CN104889868B - Cutting apparatus - Google Patents
Cutting apparatus Download PDFInfo
- Publication number
- CN104889868B CN104889868B CN201510090442.4A CN201510090442A CN104889868B CN 104889868 B CN104889868 B CN 104889868B CN 201510090442 A CN201510090442 A CN 201510090442A CN 104889868 B CN104889868 B CN 104889868B
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- Prior art keywords
- cutting
- vibration
- vibration signal
- cutting tool
- vibrating part
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Dicing (AREA)
- Turning (AREA)
Abstract
The present invention provides cutting apparatus, can suitably detect the exception in cutting.The cutting apparatus has: vibration signal generates component (68), generates vibration signal corresponding with the vibration of cutting tool (60)；And control member (78), it determines the state of cutting tool according to the vibration signal that component generates is generated by vibration signal, vibration signal generates component and consists of the following parts: ultrasonic oscillator (70), it is disposed on the 1st vibrating part (46), generates the comparable voltage of vibration signal with the vibration for corresponding to cutting tool；And transmission member (72), it connect with ultrasonic oscillator, voltage is sent to control member, the multiple ultrasonic oscillators (70a, 70b, 70c) different from the resonance frequency that the 1st coil member (74) for constituting transmission member is connected in parallel are equipped on the 1st vibrating part.
Description
Technical field
The present invention relates to the cutting apparatus that the machined object to plate is cut.
Background technique
Such as using the cutting apparatus for having circular cutting tool, to using semiconductor wafer as the quilt of the plate of representative
Machining object is cut, to be divided into multiple chips.In the cutting of the machined object, when occurring, cutting tool is damaged, cuts
When cutting reduced performance, contact with foreign matter, processing abnormal as load variation, cutting tool can vibrate.
Therefore, in order to detect such exception, various methods are had studied.For example, can be to use the side of optical sensor
The breakage of method detection cutting tool (for example, referring to patent document 1).Also, it also can be according to the master for being equipped with cutting tool
The method that the electric current of axis (motor) is monitored, to detect the variation of processing load.
Patent document 1: No. 4704816 bulletins of Japanese Patent
However, existing can not suitably detect in addition to cutting tool in the above-mentioned method using optical sensor
Abnormal problem except breakage.In contrast, it about the method monitored to electric current, is capable of detecting when to cutting tool
The various exceptions impacted are rotated, but there is evaluated error to a certain degree, therefore be not suitable for the detection of minor anomaly.
Summary of the invention
The present invention is to complete in view of the above problems, and its purpose is to provide can suitably detect in cutting
Abnormal cutting apparatus.
According to the present invention, a kind of cutting apparatus is provided comprising: chuck table keeps machined object；And cutting
Component has cutting tool, which cuts the machined object for being held in the chuck table, the cutting structure
Part has: main shaft, is supported on main shaft shell in a manner of it can rotate；And the 1st vibrating part and the 2nd vibrating part, it
Be installed on the end of the main shaft, and clamp the cutting tool, the cutting apparatus is characterized in that, the cutting apparatus tool
Standby: vibration signal generates component, generates vibration signal corresponding with the vibration of the cutting tool；And control member, root
The state of the cutting tool is determined according to the vibration signal that component generates is generated by the vibration signal, which generates component
Consist of the following parts: ultrasonic oscillator is disposed on the 1st vibrating part, is generated and the vibration corresponding to the cutting tool
The dynamic comparable voltage of the vibration signal；And transmission member, it is connect with the ultrasonic oscillator, which is sent to the control
Component processed, the transmission member include: the 1st coil member, are installed on the 1st vibrating part；And the 2nd coil member, with
Opposed mode is disposed in the main shaft shell at spaced intervals with the 1st coil member, is equipped on the 1st vibrating part
Multiple ultrasonic oscillators different from the resonance frequency that the 1st coil member is connected in parallel.
Also, in the present invention, it is preferred that the control member is to the comparable with time change of the vibration signal
Waveform carries out Fourier transformation and is parsed, and the variation of the state of cutting tool is determined according to the variation of vibration component.
Invention effect
Cutting apparatus of the invention has: the vibration signal for generating vibration signal corresponding with the vibration of cutting tool generates
Component and the control member that the state of cutting tool is determined according to the vibration signal generated by vibration signal generation component, because
This, can suitably detect the exception in the cutting along with the vibration of cutting tool.
