve tank, pipeline group, filter and water pump, and described filter and described water pump are all located at outside described liquid reserve tank, and described liquid reserve tank is connected with described cleaning case by described pipeline group.
Glass substrate washing device provided by the present invention has following technique effect:
The present invention is broken by cavitation bubble can produce the principle of huge energy instantaneously, hydraulic fluid can be made to produce the upper vibration plate of cavitation bubble stream and lower vibration plate by arranging, ensure the impact that all can be subject to cavitation bubble stream from the glass substrate two sides to be cleaned passed through between upper vibration plate and lower vibration plate, the dirt on glass baseplate surface and foreign matter can be eliminated effectively.In addition, because the present invention adopts the principle of ultrasonic cavitation to take out stains and foreign matter, it also has and takes up room that little, Scavenging activity is strong, efficiency advantages of higher.Upper vibration plate and lower vibration plate are soaked in hydraulic fluid, and it also helps the heat radiation of vibration plate.
Accompanying drawing explanation
Fig. 1 is the internal structure schematic diagram of glass substrate washing device in the embodiment of the present invention.
Detailed description of the invention
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
See Fig. 1, embodiments provide a kind of glass substrate washing device, comprising:
Cleaning case 1, it has cavity, dividing plate 11 is provided with in described cavity, described cavity is divided into the work nest 12 that can hold hydraulic fluid and the sump pit 13 being used for holding the hydraulic fluid overflowed in described work nest by described dividing plate 11, described dividing plate 11 is provided with the overfolw hole 111 for regulating hydraulic fluid liquid level in described work nest 12, the through described work nest 12 of described overfolw hole 111 and described sump pit 13;
Supersonic generator 2, it is located at outside described cleaning case 1;
Upper vibration plate 3 and lower vibration plate 4, it makes hydraulic fluid produce cavitation bubble for launching ultrasonic wave, described upper vibration plate 3 and described lower vibration plate 4 are all electrically connected with described supersonic generator 2, described lower vibration plate 4 is located at bottom described work nest 12, described upper vibration plate 3 to be located in described work nest 12 and to be positioned at above described lower vibration plate 4, and the gap between described upper vibration plate 3 and described lower vibration plate 4 forms the passage 15 holding glass substrate 5 to be cleaned and pass through;
Connecting gear 6, it is for transmitting described glass substrate to be cleaned 5, and described connecting gear 6 is located in described passage 15;
Circulation fluid infusion system 7, it is for providing hydraulic fluid for described work nest 12, and for reclaiming the hydraulic fluid in described sump pit 13, described circulation fluid infusion system 7 is connected with described cleaning case 1.
During cleaning glass substrate, first work nest 12 in cleaning case injects hydraulic fluid (hydraulic fluid can be water or other chemical liquids), when hydraulic fluid reach a certain height (in embodiments of the present invention, hydraulic fluid floods vibration plate 3 and lower vibration plate 4), unnecessary hydraulic fluid flows in sump pit 13 by overfolw hole 111; Upper vibration plate 3 and lower vibration plate 4 launch ultrasonic wave, make hydraulic fluid produce cavitation bubble; Glass substrate 5 to be cleaned is coated with one of tin indium oxide (ITO) film and faces up, passage 15 is transported through by connecting gear 6, glass substrate 5 upper and lower surface to be cleaned is all subject to the bombardment/impact of cavitation bubble stream, cavitation bubble breaks rapidly when striking glass substrate 5 to be cleaned surface (sharply collapsing), abrupt release goes out huge energy, the dirt on glass substrate 5 surface to be cleaned is dispelled, thus reaches the effect of cleaning glass substrate.Due to the passage 15 that glass substrate during cleaning is formed through upper vibration plate and lower vibration plate, it is just as passing through tunnel, and therefore the present invention also can be called " tunnel type glass substrate washing device " visually.
The present invention is broken by cavitation bubble can produce the principle of huge energy instantaneously, hydraulic fluid can be made to produce the upper vibration plate 3 of cavitation bubble stream and lower vibration plate 4 by arranging, ensure the impact that all can be subject to cavitation bubble stream from glass substrate to be cleaned 5 two sides passed through between upper vibration plate 3 and lower vibration plate 4, the dirt on glass baseplate surface and foreign matter can be eliminated effectively.In addition, because the present invention adopts the principle of ultrasonic cavitation to take out stains and foreign matter, it also has and takes up room that little, Scavenging activity is strong, efficiency advantages of higher.Upper vibration plate and lower vibration plate are soaked in hydraulic fluid, and it also helps the heat radiation of vibration plate.
