CN104931825A - Integrated apparatus used for optical and electrical measurement and vacuum monitoring of device - Google Patents
Integrated apparatus used for optical and electrical measurement and vacuum monitoring of device Download PDFInfo
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- CN104931825A CN104931825A CN201510323769.1A CN201510323769A CN104931825A CN 104931825 A CN104931825 A CN 104931825A CN 201510323769 A CN201510323769 A CN 201510323769A CN 104931825 A CN104931825 A CN 104931825A
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Abstract
The invention belongs to the vacuum optical and electrical measurement technical field and relates to an integrated apparatus used for optical and electrical measurement and vacuum monitoring of a device. The main body of the integrated apparatus is a gas-tight shell; and the shell is provided with a gas check back valve, an electrical test probe, a transparent window, a negative pressure meter and the like. With the integrated apparatus of the invention adopted, the device can be effectively stored in a vacuum manner through a transition bin or vacuum pump of a glove box; the device in a vacuum environment can be transported conveniently; the electrical test probe and the transparent window installed on the shell allow vacuum optical and electrical testing on the device which is stored inside; and the pressure condition of the interior of the shell can be monitored in real time through the negative pressure meter.
Description
Technical field
The invention belongs to vacuum optics, electrical measurement technical field, be specifically related to a kind of integrated equipment for carrying out optics and electrical testing to device.
Background technology
When the photoelectric characteristic of research function electron device (such as photoelectric cell, memory device, piezoelectric device, thermo-electric device etc.), measuring atmosphere is a storage and measuring condition that must consider.A lot of new material, especially organic material are all easier to be rotten under water oxygen, and this causes the life-span of a lot of device and atmosphere to have direct relation.In addition, its optical/electrical character usually also has relevant with the atmospheric condition of test.In research in the past, generally carried out the impact of exclusion of water oxygen by the performance of measuring element in glove box (inert gas atmosphere such as nitrogen, argon gas), but glove box limited space, this brings a lot of restriction to the measurement of device.The more important thing is in addition, because glove box size is too large, and it keeps the function of atmosphere must maintain by the continuous running of the outside pump housing, therefore cannot be used for keeping exclusion of water oxygen in transportation.Although the principal ingredient of last glove box is the inert gases such as nitrogen argon gas, a small amount of water oxygen wherein contained still can affect the stability of device performance, cannot realize measuring equipment under vacuum.Along with the progress of technology, also occurred that some run the novel device of measuring element optical/electrical performance under vacuum, but these equipment are usually comparatively heavy, and the same continuous running relying on external power and the pump housing maintains vacuum, is therefore difficult to maintain vacuum in transportation.
The present invention, by installing gas non-return valve, electrical testing probe and transparency window on a gas-tight housing, obtains one and can carry out effective vacuum storage to device, light vacuum transport, and the integrated equipment that can be used for vacuum optics, electrical testing.Particularly, the present invention can realize following functions: carry out vacuum storage effectively by the transitional storehouse of glove box or vacuum pump to device; The device held under vacuum conditions can lightly transport; Be arranged on electrical testing probe on housing and transparency window allows to carry out vacuum optics and electrical testing to the device of internal reservoir simultaneously; Can the air pressure situation of Real-Time Monitoring enclosure interior by vacuum table.
Summary of the invention
The object of the present invention is to provide a kind of integrated equipment for vacuum optics, electrical testing that can carry out effective vacuum storage to device, facilitate vacuum transport.
The integrated equipment for vacuum optics, electrical testing that the present invention proposes, its main body is a gas-tight housing (see figure 1), the side of this housing is mounted with gas check valve (also known as retaining valve, check (non-return) valve), this gas check valve can extract to vacuum environment by the transitional storehouse of glove box (antechamber) or the vacuum pump be connected, and effectively maintains inner housing vacuum state under atmospheric environment; The lower inside of housing is provided with the slot can placed for device under test, and the side of housing has one can the airtight chamber lid of switch, and device under test is placed in the housing by this airtight chamber lid; On housing, corresponding to the front of device under test, corresponding to region and the back side, region is respectively equipped with printing opacity form, allows the incidence of ambient light, or by the outgoing of device under test luminescence, thus implements device under test and carry out optical property measurement; The electrical testing probe for detecting device under test and stationary installation thereof is provided with in housing, an aviation plug (or other electrical interface) is provided with in a side of housing, the electrode of device under test is connected with by with the probe fixture that device under test matches, be configured aviation plug (or other electrical interface) on housing to derive, and adaptive different electricity performance measurement equipment as required.
