CN208555334U - A kind of automatic on-line vacuum plasma cleaning machine - Google Patents
A kind of automatic on-line vacuum plasma cleaning machine Download PDFInfo
- Publication number
- CN208555334U CN208555334U CN201820276832.XU CN201820276832U CN208555334U CN 208555334 U CN208555334 U CN 208555334U CN 201820276832 U CN201820276832 U CN 201820276832U CN 208555334 U CN208555334 U CN 208555334U
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- China
- Prior art keywords
- magazine
- claw
- pick
- automatic
- lifting body
- Prior art date
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- Expired - Fee Related
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Abstract
The utility model provides a kind of automatic on-line vacuum plasma cleaning machine, including four material fetching mechanisms, pick-up claw are moved forward and backward the fixed device of mechanism, magazine lifting body and magazine；Four material fetching mechanism is moved forward and backward mechanism with the pick-up claw and connect；The magazine lifting body is connect with the fixed device of the magazine；Four material fetching mechanism, pick-up claw are moved forward and backward the fixed device of mechanism, magazine lifting body and magazine and are fixed on the rack.The beneficial effects of the utility model are that the automatic production line that the utility model connects together feeder, cleaning, blanking reduces personnel and space waste, and stabilization of equipment performance is good, high degree of automation, realizes unmanned workshop；Fragment rate is low, small to wafer contamination, and working efficiency effectively improves.
Description
Technical field
The utility model belongs to part on-line cleaning design field, clear more particularly, to a kind of automatic on-line vacuum plasma
Washing machine.
Background technique
Include multiple processes at present during Electronic products manufacturing, as LED chip cleaning, plating transparent electrode layer, thoroughly
Prescribed electrode figure photoetching etc. requires for chip to be fitted into basket tool in above-mentioned process and is replaced mutually in magazine.It is existing
Have in technology, all habit is operated by the way of artificial, and which is easy to appear percentage of damage height, efficiency big to the pollution of chip
The problems such as low, wasting manpower and material resources.
It would therefore be highly desirable to which those skilled in the art capture above-mentioned technical problem.
Utility model content
Problem to be solved in the utility model is to provide a kind of automatic on-line vacuum plasma cleaning machine, is able to solve above-mentioned
Problem.
In order to solve the above technical problems, the technical solution of the utility model is achieved in that
A kind of automatic on-line vacuum plasma cleaning machine, including four material fetching mechanisms, pick-up claw are moved forward and backward mechanism, magazine top
Rise mechanism and the fixed device of magazine；
Four material fetching mechanisms are moved forward and backward mechanism with pick-up claw and connect；Magazine lifting body is connect with the fixed device of magazine；
Four material fetching mechanisms, pick-up claw are moved forward and backward the fixed device of mechanism, magazine lifting body and magazine and are fixed on the rack.
Preferably, further includes: cleaning box sealing mechanism, cleaning box sealing mechanism include cleaning box sealing jacking cylinder and clear
Wash box sealing compression cylinder, cleaning box seal jacking cylinder and cleaning box sealing compression cylinder respectively with guiding axis connection.
Preferably, four material fetching mechanisms are equipped with pick-up claw, and pick-up claw is made of four sub- pawls of feeding, each sub- pawl of feeding with
One cylinder connection.
Preferably, magazine lifting body is connected to motor, magazine lifting body and guiding axis connection.
The utility model has the advantages and positive effects of:
1) the utility model is structurally reasonable, and stability is good, high degree of automation, reduces space waste, realizes unmanned vehicle
Between.
2) the utility model fragment rate is low, small to wafer contamination, and working efficiency effectively improves.
Detailed description of the invention
Fig. 1 is the utility model plasma cleaner structural representation front view.
Fig. 2 is the utility model plasma cleaner structural representation top view.
Fig. 3 is the utility model plasma cleaner structural representation side view.
Specific embodiment
It should be noted that the feature in the case where not colliding, in the embodiments of the present invention and embodiment
It can be combined with each other.
It elaborates with reference to the accompanying drawing to specific embodiment of the utility model.
An embodiment as the utility model provides a kind of automatic on-line vacuum plasma cleaning machine, including four reclaimers
Structure 1, pick-up claw are moved forward and backward the fixed device 5 of mechanism 2, magazine lifting body 4 and magazine；Four material fetching mechanisms 1 and pick-up claw front and back
Mobile mechanism 2 connects；Magazine lifting body 4 connect 5 with the fixed device of magazine；Four material fetching mechanisms 1, pick-up claw are moved forward and backward mechanism
2, magazine lifting body 4 and the fixed device 5 of magazine are fixed in rack 6.Further include: cleaning box sealing mechanism 3, cleaning box sealing
Mechanism 3 includes cleaning box sealing jacking cylinder and cleaning box seals compression cylinder, and cleaning box seals jacking cylinder and cleaning box is close
Seal compression cylinder respectively with guiding axis connection.Four material fetching mechanisms 1 are equipped with pick-up claw, and pick-up claw is made of four sub- pawls of feeding,
Each sub- pawl of feeding is connect with a cylinder.Magazine lifting body 4 is connected to motor, magazine lifting body and guiding axis connection.