The glass substrate washing device that the embodiment of the present invention provides can also comprise for supplementing hydraulic fluid for described work nest 12 and providing the fluid infusion cutter 8 of pressure current for described glass substrate 5 to be cleaned, described fluid infusion cutter 8 to be located in described work nest 12 and to be positioned at the side periphery of described upper vibration plate 3, described fluid infusion cutter 8 is connected with described circulation fluid infusion system 7 and is provided with the mouth spray 81 penetrating hydraulic fluid stream, and described mouth spray 81 vertically down.Add fluid infusion cutter 8, hydraulic fluid can be supplemented on the one hand for work nest 12, liquid level is made to remain on suitable height, on the other hand, the flow hits glass substrate 5 to be cleaned that fluid infusion cutter 8 penetrates, glass substrate 5 to be cleaned obtains the pressure being close to connecting gear 6, makes it more stably can pass passage 15.
For the ease of safeguarding cleaning case 1 inside, be provided with two described upper vibration plates 3 in described work nest 12, described in two, upper vibration plate 3 one-tenth spacing is arranged side by side, and the gap described in two between upper vibration plate 3 is provided with described fluid infusion cutter 8.As shown in Figure 1, the volume of upper vibration plate 3 comparatively descends vibration plate 4 little, two pieces of upper vibration plates 3 side by side after width suitable with the width of lower vibration plate 4, be appreciated that, the weight of upper vibration plate 3 is also less, like this, while the impact ensureing the cavitation bubble stream that the two sides of glass substrate 5 to be cleaned can be balanced, also be convenient to the handling of vibration plate 3, convenient operation personnel are to the maintenance of cleaning case 1 inside.Gap on two between vibration plate 3 also adds fluid infusion cutter 8, the pressure that glass substrate 5 to be cleaned is subject to evenly.
Certainly, also only can be provided with two described upper vibration plates 3 in described work nest 12, described in two, upper vibration plate 3 is arranged side by side, and does not add fluid infusion cutter between which.
As a kind of embodiment of the present invention about connecting gear 6, described connecting gear 6 comprises multiple upper roller bearing 61 and multiple lower roller bearing 62, multiple described lower roller bearing 62 one-tenth spacing setting arranged in parallel and be positioned on described lower vibration plate 4, multiple described upper roller bearing 61 one-tenth spacing setting arranged in parallel and on described between vibration plate 3 and described lower roller bearing 62.Become spacing to arrange between roller bearing, can ensure that bubble flow through the gap roller bearing, can impact on the glass substrate.
The glass substrate washing device that the embodiment of the present invention provides can also comprise the regulating part 14 for regulating described upper vibration plate 3 height and position, and described regulating part 14 is located at the inwall of described cleaning case 1, and described upper vibration plate 3 is located on described regulating part 14.The present invention can regulate the spacing between vibration plate 3 and lower vibration plate 4 as required, and usually, upper vibration plate 3 is between 3 ~ 6mm apart from glass substrate upper surface, touches in order to avoid wiping occurs for the two, tin indium oxide (ITO) film on infringement glass substrate; Lower roller bearing 62 is about 10mm apart from lower vibration plate 4, is limited not hinder the rotation of lower roller bearing 62.
Particularly, described dividing plate 11 is provided with the adjustable plate 112 for regulating described overfolw hole 111 size and height, and described adjustable plate 112 is located at below described overfolw hole 111.It is large that the width of overfolw hole 111 vertical direction can do enough, hides the degree of overfolw hole 111 by arranging adjustable plate 112, and with the size regulating overfolw hole 111 final and height, such structure can strengthen the flexibility ratio regulating liquid level.
As a kind of preferred embodiment of the present invention, two described dividing plates 11 are provided with in the cavity of described cleaning case 1, two described dividing plates 11 are parallel to be oppositely arranged and described cavity to be divided into a described work nest 12 and two described sump pits, 13, two described sump pits 13 lay respectively at described work nest 12 both sides.
