CN109212837B - Optical alignment device and method - Google Patents

Optical alignment device and method Download PDF

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Publication number
CN109212837B
CN109212837B CN201710524594.XA CN201710524594A CN109212837B CN 109212837 B CN109212837 B CN 109212837B CN 201710524594 A CN201710524594 A CN 201710524594A CN 109212837 B CN109212837 B CN 109212837B
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substrate
lighting
light
group
unit
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CN109212837A (en
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戴乐薇
李玉龙
张鹏黎
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Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation

Abstract

The invention discloses a light alignment device and a light alignment method, wherein the device comprises at least one group of lighting units, each group of lighting units comprises two light sources which are symmetrically arranged relative to a substrate, the two light sources in each group of lighting units are simultaneously incident to the same area of the substrate, and the lighting areas of the light sources in at least one group of lighting units cover the upper surface of the substrate. According to the invention, at least one group of lighting units is arranged, each group of lighting units comprises two light sources which are symmetrically arranged relative to the substrate, expected alignment can be generated on the large-size alignment film, the optical alignment of the large-size alignment film is realized with lower equipment cost, the large-size optical alignment lighting is directly realized, and the pattern splicing is not needed, so that the optical alignment performance and the yield are improved.

Description

Optical alignment device and method
Technical Field
The invention relates to the technical field of liquid crystal panel orientation processing, in particular to a photo-alignment device and a photo-alignment method.
Background
In recent years, as alignment treatments of alignment layers of alignment films of liquid crystal panels and viewing angle compensating films, techniques have been used in which alignment is performed by irradiating an alignment film with polarized light of a specific wavelength, and photo-alignment is performed.
The thin film provided with an alignment layer or an alignment film that is aligned by the light is collectively referred to as a photo-alignment film. The optical alignment film has been increased in size with the increase in size of the liquid crystal panel, and a polarized light irradiation device for irradiating polarized light to the optical alignment film has also been increased in size.
In the optical alignment film, for example, the viewing angle compensation film is a long work in a band shape, and is cut into a desired length after alignment treatment. Recently, as the panel size becomes larger, a film having a width of 1500mm is available.
In recent years, in order to photo-align such a long and long optical alignment film in a band shape, a polarized light irradiation apparatus in which a rod lamp 10 and a wire grid polarizer 20 are combined has been proposed in the related art, as shown in fig. 1.
However, the optical alignment method using the light source and the grating has the following disadvantages:
1) the polarization of the polarized light is limited to the performance of the polarized wire grid, the wire grid is difficult to manufacture, and the cost is high;
2) the method of generating polarized light by the light source and the grating reduces the utilization rate of light energy;
3) in the method for generating polarized light by the light source and the grating, a large amount of light energy is converted into heat energy near the grating, so that the part has huge heat productivity;
fig. 2 shows an optical alignment device of an ultraviolet light source, which is a device for projecting ultraviolet laser light onto an alignment film to perform optical alignment by expanding and shaping the ultraviolet laser light, and ultraviolet light emitted from an ultraviolet laser light source 30 is expanded by a beam expander 40 and passes through a shaping device to uniformly project polarized light onto an alignment film substrate 50.
At present, the size of a substrate (more than 6G) of a large generation is wide, and reaches more than 1 meter, and in order to cover such a large visual field, two schemes are generally adopted: firstly, a large-size lens or a cylindrical mirror is adopted, but the optical processing difficulty and the cost are higher; and secondly, splicing is carried out by adopting multiple view fields, and corresponding splicing errors and measurement and calibration difficulty are introduced by the method.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a light alignment device and a light alignment method for realizing large-size polarized light illumination with lower equipment cost.
