CN104896325A - Polarization light irradiation apparatus - Google Patents

Polarization light irradiation apparatus Download PDF

Info

Publication number
CN104896325A
CN104896325A CN201510091614.XA CN201510091614A CN104896325A CN 104896325 A CN104896325 A CN 104896325A CN 201510091614 A CN201510091614 A CN 201510091614A CN 104896325 A CN104896325 A CN 104896325A
Authority
CN
China
Prior art keywords
illumination device
light source
polarized light
reflecting plate
principal reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510091614.XA
Other languages
Chinese (zh)
Inventor
山田一吉
川锅保文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwasaki Denki KK
Original Assignee
Iwasaki Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwasaki Denki KK filed Critical Iwasaki Denki KK
Publication of CN104896325A publication Critical patent/CN104896325A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
    • F21S2/005—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction of modular construction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/60—Cooling arrangements characterised by the use of a forced flow of gas, e.g. air
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00—Reflectors for light sources
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00—Reflectors for light sources
    • F21V7/0025—Combination of two or more reflectors for a single light source
    • F21V7/0033—Combination of two or more reflectors for a single light source with successive reflections from one reflector to the next or following
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V9/00—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters
    • F21V9/14—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters for producing polarised light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Polarising Elements (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Liquid Crystal (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)

Abstract

There is provided a polarized light illumination device for further improving uneven illumination intensity. The polarized light illumination device (1) comprises : linear light source (4); slot-like main mirror (5),for gathering the light of light source (4),; and a grate polarizer (16), for linearly polarizing the illumnated light. The polarized light illumination device (1) illuminates polarized light to the object (W), wherein a assistant mirro (6) is provided near the light emitting end (P)of light source (4) extending from the light source (4) to the grate polarizer (16).

Description

Polarized light illumination device
Technical field
The present invention relates to the polarized light illumination device possessing the light source of wire, the principal reflection mirror of channel-shaped and wire-grid polarizer.
Background technology
Known following polarized light illumination device, accommodates the light source of wire in the principal reflection mirror of channel-shaped, is made the light polarization of this light source by the wire-grid polarizer of the emitting side being arranged on principal reflection mirror, thus irradiates irradiation object.In this polarized light illumination device, the illumination of the length direction of light source is that the center relative to light source near the end of light source sharply declines, and uneven illumination is larger.
So, there is following ultraviolet lamp (for example, referring to patent document 1), in order to compensate uneven illumination, and the auxiliary mirror of reflection towards the light outside the length direction of light source being arranged on outside the both ends of light source.In addition, also there is the UV, visible light light irradiation device (for example, referring to patent document 2) of the below same auxiliary mirror being arranged on the basket surrounding principal reflection mirror.
Prior art document
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2008-221170 publication
Patent document 2: Japanese Unexamined Patent Publication 2012-138348 publication
Summary of the invention
The problem to be solved in the present invention
But, if just above-mentioned structure is in the past applied to polarized light illumination device simply, then can not compensate uneven illumination fully.
The present invention completes in view of the above circumstances, its objective is the polarized light illumination device providing and can improve uneven illumination further.
For the method for dealing with problems
In order to achieve the above object, polarized light illumination device of the present invention possesses: the light source of wire; The principal reflection mirror of channel-shaped, it carries out optically focused to the light of this light source; And wire-grid polarizer, it is for making the light linear polarization of irradiation, described polarized light illumination device irradiates polarised light to irradiation object, it is characterized in that, is provided with the auxiliary mirror extended near described wire-grid polarizer from described light source near the luminous end of described light source.
In such a configuration, described auxiliary mirror also can be made to arrange at the range tilt of 0 ° ~ 20 ° relative to the vertical of described irradiation object thing.
In such a configuration, also can be arranged to as follows, between described light source and described wire-grid polarizer, possess wavelength selecting filter, described auxiliary mirror segmentation is configured between described light source and described wavelength selecting filter and between described wavelength selecting filter and described wire-grid polarizer.
In such a configuration, also described auxiliary mirror can be formed as follows, described auxiliary mirror is divided into top auxiliary mirror and bottom auxiliary mirror, when the length of the described irradiation object thing of luminous length on the length direction of described light source of described light source, the lower end of described bottom auxiliary mirror is configured on the position of more than the length of described irradiation object thing, when the described length of described irradiation object thing is longer than in the luminescence of described light source, the angle configurations of described bottom auxiliary mirror is become to be different from the angle of described top auxiliary mirror.
In such a configuration, also can make to flow in the spatial portion of cooling air between the front end of described principal reflection mirror and described wavelength selecting filter and the spatial portion between described wavelength selecting filter and described wire-grid polarizer.
In such a configuration, described auxiliary mirror also can be configured to, the base end part of described light source side is formed with the size of the section covering described principal reflection mirror, and on described base end part, be provided with the notch that described light source is run through, and form the leading section of described wire-grid polarizer side with size more than the section A/F of at least described principal reflection mirror.
In such a configuration, also the angle of inclination of this auxiliary mirror can be adjusted to described auxiliary mirror centered by the intersection point of the axle of this auxiliary mirror and described light source.
In such a configuration, the thermal source cooling path of described light source and described principal reflection mirror and the polarizer cooling path between described wavelength selecting filter and described polarizer unit can also be made independently.In addition, also can described light source and described principal reflection mirror be accommodated in basket, described wire-grid polarizer is configured in the light injection opening portion of basket, the partition wall separated described light source and described principal reflection mirror and described basket is set in the inside of described basket, described wavelength selecting filter is configured in the mode blocking this opening at the opening of described partition wall, make the inner side supply described light source of cooling air to the opening of described partition wall and the thermal source cooling path of described principal reflection mirror, and it is independent to the polarizer cooling path of the described polarizer unit of the spatial portion supply cooling air between described wavelength selecting filter and described wire-grid polarizer.
Invention effect
According to the present invention, owing to being provided with the auxiliary mirror extended near wire-grid polarizer from light source near the luminous end of light source, therefore, it is possible to improve uneven illumination further.
Accompanying drawing explanation
Fig. 1 is the front view schematically showing the polarized light illumination device that the first embodiment of the present invention relates to.
Fig. 2 is the side view representing polarized light illumination device.
Fig. 3 is the figure of the structure representing polarizer unit, and wherein, (A) is top view, and (B) is sectional view.
Fig. 4 is the sectional view representing polarized light illumination device.
Fig. 5 is the schematic diagram being amplified the end of lamp about polarized light illumination device and represent.
Fig. 6 is the curve map of the relation represented between the angle of auxiliary reflecting plate and the gross energy of workpiece.
Fig. 7 is the curve map of the relation represented between the angle of auxiliary mirror and illumination, and wherein, (A) represents overall, and (B) amplifies the part Y representing (A).
Fig. 8 is the curve map of the relation represented between the length of auxiliary mirror and illumination.
Fig. 9 is the front view schematically showing the polarized light illumination device that the second embodiment of the present invention relates to.
Figure 10 is the side view representing polarized light illumination device.
The schematic diagram that the end of lamp is amplified about polarized light illumination device and represented by Figure 11.
Figure 12 is the sectional view representing polarized light illumination device.
Figure 13 is the curve map of the relation represented between the length of auxiliary mirror and illumination.
Figure 14 is that the end of lamp is amplified and the schematic diagram of expression by the polarized light illumination device related to about the 3rd embodiment of the present invention.
Description of reference numerals
1, 100, 200: polarized light illumination device, 4: lamp (light source), 5: principal reflection plate (principal reflection mirror), 6, 106: auxiliary reflecting plate (auxiliary mirror), 7: wavelength selecting filter, 10: polarizer unit, 16: wire-grid polarizer, 20A: base end part, 20B: leading section, 21: notch, 106A: reflecting plate (top auxiliary mirror) is assisted on top, 106B: reflecting plate (bottom auxiliary mirror) is assisted in bottom, K: section A/F, M: luminous long, P: luminous end, S1, S2: spatial portion, W: workpiece (irradiation object thing).
Detailed description of the invention
Below, with reference to accompanying drawing, embodiments of the present invention are described.
< first embodiment >
Fig. 1 is the front view schematically showing the polarized light illumination device that the first embodiment relates to, and Fig. 2 is the side view representing polarized light illumination device.Fig. 3 is the figure of the structure representing polarizer unit, Fig. 3 (A) is top view, and Fig. 3 (B) is sectional view.Fig. 4 is the sectional view representing polarized light illumination device.
As shown in Figures 1 and 2, polarized light illumination device 1 irradiates polarised light to carry out the light aligning device of light orientation to the optical alignment film of workpiece (irradiation object thing) W of tabular or band shape.In polarized light illumination device 1, possess in the basket 3 that lower surface has light injection opening portion 3A: as the lamp 4 of light source, principal reflection plate (principal reflection mirror) 5 and auxiliary reflecting plate (auxiliary mirror) 6, and possess polarizer unit 10 at light injection opening portion 3A.These principal reflection plates 5 and auxiliary reflecting plate 6 form the speculum of polarized light illumination device 1.
Workpiece W is transferred along direct acting direction X by straight-moving mechanism (not shown), thus by immediately below polarized light illumination device 1, workpiece W exposes under polarized light when passing through immediately below polarized light illumination device 1, and optical alignment film is oriented thus.In the present embodiment, workpiece W is formed as being rectangular-shaped when overlooking, and to make the short side direction of the workpiece W mode consistent with direct acting direction X be transferred.
Basket 3 is configured in the top position leaving predetermined distance from workpiece W.Lamp 4 is discharge lamp, the ultraviolet lamp of the straight pipe type (bar-shaped) that the length more than use is at least equal with the length of the long side direction with workpiece W extends.
Principal reflection plate 5 to be sections be oval and cylinder concave surface (channel-shaped) speculum that is that extends along the long side direction of lamp 4, the light of principal reflection plate 5 pairs of lamps 4 penetrates opening portion 3A from light after carrying out optically focused and irradiates towards polarizer unit 10.
It immediately below lamp 4 is rectangular-shaped opening portion when overlooking that light injection opening portion 3A is formed in, and it is consistent with the long side direction (axis) of lamp 4 that light injection opening portion 3A is arranged to long side direction.
Be provided with in the inner side of light injection opening portion 3A to through the wavelength selecting filter 7 selected of the wavelength of light, by this wavelength selecting filter 7, polarized light illumination device 1 irradiates the light of desired wavelength.
In addition, in the present embodiment, although be provided with wavelength selecting filter 7, when lamp 4 self can penetrate the light of desired wavelength, also wavelength selecting filter 7 can be omitted.
Light injection opening portion 3A is provided with polarizer unit 10, blocks light injection opening portion 3A by this polarizer unit 10.Polarizer unit 10 is configured between wavelength selecting filter 7 and workpiece W, makes irradiation light polarization on the workpiecew.By the optical alignment film of this polarizing light irradiation at workpiece W, thus this optical alignment film is oriented.
As shown in Figure 3, polarizer unit 10 possesses: multiple units polarizer unit 12; And framework 14, it is arranged in row by horizontally-arranged for these unit polarizer unit 12.Framework 14 is the frameworks of constituent parts polarizer unit 12 being carried out to the tabular connecting configuration.Unit polarizer unit 12 possesses the wire-grid polarizer (polarizer) 16 being formed as substantially rectangular tabular.
In the present embodiment, constituent parts polarizer unit 12 with the mode supporting-line grid polarizer 16 making line direction A parallel with direct acting direction X, and is set up in the mode that the direction being orthogonal to this line direction A is consistent with the orientation B of wire-grid polarizer 16.
Wire-grid polarizer 16 is one of linear polarization device, is formed with grid on the surface of substrate.As mentioned above, lamp 4 is bar-shaped, and thus, the light of various angle incides wire-grid polarizer 16, but utilizes wire-grid polarizer 16, even the light of oblique incidence, also can carry out linear polarization and make this light transmission.
Wire-grid polarizer 16 is can be supported in its normal direction on unit polarizer unit 12 mode that inching is carried out in the direction of polarization axle C1 as turning cylinder and at rotation in surface.That is, multiple wire-grid polarizer 16 is mutually can be configured across interval the mode that inching is carried out in the direction of polarization axle C1.For all unit polarizer unit 12, the polarization axle C1 of wire-grid polarizer 16 is carried out inching in the mode of aliging with the irradiation reference direction of regulation, to obtain in the whole length of the long axis direction of polarizer unit 10 polarization axle C1 thus by the polarised light alignd accurately, thus high-quality smooth orientation can be realized.Framework 14 is fixed on by screw element (fixed cell) 19 in the upper end of unit polarizer unit 12 and lower end, and thus, the controlled wire-grid polarizer 16 of polarization axle C1 is configured in framework 14 regularly.
In addition, as shown in Figure 4, polarized light illumination device 1 possesses the cooling path 30 cooled lamp 4, principal reflection plate 5, wavelength selecting filter 7 and polarizer unit 10.Cooling path 30 is connected with the air blast (not shown) of conveying cooling air.
In basket 3, the next door 31 surrounding the side of lamp 4 and principal reflection plate 5 is arranged to vacate gap delta 1 ground with basket 3.Next door 31 has opening 31A lamp 4 and principal reflection plate 5 exposed downwards in bottom, and has air vent 31B on top.
Cooling air is fed in the gap delta 1 between next door 31 and basket 3, and flow in the spatial portion S1 between the front end 5B and wavelength selecting filter 7 of principal reflection plate 5, and flow in principal reflection plate 5 and as the space R in the next door 31 in the outside of principal reflection plate 5, thus the optics of lamp 4, principal reflection plate 5, wavelength selecting filter 7 and polarizer unit 10 is cooled.These opticses are cooled thus the cooling air that uprises of temperature from be formed in principal reflection plate 5 top through hole 5A and flow from the space R in the next door, lateral 31 of principal reflection plate 5, and to discharge outside next door 31.Polarized light illumination device 1 also can be configured to make cooling air at cooling path 30 Inner eycle, also can be configured to externally discharge carrying out cooled cooling air to optics.
In this polarized light illumination device 1, the illumination of the long side direction of lamp 4 sharply declines relative to the center of lamp 4 near the both ends Q of lamp 4, and uneven illumination is larger.In order to compensate uneven illumination, there is following method: by the auxiliary mirror reflected towards the light outside the long side direction of lamp is arranged on to lamp both ends outside or the below of basket.By outside the both ends that auxiliary mirror are arranged on lamp or the structure of the below of basket, uneven illumination can not be compensated fully.
So, in the present embodiment, near luminous end (electrode) P of lamp 4, be provided with auxiliary reflecting plate 6.In addition, in the following description, the distance between luminous end P is described as the long M of luminescence.
Fig. 5 is the schematic diagram being amplified by the end Q of lamp 4 about polarized light illumination device 1 and represent.
Auxiliary reflecting plate 6 is arranged between lamp 4 and workpiece W, by being reflected towards workpiece W by the light appeared outside workpiece W, thus compensates the Illumination Distribution of the irradiation according to lamp 4 and principal reflection plate 5.
Specifically, in this polarized light illumination device 1, when only utilizing lamp 4 and principal reflection plate 5 to irradiate, as shown in Figures 1 and 5, in the region D corresponding with the both ends Q of lamp 4, illumination is not enough.In this polarized light illumination device 1, formed auxiliary reflecting plate 6 in the mode of the illumination deficiency being compensated this region D by reverberation.
Specifically, auxiliary reflecting plate 6 has a pair end plate 20 at the two ends in the face of lamp 4, and inner wall surface thereof is configured as reflecting surface.The cardinal extremity 8A of auxiliary reflecting plate 6 is positioned near the luminous end P of lamp 4.
Specifically, when the long M of luminescence is longer than the length N of workpiece W, on the length direction of lamp 4, between the position preferred luminous end P and the end W1 of workpiece W of cardinal extremity 8A, when cardinal extremity 8A is configured in the outside of luminous end P, the position within the position of cardinal extremity 8A is preferably 30mm from luminous end P.When the long M of luminescence is shorter than the length N of workpiece W, the position within the position of cardinal extremity 8A is preferably 30mm from luminous end P, the position of front end 8B needs the outside of the end W1 being configured in workpiece W.In the present embodiment, luminous long M is longer than the length N of workpiece W, and the position of cardinal extremity 8A is configured in luminous end P.
The length L of auxiliary reflecting plate 6 is set to be at least front end more than the 5B of principal reflection plate 5.Fig. 5 (A) represents situation about to be configured in by front end 8B on the position identical with the front end 5B of principal reflection plate 5, and Fig. 5 (B) represents situation about to be configured in by front end 8B near polarizer unit 10.
As shown in Figure 2, the base end part 20A of end plate 20 is formed with the size covering the section of principal reflection plate 5, is formed with the notch 21 that lamp 4 is run through at this base end part 20A.Notch 21, towards the top 5C opening of principal reflection plate 5, inserts lamp 4 from opening portion 21A to notch 21.The leading section 20B of end plate 20 is formed as the size roughly equal with the section A/F K of principal reflection plate 5.
Based on this structure, a pair end plate 20 towards above-mentioned zone D reverberation, and carrys out the illumination of compensatory zone D by this reverberation.
In addition, adjust the tilt angle theta of end plate 20 in the mode of irradiating reverberation to the region D that should compensate illumination, thus, improve the uniformity.
The wavelength selecting filter 7 of present embodiment utilizes and forms through absorption-type filter or the filter that formed by multilayer film, and this wavelength selecting filter 7 has following characteristic (angular characteristics), and incident angle more tilts, and more reduces through light quantity.Further, according to the angular characteristics of this wavelength selecting filter 7, light beam shadow surface irradiated through wavelength selecting filter 7, its obliquely through the ratio of light more, the light quantity on shadow surface is fewer.Thus, in the present embodiment, as shown in Fig. 5 (C), auxiliary reflecting plate 6 arranges end plate 20 obliquely in the mode expanded to 8B side, front end from cardinal extremity 8A side, thus make the angle of reverberation close to the vertical (normal direction) of workpiece, reduce the minimizing through light quantity thus.Specifically, end plate 20 centered by the intersection point of the axis (axle) with lamp 4 (being luminous end P in the present embodiment), relative to the vertical gradient angle θ of workpiece W.
Fig. 6 is the curve map of the relation represented between the tilt angle theta of auxiliary reflecting plate 6 and the gross energy of workpiece.In figure 6, transverse axis represents the length of workpiece W, the increase ratio of light quantity in the workpiece W when longitudinal axis represents relative to not auxiliary reflecting plate 6.In Fig. 6, luminous end P (electrode) position of the positional representation lamp 4 of amplitude 1600mm.In addition, in Fig. 6, result when line E1 represents that the tilt angle theta of auxiliary reflecting plate 6 is 0 °, result when line E2 represents that the tilt angle theta of auxiliary reflecting plate 6 is 5 °, result when line E3 represents that the tilt angle theta of auxiliary reflecting plate 6 is 10 °, result when line E4 represents that the tilt angle theta of auxiliary reflecting plate 6 is 15 °, result when line E5 represents that the tilt angle theta of auxiliary reflecting plate 6 is 20 °, result when E6 represents that the tilt angle theta of auxiliary reflecting plate 6 is 25 °.
As shown in Figure 6, according to the angular characteristics of wavelength selecting filter 7, there is the structure of tilt angle theta in auxiliary reflecting plate 6, its overall light quantity increases.In the present embodiment, tilt angle theta is near 5 °, it is maximum that its light quantity increases.In addition, if tilt angle theta becomes large, then the increase ratio of light quantity reduces, and there is the tendency of the effect reduction arranging auxiliary reflecting plate 6.
Fig. 7 is the curve map of the relation represented between the angle of inclination of auxiliary mirror 6 and illumination, and Fig. 7 (A) represents overall, and Fig. 7 (B) is the part Y of enlarged drawing 7 (A) and represents.In the figure 7, transverse axis represents the excentric distance axially of workpiece W, and the longitudinal axis represents the illumination ratio when illumination at the center of long for luminescence M being set as 100%.In addition, luminous long M is 1600mm, and luminous end P (electrode) position of lamp 4 is corresponding with the position near 800mm.In addition, in Fig. 7, line F1 represents result when not arranging auxiliary reflecting plate and only arrange principal reflection plate, result when line F2 represents that the tilt angle theta of auxiliary reflecting plate is 0 °, result when line F3 represents that the tilt angle theta of auxiliary reflecting plate is 5 °, result when line F4 represents that the tilt angle theta of auxiliary reflecting plate is 10 °, result when line F5 represents that the tilt angle theta of auxiliary reflecting plate is 15 °, result when line F6 represents that the tilt angle theta of auxiliary reflecting plate is 20 °.
As shown in Figure 7, about illumination ratio, on the position that principal reflection plate 5 and 80% are only set, when the tilt angle theta of auxiliary reflecting plate 6 is 0 ° ~ 10 °, illumination ratio is enhanced into about 95%, on the position only arranging principal reflection plate 5 and 70%, when tilt angle theta is 0 ° ~ 10 °, illumination ratio is enhanced into more than 90%.On the position only arranging principal reflection plate 5 and 60%, when tilt angle theta is 5 ° ~ 20 °, illumination ratio is enhanced into more than 80%.
In addition, according to the length L of auxiliary reflecting plate 6, illumination is than also changing.
Fig. 8 is the curve map of the relation represented between the length of auxiliary reflecting plate 6 and illumination.In fig. 8, transverse axis represents the excentric distance axially of workpiece W, and the longitudinal axis represents the illumination ratio when illumination at the center of P being set as 100%.In addition, Fig. 8 represents the result when tilt angle theta of auxiliary reflecting plate 6 being set as 5 °.In Fig. 8, line G1 represents result when not arranging auxiliary reflecting plate 6 and only arrange principal reflection plate 5, the result when length of the auxiliary reflecting plate 6 that line G2 represents from the front end 5B of principal reflection plate 5 is 0mm, the result that line G3 is the length of the auxiliary reflecting plate 6 represented from the front end 5B of principal reflection plate 5 when being 60mm, the result that line G4 is the length of the auxiliary reflecting plate 6 represented from the front end 5B of principal reflection plate 5 when being 120mm.
As shown in Figure 8, make auxiliary reflecting plate 6 more close to polarizer unit 10, more can increase the area of substantial reflecting surface, therefore, it is possible to improve illumination ratio.
That is, in polarized light illumination device 1, preferably tilt angle theta is located in the scope of 0 ° ~ 20 °, and preferably makes the front end 8B of auxiliary reflecting plate 6 be positioned near polarizer unit 10.In the present embodiment, tilt angle theta is set as 5 °, and the length of the auxiliary reflecting plate 6 be set as from the front end 5B of principal reflection plate 5 by the length L of auxiliary reflecting plate 6 becomes 120mm.
In the present embodiment, even if reflecting plate 6 will be assisted to extend near polarizer unit 10 from lamp 4, as shown in Figure 4, the both sides due to lamp 4 will not arrange auxiliary reflecting plate 6, therefore, between the front end 5B and polarizer unit 10 of principal reflection plate 5, form spatial portion S1.By making cooling air flow in this spatial portion S1, effectively optics can be cooled as mentioned above.
As described above, according to the present embodiment, near the luminous end P of lamp 4, be provided with the auxiliary reflecting plate 6 extended near polarizer unit 10 from lamp 4.According to this structure, by the reverberation of auxiliary reflecting plate 6, the illumination that can compensate the region D corresponding with the both ends Q of lamp 4 is not enough, therefore, it is possible to improve the uniformity of workpiece W.
In addition, according to the present embodiment, auxiliary reflecting plate 6 is configured to vertical relative to workpiece W at the range tilt of 0 ° ~ 20 °.When wavelength selecting filter 7 be through absorption-type filter or by the filter that multilayer film is formed, according to the angular characteristics of wavelength selecting filter 7, the angle being irradiated to the light on shadow surface is limited.According to this structure, even wavelength selecting filter 7 is through absorption-type filter, even or the filter be made up of multilayer film, also can reduce the minimizing through light quantity.
In addition, according to the present embodiment, be configured to cooling air is flowed in the spatial portion S between the front end 5B and wavelength selecting filter 7 of principal reflection plate 5, therefore, it is possible to cool down lamp 4, principal reflection plate 5, auxiliary reflecting plate 6, wavelength selecting filter 7 and polarizer unit 10 effectively.
In addition, according to the present embodiment, auxiliary reflecting plate 6 forms the base end part 20A of lamp 4 side with the size covering the section of principal reflection plate 5, arranges the notch 21 that lamp 4 is run through at base end part 20A.According to this structure, such as with auxiliary reflecting plate 6 is arranged on compared with the situation of the below of lamp 4, the area of the reflecting surface of auxiliary reflecting plate 6 can be increased, therefore, it is possible to increase the light quantity that can reflect on the workpiecew.
In addition, the leading section 20B of polarizer unit 10 side is formed with the size of at least section more than the A/F K of principal reflection plate 5.According to this structure, can reflect more towards the light outside the end Q of lamp 4, therefore, it is possible to increase the light quantity that can reflect on the workpiecew.
< second embodiment >
In the first embodiment, wavelength selecting filter 7 and polarizer unit 10 are closely configured, and in this second embodiment, wavelength selecting filter 7 and polarizer unit 10 are configured discretely.In addition, in this second embodiment, for the part identical with polarized light illumination device 1, use identical Reference numeral and omit the description.
Fig. 9 is the front view schematically showing the polarized light illumination device that the second embodiment relates to, and Figure 10 is the side view representing polarized light illumination device.Figure 11 is the schematic diagram being amplified the end of lamp 4 about polarized light illumination device and represent.
In polarized light illumination device 100, as shown in Fig. 9 ~ Figure 11, wavelength selecting filter 7 and polarizer unit 10 are configured significantly discretely.
Figure 12 is the sectional side view representing polarized light illumination device 100.
In addition, as shown in figure 12, polarized light illumination device 100 separately possesses: thermal source cooling path 130, and it is for cool down lamp 4, principal reflection plate 5 and wavelength selecting filter 7; And polarizer cooling path 140, its cooling wavelength selecting filter 7 and polarizer unit 10.Thermal source cooling path 130 and polarizer cooling path 140 are connected to the air-blast device (not shown) of conveying cooling air.
The next door 31 of the side surrounding lamp 4 and principal reflection plate 5 is provided with in basket 3.Next door 31 has opening 31A lamp 4 and principal reflection plate 5 exposed downwards in bottom, and has air vent 31B on top.In addition, between basket 3 and next door 31, be provided with the partition wall 32 these separated, next door 31 and partition wall 32 are vacated gap delta 2 and are configured, and basket 3 and partition wall 32 are vacated gap delta 3 and be configured.Partition wall 32 has the opening 32A exposed by wavelength selecting filter 7 downwards.
In thermal source cooling path 130, cooling air is fed in the gap delta 2 between next door 31 and partition wall 32, and flow in the spatial portion S2 between the front end 5B and wavelength selecting filter 7 of principal reflection plate 5, and flow in principal reflection plate 5 and as the space R in the next door 31 in the outside of principal reflection plate 5, thus lamp 4, principal reflection plate 5 and wavelength selecting filter 7 are cooled.The cooling air that temperature uprises by cooling these lamps 4, principal reflection plate 5 and wavelength selecting filter 7 from be formed in principal reflection plate 5 top through hole 5A or flow from the space R in the next door, lateral 31 of principal reflection plate 5, and outside next door 31 discharge.
In polarizer cooling path 140, cooling air is fed into the side of the gap delta 3 between basket 3 and partition wall 32, and flow in the spatial portion S3 between wavelength selecting filter 7 and polarizer unit 10, thus wavelength selecting filter 7 and polarizer unit 10 are cooled.Now, the cooling air flow in spatial portion S3 flows in the mode orthogonal relative to the long side direction of lamp 4.Polarizer unit 10 to be cooled and the cooling air that temperature uprises is discharged from the opposite side of the gap delta 3 between basket 3 and partition wall 32.
Polarized light illumination device 100 also can be configured to make cooling air respectively at thermal source cooling path 130 and polarizer cooling path 140 Inner eycle, also externally can discharge carrying out cooled cooling air to optics.
Figure 13 is the curve map of the relation represented between the length of auxiliary reflecting plate 106 and illumination.In fig. 13, transverse axis represents the excentric distance axially of workpiece W, and the longitudinal axis represents the illumination ratio when illumination at the center of long for luminescence M being set as 100%.In addition, Figure 13 represents the result when tilt angle theta of auxiliary reflecting plate 6 being set as 5 °.In Figure 13, line H1 represents result when not arranging auxiliary reflecting plate 106 and only arrange principal reflection plate 5, line H2 represent auxiliary reflecting plate 6 have until the length of wavelength selecting filter 7 when result, line H3 represent auxiliary reflecting plate 6 have until the length of polarizer unit 10 when result.
As shown in figure 13, illumination, than on the position only arranging principal reflection plate 5 and 70%, if having until the length of polarizer unit 10, then can reach more than 90%, and when have until the length of wavelength selecting filter 7, rest on 85%.That is, even if when wavelength selecting filter 7 and polarizer unit 10 configure discretely, according to the length L of auxiliary reflecting plate 106, illumination ratio changes.
So as shown in figure 11, the auxiliary reflecting plate 106 of present embodiment makes front end 8B be positioned near polarizer unit 10.Further specifically, auxiliary reflecting plate 106 is divided into the top between lamp 4 and wavelength selecting filter 7 to assist reflecting plate 106A and the bottom between wavelength selecting filter 7 and polarizer unit 10 assist reflecting plate 106B and are configured.Assist on top on the base end part 120A of reflecting plate 106A and be provided with notch 21.Top assists the leading section 120B of reflecting plate 106A to be formed with the size that the section A/F K with principal reflection plate 5 is roughly equal.Bottom assists reflecting plate 106B to be formed with the width roughly equal with leading section 120B.
Top assists reflecting plate 106A in the same manner as auxiliary reflecting plate 6, preferably tilt angle theta is set as, in the scope of 0 ° ~ 20 °, in the present embodiment, tilt angle theta being set as 5 °.Top assists the lower end 106A1 of reflecting plate 106A to be positioned near wavelength selecting filter 7.
Do not need bottom to assist reflecting plate 106B to be set to and assist with top the tilt angle theta that reflecting plate 106A is identical, be configured to the arbitrary angle comprising vertical.In the present embodiment, the long M of luminescence due to lamp 4 is shorter than the length of workpiece W, therefore, to make bottom assist reflecting plate 106B to tilt from lamp 4 side to the mode that polarizer unit 10 side expands, and the lower end of reflecting plate 106B (front end 8B) is assisted bottom to be configured on the position of more than the length N of workpiece W.In the present embodiment, the tilt angle theta of reflecting plate 106A is assisted on top to be also set as 5 °.Bottom assists the upper end 106B1 of reflecting plate 106B to be positioned near wavelength selecting filter 7.
As described above, according to the present embodiment, realize the effect equal with the first embodiment.
In addition, according to the present embodiment, auxiliary reflecting plate 106 has following structure, and segmentation is configured between lamp 4 and wavelength selecting filter 7 and between wavelength selecting filter 7 and wire-grid polarizer 16.According to this structure, the area of the reflecting surface of auxiliary reflecting plate 106 can be guaranteed as possible, therefore, the light quantity that can reflect on the workpiecew can be increased.
In addition, according to the present embodiment, auxiliary reflecting plate 106 has following structure, being divided into top assists reflecting plate 106A and bottom to assist reflecting plate 106B, when the long M of the luminescence of lamp 4 is shorter than the length of the workpiece W on the length direction of lamp 4, the front end 8B of reflecting plate 106B is assisted bottom to be configured on the position of more than the length of workpiece W.According to this structure, the area of the reflecting surface of auxiliary reflecting plate 106 can be guaranteed as possible, therefore, the light quantity that can reflect on the workpiecew can be increased.
In addition, according to the present embodiment, make to flow in the spatial portion S2 of cooling air between the front end 5B and wavelength selecting filter 7 of principal reflection the plate 5 and spatial portion S3 between wavelength selecting filter 7 and polarizer unit 10.According to this structure, can not only cool lamp 4, principal reflection plate 5, wavelength selecting filter 7 and polarizer unit 10, even if when the long M of the luminescence of lamp 4 is shorter than the length of workpiece W, also can irradiate in the whole length of workpiece W.
In addition, in the present embodiment, assist reflecting plate 106A and bottom to assist reflecting plate 106B although auxiliary reflecting plate 106 is divided into top, also can be formed with the patchhole inserting wavelength selecting filter 7 on an auxiliary reflecting plate.
< the 3rd embodiment >
In the first embodiment, the situation long M of the luminescence of lamp 4 being shorter than to the length of workpiece W is illustrated, and in the third embodiment, the situation of the long M of the luminescence of lamp 4 being longer than to the length of workpiece W is described.In addition, in the third embodiment, for the part identical with polarized light illumination device 100, use identical Reference numeral and omit the description.
Figure 14 is that the end of lamp is amplified and the schematic diagram of expression by the polarized light illumination device related to about the 3rd embodiment of the present invention.
As shown in figure 14, because in polarized light illumination device 200, the long M of luminescence of lamp 4 is longer than the length of workpiece W, therefore, make bottom assist the angle of reflecting plate 106B and top to assist reflecting plate 106A different, and assisted bottom reflecting plate 106B to be configured in the vertical of workpiece 2.In addition, on the position of the bottom lower end 106A1 that assists the upper end 106B1 of reflecting plate 106B to be configured in assist reflecting plate 106A than top more by the axially outside of lamp 4.
So, auxiliary reflecting plate 106 has following structure, being divided into top assists reflecting plate 106A and bottom to assist reflecting plate 106B, when the long M of the luminescence of lamp 4 is longer than the length of the workpiece W on the length direction of lamp 4, the angle configurations of reflecting plate 106B is assisted bottom to become to assist reflecting plate 106A different from top.According to this structure, improve the free degree that the configuration of reflecting plate 106B is assisted in bottom.
Such as, reflecting plate 106A is assisted to tilt by making top, the light of assisting reflecting plate 106A to reflect by top can be made further close to the direction vertical relative to wavelength selecting filter 7, and the minimizing through light quantity that produced by the angular characteristics of wavelength selecting filter 7 can be suppressed, and by configuring bottom assist reflecting plate 106B relative to workpiece W vertical, the length of polarized light illumination device 200 can be made to shorten.
But above-mentioned embodiment is a scheme of the present invention, in the nature of things, without departing from the scope of spirit of the present invention, can carry out suitable change.
Such as, in the above-described embodiment, auxiliary reflecting plate 6 and top assist the leading section 20B of reflecting plate 106A to be formed with the size that the section A/F K with principal reflection plate 5 is roughly equal, but be not limited to this, as long as this leading section 20B is formed just passable with the size of section more than the A/F K being at least principal reflection plate 5.
In addition, in the above-described embodiment, the light source as wire employs lamp 4, but the light source of wire is not limited thereto.In addition, also can replace lamp 4 and use the linear light source of the shape that to be arranged in a straight line by the light-emitting component of ultraviolet LED etc.In addition, the light that the light source of wire irradiates is not limited to ultraviolet.

Claims (8)

1. a polarized light illumination device, it possesses: the light source of wire; The principal reflection mirror of channel-shaped, it carries out optically focused to the light of this light source; And wire-grid polarizer, it is for making the light linear polarization of irradiation, and described polarized light illumination device irradiates polarised light to irradiation object,
The feature of described polarized light illumination device is,
The auxiliary mirror extended near described wire-grid polarizer from described light source is provided with near the luminous end of described light source.
2. polarized light illumination device according to claim 1, is characterized in that,
Described auxiliary mirror is arranged in the mode of the range tilt of 0 ° ~ 20 ° with the vertical relative to described irradiation object thing.
3. polarized light illumination device according to claim 1 and 2, is characterized in that,
Described polarized light illumination device possesses wavelength selecting filter between described light source and described wire-grid polarizer,
Described auxiliary mirror segmentation is configured between described light source and described wavelength selecting filter and between described wavelength selecting filter and described wire-grid polarizer.
4. polarized light illumination device according to claim 3, is characterized in that,
Described auxiliary mirror is divided into top auxiliary mirror and bottom auxiliary mirror,
When the length of the described irradiation object thing of luminous length on the length direction of described light source of described light source, the lower end of described bottom auxiliary mirror is configured on the position of more than the length of described irradiation object thing,
When the described length of described irradiation object thing is longer than in the luminescence of described light source, the angle configurations of described bottom auxiliary mirror is become to be different from the angle of described top auxiliary mirror.
5. the polarized light illumination device according to claim 3 or 4, is characterized in that,
Make to flow in the spatial portion of cooling air between the front end of described principal reflection mirror and described wavelength selecting filter and the spatial portion between described wavelength selecting filter and described wire-grid polarizer.
6. polarized light illumination device according to any one of claim 1 to 5, is characterized in that,
Described auxiliary mirror is configured to, the base end part of described light source side is formed with the size of the section covering described principal reflection mirror, and on described base end part, be provided with the notch that described light source is run through, and form the leading section of described wire-grid polarizer side with size more than the section A/F of at least described principal reflection mirror.
7. the polarized light illumination device according to any one of claim 2 to 6, is characterized in that,
Centered by the intersection point of the axle of this auxiliary mirror and described light source the angle of inclination of this auxiliary mirror adjusts to described auxiliary mirror.
8. the polarized light illumination device according to any one of claim 3 to 7, is characterized in that,
Make the thermal source cooling path of described light source and described principal reflection mirror and the polarizer cooling path between described wavelength selecting filter and described polarizer unit independently.
CN201510091614.XA 2014-03-05 2015-02-28 Polarization light irradiation apparatus Pending CN104896325A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014042715A JP5831575B2 (en) 2014-03-05 2014-03-05 Polarized light irradiation device
JP2014-042715 2014-03-05

Publications (1)

Publication Number Publication Date
CN104896325A true CN104896325A (en) 2015-09-09

Family

ID=54029164

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510091614.XA Pending CN104896325A (en) 2014-03-05 2015-02-28 Polarization light irradiation apparatus

Country Status (4)

Country Link
JP (1) JP5831575B2 (en)
KR (1) KR20150104522A (en)
CN (1) CN104896325A (en)
TW (1) TW201534836A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107561784B (en) * 2016-06-30 2021-08-20 上海微电子装备（集团）股份有限公司 Optical alignment control method and optical alignment equipment

Also Published As

Publication number Publication date
KR20150104522A (en) 2015-09-15
JP2015170409A (en) 2015-09-28
TW201534836A (en) 2015-09-16
JP5831575B2 (en) 2015-12-09

Similar Documents

Publication Publication Date Title
TWI411864B (en) Polarized light irradiation device
JP6707467B2 (en) Laser driven shield beam lamp
CN104160204B (en) Light emitting device with pump laser column and the method for running the light emitting device
US7400805B2 (en) Compact light collection system and method
JP5850542B2 (en) Light emitting diode projector
US9558858B2 (en) System and method for imaging a sample with a laser sustained plasma illumination output
JP2007114647A (en) Polarized light irradiation device for photo-alignment
CN102129139B (en) Polarized light irradiation device
JP5077465B2 (en) Polarized light irradiation device for photo-alignment
CN104396012A (en) Luminaire with leds and cylindrical lens
TW201310086A (en) Polarizer unit, light irradiation device using the same, and transmittance setting method for the same
JP6326746B2 (en) Polarized light irradiation device
CN104896325A (en) Polarization light irradiation apparatus
TWI468750B (en) Mask and apparatus for manufacturing optical filter including the same
KR20020006414A (en) A polarizing element of a polarized light illuminating apparatus used for light orientation of liquid crystal orientation film
JP2016212376A (en) Photo-alignment device
CN202433090U (en) Monochromatic source system
CN108698078A (en) Ultra-violet curing device with seperated ultraviolet deflecting mirror
EP2820676B1 (en) Uniform epi-illumination of planar samples
CN103454769B (en) The method of optical system, exposure device and manufacture device
CN104950520B (en) Polarized light illumination device
JP6512041B2 (en) Light alignment device
CN104654258A (en) Light irradiation apparatus
CN109212837B (en) Optical alignment device and method
JP6358012B2 (en) Light irradiation device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20150909

WD01 Invention patent application deemed withdrawn after publication