In above-mentioned two dividing plates 11, dividing plate described in one of them is provided with and holds described glass substrate 5 to be cleaned is entered described work nest 12 feeding mouth 113 by described sump pit 13, dividing plate described in another is provided with and holds described glass substrate 5 to be cleaned is exported to described sump pit 13 discharging opening 114 by described work nest 12, and described feeding mouth 113 is oppositely arranged with described discharging opening 114.Feeding mouth 113 and discharging opening 114 are set, multiple pieces of glass substrate can be allowed to enter successively in work nest 12 and carry out streamline cleaning, then send work nest 12 successively.
The glass substrate washing device that the embodiment of the present invention provides can also comprise frame 9, and described cleaning case 1, described supersonic generator 2 and described circulation fluid infusion system 7 are all located in described frame 9; Described circulation fluid infusion system 7 comprises liquid reserve tank 71, pipeline group 72, filter 73 and water pump 74, and described filter 73 and described water pump 74 are all located at outside described liquid reserve tank 71, and described liquid reserve tank 71 is connected with described cleaning case 1 by described pipeline group 72.Pipeline group 72 is connected with work nest 12, sump pit and fluid infusion cutter 8 etc. respectively, makes the hydraulic fluid in cleaning case 1 can carry out circularly purifying use by described circulation fluid infusion system 7.Filter 73, for filtering hydraulic fluid, also can add the preliminary filter for tentatively filtering hydraulic fluid or preliminary screen pack 76 in liquid reserve tank 71.Certainly, liquid reserve tank 71 is also provided with water inlet 711, makes outside can fill into hydraulic fluid to liquid reserve tank 71.For flowing velocity and the amount of flow of hydraulic fluid can be regulated, pipeline group 72 can add valve 75.
It may be noted that the layout of the pipeline group 72 shown in Fig. 1 and connected mode only for signal, not in order to specifically to represent or to limit their layout.
Below in conjunction with concrete structure and the accompanying drawing of the present embodiment, the course of work of the glass substrate washing device that the embodiment of the present invention provides is described:
Liquid reserve tank 71 externally to circulation fluid infusion system 7 injects sufficient hydraulic fluid;
The pressure flowing that hydraulic fluid is provided by water pump 74, after filter 73 carries out purification filtering, injects in the work nest 12 of cleaning case 1;
When making the liquid level in work nest 12 reach certain height be applicable to by control valve 75 during work, (work liquid level is higher than upper vibration plate 3 thickness more than 1/2, and exceed overfolw hole 111), hydraulic fluid is from overfolw hole 111 overflow in sump pit 13, and in circulation fluid infusion system 7, liquid level and work nest 12 liquid level keep dynamic equilibrium;
Start supersonic generator 2, upper vibration plate 3 and lower vibration plate 4 send ultrasonic wave, hydraulic fluid is made to produce cavitation bubble stream, glass substrate 5 to be cleaned enters work nest 12 from feeding mouth 113, is conveyed through passage 15 through connecting gear 6, and cavitation bubble stream impacts the surface of glass substrate 5 to be cleaned, cavitation bubble breaks after clashing into glass substrate instantaneously, produce huge energy, the dirt on glass substrate and foreign matter are dispelled, reaches elimination effect; Meanwhile, fluid infusion cutter 8 constantly sprays liquid stream, supplies the hydraulic fluid in work nest 12, simultaneously also for glass substrate provides required pressure, steadily can pass passage 15;
The glass substrate cleaned up exports from discharging opening 114, and next block glass substrate to be cleaned inputs from feeding mouth 113, carries out the cleaning of next block glass substrate;
By the hydraulic fluid in circulation fluid infusion system 7 constantly circulating filtration renewal cleaning case 1 in the glass substrate washing device course of work;
Glass substrate washing device constantly repeats above-mentioned steps, cleans glass substrate successively, until work complete till.
Glass substrate washing device provided by the present invention can also coordinate drying unit etc., forms a whole set of pipelining equipment, realizes full-automatic flow process.