Detailed description of the invention
Fig. 1 is the perspective view for schematically showing the structural example of cutting apparatus of present embodiment.
Fig. 2 is the exploded perspective view for schematically illustrating the structure of cutting unit.
Fig. 3 is the figure in section for schematically illustrating cutting unit etc..
(A) of Fig. 4 is the figure for schematically illustrating the configuration of ultrasonic oscillator and the 1st inductor, (B) of Fig. 4 be show it is super
The circuit diagram of the connection relationship of acoustic wave transducer and the 1st inductor.
(A) of Fig. 5 is the curve graph for showing the example of waveform (waveform of time-domain) of the voltage transmitted to control device,
(B) of Fig. 5 is the curve graph of the example of the waveform (waveform of frequency domain) after showing Fourier transformation.
Fig. 6 is the curve graph for showing the example of the abnormal waveform (waveform of frequency domain) that front and back occurs.
Label declaration
2: cutting apparatus；
4: pedestal；
4a: opening；
6:X axis mobile work platform；
8: waterproof cover；
10: chuck table；
10a: retaining surface；
12: clamper；
14: cutting unit (cutting member)；
16: supporting structure；
18: cutting unit mobile mechanism；
20:Y axis rail；
22:Y axis mobile work platform；
24:Y axis ball-screw；
26:Z axis rail；
28:Z axis mobile work platform；
30:Z axis ball-screw；
32:Z axis impulse motor；
34: camera；
36: main shaft shell；
38: housing main body；
38a: threaded hole；
40: jacket；
40a: opening；
40b: threaded hole；
40c: engaging portion；
42: main shaft；
42a: opening；
44: screw；
46: the 1 vibrating parts；
46a: opening；
48: flange part；
48a: bearing surface；
50: the 1 lug bosses；
50a: outer peripheral surface；
52: the 2 lug bosses；
56: washer；
58: bolt；
58a: outer peripheral surface；
60: cutting tool；
60a: opening；
62: supporting base；
64: cutting edge；
66: the 2 vibrating parts；
66a: opening；
66b: bearing surface；
68: vibration signal generation device (vibration signal generation component)；
70: ultrasonic oscillator；
70a: the 1 ultrasonic oscillator；
70b: the 2 ultrasonic oscillator；
70c: the 3 ultrasonic oscillator；
72: transmission path (transmission member)；
74: the 1 inductors (the 1st coil member)；
76: the 2 inductors (the 2nd coil member)；
78: control device (control member)；
O: axle center.
Specific embodiment
Referring to attached drawing, embodiments of the present invention will be described.Fig. 1 is the cutting for schematically showing present embodiment
The perspective view of the structural example of device.As shown in Figure 1, cutting apparatus 2 has the pedestal 4 for supporting each structure.
The longer rectangular shape in X-direction (front-rear direction, processing direction of feed) is formed in the upper surface of pedestal 4
Opening 4a.The X-axis for being provided with X-axis moving table 6 in opening 4a, moving X-axis moving table 6 along the x axis
Mobile mechanism (not shown) and the waterproof cover 8 for covering X-axis mobile mechanism.
X-axis mobile mechanism has a pair of of the X-axis guide rail (not shown) parallel with X-direction, and with energy in X-axis guide rail
The mode enough slided is provided with X-axis moving table 6.Nut portions are fixed in the lower face side of X-axis moving table 6 (not scheme
Show), the X-axis ball-screw (not shown) parallel with X-axis guide rail is screwed together in the nut portions.
X-axis impulse motor (not shown) is linked in the one end of X-axis ball-screw.By making X using X-axis impulse motor
The rotation of axis ball-screw, X-axis moving table 6 move in the X-axis direction along X-axis guide rail.
The chucking work for aspirating the machined object (not shown) for keeping plate is provided in X-axis moving table 6
Platform 10.Machined object is, for example, discoid semiconductor wafer, resin substrate, ceramic substrate etc., by the lower surface of machined object
Side suction remains on chuck table 10.
The connection (not shown) of the rotating mechanisms such as chuck table 10 and motor, and extend around along Z-direction (vertical direction)
Rotary shaft rotation.Also, chuck table 10 is moved along the x axis using above-mentioned X-axis mobile mechanism.In chuck table 10
Around be provided with for the clamper 12 that is gripped of cricoid frame (not shown) to bearing machined object.
