CN104952974A - Wafer turnover equipment - Google Patents
Wafer turnover equipment Download PDFInfo
- Publication number
- CN104952974A CN104952974A CN201510217211.5A CN201510217211A CN104952974A CN 104952974 A CN104952974 A CN 104952974A CN 201510217211 A CN201510217211 A CN 201510217211A CN 104952974 A CN104952974 A CN 104952974A
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- Prior art keywords
- manipulator
- sheet
- outlet
- turning
- supporting part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000007306 turnover Effects 0.000 title abstract description 12
- 230000007246 mechanism Effects 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims description 45
- 230000000875 corresponding effect Effects 0.000 claims description 15
- 239000004743 Polypropylene Substances 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- -1 polypropylene Polymers 0.000 claims description 3
- 229920001155 polypropylene Polymers 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 abstract 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 27
- 229910052710 silicon Inorganic materials 0.000 description 27
- 239000010703 silicon Substances 0.000 description 27
- 238000000034 method Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000032258 transport Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses wafer turnover equipment which comprises a wafer suction device, inlet manipulators, outlet manipulators and wafer turnover mechanisms. The wafer suction device comprises at least one sucker mechanism; the inlet manipulators and the outlet manipulators are respectively provided with horizontal movable carrying portions, and the horizontal movable carrying portions are in one-to-one correspondence to the sucker mechanisms; the wafer turnover mechanisms are configured between the inlet manipulators and the outlet manipulators and comprise driving shafts and turnover portions, the turnover portions are in one-to-one correspondence to the horizontal movable carrying portions of the inlet manipulators, can be driven by the driving shafts to rotate and are provided with slots, and wafers can be horizontally inserted into the corresponding slots by the horizontal movable carrying portions of the inlet manipulators at first working positions of the turnover portions, and can be horizontally taken out of the corresponding slots by the horizontal movable carrying portions of the outlet manipulators at second working positions of the turnover portions. The wafer turnover equipment has the advantages that pollution and damage of the surfaces of the wafers can be reduced, and the wafer turnover operation efficiency can be improved.
Description
Technical field
The present invention relates to manufacture of solar cells technical field, particularly relate to a kind of flaps equipment.
Background technology
When the non-renewable energy resources such as electric power, coal, oil signal for help repeatedly, when energy problem becomes the bottleneck of restriction international community economic development day by day, increasing country comes into effect " sunlight program ", and exploitation solar energy resources, seeks the new power of economic development.Some high-caliber core research institutions of Europe also start to turn to regenerative resource.Under the promotion of international photovoltaic market great potential, the solar cell manufacturing industry of various countries falls over each other to drop into huge fund, and expanding production, to strive one seat.
At present, the development of silicon solar cell is comparatively ripe, occupies leading position in the application.In the production technology of silicon solar cell, often need to carry out flaps operation to silicon chip sheet material.In prior art, usually by manually using tweezers to be picked up from smooth surface by silicon chip, then overturn.Its technological deficiency is, tweezers clipping silicon chip easily pollutes silicon chip and damages, and silicon chip even can be caused broken; Further, existing flaps mode, operating efficiency is lower, and this has influence on the production efficiency of solar cell to a certain extent.
Summary of the invention
The object of the embodiment of the present invention is to provide a kind of flaps equipment, to reduce pollution to sheet surface and damage, improves the efficiency of sheet material being carried out to flaps operation.
Embodiments provide a kind of flaps equipment, comprise and inhale sheet devices, entrance manipulator, outlet manipulator and Sheet turning device, wherein:
Described suction sheet devices comprises at least one sucking disc mechanism, and described suction sheet devices between sheet material rest area and entrance manipulator, and can transport sheet material between outlet manipulator and sheet material rest area;
Described entrance manipulator and the corresponding each sucking disc mechanism of outlet manipulator have respectively and move horizontally supporting part;
Described Sheet turning device is configured between described entrance manipulator and outlet manipulator, the each supporting part that moves horizontally comprising driving shaft and corresponding entrance manipulator arranges and can drive the turning part rotated by driven shaft, turning part has slot, in the first service position of turning part, the supporting part that moves horizontally of described entrance manipulator can by described slot corresponding for the insertion of sheet material level, in the second service position of turning part, the supporting part that moves horizontally of described outlet manipulator can by sheet material level taking-up from the described slot of correspondence.