It should be noted that, the present invention is not only for the cleaning for LCD glass substrate, and it also can be used for cleaning similar tabular object.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement or improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. a glass substrate washing device, is characterized in that, comprising:
Cleaning case, it has cavity, dividing plate is provided with in described cavity, described cavity is divided into the work nest that can hold hydraulic fluid and the sump pit being used for holding the hydraulic fluid overflowed in described work nest by described dividing plate, described dividing plate is provided with the overfolw hole for regulating hydraulic fluid liquid level in described work nest, the through described work nest of described overfolw hole and described sump pit;
Supersonic generator, it is located at outside described cleaning case;
Upper vibration plate and lower vibration plate, it makes hydraulic fluid produce cavitation bubble for launching ultrasonic wave, described upper vibration plate and described lower vibration plate are all electrically connected with described supersonic generator, described lower vibration plate is located at bottom described work nest, described upper vibration plate to be located in described work nest and to be positioned at above described lower vibration plate, and the gap between described upper vibration plate and described lower vibration plate forms the passage holding glass substrate to be cleaned and pass through;
Connecting gear, it is for transmitting described glass substrate to be cleaned, and described connecting gear is located in described passage;
Circulation fluid infusion system, it is for providing hydraulic fluid for described work nest, and for reclaiming the hydraulic fluid in described sump pit, described circulation fluid infusion system is connected with described cleaning case.
2. glass substrate washing device as claimed in claim 1, it is characterized in that: also comprise for supplementing hydraulic fluid for described work nest and providing the fluid infusion cutter of pressure current for described glass substrate to be cleaned, described fluid infusion cutter to be located in described work nest and to be positioned at the side periphery of described upper vibration plate, described fluid infusion cutter is connected with described circulation fluid infusion system and is provided with the mouth spray penetrating hydraulic fluid stream, and described mouth spray vertically down.
3. glass substrate washing device as claimed in claim 2, is characterized in that: be provided with two described upper vibration plates in described work nest, and described in two, upper vibration plate becomes spacing to be arranged side by side, and the gap described in two between upper vibration plate is provided with described fluid infusion cutter.
4. glass substrate washing device as claimed in claim 1, is characterized in that: be provided with two described upper vibration plates in described work nest, and described in two, upper vibration plate is arranged side by side.
5. glass substrate washing device as claimed in claim 1, it is characterized in that: described connecting gear comprises multiple upper roller bearing and multiple lower roller bearing, multiple described lower roller bearing becomes spacing setting arranged in parallel and is positioned on described lower vibration plate, and multiple described upper roller bearing becomes spacing setting arranged in parallel and on described between vibration plate and described lower roller bearing.
6. the glass substrate washing device as described in any one of claim 1-5, is characterized in that: also comprise the regulating part for regulating described upper vibration plate height and position, described regulating part is located at the inwall of described cleaning case, and described upper vibration plate is located on described regulating part.
7. the glass substrate washing device as described in any one of claim 1-5, is characterized in that: described dividing plate is provided with the adjustable plate for regulating described overfolw hole size and height, and described adjustable plate is located at below described overfolw hole.
8. the glass substrate washing device as described in any one of claim 1-5, it is characterized in that: in the cavity of described cleaning case, be provided with two described dividing plates, two described dividing plates are parallel to be oppositely arranged and described cavity to be divided into a described work nest and two described sump pits, and two described sump pits lay respectively at described work nest both sides.
9. glass substrate washing device as claimed in claim 8, it is characterized in that: dividing plate described in one of them is provided with and holds described glass substrate to be cleaned is entered described work nest feeding mouth by described sump pit, dividing plate described in another is provided with and holds described glass substrate to be cleaned is exported to described sump pit discharging opening by described work nest, and described feeding mouth and described discharging opening are oppositely arranged.