The surface (upper surface) of chuck table 10 becomes for aspirating the retaining surface 10a for keeping machined object.The holding
Face 10a is connect and flow path (not shown) formed in the inside of chuck table 10 with suction source (not shown).
The gate-type configured with bearing cutting unit (cutting member) 14 in a manner of across opening 4a in the upper surface of pedestal 4
Supporting structure 16.Being provided on the front surface top of supporting structure 16 makes cutting unit 14 (index feed direction) along the y axis
The mobile cutting unit mobile mechanism 18 with Z-direction.
Cutting unit mobile mechanism 18 has the front surface configured in supporting structure 16 and a pair of of the Y parallel with Y direction
Axis rail 20.The mobile work of Y-axis for being constituted cutting unit mobile mechanism 18 is provided in a manner of it can slide in Y-axis guide rail 20
Make platform 22.
It is fixed with nut portions (not shown) in the back side (back-surface side) of Y-axis moving table 22, it is flat with Y-axis guide rail 20
Capable Y-axis ball-screw 24 is screwed together in the nut portions.Y-axis impulse motor is linked in the one end of Y-axis ball-screw 24 (not scheme
Show).If rotating Y-axis ball-screw 24 using Y-axis impulse motor, Y-axis moving table 22 is along Y-axis guide rail 20 in Y-axis
It is moved on direction.
The surface (front surface) of Y-axis moving table 22 is provided with a pair of of the Z axis guide rail 26 parallel with Z-direction.In Z
Z-axis moving table 28 is provided on axis rail 26 in a manner of it can slide.
It is fixed with nut portions (not shown) in the back side (back-surface side) of Z-axis moving table 28, it is flat with Z axis guide rail 26
Capable Z axis ball-screw 30 is screwed together in the nut portions.Z axis impulse motor 32 is linked in the one end of Z axis ball-screw 30.If
Using Z axis impulse motor make Z axis ball-screw 30 rotate, then Z-axis moving table 28 along Z axis guide rail 26 in the Z-axis direction
It is mobile.
The lower part of Z-axis moving table 28 is provided with the cutting unit 14 for cutting machined object.Also, with cut
It cuts the adjacent position of unit 14 and is provided with the camera 34 shot to the upper surface side of machined object.As described above, passing through
Keep Y-axis moving table 22 and Z-axis moving table 28 mobile, so that cutting unit 14 and camera 34 are in Y direction and Z axis
It is moved on direction.
Fig. 2 is the exploded perspective view for schematically illustrating the structure of cutting unit 14, and Fig. 3 is to schematically illustrate cutting unit 14
Section etc. figure.In addition, in figure 2 and figure 3, a part of the structure of cutting unit 14 is omitted.
Cutting unit 14 has the main shaft shell 36 for the lower part for being fixed on Z-axis moving table 28.The main shaft shell 36 packet
It includes the housing main body 38 of substantially rectangular parallelepiped and is fixed on the columned jacket 40 of the one end of housing main body 38.
The main shaft 42 rotated around Y-axis is accommodated in the inside of housing main body 38.The one end of main shaft 42 is from housing main body 38
It is protruding to the outside.The motor (not shown) for rotating main shaft 42 is linked in the another side of main shaft 42.
Circular opening 40a is formed in the center of jacket 40.Also, it is arranged in 38 side of the housing main body of jacket 40
There is engaging portion 40c, is formed with threaded hole 40b in engaging portion 40c.If the one end of main shaft 42 is run through insertion opening 40a, by spiral shell
Nail 44 passes through the threaded hole 40b of engaging portion 40c and is screwed into the threaded hole 38a of housing main body 38, then can be fixed by jacket 40
To housing main body 38.
It is formed with opening 42a in the one end of main shaft 42, and the inner wall of opening 42a is provided with thread groove.?
The one end of the main shaft 42 is equipped with the 1st vibrating part 46.
1st vibrating part 46 includes: outwardly directed flange part 48 and front and back from flange part 48 radially
Distinguish the 1st lug boss 50 and the 2nd lug boss 52 outstanding in face.The 1st lug boss of perforation is formed in the center of the 1st vibrating part 46
50, the opening 46a of flange part 48 and the 2nd lug boss 52.