Integrated equipment of the present invention also can arrange vacuum table, for measuring, the pressure condition of monitoring equipment inside.
The present invention owing to having given up the pump housing for maintaining vacuum system, then relies on non-return valve maintenance enclosure interior vacuum, is beneficial to very much and carries.
Accompanying drawing explanation
Fig. 1 is integrated equipment structural diagrams of the present invention.
Embodiment
Conveniently understand, below in conjunction with real data, describe once concrete equipment use example.
In the equipment use example that this is concrete, use brass as the material of gas-tight housing, quartz glass is as the high window on housing.Brass, as the metal of electric conductivity excellence, effectively can shield outside electromagnetic interference.The high light transmittance of quartz glass then effectively can ensure outgoing and the incidence of light.Housing has one can switch chamber lid, for putting into and taking out device under test.In addition housing is also provided with MX12 type 4 stitch vacuum aircraft plug, for input and output electrical signal.Select the AKH06A-02S type non-return valve of CKT brand to maintain enclosure interior vacuum.With fluorine rubber ring sealing between above-mentioned part (housing, quartz glass, chamber lid and aviation plug), and by suitable bolted.
Device under test is of a size of 15mm*15mm*1.1mm, has eight electrical lead, can be positioned over enclosure interior by above-mentioned chamber lid.Enclosure interior is designed with suitable slot for settling above-mentioned device under test, also having a plastic frame body, for being fixed with the CSR-6J probe tip of Huarong board CSR6-2S type probe set and Huarong board, thus mating with eight electrode positions of device under test.With enameled wire welding between probe set and the electrode of aviation plug, the electrode of aviation plug is connected with device under test electrode.
Adaptive gas-tight housing is of a size of 35mm*32mm*25mm, and gross weight of equipment (comprising brass housing, quartz glass, aviation plug, non-return valve, probe and adaptor parts thereof, and device under test) is less than 200g, is beneficial to very much the transport of device.By the mechanical pump be connected with non-return valve, device interior can maintain the vacuum environment of 1Pa.Disconnect mechanical pump, under equipment is placed on atmospheric environment, after 24h, device interior vacuum tightness still can maintain below 0.1 atmospheric pressure.
Claims (2)
1. the integrated equipment for device optical and electrical measurement and vacuum monitoring, it is characterized in that main body is a gas-tight housing, the side of this housing is mounted with gas check valve, this gas check valve can extract to vacuum environment by the transitional storehouse of glove box or connected vacuum pump, and effectively maintains inner housing vacuum state under atmospheric environment; The lower inside of housing is provided with the slot can placed for device under test, and the side of housing has one can the airtight chamber lid of switch, and device under test is placed in the housing by this airtight chamber lid; On housing, corresponding to the front of device under test, corresponding to region and the back side, region is respectively equipped with printing opacity form, allows the incidence of ambient light, or by the outgoing of device under test luminescence, thus implements device under test and carry out optical property measurement; The electrical testing probe for detecting device under test and stationary installation thereof is provided with in housing, an aviation plug or other electrical interface is provided with in a side of housing, the electrode of device under test is connected with by with the probe fixture that device under test matches, be configured aviation plug on housing or other electrical interface derive, and adaptive different electricity performance measurement equipment as required.
2. integrated equipment according to claim 1, is characterized in that also being provided with vacuum table, for measuring, the pressure condition of monitoring equipment inside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510323769.1A CN104931825A (en) | 2015-06-13 | 2015-06-13 | Integrated apparatus used for optical and electrical measurement and vacuum monitoring of device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510323769.1A CN104931825A (en) | 2015-06-13 | 2015-06-13 | Integrated apparatus used for optical and electrical measurement and vacuum monitoring of device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104931825A true CN104931825A (en) | 2015-09-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510323769.1A Pending CN104931825A (en) | 2015-06-13 | 2015-06-13 | Integrated apparatus used for optical and electrical measurement and vacuum monitoring of device |
Country Status (1)
| Country | Link |
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| CN (1) | CN104931825A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105973967A (en) * | 2016-07-15 | 2016-09-28 | 中国科学院福建物质结构研究所 | Atmosphere controllable field effect transistor (FET) sealed testing device for plurality of devices |
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| CN2351756Y (en) * | 1998-11-05 | 1999-12-01 | 中国科学院上海技术物理研究所 | Flat vacuum sample chamber capable of simultaneously measuring light transmission and photoelectric response characteristic |
| CN1238552A (en) * | 1999-01-12 | 1999-12-15 | 张亚利 | Auxiliary device for testing electronic microscope |
| EP1039389A1 (en) * | 1999-03-01 | 2000-09-27 | Agilent Technologies Inc | Method and apparatus for adaptively learning test error sources to reduce the total number of test measurements required in real-time |
| US6590378B2 (en) * | 2000-12-04 | 2003-07-08 | Samsung Electronics Co., Ltd. | Real time parameter monitoring apparatus for high voltage chamber in semiconductor wafer processing system |
| CN200962065Y (en) * | 2006-09-06 | 2007-10-17 | 浙江博德汽车电子股份有限公司 | Detection device of inlet branch pipe pressure sensor |
| CN102479661A (en) * | 2010-11-30 | 2012-05-30 | 中国科学院大连化学物理研究所 | Composite ionization source of vacuum ultraviolet photoionization and chemical ionization used in mass spectrometry |
| CN102983064A (en) * | 2012-11-07 | 2013-03-20 | 上海交通大学 | Vacuum equipment with ultraviolet light/ ozone surface treatment and electrical property in-situ test integrated |
| CN103786713A (en) * | 2012-10-26 | 2014-05-14 | 爱三工业株式会社 | Failure diagnosis apparatus of brake system and failure diagnosis method of brake system |
-
2015
- 2015-06-13 CN CN201510323769.1A patent/CN104931825A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2351756Y (en) * | 1998-11-05 | 1999-12-01 | 中国科学院上海技术物理研究所 | Flat vacuum sample chamber capable of simultaneously measuring light transmission and photoelectric response characteristic |
| CN1238552A (en) * | 1999-01-12 | 1999-12-15 | 张亚利 | Auxiliary device for testing electronic microscope |
| EP1039389A1 (en) * | 1999-03-01 | 2000-09-27 | Agilent Technologies Inc | Method and apparatus for adaptively learning test error sources to reduce the total number of test measurements required in real-time |
| US6590378B2 (en) * | 2000-12-04 | 2003-07-08 | Samsung Electronics Co., Ltd. | Real time parameter monitoring apparatus for high voltage chamber in semiconductor wafer processing system |
| CN200962065Y (en) * | 2006-09-06 | 2007-10-17 | 浙江博德汽车电子股份有限公司 | Detection device of inlet branch pipe pressure sensor |
| CN102479661A (en) * | 2010-11-30 | 2012-05-30 | 中国科学院大连化学物理研究所 | Composite ionization source of vacuum ultraviolet photoionization and chemical ionization used in mass spectrometry |
| CN103786713A (en) * | 2012-10-26 | 2014-05-14 | 爱三工业株式会社 | Failure diagnosis apparatus of brake system and failure diagnosis method of brake system |
| CN102983064A (en) * | 2012-11-07 | 2013-03-20 | 上海交通大学 | Vacuum equipment with ultraviolet light/ ozone surface treatment and electrical property in-situ test integrated |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105973967A (en) * | 2016-07-15 | 2016-09-28 | 中国科学院福建物质结构研究所 | Atmosphere controllable field effect transistor (FET) sealed testing device for plurality of devices |
| CN105973967B (en) * | 2016-07-15 | 2018-06-15 | 中国科学院福建物质结构研究所 | A kind of controllable more device field-effect transistor sealing test devices of atmosphere |
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Application publication date: 20150923 |