10. glass substrate washing device as claimed in claim 1, it is characterized in that: also comprise frame, described cleaning case, described supersonic generator and described circulation fluid infusion system are all located in described frame; Described circulation fluid infusion system comprises liquid reserve tank, pipeline group, filter and water pump, and described filter and described water pump are all located at outside described liquid reserve tank, and described liquid reserve tank is connected with described cleaning case by described pipeline group.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410138570.7A CN104971921A (en) | 2014-04-08 | 2014-04-08 | Glass substrate cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410138570.7A CN104971921A (en) | 2014-04-08 | 2014-04-08 | Glass substrate cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104971921A true CN104971921A (en) | 2015-10-14 |
Family
ID=54269202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410138570.7A Pending CN104971921A (en) | 2014-04-08 | 2014-04-08 | Glass substrate cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104971921A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110586597A (en) * | 2019-09-25 | 2019-12-20 | 惠州市吉祥达智能装备有限公司 | Glass cleaning device and method |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH065577A (en) * | 1992-06-16 | 1994-01-14 | Nec Corp | Substrate cleaning device |
| CN1191385A (en) * | 1997-02-21 | 1998-08-26 | 佳能株式会社 | Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method |
| JP2000254605A (en) * | 1999-03-11 | 2000-09-19 | Ricoh Co Ltd | Cleaning device for flexible substrate |
| US20050006026A1 (en) * | 2003-05-29 | 2005-01-13 | Seiko Epson Cprporation | Transfer apparatus, cleaning apparatus, chemical processing apparatus, and method for manufacturing circuit substrate |
| US7350991B1 (en) * | 2006-10-27 | 2008-04-01 | Anocoil Corporation | Universal spray processor for imaged plates |
| CN201534157U (en) * | 2009-03-30 | 2010-07-28 | 谢鲜武 | Substrate cleaning container |
| CN201678774U (en) * | 2010-05-10 | 2010-12-22 | 江苏神泰科技发展有限公司 | High-intensity mould polyethylene fiber cooling water bath |
| CN202009027U (en) * | 2011-04-07 | 2011-10-12 | 晶澳太阳能有限公司 | Filtering device of pickling tank |
| JP4853811B2 (en) * | 2007-03-28 | 2012-01-11 | 株式会社サワーコーポレーション | Cleaning device for planar parts |
| CN202129240U (en) * | 2011-06-10 | 2012-02-01 | 张家港市港威超声电子有限公司 | Immersion structure for ultrasonic vibrating plate emission surface |
| CN202506626U (en) * | 2012-04-18 | 2012-10-31 | 北京京东方光电科技有限公司 | Rinsing device and etching equipment |
| CN203448356U (en) * | 2013-08-22 | 2014-02-26 | 常州捷佳创精密机械有限公司 | Wafer-cleaning device |
| CN203816979U (en) * | 2014-04-08 | 2014-09-10 | 麒麟电子（深圳）有限公司 | Cleaning device for glass substrate |
-
2014
- 2014-04-08 CN CN201410138570.7A patent/CN104971921A/en active Pending
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH065577A (en) * | 1992-06-16 | 1994-01-14 | Nec Corp | Substrate cleaning device |
| CN1191385A (en) * | 1997-02-21 | 1998-08-26 | 佳能株式会社 | Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method |
| JP2000254605A (en) * | 1999-03-11 | 2000-09-19 | Ricoh Co Ltd | Cleaning device for flexible substrate |
| US20050006026A1 (en) * | 2003-05-29 | 2005-01-13 | Seiko Epson Cprporation | Transfer apparatus, cleaning apparatus, chemical processing apparatus, and method for manufacturing circuit substrate |
| US7350991B1 (en) * | 2006-10-27 | 2008-04-01 | Anocoil Corporation | Universal spray processor for imaged plates |
| JP4853811B2 (en) * | 2007-03-28 | 2012-01-11 | 株式会社サワーコーポレーション | Cleaning device for planar parts |
| CN201534157U (en) * | 2009-03-30 | 2010-07-28 | 谢鲜武 | Substrate cleaning container |
| CN201678774U (en) * | 2010-05-10 | 2010-12-22 | 江苏神泰科技发展有限公司 | High-intensity mould polyethylene fiber cooling water bath |
| CN202009027U (en) * | 2011-04-07 | 2011-10-12 | 晶澳太阳能有限公司 | Filtering device of pickling tank |
| CN202129240U (en) * | 2011-06-10 | 2012-02-01 | 张家港市港威超声电子有限公司 | Immersion structure for ultrasonic vibrating plate emission surface |
| CN202506626U (en) * | 2012-04-18 | 2012-10-31 | 北京京东方光电科技有限公司 | Rinsing device and etching equipment |
| CN203448356U (en) * | 2013-08-22 | 2014-02-26 | 常州捷佳创精密机械有限公司 | Wafer-cleaning device |
| CN203816979U (en) * | 2014-04-08 | 2014-09-10 | 麒麟电子（深圳）有限公司 | Cleaning device for glass substrate |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110586597A (en) * | 2019-09-25 | 2019-12-20 | 惠州市吉祥达智能装备有限公司 | Glass cleaning device and method |
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Application publication date: 20151014 |