The one end of main shaft 42 is embedded in the opening 46a of the 1st vibrating part 46 from back side (36 side of main shaft shell).At this
Under state, if washer 56 is located in opening 46a, and fixed bolt 58 is passed through into the washer 56 and is screwed into opening 42a, then
1st vibrating part 46 is fixed in main shaft 42.In addition, being provided with the thread groove pair with the 42a that is open in the outer peripheral surface 58a of bolt 58
The thread answered.
The front of the peripheral side of flange part 48 becomes the bearing surface 48a abutted with the back side of cutting tool 60.When from Y-axis side
When observing to (axis direction of main shaft 42), bearing surface 48a is formed as circular.
1st lug boss 50 is formed as cylindric, and the outer peripheral surface 50a of side is provided with thread at its end.It is cutting
The center of cutter 60 is formed with circular opening 60a.By the way that the 1st lug boss 50 is run through insertion opening 60a, thus bite
Tool 60 is mounted to the 1st vibrating part 46.
Cutting tool 60 is so-called scribing cutter (hub blade), is fixed in the periphery of discoid supporting base 62
There is the circular cutting edge 64 for cutting machined object.About cutting edge 64, the binding materials such as metal or resin (in conjunction with
Material) in mixing the abrasive grains such as diamond or CBN (Cubic Boron Nitride, cubic boron nitride) and be formed as specific thickness.
In addition, the gasket cutter (washer blade) being only made of cutting edge can be used as cutting tool 60.
In the state that the cutting tool 60 is installed to the 1st vibrating part 46, configured in the face side of cutting tool 60
The 2nd circular vibrating part 66.It is formed with circular opening 66a in the center of the 2nd vibrating part 66, and in the opening
The inner wall of 66a is provided with thread groove corresponding with the thread of outer peripheral surface 50a formation in the 1st lug boss 50.
The back side of the peripheral side of 2nd flange part 66 becomes the bearing surface 66b (Fig. 3) abutted with the front of cutting tool 60.
Position corresponding with the bearing surface 48a of the 1st vibrating part 46 is arranged in bearing surface 66b.
By the way that the front end of the 1st lug boss 50 to be screwed into the opening 66a of the 2nd vibrating part 66, thus 60 quilt of cutting tool
1st vibrating part 46 and the clamping of the 2nd vibrating part 66.
The vibration detection mechanism of the vibration for detecting cutting tool 60 is provided in the cutting unit 14 constituted in this way.
Vibration detection mechanism includes vibration signal generation device (the vibration letter for generating vibration signal corresponding with the vibration of cutting tool 60
Number generate component) 68 (Fig. 3).
Vibration signal generation device 68 has the multiple ultrasonic oscillators 70 for the inside for being fixed on the 1st vibrating part 46.It should
Ultrasonic oscillator 70 is for example by barium titanate (BaTiO3), lead zirconate titanate (Pb (Zi, Ti) O3), lithium niobate (LiNbO3), lithium tantalate
(LiTaO3) etc. materials formed, the vibration of cutting tool 60 is converted into voltage (vibration signal).
In general, the ultrasonic oscillator 70 is configured to that resonance occurs for the vibration of defined frequency.Therefore, according to ultrasonic wave
The resonance frequency of oscillator 70, determining can be using the frequency for the vibration that vibration detection mechanism detects.In the present embodiment, it is
It is capable of detecting when the vibration of big frequency range, uses the different multiple ultrasonic oscillators 70 of resonance frequency.
The transmission of the non-contact type for transmitting the voltage generated by ultrasonic oscillator 70 is connected in ultrasonic oscillator 70
Road (transmission member) 72 (Fig. 3).The transmission path 72 includes: the 1st inductor (the 1st coil member) connecting with ultrasonic oscillator 70
74 and relative to the 1st inductor 74 opposed the 2nd inductor (the 2nd coil member) 76 at a prescribed interval.
Typically, the 1st inductor 74 and the 2nd inductor 76 are wound around coil circular made of conducting wire, and
It is individually fixed in the 1st vibrating part 46 and jacket 40.
(A) of Fig. 4 is the figure for schematically illustrating the configuration of ultrasonic oscillator 70 and the 1st inductor 74, and (B) of Fig. 4 is to show
The circuit diagram of the connection relationship of ultrasonic oscillator 70 and the 1st inductor 74 out.