In order to solve the technical problems, the technical scheme of the invention is as follows: a light alignment device comprises at least one group of lighting units, each group of lighting units comprises two light sources symmetrically arranged relative to a substrate, the two light sources in each group of lighting units are simultaneously incident to the same area of the substrate, and the lighting areas of the light sources in at least one group of lighting units cover the upper surface of the substrate.
Further, the light source is obliquely arranged relative to the substrate.
Further, each group of the lighting units comprises a first sub-lighting unit and a second sub-lighting unit, and the light source of the first sub-lighting unit and/or the second sub-lighting unit can be a laser light source or a white light source.
Further, the device also comprises an optical shaping unit.
Further, the optical shaping unit may include a beam expanding and collimating lens.
Further, the optical shaping unit may include a polarization module.
Further, the width L of the alignment light beam projected onto the substrate by the light source, the inclination angle θ and the width W of the substrate satisfy the following relationship: w is L/sin theta.
Furthermore, the lighting units are provided with two groups, namely a first lighting unit and a second lighting unit, and the light beams of the first lighting unit and the light beams of the second lighting unit are different in inclination angle.
Further, the width L of the alignment light beam projected onto the substrate by the first light source in the first illumination unit and/or the second light source in the second illumination unit, the oblique incidence angle θ and the width W of the substrate satisfy the following relationship: w is L/sin theta.
The invention also provides a photo-alignment method, at least one group of lighting units are used for symmetrically illuminating the area to be aligned of the substrate, and the total distribution of the illumination energy of at least one group of lighting units in the area to be aligned of the substrate is uniform.
Further, the sub-lighting units of each group of said lighting units may be laser lighting units and/or white light lighting units.
Further, the light beam emitted by the illumination unit is irradiated to the substrate after being optically shaped.
Further, the optical shaping may be beam expanding collimation shaping and/or polarization state shaping.
Further, the illumination unit is provided with a group, and the width L of the alignment light beam projected onto the substrate, the inclination angle theta and the width W of the substrate satisfy the following relation: w is L/sin theta.
Furthermore, the lighting units are provided with two groups, namely a first lighting unit and a second lighting unit, the first lighting unit is positioned on two sides of the second lighting unit, and the width L, the oblique incident angle theta and the width W of the substrate of the alignment light beam projected onto the substrate after the first light source in the first lighting unit is subjected to collimation, beam expansion and polarization treatment satisfy the following relations: w is L/sin theta.
The invention provides a light alignment device and a light alignment method. According to the invention, at least one group of lighting units is arranged, each group of lighting units comprises two light sources which are symmetrically arranged relative to the substrate, expected alignment can be generated on the large-size alignment film, the optical alignment of the large-size alignment film is realized with lower equipment cost, the large-size optical alignment lighting is directly realized, and the pattern splicing is not needed, so that the optical alignment performance and the yield are improved.
Drawings
FIG. 1 is a schematic diagram of a prior art polarized light illumination apparatus with a combination of a rod lamp and a wire grid polarizer;
FIG. 2 is a schematic diagram of a prior art light-directing arrangement employing an ultraviolet light source;
FIG. 3 is a schematic structural diagram of a photo-alignment apparatus in example 1 of the present invention;
FIG. 4 is a schematic diagram showing the superposition of the light intensities irradiated onto the substrate by two symmetrically arranged light sources in embodiment 1 of the present invention;
fig. 5 is a schematic structural diagram of a photoalignment device in embodiment 2 of the present invention.
Shown in FIGS. 1-2: 10. a rod-shaped lamp; 20. a wire grid polarizing element; 30. a light source; 40. a beam expander; 50. an alignment film substrate;
shown in fig. 3-5: 100. a lighting unit; 100a, a first lighting unit; 100b, a second lighting unit; 101. a light source; 101a, a first light source; 101b, a second light source; 102. a polarizing unit; 103. a beam expanding, collimating and shaping unit; 104. aligning light beams; 200. a substrate.
Detailed Description
The invention is described in detail below with reference to the attached drawing
Example 1