When it is implemented, the taking-up of magazine cleaning part is put into cleaning cabin by four feeding devices 1, pick-up claw is retracted, clearly
It washes box sealing mechanism 3 and is sealed cabin is cleaned, then cleaning part is cleaned, cleaning cabin, feeding are opened after the completion of cleaning
Cleaning is completed part and sends magazine back to by pawl, and magazine declines a lattice, and pick-up claw, which retrieves non-cleaning part and is put into cleaning cabin, to be continued to clean,
Abovementioned steps are repeated until completing the cleaning of entire magazine silicon wafer.
The automatic production line that the utility model connects together feeder, cleaning, blanking reduces personnel and space wave
Take, stabilization of equipment performance is good, high degree of automation, realizes unmanned workshop；Fragment rate is low, small to wafer contamination, and working efficiency has
Effect improves.
It is obvious to a person skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and
And without departing substantially from the spirit or essential attributes of the utility model, it can realize that this is practical new in other specific forms
Type.
Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this
The range of utility model is indicated by the appended claims rather than the foregoing description, it is intended that equally wanting for claim will be fallen in
All changes in the meaning and scope of part are embraced therein.Any appended drawing reference in claim should not be regarded
To limit the claims involved.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (4)
1. a kind of automatic on-line vacuum plasma cleaning machine, it is characterised in that: be moved forward and backward machine including four material fetching mechanisms, pick-up claw
The fixed device of structure, magazine lifting body and magazine；
Four material fetching mechanism is moved forward and backward mechanism with the pick-up claw and connect；The magazine lifting body is fixed with the magazine
Device connection；
Four material fetching mechanism, pick-up claw are moved forward and backward the fixed device of mechanism, magazine lifting body and magazine and are fixed on the rack.
2. a kind of automatic on-line vacuum plasma cleaning machine according to claim 1, it is characterised in that: further include: cleaning
Box sealing mechanism, the cleaning box sealing mechanism includes cleaning box sealing jacking cylinder and cleaning box seals compression cylinder, described
Cleaning box seal jacking cylinder and the cleaning box sealing compression cylinder respectively with guiding axis connection.
3. a kind of automatic on-line vacuum plasma cleaning machine according to claim 1, it is characterised in that: four reclaimer
Structure is equipped with pick-up claw, and the pick-up claw is made of four sub- pawls of feeding, and each sub- pawl of feeding is connect with a cylinder.
4. a kind of automatic on-line vacuum plasma cleaning machine according to claim 2, it is characterised in that: the magazine jacking
Mechanism is connected to motor, the magazine lifting body and the guiding axis connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820276832.XU CN208555334U (en) | 2018-02-27 | 2018-02-27 | A kind of automatic on-line vacuum plasma cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820276832.XU CN208555334U (en) | 2018-02-27 | 2018-02-27 | A kind of automatic on-line vacuum plasma cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208555334U true CN208555334U (en) | 2019-03-01 |
Family
ID=65452989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820276832.XU Expired - Fee Related CN208555334U (en) | 2018-02-27 | 2018-02-27 | A kind of automatic on-line vacuum plasma cleaning machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208555334U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109761003A (en) * | 2019-03-12 | 2019-05-17 | 无锡奥威赢科技有限公司 | Device for transporting objects, material cleaning equipment and method |
-
2018
- 2018-02-27 CN CN201820276832.XU patent/CN208555334U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109761003A (en) * | 2019-03-12 | 2019-05-17 | 无锡奥威赢科技有限公司 | Device for transporting objects, material cleaning equipment and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP02 | Change in the address of a patent holder |
Address after: 523000 Room 101, building 2, No.1, Chibu Road, Zhangmutou town, Dongguan City, Guangdong Province Patentee after: GUANGDONG QITIAN AUTOMATIC INTELLIGENT EQUIPMENT Co.,Ltd. Address before: 523637, building 8, two bamboo street, Sassafras community, Zhangmutou town, Dongguan, Guangdong Patentee before: GUANGDONG QITIAN AUTOMATIC INTELLIGENT EQUIPMENT Co.,Ltd. |
|
| CP02 | Change in the address of a patent holder | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190301 Termination date: 20210227 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |