CN104942964A - Guide roller and ceramic green sheet manufacturing apparatus - Google Patents
Guide roller and ceramic green sheet manufacturing apparatus Download PDFInfo
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- CN104942964A CN104942964A CN201510131778.0A CN201510131778A CN104942964A CN 104942964 A CN104942964 A CN 104942964A CN 201510131778 A CN201510131778 A CN 201510131778A CN 104942964 A CN104942964 A CN 104942964A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/30—Producing shaped prefabricated articles from the material by applying the material on to a core or other moulding surface to form a layer thereon
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Abstract
The invention provides a guide roller capable of effectively improving the film thickness uniformity for a film. The guide roller is used for guiding the transportation of a carrier sheet which is continuously coated with slurry. The guide roller (1) has an axial direction, and the diameter of the guide roller (1) gradually decreases in the axial direction from the top portion with the largest diameter to end portions. The guide roller (1) comprises portions with the diameter change rate being reduced from the end portion to the end portions.
Description
Technical field
The present invention relates to the manufacturing installation of deflector roll (guide roll) and the ceramic green sheet (green sheet) conveying of carrier-pellet guided when the upper coated with ceramic slurry (slurry) of carrier-pellet (carrier sheet) etc.
Background technology
In the past, the monolithic ceramic electronic component such as laminated ceramic capacitor carries out stacked operation to manufacture via to the ceramic green sheet being formed with electrode pattern.As the preparation method of ceramic green sheet, the method that ceramic size is applied directly to carrier-pellet from applicator head is general method.
In following patent document 1, be configured with deflector roll respectively at the upstream side of applicator head and downstream.By deflector roll, while prop carrier sheet, ceramic size is coated on carrier-pellet.Thus, ceramic green sheet is obtained.
In order to realize the stable characteristic of monolithic ceramic electronic component, need the ceramic green sheet with uniform thickness.
In patent document 1, make the external diameter of the roller central portion of the deflector roll of upstream side larger than the external diameter at roller both ends.Thus, when coated with ceramic slurry, the fold of carrier film is stretched.Therefore, the thickness variation part of the striated produced in film is difficult to.
At first technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2012-148517 publication
But, in the method described in patent document 1, there is the situation that the thickness of the above-mentioned axial end of Film Thickness Ratio of the central portion of the axis of the deflector roll in film is large.Therefore, there is the situation that the thickness of film can not be made full and uniform.
In recent years, in order to the miniaturization, high capacity etc. of monolithic ceramic electronic component, the further thin layer of ceramic green sheet advances.Therefore, the thickness homogenising more reliably making film is needed.
Summary of the invention
The object of the invention is to, provide a kind of and effectively can improve the deflector roll of the film thickness uniformity of film and the manufacturing installation of ceramic green sheet.
Deflector roll involved in the present invention is for the deflector roll guided by the conveying of the carrier-pellet of coating coating slurry continuously.Above-mentioned deflector roll has axis, and at this axially, from the top as maximum gauge part to end, diameter diminishes.Comprise from above-mentioned top to the part that the rate of change of above-mentioned end diameter reduces.
Deflector roll involved in the present invention a certain specific in, between the part that the rate of change of above-mentioned top and above-mentioned diameter reduces, comprise from above-mentioned top to the part that the rate of change of the above-mentioned diameter in above-mentioned end increases.In this case, the change of the tension force of carrier-pellet axially can be reduced further.Thereby, it is possible to effectively improve the film thickness uniformity of film.
In other of deflector roll involved in the present invention are specific, there is from above-mentioned top to above-mentioned end part 1, part 2 and the 3rd part, and the axial end of the side, above-mentioned top of above-mentioned part 1 is positioned at above-mentioned top.The rate of change of the diameter axially of above-mentioned part 2 is larger than the rate of change of the diameter axially of above-mentioned part 1 and above-mentioned 3rd part.In this case, the change of the tension force of carrier-pellet axially can be reduced further.Thereby, it is possible to improve the film thickness uniformity of film further.
Deflector roll involved in the present invention another other specific in, axially above-mentioned, the length of above-mentioned part 2 than the length of above-mentioned part 1 and the length of the 3rd part little.In this case, the rate of change of the diameter axially of part 2 becomes large to the impact of thickness.Thereby, it is possible to improve the film thickness uniformity of film further.
Deflector roll involved in the present invention another specific in, the size axially of above-mentioned part 1 be play from above-mentioned top size axially till the axial end of the side, above-mentioned end of above-mentioned 3rd part more than 40% and less than 60%.The size axially of above-mentioned part 2 be play from above-mentioned top size axially till the axial end of the side, above-mentioned end of above-mentioned 3rd part more than 10% and less than 20%.The difference of the diameter of the axial end of the diameter of the axial end of the side, above-mentioned top of above-mentioned part 1 and the side, above-mentioned end of above-mentioned part 1 be the diameter at above-mentioned top more than 0.01% and less than 0.02%.The difference of the diameter of the axial end of the diameter of the axial end of the side, above-mentioned top of above-mentioned part 2 and the side, above-mentioned end of above-mentioned part 2 be the diameter at above-mentioned top more than 0.02% and less than 0.05%.The difference of the diameter of the axial end of the diameter of the axial end of the side, above-mentioned top of above-mentioned 3rd part and the side, above-mentioned end of above-mentioned 3rd part be the diameter at above-mentioned top more than 0% and less than 0.1%.In this case, the film thickness uniformity of film can effectively be improved.
Deflector roll involved in the present invention another other specific in, described top is positioned at axial centre.In this case, the film thickness uniformity of film can effectively be improved.
The manufacturing installation of ceramic green sheet involved in the present invention is for passing through coated with ceramic slurry on a carrier sheet, thus on above-mentioned carrier-pellet, form the manufacturing installation of ceramic green sheet.Manufacturing installation of the present invention possesses: applicator head, and it is at an interarea coated with ceramic slurry of above-mentioned carrier-pellet; With multiple deflector roll, its supporting with the interarea of an above-mentioned interarea opposite side of coated above-mentioned ceramic size above-mentioned carrier-pellet, and the conveying of above-mentioned carrier-pellet is guided.At least one above-mentioned deflector roll has axis, and axially above-mentioned, from the top as maximum gauge part to end, diameter diminishes.Comprise from above-mentioned top to the part that the rate of change of above-mentioned end diameter reduces.In this case, the film thickness uniformity of film can effectively be improved.
Ceramic green sheet involved in the present invention manufacturing installation a certain specific in, between the part that the rate of change of above-mentioned top and above-mentioned diameter reduces, comprise from above-mentioned top to the part that the rate of change of above-mentioned end diameter increases.In this case, the film thickness uniformity of film can effectively be improved.
In other of the manufacturing installation of ceramic green sheet involved in the present invention are specific, there is from above-mentioned top to above-mentioned end part 1, part 2 and the 3rd part, and the axial end of the side, above-mentioned top of above-mentioned part 1 is positioned at above-mentioned top.The rate of change of the diameter axially of above-mentioned part 2 is larger than the rate of change of the diameter axially of above-mentioned part 1 and above-mentioned 3rd part.In this case, the film thickness uniformity of film can be improved further.
Ceramic green sheet involved in the present invention manufacturing installation another other specific in, axially above-mentioned, the length of above-mentioned part 2 than the length of above-mentioned part 1 and the length of the 3rd part little.In this case, the film thickness uniformity of film can be improved further.
In other of the manufacturing installation of ceramic green sheet involved in the present invention is specific, above-mentioned multiple deflector roll has the 1st deflector roll and the 2nd deflector roll.Above-mentioned 1st deflector roll is provided in the upstream side of the above-mentioned applicator head on the throughput direction of above-mentioned carrier-pellet.Above-mentioned 2nd deflector roll is provided in the downstream of the above-mentioned applicator head on the throughput direction of above-mentioned carrier-pellet.Diameter becomes large from above-mentioned end to above-mentioned top, has above-mentioned part 1, part 2 and the 3rd part.The rate of change of the diameter axially of above-mentioned part 2 is larger than the rate of change of the diameter axially of above-mentioned part 1 and above-mentioned 3rd part.In this case, the film thickness uniformity of film can be improved further.
Ceramic green sheet involved in the present invention manufacturing installation another other specific in, the size axially of above-mentioned part 1 be play from above-mentioned top size axially till the axial end of the side, above-mentioned end of above-mentioned 3rd part more than 40% and less than 60%.The size axially of above-mentioned part 2 be play from above-mentioned top size axially till the axial end of the side, above-mentioned end of above-mentioned 3rd part more than 10% and less than 20%.The difference of the diameter of the axial end of the diameter of the axial end of the side, above-mentioned top of above-mentioned part 1 and the side, above-mentioned end of above-mentioned part 1 be the diameter at above-mentioned top more than 0.01% and less than 0.02%.The difference of the diameter of the axial end of the diameter of the axial end of the side, above-mentioned top of above-mentioned part 2 and the side, above-mentioned end of above-mentioned part 2 be the diameter at above-mentioned top more than 0.02% and less than 0.05%.The difference of the diameter of the axial end of the diameter of the axial end of the side, above-mentioned top of above-mentioned 3rd part and the side, above-mentioned end of above-mentioned 3rd part be the diameter at above-mentioned top more than 0% and less than 0.1%.In this case, the film thickness uniformity of film can effectively be improved.
Ceramic green sheet involved in the present invention manufacturing installation another other specific in, described top is positioned at axial centre.In this case, the film thickness uniformity of film can effectively be improved.
Invention effect
According to the present invention, can provide a kind of and effectively can improve the deflector roll of the film thickness uniformity of film and the manufacturing installation of ceramic green sheet.
Accompanying drawing explanation
Fig. 1 is the stereogram of the deflector roll involved by the 1st embodiment of the present invention.
Fig. 2 is the stereogram of the deflector roll prepared to compare.
Fig. 3 represents that the conveying of the deflector roll by preparing to compare to carrier-pellet guides, and is coated in the figure of the relation in the region of the thickness of the film on this carrier-pellet and the width of this carrier film with target film thickness 0.83 μm.
Fig. 4 represents that the conveying of the deflector roll by preparing to compare to carrier-pellet guides, and is coated in the figure of the relation in the region of the thickness of the film on this carrier-pellet and the width of this carrier film with target film thickness 3.17 μm.
Fig. 5 represents to be guided by the conveying of deflector roll to carrier-pellet involved by the 1st embodiment of the present invention, and is coated in the figure of the relation in the region of the thickness of the film on this carrier-pellet and the width of this carrier-pellet with target film thickness 0.83 μm.
Fig. 6 represents to be guided by the conveying of deflector roll to carrier-pellet involved by the 1st embodiment of the present invention, and is coated in the figure of the relation in the region of the thickness of the film on this carrier-pellet and the width of this carrier-pellet with target film thickness 3.17 μm.
Fig. 7 is the schematic diagram of the manufacturing installation of ceramic green sheet involved by one embodiment of the present invention.
Fig. 8 represents to use the manufacturing installation of ceramic green sheet involved by one embodiment of the present invention and the stereogram of an example of monolithic ceramic electronic component that manufactures.
Fig. 9 is the sectional view of the monolithic ceramic electronic component along the C-C line in Fig. 8.
-symbol description-
1 ... deflector roll
2 ... guide portion
2a ... axial centre
3 ... remainder
4 ... the manufacturing installation of ceramic green sheet
5 ... roll out portion
6 ... 1st vacuum furnace (suction roll)
7 ... coated portion
8 ... 1st deflector roll
9 ... applicator head
10 ... 2nd deflector roll
11 ... 2nd vacuum furnace
12 ... drying section
13 ... reeling end
14 ... feed back control system
20 ... monolithic ceramic electronic component
21 ... internal electrode
22 ... multilayered ceramic body
23 ... outer electrode
101 ... deflector roll
102 ... guide portion
Detailed description of the invention
Below, by referring to accompanying drawing, the specific embodiment of the present invention is described, thus makes the present invention cheer and bright.
Fig. 1 is the stereogram of the deflector roll involved by the 1st embodiment of the present invention.
When ceramic size being coated on above-mentioned carrier-pellet while delivery vehicles sheet, deflector roll 1 supports above-mentioned carrier-pellet, and guides conveying.
Deflector roll 1 has the guide portion 2 extended in the axial direction.The width being axially of a size of carrier-pellet of guide portion 2.In guide portion 2, carrier-pellet is directed.In addition, deflector roll 1, from end axially to guide portion 2, has remainder 3.In addition, can the axial integral of deflector roll 1 be also guide portion 2, and not there is remainder 3.
Guide portion 2 has the top as maximum gauge portion.In the present embodiment, top is positioned at axial centre 2a.In the axial direction, towards end from axial centre 2a, there is part 1 A1, part 2 A2 and the 3rd part A3.Part 1 A1, part 2 A2 and the 3rd part A3 are connected in the axial direction.In addition, the end of the side, axial centre 2a portion of part 1 A1 is positioned at axial centre 2a.
The material of deflector roll 1 preferably uses the light-duty material being applicable to High Rotation Speed.Such as, aluminium, CFRP as carbon fiber reinforced plastic can be used.When using aluminium in the material, also can carry out strengthening surface by hard chromium plating etc.
In deflector roll 1, from axial end portion to axial centre 2a, diameter becomes large.That is, in the diameter D3a of axial end of axial centre 2a side of the diameter D2a of axial end of the diameter D1a of the axial end in the axial centre 2a side of part 1 A1, the diameter D1b of the axial end of side, end, the axial centre 2a side of part 2 A2, the diameter D2b of the axial end of side, end, the 3rd part A3 and the diameter D3b of the axial end of side, end, following relation is set up.
D1a＞D1b＝D2a＞D2b＝D3a＞D3b
In addition, because part 1 A1, part 2 A2 and the 3rd part A3 are connected in the axial direction, therefore diameter D1b and diameter D2a is the diameter of same position.Similarly, diameter D2b and D3a is the diameter of same position.The face that part 1 A1, part 2 A2 and the 3rd part A3 are changed by diameter rate of change, that is, surface relative to the angle change of the axis of deflector roll 1 face and be divided.
In addition, part 1 A1 size L1 axially, part 2 A2 size L2 axially and the total of the 3rd part A3 size L3 are axially equal with the half of the axial length of guide portion 2 and length Lt.That is, following relation is set up.
L1+L2+L3＝Lt
In addition, in other words, as the size Lt axially that the length Lt of the half of the axial length of guide portion 2 is from the axial centre 2a of deflector roll 1 to the axial end of the axial end portion side of the 3rd part A3.
The rate of change B3 of the rate of change B2 of the rate of change B1 of the diameter axially of part 1 A1, the diameter axially of part 2 A2 and the diameter axially of the 3rd part A3 can be represented by following formula.
B1＝(D1a-D1b)/L1
B2＝(D2a-D2b)/L2
B3＝(D3a-D3b)/L3
The invention is characterized in, the rate of change B2 of the diameter axially of part 2 A2 is larger than the rate of change B3 of the rate of change B1 of the diameter axially of part 1 A1 and the diameter axially of the 3rd part A3.That is, following relation is met.
B2 > B1 and B2 > B3
That is, deflector roll 1 from axial centre 2a towards above-mentioned end from part 2 A2 to the 3rd part A3, comprise diameter rate of change reduce part.In addition, between the part that deflector roll 1 reduces at the rate of change of axial centre 2a and diameter, from part 1 A1 to part 2 A2, the part that the rate of change comprising diameter increases.
The rate of change B1 of the diameter axially of part 1 A1 can be also 0, does not namely tilt.The rate of change B3 of the diameter axially of the 3rd part A3 can be also 0, does not namely tilt.
In the present embodiment, owing to having above-mentioned feature structure, therefore, it is possible to improve the film thickness uniformity of film.Below its reason is described.
The direction vertical with the throughput direction of carrier-pellet is set to width.In addition, in the present embodiment, the axis of deflector roll 1 and the above-mentioned width of carrier-pellet consistent.
When use roll out portion, reeling end and deflector roll carry out delivery vehicles sheet, the tension force of throughput direction is affixed to carrier film.If the tension force of throughput direction is affixed to carrier-pellet, then the tension force of the width end of the above-mentioned carrier-pellet of warp tension ratio of the width central portion of above-mentioned carrier-pellet is little.
Known to applying, the thickness of the film at the position that tension force is large easily diminishes, and the thickness of the film at the position that tension force is little easily becomes large.That is, the thickness of the width central portion of carrier film easily becomes large, and the thickness of the width end of carrier-pellet easily diminishes.
To this, as mentioned above, in patent document 1, from the axial end portion of deflector roll to axial centre 2a, increase the diameter of deflector roll.Thus, the difference of the size of the width central portion of carrier-pellet and the tension force of width end diminishes.
Fig. 2 is the stereogram of the deflector roll prepared to compare.
In deflector roll 101, from the axial end portion of guide portion 102 to axial centre, diameter becomes large.In addition, from axial end portion to axial centre, the rate of change of diameter is axially constant, is 0.05%.
As deflector roll 101, only become large from axial end portion to axial centre diameter, the raising of film thickness uniformity is insufficient.The thickness of the film of the width central portion of carrier-pellet easily becomes large, and the trend that the thickness of the film of the width end of carrier-pellet is easily little still remains.
Fig. 3 represents that the conveying of the deflector roll by preparing to compare to carrier-pellet guides, and is coated in the figure of the relation in the region of the thickness of the film on this carrier-pellet and the width of this carrier film with target film thickness 0.83 μm.Fig. 4 represents that the conveying of the deflector roll by preparing to compare to carrier-pellet guides, and is coated in the figure of the relation in the region of the thickness of the film on this carrier-pellet and the width of this carrier-pellet with target film thickness 3.17 μm.In Fig. 3 and Fig. 4, region T1 and region T9 represents that, near the width two ends of above-mentioned carrier-pellet, region T5 represents near the width central authorities of above-mentioned carrier-pellet.
As shown in Figure 3 and 4, from the width end of carrier-pellet to width center, the gradient that thickness becomes large is made like.Therefore, even if use the conveying of deflector roll 101 to carrier-pellet guide and apply, the uniform film thickness making film is also difficult to.In addition, owing to forming above-mentioned thickness gradient, the mean value of the thickness of the film of the width of carrier-pellet therefore only can be made consistent with target film thickness.Therefore, it is possible to what become the thickness near target film thickness is the part of the width of carrier-pellet.Such as, in Fig. 3 and Fig. 4, only have region T2 and region T7 etc. can become thickness near desired value.
On the other hand, in the present embodiment, from the axial end portion of deflector roll 1 to axial centre 2a, not only the diameter of deflector roll becomes large, also makes the rate of change of the diameter axially of deflector roll 1 different according to the difference at position.That is, the rate of change B2 of the diameter axially of above-mentioned part 2 A2 is larger than the rate of change B3 of the rate of change B1 of the diameter axially of above-mentioned part 1 A1 and the diameter axially of above-mentioned 3rd part A3.Thereby, it is possible to more reduce the change of the tension force of carrier-pellet axially.Therefore, it is possible to improve the film thickness uniformity of film further.
In addition, preferably the rate of change B3 of the diameter axially of the 3rd part A3 is larger than the rate of change B1 of the diameter axially of part 1 A1.That is, following relation is preferably met.
B3＞B1
In this case, the rate of change B2 of the diameter axially of part 2 A2 becomes large to the impact of thickness.Thus, the film thickness uniformity on the width of coated film is on a carrier sheet further improved.
For the length of the various piece of deflector roll 1, the size L1 axially of preferred part 1 A1 is larger than the size L2 axially of part 2 A2.In addition, the size L3 axially of best 3rd part A3 is larger than the size L2 axially of part 2 A2.That is, in following relation, preferably at least one party is met.
L1＞L2
L3＞L2
In this case, the rate of change B2 of the diameter axially of part 2 A2 becomes large to the impact of thickness.Thus, the film thickness uniformity on the width of coated film on a carrier sheet improves further.
More preferably the size L1 axially of part 1 A1 is, deflector roll 1 from axial centre 2a play size Lt axially till the axial end of the axial end portion side of the 3rd part more than 40% and less than 60%.In addition, the size L2 axially of best part 2 A2 is, deflector roll 1 from axial centre 2a play size Lt axially till the axial end of the axial end portion side of the 3rd part more than 10% and less than 20%.Thus, above-mentioned film thickness uniformity is further improved.
The size L2 axially of part 2 A2 also can be infinitely close to 0, and surface also can be infinitely close to 90 degree relative to the angle of inclination of axis.
For the diameter of the various piece of deflector roll 1, the difference of the diameter D1b of the axial end of the diameter D1a of the axial end of the axial centre 2a side of preferred part 1 A1 and the axial end portion side of part 1 be the diameter Dc of axial centre 2a more than 0.01% and less than 0.02%.In addition, the difference of the diameter D2b of the axial end of the diameter D2a of the axial end of the axial centre 2a side of best part 2 A2 and the axial end portion side of part 2 be the diameter Dc of axial centre 2a more than 0.02% and less than 0.05%.In addition, the difference of the diameter D3b of the axial end of the diameter D3a of the axial end of the axial centre 2a side of best 3rd part A3 and the axial end portion side of the 3rd part be the diameter Dc of axial centre 2a more than 0% and less than 0.1%.In addition, for the diameter of the 3rd part, also in the axial direction difference can be set.Thereby, it is possible to improve the film thickness uniformity on the width of coated film on a carrier sheet further.
In addition, except the 1st, the 2nd, the 3rd part A1, A2, A3, deflector roll 1 can also comprise the 4th part A4.The diameter rate of change of the 4th part A4 can be identical with the diameter rate of change of any one of non-conterminous 1st, the 2nd, the 3rd part A1, A2, A3, also can be different from the diameter rate of change of any one.
So far, as explanation of the present invention, axial centre 2a is positioned to the top of deflector roll 1, and the shape between axial centre 2a and end is illustrated, but top also can not be positioned at axial centre 2a.In this case, the present invention can be suitable for too.
Fig. 5 represents to use the conveying of deflector roll to carrier-pellet of the 1st embodiment involved in the present invention to guide, and is coated in the figure of the relation in the region of the thickness of the film on this carrier-pellet and the width of this carrier-pellet with target film thickness 0.83 μm.Fig. 6 represents to use the conveying of deflector roll to carrier-pellet of the 1st embodiment involved in the present invention to guide, and is coated in the figure of the relation in the region of the thickness of the film in this carrier film and the width of this carrier-pellet with target film thickness 3.17 μm.In Fig. 5 and Fig. 6, region T1 and region T9 represents that, near the width two ends of above-mentioned carrier film, region T5 represents near the width central authorities of above-mentioned carrier-pellet.
According to Fig. 5 and Fig. 6, from the width end of carrier-pellet to width center, be not made like the gradient that thickness becomes large.In the present embodiment, in any one party of target film thickness 0.83 μm and 3.17 μm, can both be thickness close to target film thickness in the width entirety of carrier-pellet.
Such as, when using the deflector roll prepared to compare, be more than-0.43 μm and less than+0.27 μm relative to the film thickness difference of target film thickness 3.17 μm.On the other hand, be more than-0.10 μm in the present embodiment and less than+0.04 μm.Like this, by using the deflector roll 1 of present embodiment, effectively film thickness uniformity can be improved.
Below, the manufacturing installation of the ceramic green sheet involved by one embodiment of the present invention is described.
Fig. 7 is the schematic diagram of the manufacturing installation of the ceramic green sheet involved by an embodiment represented in the present invention.
The manufacturing installation 4 of ceramic green sheet passes through coated with ceramic slurry on carrier-pellet Z and makes it dry, forms ceramic green sheet.
In the present embodiment, carrier-pellet Z is made up of PETG.In addition, the material of carrier-pellet Z is not particularly limited in above-mentioned.Such as, the resin molding etc. be made up of polyethylene, polypropylene can also be used.
In addition, in the present embodiment, use the barium titanate comprised as dielectric ceramics as the ceramic size of ceramic component.In addition, the material of ceramic size is not specially limited.Such as, the ferrite system pottery of magnetic pottery, the lead zirconate titanate etc. as piezoelectric ceramic can be also used as.
The manufacturing installation 4 of ceramic green sheet has the portion of rolling out 5.Carrier film Z is sent by from rolling out portion 5.In the present embodiment, roll out portion 5 to be made up of scroll attachment.In addition, roll out portion 5 and be not particularly limited to said structure.
The downstream rolling out portion 5 is provided with coated portion 7.Coated portion 7 has applicator head 9.By applicator head 9, ceramic size is applied to an interarea of carrier-pellet Z.
In coated portion 7, be equipped with the 1st deflector roll 8 at the upstream side of applicator head 9, be equipped with the 2nd deflector roll 10 in the downstream of applicator head 9.1st deflector roll 8 and the 2nd deflector roll 10 are from the interarea prop carrier sheet Z of the contrary side of the interarea being coated with the side of ceramic size with carrier-pellet Z.Therefore, by the 1st deflector roll 8 and the 2nd deflector roll 10, the conveying of carrier-pellet Z is directed.
In addition, at the upstream side of coated portion 7, the 1st vacuum furnace 6 is equipped.In addition, in the downstream of coated portion 7, the 2nd vacuum furnace 11 is equipped.The tension force of the carrier-pellet Z at coated portion 7 place is controlled by the 1st vacuum furnace 6 and the 2nd vacuum furnace 11.In addition, with roll out portion 5 and drying section described later 12 place carrier film Z tension force independently, the mentioned strain at coated portion 7 place is controlled.
More specifically, the rotary speed of the 1st vacuum furnace 6 and the 2nd vacuum furnace 11 is controlled by feed back control system 14.Between the 1st vacuum furnace 6 and the rotary speed of the 2nd vacuum furnace 11, small speed difference is set.Controlled by feed back control system 14 by above-mentioned speed difference, thus the tension force of the carrier film Z at coated portion 7 place is controlled.
In the downstream of the 2nd vacuum furnace 11, be provided with drying section 12.The ceramic size be applied on carrier film Z is dried during being transferred in drying section 12.Thus, carrier-pellet Z forms ceramic green sheet.In addition, the structure of drying section 12 is not specially limited.Such as, the drying oven etc. of heated air circulation type can also be used.
The downstream of drying section 12 is provided with reeling end 13.The carrier-pellet Z being formed with ceramic green sheet is wound by reeling end 13.In the present embodiment, reeling end 13 is made up of scroll attachment.In addition, reeling end 13 is not specially limited in said structure.
In the present embodiment, by using above-mentioned deflector roll 1 at least any one party in the 1st deflector roll 8 and the 2nd deflector roll 10, thus film thickness uniformity can be improved as described above.Preferably only deflector roll 1 is used to the 2nd deflector roll 10.When only to the 2nd deflector roll 10 employ in the 1st embodiment deflector roll 1, the thickness of film is difficult to by left and right such as the making precision of deflector roll.
Below, to employ deflector roll 1 of the present invention and ceramic green sheet manufacturing installation 4, the manufacture method of the monolithic ceramic electronic component 20 shown in Fig. 8 and Fig. 9 is described.In addition, Fig. 8 represents the stereogram using the manufacturing installation of ceramic green sheet involved by one embodiment of the present invention and an example of manufactured monolithic ceramic electronic component.Fig. 9 is the sectional view of the monolithic ceramic electronic component along the C-C line in Fig. 8.
First, the modulation of ceramic size is carried out.Specifically, ceramic powders, adhesive and solvent etc. are mixed with the compounding ratio of regulation, form ceramic size thus.
Next, ceramic green sheet is formed.Use the manufacturing installation 4 of the above-mentioned ceramic green sheet shown in Fig. 7, being supported by deflector roll 1 and coated with ceramic slurry continuously on carrier-pellet Z carry, by making coated ceramic size dry, thus making ceramic green sheet.
Next, master slice is formed.Specifically, by using silk screen print method or woodburytype etc., according to the mode of the pattern with regulation, conductive paste is printed in ceramic green sheet, thus the master slice of conductive pattern ceramic green sheet being provided with regulation is formed in.In the formation of conductive pattern being printed in ceramic green sheet, also can use the sheet manufacturing installation forming conductive pattern while supporting ceramic green sheet by above-mentioned deflector roll 1.Or, also can with ceramic green sheet respectively, while being supported by above-mentioned deflector roll 1, conductive pattern is printed in carrier-pellet, afterwards that conductive pattern is overlapping with by the ceramic green sheet that makes respectively.
Next, carrying out overlapping master slice according to the rule of regulation, by crimping between master slice, thus making female duplexer.Next, be broken as ranks shape by cutting off or cut off female duplexer and obtain duplexer chip, firing duplexer chip.Thus, the internal electrode 21 shown in Fig. 8 and Fig. 9 and multilayered ceramic body 22 is obtained.On the surface of multilayered ceramic body 22, apply and fire conductive paste, implementing plating etc., form outer electrode 23.As described above, monolithic ceramic electronic component 20 is manufactured.
In addition, although be illustrated method ceramic size being coated on continuously carrier-pellet, the present invention also can be applicable to the method that the pulp-like material beyond to ceramic sizes such as such as metal pastes applies.
Claims (13)
1. a deflector roll, it is for guiding by the conveying of the carrier-pellet of coating coating slurry continuously,
This deflector roll has axis, and at this axially, from the top as maximum gauge part to end, diameter diminishes,
This deflector roll comprises from described top to the part that the rate of change of described end diameter reduces.
2. deflector roll according to claim 1, wherein,
Between the part that the rate of change of described top and described diameter reduces, comprise from described top to the part that the rate of change of diameter described in described end increases.
3. deflector roll according to claim 2, wherein,
There is from described top to described end part 1, part 2 and the 3rd part, and the axial end of the side, described top of described part 1 is positioned at described top,
The rate of change of the diameter axially of described part 2 is larger than the rate of change of the diameter axially of described part 1 and described 3rd part.
4. deflector roll according to claim 3, wherein,
Axially described, the length of described part 2 than the length of described part 1 and the length of the 3rd part little.
5. deflector roll according to claim 3, wherein,
The size axially of described part 1 be play from described top size axially till the axial end of the side, described end of described 3rd part more than 40% and less than 60%,
The size axially of described part 2 be play from described top size axially till the axial end of the side, described end of described 3rd part more than 10% and less than 20%,
The difference of the diameter of the axial end of the diameter of the axial end of the side, described top of described part 1 and the side, described end of described part 1 be the diameter at described top more than 0.01% and less than 0.02%,
The difference of the diameter of the axial end of the diameter of the axial end of the side, described top of described part 2 and the side, described end of described part 2 be the diameter at described top more than 0.02% and less than 0.05%,
The difference of the diameter of the axial end of the diameter of the axial end of the side, described top of described 3rd part and the side, described end of described 3rd part be the diameter at described top more than 0% and less than 0.1%.
6. the deflector roll according to any one of Claims 1 to 5, wherein,
Described top is positioned at axial centre.
7. a manufacturing installation for ceramic green sheet, it for passing through coated with ceramic slurry on a carrier sheet, thus forms ceramic green sheet on described carrier-pellet, and the manufacturing installation of described ceramic green sheet possesses:
Applicator head, it is at an interarea coated with ceramic slurry of described carrier-pellet; With
Multiple deflector roll, its supporting with the interarea of a described interarea opposite side of coated described ceramic size described carrier-pellet, and the conveying of described carrier-pellet is guided,
Described at least one, deflector roll has axis, and at this axially, from the top as maximum gauge part to end, diameter diminishes,
Deflector roll described at least one comprises from described top to the part that the rate of change of described end diameter reduces.
8. the manufacturing installation of ceramic green sheet according to claim 7, wherein,
Between the part that the rate of change of described top and described diameter reduces, comprise from described top to the part that the rate of change of described end diameter increases.
9. the manufacturing installation of ceramic green sheet according to claim 8, wherein,
From described top to described end, there is part 1, part 2 and the 3rd part, and the axial end of the side, described top of described part 1 is positioned at described top,
The rate of change of the diameter axially of described part 2 is larger than the rate of change of the diameter axially of described part 1 and described 3rd part.
10. the manufacturing installation of ceramic green sheet according to claim 9, wherein,
Axially described, the length of described part 2 than the length of described part 1 and the length of the 3rd part little.
The manufacturing installation of 11. ceramic green sheets according to any one of claim 7 ~ 10, wherein,
Described multiple deflector roll has the 1st deflector roll and the 2nd deflector roll,
Described 1st deflector roll is provided in the upstream side of the described applicator head on the throughput direction of described carrier-pellet,
Described 2nd deflector roll is provided in the downstream of the described applicator head on the throughput direction of described carrier-pellet,
Diameter becomes large from described end to described top,
There is described part 1, described part 2 and described 3rd part,
The rate of change of the diameter axially of described part 2 is larger than the rate of change of the diameter axially of described part 1 and described 3rd part.
The manufacturing installation of 12. ceramic green sheets according to any one of claim 7 ~ 11, wherein,
The size axially of described part 1 be play from described top size axially till the axial end of the side, described end of described 3rd part more than 40% and less than 60%,
The size axially of described part 2 be play from described top size axially till the axial end of the side, described end of described 3rd part more than 10% and less than 20%,
The difference of the diameter of the axial end of the diameter of the axial end of the side, described top of described part 1 and the side, described end of described part 1 be the diameter at described top more than 0.01% and less than 0.02%,
The difference of the diameter of the axial end of the diameter of the axial end of the side, described top of described part 2 and the side, described end of described part 2 be the diameter at described top more than 0.02% and less than 0.05%,
The difference of the diameter of the axial end of the diameter of the axial end of the side, described top of described 3rd part and the side, described end of described 3rd part be the diameter at described top more than 0% and less than 0.1%.
The manufacturing installation of 13. ceramic green sheets according to any one of claim 7 ~ 12, wherein,
Described top is positioned at axial centre.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
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| JP2014061544 | 2014-03-25 | ||
| JP2014-061544 | 2014-03-25 | ||
| JP2015-012995 | 2015-01-27 | ||
| JP2015012995A JP6311620B2 (en) | 2014-03-25 | 2015-01-27 | Guide roll and ceramic green sheet manufacturing equipment |
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| CN104942964A true CN104942964A (en) | 2015-09-30 |
| CN104942964B CN104942964B (en) | 2018-03-30 |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06178961A (en) * | 1992-12-15 | 1994-06-28 | Matsushita Electric Ind Co Ltd | Coating applicator for magnetic recording medium |
| JPH11333360A (en) * | 1998-05-25 | 1999-12-07 | Tdk Corp | Smoothing device for supporting body and coating device using the same |
| JP2002036332A (en) * | 2000-07-24 | 2002-02-05 | Toshiba Mach Co Ltd | Molding roll for manufacturing thin film sheet |
| JP2003026358A (en) * | 2001-07-13 | 2003-01-29 | Sony Corp | Film tape and tape winding device |
| CN101394936A (en) * | 2006-03-08 | 2009-03-25 | 富士胶片株式会社 | Coating apparatus |
| JP2009300504A (en) * | 2008-06-10 | 2009-12-24 | Nichias Corp | Ceramic roller |
| CN202021901U (en) * | 2011-05-03 | 2011-11-02 | 广东生益科技股份有限公司 | Metering roll |
| JP2012148517A (en) * | 2011-01-20 | 2012-08-09 | Murata Mfg Co Ltd | Method for producing ceramic green sheet and production device therefor |
-
2015
- 2015-03-24 CN CN201510131778.0A patent/CN104942964B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06178961A (en) * | 1992-12-15 | 1994-06-28 | Matsushita Electric Ind Co Ltd | Coating applicator for magnetic recording medium |
| JPH11333360A (en) * | 1998-05-25 | 1999-12-07 | Tdk Corp | Smoothing device for supporting body and coating device using the same |
| JP2002036332A (en) * | 2000-07-24 | 2002-02-05 | Toshiba Mach Co Ltd | Molding roll for manufacturing thin film sheet |
| JP2003026358A (en) * | 2001-07-13 | 2003-01-29 | Sony Corp | Film tape and tape winding device |
| CN101394936A (en) * | 2006-03-08 | 2009-03-25 | 富士胶片株式会社 | Coating apparatus |
| JP2009300504A (en) * | 2008-06-10 | 2009-12-24 | Nichias Corp | Ceramic roller |
| JP2012148517A (en) * | 2011-01-20 | 2012-08-09 | Murata Mfg Co Ltd | Method for producing ceramic green sheet and production device therefor |
| CN202021901U (en) * | 2011-05-03 | 2011-11-02 | 广东生益科技股份有限公司 | Metering roll |
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