As shown in fig. 3, the present invention provides a light alignment apparatus, which includes a substrate 200 and at least one group of lighting units 100, where each group of lighting units 100 may include a laser light source or a white light source, and this example is described by taking a laser light source as an example. The lighting device comprises two light sources 101 symmetrically arranged relative to the substrate 200, namely a first sub-lighting unit and a second sub-lighting unit, and the light sources of the first sub-lighting unit and/or the second sub-lighting unit can be laser light sources or white light sources. The two light sources 101 in each group of the lighting units 100 are simultaneously incident on the same area of the substrate 200, and the lighting areas of the light sources 101 in at least one group of the lighting units 100 cover the upper surface of the substrate 200. Specifically, the light sources 101 are arranged obliquely with respect to the substrate 200, that is, light beams emitted by the light sources 101 are projected onto the substrate 200 at a certain angle, and the illumination areas of the light sources 101 in at least one group of illumination units 101 cover the entire upper surface of the substrate 200, so that the photo-alignment of the large-size alignment film can be realized with a low equipment cost, and pattern splicing is not required, thereby improving the photo-alignment performance and yield. It should be noted that, because the light source 101 is obliquely illuminated, the problem of uniformity of the field of view may be caused, that is, the near-end light from the light source is strong, and the far-end light is weak, for this reason, two light sources 101 are adopted to perform symmetric oblique illumination, so as to compensate the problem of uniformity of illumination, as shown in fig. 4. When a white light source and a laser light source are used, the above configurations are both applicable, and are not described in detail.
Preferably, the optical alignment apparatus further includes an optical shaping unit, which may include a polarization unit 102, specifically, the polarization unit 102 is disposed between the light source 101 and the substrate 200, in this embodiment, the polarization unit 102 is coaxial with the light source 101, and a light beam emitted by the light source 101 is shaped by the polarization unit 102 to generate high-quality polarized light. Since the light beam emitted by the white light source is white light, the polarization unit 102 needs to be added to polarize the white light beam emitted by the white light source. When the light source is a laser light source, the laser pulse emitted by the laser light source has the property of polarization state, the polarization unit 102 may not be needed, the polarization unit 102 may also be added to further optimize the laser pulse, and the polarization directions of the light sources 101 in the same group of illumination units 100 are the same.
Preferably, the optical shaping unit may include a beam expanding and collimating lens 103, specifically, a beam expanding and collimating lens 103 is further disposed between the light source 101 and the substrate 200, and in this embodiment, the beam expanding and collimating lens 103 is coaxial with the light source 101 and is configured to collimate and expand light beams emitted by the light source 101.
In the present embodiment, the illumination unit 100 is provided with a group, the illumination area of the light source 101 in the illumination unit 100 covers the upper surface of the substrate 200, and as shown in fig. 3, the width L, the oblique incident angle θ and the width W of the substrate 200 of the alignment light beam 104 projected onto the substrate 200 of the light source 101 satisfy the relationship: w is L/sin theta.
The light distribution method of the light distribution device in this embodiment specifically includes: firstly, a group of illumination units 100 is arranged above a substrate 200, two light sources 101 which are obliquely and symmetrically arranged relative to the substrate 200 are arranged in the illumination unit 100, the inclination angle of the light sources 101 in the group of illumination units 100 is adjusted to enable the illumination area to cover the upper surface of the substrate 200, meanwhile, a beam expanding and collimating lens 103 and a polarization unit 102 are coaxially arranged behind the light sources 101, the light sources 101 are collimated and expanded by the beam expanding and collimating lens 103 and then projected onto the polarization unit 102 for polarization treatment, and the width L of alignment light beams 104 projected onto the substrate 200, the inclination angle theta and the width W of the substrate 200 satisfy the following relation: and W is L/sin theta, so that large-size optical alignment illumination can be realized, and pattern splicing is not needed.
Example 2