Preferably, move horizontally described in supporting part comprise separately and can level retreat at least two carrying finger.
Preferably, turning part comprises at least two rotating sheets separately, and each described rotating sheet offers U-shaped socket, and the U-shaped socket of described at least two rotating sheets forms the slot of turning part.
More excellent, each described rotating sheet offers two opposing U-shaped sockets.
Preferably, in the first service position of turning part, the loading end moving horizontally supporting part of described entrance manipulator higher than the lower bottom part of the described slot of correspondence, and lower than the upper bottom portion of described slot;
In the second service position of turning part, the loading end moving horizontally supporting part of described outlet manipulator higher than the lower bottom part of the described slot of correspondence, and lower than the upper bottom portion of described slot.
Preferably, described sucking disc mechanism quantity is multiple, described multiple sucking disc mechanism, described entrance manipulator multiple move horizontally supporting part, described outlet manipulator multiplely move horizontally supporting part, multiple turning part of described Sheet turning device are arranged side by side respectively.
Preferably, flaps equipment also comprises: the guide rail arranged along sheet material carriage direction, described suction sheet devices slidable fit is in described guide rail.
Preferably, the turning part moving horizontally supporting part and described Sheet turning device of described entrance manipulator and outlet manipulator is polypropylene material.
Preferably, flaps equipment also comprises: control described suction sheet devices, entrance manipulator, outlet manipulator and Sheet turning device carry out corresponding actions control appliance according to setting sequential.
In the technical scheme of the embodiment of the present invention, equipment is when overturning sheet material, less with the contact area of sheet material, rubs less, thus can reduce pollution and damage that sheet material is subject in switching process.Flaps process, by equipment operating, compared to existing technology, can improve the efficiency of flaps operation greatly.
Accompanying drawing explanation
Fig. 1 is the flaps equipment vertical view of the embodiment of the present invention;
Fig. 2 is the U-shaped socket schematic diagram that in the embodiment of the present invention, rotating sheet sent into by sheet material by carrying finger;
Fig. 3 is rotating sheet switching process schematic diagram.
Reference numeral:
1-inhales sheet devices;
2-entrance manipulator;
3-exports manipulator;
4-sucking disc mechanism;
5-sheet material rest area;
6-sheet material;
7-Sheet turning device;
8-driving shaft;
9-carries finger;
10-rotating sheet;
11-U shape socket;
12-guide rail;
13-control appliance;
14-moves horizontally supporting part;
15-turning part.
Embodiment
In order to reduce pollution to sheet surface and damage, improving the efficiency of sheet material being carried out to flaps operation, embodiments providing a kind of flaps equipment.For making the object, technical solutions and advantages of the present invention clearly, by the following examples the present invention is described in further detail.
As shown in Figure 1, embodiments provide a kind of flaps equipment, comprise and inhale sheet devices 1, entrance manipulator 2, outlet manipulator 3 and Sheet turning device 7, wherein:
Inhale sheet devices 1 and comprise at least one sucking disc mechanism 4, inhale sheet devices 1 between sheet material rest area 5 and entrance manipulator 2, and can transport sheet material between outlet manipulator 3 and sheet material rest area 5;
Entrance manipulator 2 and the corresponding each sucking disc mechanism 4 of outlet manipulator 3 have respectively and move horizontally supporting part 14;
Sheet turning device 7 is configured between entrance manipulator 2 and outlet manipulator 3, the each supporting part 14 that moves horizontally comprising driving shaft 8 and corresponding entrance manipulator 2 arranges and can drive the turning part 15 rotated by driven shaft 8, turning part 15 has slot, in the first service position of turning part 15, the supporting part that moves horizontally of entrance manipulator 2 can by slot corresponding for the insertion of sheet material 6 level, in the second service position of turning part 15, the supporting part that moves horizontally of outlet manipulator 3 can by sheet material level taking-up from the slot of correspondence.
In order to realize batch operation, in Fig. 1, sucking disc mechanism 4 quantity is multiple, multiple sucking disc mechanism 4, entrance manipulator 2 multiple move horizontally supporting part, outlet manipulator 3 multiplely move horizontally supporting part, multiple turning part of Sheet turning device 7 are arranged side by side respectively.