As shown in fig. 5, unlike embodiment 1, the lighting unit 100 in this embodiment is provided with two sets, namely a first lighting unit 100a and a second lighting unit 100b, the light source of the first lighting unit 100a and/or the second lighting unit 100b may be a laser light source or a white light source, and the oblique incident angles of the light beams of the first lighting unit 100a and the second lighting unit 100b are different. Specifically, the first illumination unit 100a is located at two sides of the second illumination unit 100b, that is, the two first light sources 101a in the first illumination unit 100a are respectively located at two sides of the second illumination unit 100b, and the two second light sources 101b in the second illumination unit 100b are both located between the two first light sources 101a, in this embodiment, the illumination areas of the two second light sources 101b in the second illumination unit 100b are the center of the upper surface of the substrate 200, and the illumination areas of the two first light sources 101a cover the upper surface of the substrate 200, that is, the width L, the oblique incident angle θ and the width W of the alignment light beam 104 projected onto the substrate 200 by the first light sources 101a satisfy the following relationship: w is L/sin theta.
In the light distribution method corresponding to the light alignment device in this embodiment, at least one group of illumination units 100 is used to symmetrically illuminate the region to be aligned of the substrate 200, and the total distribution of the illumination energy of at least one group of illumination units 100 in the region to be aligned of the substrate 200 is uniform. Preferably, the sub-lighting units of each group of the lighting units 100 may be laser lighting units and/or white light lighting units. The light beam emitted from the illumination unit 100 is optically shaped and then irradiated to the substrate 200. The method specifically comprises the following steps: firstly, two sets of lighting units 100, namely a first lighting unit 100a and a second lighting unit 100b, are arranged above a substrate 200, the first lighting unit 100a is installed at two sides of the second lighting unit 100b, the inclination angles of two first light sources 101a in the first lighting unit 100a are adjusted to enable the lighting areas thereof to cover the upper surface of the substrate 200, meanwhile, the inclination angles of two second light sources 101b in the second lighting unit 100b are adjusted to enable the lighting areas thereof to be positioned at the center of the upper surface of the substrate 200, and the width L, the inclination angle θ and the width W of the substrate 200 of the alignment light beam 104 projected onto the substrate 200 by the two first light sources 101a satisfy the following relations: and W is L/sin theta, so that large-size optical alignment illumination can be realized, and pattern splicing is not needed.
Of course, the number of the lighting units 100 is not limited to one or two, and multiple sets may be provided according to actual needs, where the two light sources 101 in each set of the lighting units 100 are symmetrically arranged with respect to the substrate 200, and it is only required to ensure that the illumination area of one set of the light sources 101 covers the upper surface of the substrate 100, so as to achieve better illumination uniformity. And the plurality of lighting units can be configured as lighting units of white light sources or lighting units of laser light sources according to actual needs.
In summary, the optical alignment apparatus and method provided by the present invention have the following advantages:
firstly, the polarized light performance is better, because the prior art adopts the illumination form that the light source and the wire grid generate the polarized light, the quality of the polarized light provided by the prior art is limited by the wire grid, the extinction ratio of 50:1 can be achieved at most at present, and the manufacturing cost is high. In the invention, the polarization performance of the adopted light source 101 can easily reach the extinction ratio of 200:1, the optical alignment performance is improved, and the equipment cost is reduced.
And secondly, the utilization rate of illumination energy is higher, because in the prior art, in the illumination device adopting the light source and the wire grid, the light blocking part of the wire grid can cause the waste of illumination energy, and in the invention, the light source 101 does not need the wire grid, so that almost all the illumination energy is utilized, and the yield is improved from the other aspect.
Thirdly, the heating value is smaller, because in the prior art, the light source and the wire grid illumination mode are adopted, and most of the energy of the light source is converted into heat energy at the wire grid. On the other hand, the light source 101 used in the present invention solves the problems of large heat generation and difficult heat dissipation of the optical alignment lighting device because the lighting energy is almost fully utilized.
And fourthly, the method is suitable for large-size substrate optical alignment illumination, can realize large-size alignment illumination by adopting a laser light source combination with smaller width, and has the advantages of low processing difficulty, low cost, no splicing error and low measurement and calibration difficulty.
Although the embodiments of the present invention have been described in the specification, these embodiments are merely provided as a hint, and should not limit the scope of the present invention. Various omissions, substitutions, and changes may be made without departing from the spirit of the invention and are intended to be within the scope of the invention.

Claims (14)

1. An optical alignment device is characterized by comprising at least one group of lighting units, wherein each group of lighting units comprises two light sources which are symmetrically arranged relative to a substrate, the two light sources in each group of lighting units are simultaneously incident to the same area of the substrate, and the lighting areas of the light sources in at least one group of lighting units cover the upper surface of the substrate; the lighting units are provided with two groups, namely a first lighting unit and a second lighting unit, and the light beams of the first lighting unit and the light beams of the second lighting unit are different in inclination angle; the illumination area of the light source in the second illumination unit is the center of the upper surface of the substrate.
2. The light directing arrangement of claim 1, wherein the light source is disposed obliquely with respect to the substrate.
3. The light directing device of claim 1, wherein each group of the lighting units comprises a first sub-lighting unit and a second sub-lighting unit, and the light source of the first sub-lighting unit and/or the second sub-lighting unit may be a laser light source or a white light source.
4. The light directing arrangement of claim 3, further comprising an optical shaping unit.
5. The light directing device of claim 4, wherein the optical shaping unit comprises a beam expanding collimating lens.
6. The light directing arrangement of claim 4, wherein the optical shaping unit comprises a polarization module.
7. The photo-alignment device of claim 2, wherein the width L of the alignment beam projected onto the substrate, the oblique incidence angle θ and the width W of the substrate of the light source satisfy the relationship: w = L/sin θ.
8. The photo-alignment device according to claim 1, wherein the width L of the alignment beam projected onto the substrate by the first light source in the first illumination unit and/or the second light source in the second illumination unit, the oblique incident angle θ and the width W of the substrate satisfy the relationship: w = L/sin θ.
9. A photo-alignment method is used for a photo-alignment device, the photo-alignment device comprises at least one group of lighting units, each group of lighting units comprises two light sources symmetrically arranged relative to a substrate; the optical alignment method comprises the following steps: simultaneously irradiating two light sources in each group of lighting units to the same area of the substrate, wherein the lighting areas of the light sources in at least one group of lighting units cover the upper surface of the substrate; the sum of the irradiation energy of at least one group of the illumination units in the area to be aligned on the substrate is uniformly distributed; controlling the oblique incidence angles of the light beams of the lighting units of different groups to be different; and the lighting area of the light source in at least one group of lighting units is the center of the upper surface of the area to be aligned of the substrate.
10. The light directing method of claim 9, wherein the sub-lighting units of each group of the lighting units may be laser lighting units and/or white light lighting units.
11. The method of claim 9, wherein the light beam emitted from the illumination unit is optically shaped and then applied to the substrate.
12. The method of claim 11, wherein the optical shaping is beam expanding collimation shaping and/or polarization state shaping.
13. The photoalignment method according to claim 9, wherein at least one group of the illumination units satisfies a relationship among a width L of the alignment beam projected onto the substrate, an oblique incident angle θ, and a width W of the substrate: w = L/sin θ.
14. The method according to claim 9, wherein the illumination units are provided in two groups, namely a first illumination unit and a second illumination unit, the first illumination unit is located on two sides of the second illumination unit, and the width L, the oblique incident angle θ and the width W of the substrate of the alignment light beam projected onto the substrate after the first light source performs collimation, beam expansion and polarization processing satisfy the following relationship: w = L/sin θ.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5889571A (en) * 1996-02-01 1999-03-30 Lg Electronics Inc. Ultraviolet irradiating device for photo-alignment process and an irradiating method using the same
JP2010096795A (en) * 2008-10-14 2010-04-30 Seiko Epson Corp Method of manufacturing electrooptical device, and device of manufacturing electrooptical device
CN103033988A (en) * 2011-09-30 2013-04-10 群康科技(深圳)有限公司 Optical alignment device of alignment film and manufacturing method of alignment film
CN103210344A (en) * 2010-09-17 2013-07-17 株式会社V技术 Exposure apparatus
KR20140147717A (en) * 2013-06-20 2014-12-30 가부시키가이샤 재팬 디스프레이 Method and apparatus for manufacturing liquid crystal display device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5889571A (en) * 1996-02-01 1999-03-30 Lg Electronics Inc. Ultraviolet irradiating device for photo-alignment process and an irradiating method using the same
JP2010096795A (en) * 2008-10-14 2010-04-30 Seiko Epson Corp Method of manufacturing electrooptical device, and device of manufacturing electrooptical device
CN103210344A (en) * 2010-09-17 2013-07-17 株式会社V技术 Exposure apparatus
CN103033988A (en) * 2011-09-30 2013-04-10 群康科技(深圳)有限公司 Optical alignment device of alignment film and manufacturing method of alignment film
KR20140147717A (en) * 2013-06-20 2014-12-30 가부시키가이샤 재팬 디스프레이 Method and apparatus for manufacturing liquid crystal display device

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