This flaps equipment can be applicable to, in silicon solar cell production, carry out turning operation for needing according to technique to silicon chip.It is worth mentioning that, flaps equipment also can be applicable to the upset of other based sheet except silicon chip, is not specifically limited here.
As depicted in figs. 1 and 2, move horizontally supporting part 14 comprise separately and can level retreat at least two carrying fingers 9.Turning part 15 comprises at least two rotating sheets 10 separately, and each rotating sheet 10 offers U-shaped socket 11, and the U-shaped socket 11 of at least two rotating sheets 10 forms the slot of turning part 15.
For each sheet material, move horizontally the quantity of the carrying finger 9 of supporting part 14, and the quantity of the rotating sheet 10 of turning part 15 is not limit, and specifically can determine in conjunction with the dimensions of sheet material.In Fig. 1, move horizontally supporting part 14 and comprise two carrying fingers 9, turning part 15 comprises two rotating sheets 10, and two carry the outside that finger 9 is positioned at two rotating sheets 10.It is worth mentioning that, the structure moving horizontally supporting part 14 and turning part 15 is not limited to this, can adopt any structure realizing above-mentioned functions, and under the prerequisite not producing interference, two carrying fingers 9 also can be positioned at the inner side of two rotating sheets 10.
As shown in Figure 2, in this embodiment, each rotating sheet 10 offers two opposing U-shaped sockets 11, like this, rotating sheet 10 often revolve turnback can receive a sheet material 6, two U-shaped sockets 11 can continuous print receiver sheet 6, thus realize continuous flaps, be conducive to the flaps efficiency of raising equipment.
In a preferred embodiment of the invention, as shown in Figure 2, in the first service position of turning part, the loading end moving horizontally supporting part of entrance manipulator is higher than the lower bottom part of the slot of correspondence, and lower than the upper bottom portion of slot, namely loading end diagram U-shaped socket 11 upper below between.Like this, when sheet material 6 level is inserted in corresponding U-shaped socket by the carrying finger 9 of entrance manipulator, sheet material 6 can not contact with the upper following of U-shaped socket and rub, thus effectively reduces damage and the pollution of sheet material 6.As shown in Figure 3, when turning part overturns, sheet material only under self gravitation effect with the touching below of U-shaped socket.
In like manner, in the second service position of turning part, the loading end moving horizontally supporting part of outlet manipulator higher than the lower bottom part of the slot of correspondence, and lower than the upper bottom portion of slot.When taking out sheet material, sheet material also can not contact with the upper following of U-shaped socket and rub, thus effectively reduces damage and the pollution of sheet material.
Adopt the process that shown in Fig. 1 of the present invention, flaps equipment carries out flaps operation to silicon chip as follows:
Inhale sheet devices 1 and draw multiple silicon chip from sheet material rest area 5.Each sucking disc mechanism 4 of suction sheet devices 1 may correspond to transducer is set, whether being picked up for detecting silicon chip, if there is silicon chip not picked up, can alarm signal be sent, treat manually to search reason and carry out in-situ processing (such as clearing up silicon chip fragment).
Inhaling sheet devices 1 is transported on the carrying finger 9 of entrance manipulator 2 by multiple silicon chip;
Entrance manipulator 2 moves horizontally setting displacement towards Sheet turning device 7, thus is inserted by silicon chip in the U-shaped socket of corresponding rotating sheet 10.Now, silicon chip and rotating sheet 10 contactless.
Sheet turning device 7 drives whole row's rotating sheet 10 to turn over clockwise by driving shaft 8 and turn 90 degrees, and in this process, silicon chip only touches with the bottom of U-shaped socket under self gravitation effect, and the switching process of rotating sheet can refer to shown in Fig. 3.
Initial position return by entrance manipulator 2 dorsad Sheet turning device 7, and outlet manipulator 3 is moved horizontally to tab position towards Sheet turning device 7.
Sheet turning device 7 drives whole row's rotating sheet 10 to continue to turn over clockwise to turn 90 degrees by driving shaft 8, and in this process, silicon chip touches with the bottom of U-shaped socket under self gravitation effect, and finally drops on the carrying finger of outlet manipulator 3.When silicon chip drop on the carrying finger of outlet manipulator 3 upper after, silicon chip and rotating sheet contactless.
Initial position return by outlet manipulator 3 dorsad Sheet turning device 7, inhales sheet devices 1 and moves to outlet manipulator 3 place, draws silicon chip from the carrying finger 9 of outlet manipulator 3 and transports go back to sheet material rest area 5.
Because each rotating sheet 10 has two opposing U-shaped sockets, inhale sheet devices 1, entrance manipulator 2 and still can send into silicon chip to the U-shaped socket of side, place after rotating sheet 10 revolves turnback, therefore, flaps equipment can realize continuous flaps.
Repeat the turning operation that said process can realize justifying silicon chip.
As can be seen from said process, equipment is when overturning sheet material, less with the contact area of sheet material, rubs less, thus can reduce pollution and damage that sheet material is subject in switching process.Flaps process, by equipment operating, compared to existing technology, can improve the efficiency of flaps operation greatly.
As shown in Figure 1, flaps equipment also comprises: the guide rail 12 arranged along sheet material carriage direction, inhales sheet devices 1 slidable fit in guide rail 12.Inhale sheet devices 1 to move along guide rail 12, accurately can control the displacement of inhaling sheet devices 1, thus make the access position of silicon chip on entrance manipulator 2, outlet manipulator 3 more accurate.
In order to reduce the pollution to silicon chip further, preferably, the turning part 15 moving horizontally supporting part 14 and Sheet turning device 7 of entrance manipulator 2 and outlet manipulator 3 is polypropylene material.
In a preferred embodiment of the invention, flaps equipment also comprises: control to inhale sheet devices 1, entrance manipulator 2, outlet manipulator 3 and Sheet turning device 7 carry out corresponding actions control appliance 13 according to setting sequential.Inhale sheet devices, entrance manipulator, outlet manipulator and Sheet turning device and control interoperation by control appliance, automaticity is higher, greatly can improve the efficiency of flaps operation, alleviate the labour intensity of operating personnel.
It is worth mentioning that, in another embodiment of the invention, inhaling sheet devices 1, entrance manipulator 2, outlet manipulator 3 and Sheet turning device 7 also can according to the action respectively of corresponding manual command.
Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (9)
1. a flaps equipment, is characterized in that, comprises and inhales sheet devices, entrance manipulator, outlet manipulator and Sheet turning device, wherein:
Described suction sheet devices comprises at least one sucking disc mechanism, and described suction sheet devices between sheet material rest area and entrance manipulator, and can transport sheet material between outlet manipulator and sheet material rest area;
Described entrance manipulator and the corresponding each sucking disc mechanism of outlet manipulator have respectively and move horizontally supporting part;
Described Sheet turning device is configured between described entrance manipulator and outlet manipulator, the each supporting part that moves horizontally comprising driving shaft and corresponding entrance manipulator arranges and can drive the turning part rotated by driven shaft, turning part has slot, in the first service position of turning part, the supporting part that moves horizontally of described entrance manipulator can by described slot corresponding for the insertion of sheet material level, in the second service position of turning part, the supporting part that moves horizontally of described outlet manipulator can by sheet material level taking-up from the described slot of correspondence.
2. flaps equipment as claimed in claim 1, is characterized in that, described in move horizontally supporting part and to comprise separately and can level at least two carrying fingers of retreating.
3. flaps equipment as claimed in claim 1, it is characterized in that, turning part comprises at least two rotating sheets separately, and each described rotating sheet offers U-shaped socket, and the U-shaped socket of described at least two rotating sheets forms the slot of turning part.
4. flaps equipment as claimed in claim 3, it is characterized in that, each described rotating sheet offers two opposing U-shaped sockets.
5. flaps equipment as claimed in claim 1, is characterized in that,
In the first service position of turning part, the loading end moving horizontally supporting part of described entrance manipulator higher than the lower bottom part of the described slot of correspondence, and lower than the upper bottom portion of described slot;
In the second service position of turning part, the loading end moving horizontally supporting part of described outlet manipulator higher than the lower bottom part of the described slot of correspondence, and lower than the upper bottom portion of described slot.
6. flaps equipment as claimed in claim 1, it is characterized in that, described sucking disc mechanism quantity is multiple, described multiple sucking disc mechanism, described entrance manipulator multiple move horizontally supporting part, described outlet manipulator multiplely move horizontally supporting part, multiple turning part of described Sheet turning device are arranged side by side respectively.
7. flaps equipment as claimed in claim 1, is characterized in that, also comprise: the guide rail arranged along sheet material carriage direction, described suction sheet devices slidable fit is in described guide rail.
8. the flaps equipment as described in any one of claim 1 ~ 7, is characterized in that, the turning part moving horizontally supporting part and described Sheet turning device of described entrance manipulator and outlet manipulator is polypropylene material.
9. flaps equipment as claimed in claim 8, is characterized in that, also comprise: control described suction sheet devices, entrance manipulator, outlet manipulator and Sheet turning device carry out corresponding actions control appliance according to setting sequential.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510217211.5A CN104952974A (en) | 2015-04-30 | 2015-04-30 | Wafer turnover equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510217211.5A CN104952974A (en) | 2015-04-30 | 2015-04-30 | Wafer turnover equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104952974A true CN104952974A (en) | 2015-09-30 |
Family
ID=54167503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510217211.5A Pending CN104952974A (en) | 2015-04-30 | 2015-04-30 | Wafer turnover equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104952974A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102097533A (en) * | 2010-11-29 | 2011-06-15 | 常州亿晶光电科技有限公司 | Silicon wafer transport overturn carrier |
| CN102285204A (en) * | 2011-07-12 | 2011-12-21 | 湖北星聚工业印刷设备有限公司 | Automatic face-overturning device |
| CN202130111U (en) * | 2011-06-15 | 2012-02-01 | 湖南红太阳光电科技有限公司 | Plate overturning device for crystalline silicon solar battery screen print equipment |
| CN202405242U (en) * | 2012-01-13 | 2012-08-29 | 无锡尚德太阳能电力有限公司 | Wafer overturning machine |
| CN102741974A (en) * | 2010-04-30 | 2012-10-17 | 应用材料公司 | Process chambers having shared resources and methods of use thereof |
| CN202987578U (en) * | 2012-11-01 | 2013-06-12 | 浙江天能能源科技有限公司 | Full-automatic battery picker |
| CN203246812U (en) * | 2013-05-15 | 2013-10-23 | 京东方科技集团股份有限公司 | Turnover device |
| CN103848194A (en) * | 2014-01-26 | 2014-06-11 | 桐乡市华杰工业自动化科技有限公司 | Automatic material feeding mechanism |
| CN104011880A (en) * | 2011-11-11 | 2014-08-27 | 佐蒙特股份有限公司 | System and method for assembling a solar cell matrix |
| CN104176471A (en) * | 2014-08-07 | 2014-12-03 | 山东大学 | Cantilever type automatic loading and unloading device and method for stone plate |
-
2015
- 2015-04-30 CN CN201510217211.5A patent/CN104952974A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102741974A (en) * | 2010-04-30 | 2012-10-17 | 应用材料公司 | Process chambers having shared resources and methods of use thereof |
| CN102097533A (en) * | 2010-11-29 | 2011-06-15 | 常州亿晶光电科技有限公司 | Silicon wafer transport overturn carrier |
| CN202130111U (en) * | 2011-06-15 | 2012-02-01 | 湖南红太阳光电科技有限公司 | Plate overturning device for crystalline silicon solar battery screen print equipment |
| CN102285204A (en) * | 2011-07-12 | 2011-12-21 | 湖北星聚工业印刷设备有限公司 | Automatic face-overturning device |
| CN104011880A (en) * | 2011-11-11 | 2014-08-27 | 佐蒙特股份有限公司 | System and method for assembling a solar cell matrix |
| CN202405242U (en) * | 2012-01-13 | 2012-08-29 | 无锡尚德太阳能电力有限公司 | Wafer overturning machine |
| CN202987578U (en) * | 2012-11-01 | 2013-06-12 | 浙江天能能源科技有限公司 | Full-automatic battery picker |
| CN203246812U (en) * | 2013-05-15 | 2013-10-23 | 京东方科技集团股份有限公司 | Turnover device |
| CN103848194A (en) * | 2014-01-26 | 2014-06-11 | 桐乡市华杰工业自动化科技有限公司 | Automatic material feeding mechanism |
| CN104176471A (en) * | 2014-08-07 | 2014-12-03 | 山东大学 | Cantilever type automatic loading and unloading device and method for stone plate |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
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Application publication date: 20150930 |