In the present embodiment, as shown in (A) of Fig. 4, when from Y direction (direction of the axle center O of main shaft 42)
The position being overlapped with the 1st inductor 74 is respectively configured with 2 ultrasonic oscillators 70, which includes that resonance frequency is different
3 types ultrasonic oscillator (the 1st ultrasonic oscillator 70a, the 2nd ultrasonic oscillator 70b, the 3rd ultrasonic oscillator 70c).
For example, using the 1st ultrasonic oscillator 70a, the 2nd ultrasonic oscillator 70b, the 3rd ultrasonic oscillator 70c detect
The frequency range of vibration is 50kHz~100kHz, 100kHz~300kHz, 300kHz~500kHz respectively.In this way, by using
The different multiple ultrasonic oscillators 70 of resonance frequency, are able to detect that the vibration of big frequency range.In these cases, can
The vibration of the frequency range of appropriate detection 50kHz~500kHz.
2 the 1st ultrasonic oscillator 70a are symmetrically configured about the axle center O of main shaft 42.Also, 2 the 2nd ultrasonic oscillators
70b is symmetrically configured about the axle center O of main shaft 42.Similarly, 2 the 3rd ultrasonic oscillators 70 are symmetrical about the axle center O of main shaft 42
Ground configuration.
In this way, symmetrically being configured by the axle center O by multiple ultrasonic oscillators 70 about main shaft 42, can accurately examine
Measure the vibration of cutting tool 60.In addition, the quantity of ultrasonic oscillator 70, configuration, shape etc. are not limited to shown in (A) of Fig. 4
Mode.
As shown in (B) of Fig. 4, the 1st ultrasonic oscillator 70a, the 2nd ultrasonic oscillator 70b, the 3rd ultrasonic oscillator 70c phase
1st inductor 74 is connected in parallel.In addition, the 1st inductor 74 is opposed with the 2nd inductor 76, and magnetic knot closes.Therefore, by
The voltage that each ultrasonic oscillator 70 generates passes through the mutual induction of the 1st inductor 74 and the 2nd inductor 76, is transmitted to the 2nd inductance
76 side of device.
Control device (control member) 78 is connected in the 2nd inductor 76.The control device 78 is according to from the 2nd inductor 76
Next voltage is transmitted to determine the vibrational state of cutting tool.Specifically, by Fourier transformation (for example, fast Fourier becomes
Change) to every arbitrary unit time transmission voltage with the comparable waveform of time change (waveform of time-domain) carry out frequency spectrum solution
Analysis, the state of cutting tool 60 is determined according to the waveform of obtained frequency domain.As the unit time, it may be considered that cutting 1
Time (each cutting line) needed for bar line, time (each workpiece), the arbitrary distance of cutting needed for 1 machined object of cutting
The various modes such as required time (each section of cutting distance).
(A) of Fig. 5 is the curve for showing the example of waveform (waveform of time-domain) of the voltage transmitted to control device 78
Figure, (B) of Fig. 5 is the curve graph of the example of the waveform (waveform of frequency domain) after showing Fourier transformation.In addition, Fig. 5's
(A) in, the longitudinal axis indicates voltage (V), and horizontal axis indicates time (t), and in (B) of Fig. 5, the longitudinal axis indicates that amplitude, horizontal axis indicate frequency
(f)。
In this way, if using control device 78 to the waveform of the voltage (vibration signal) from vibration signal generation device 68
Fourier transformation is carried out, then as shown in (B) of Fig. 5, the vibration of cutting tool 60 is divided into main frequency content, can be easy
Ground parses the exception occurred in cutting.Thereby, it is possible to detect the exception in cutting in real time and accurately.
Fig. 6 is the curve graph for showing the example of the abnormal waveform (waveform of frequency domain) that front and back occurs.In Fig. 6, the longitudinal axis
Indicate that amplitude, horizontal axis indicate frequency (f).Also, in Fig. 6, it is indicated by the solid line it is abnormal occur before waveform, be represented by dashed line different
Waveform after often occurring.
As shown in fig. 6, there is the high frequency that do not met in the waveform before occurring extremely in the waveform after occurring extremely
The vibration mode (vibration component) of rate side.Control device 78 for example to the waveform (waveform of frequency domain) before and after abnormal generation into
Row compares, and exception corresponding with the vibration mode only seen in the waveform after occurring extremely has occurred in judgement.
As described above, the cutting apparatus 2 of present embodiment has: generating vibration letter corresponding with the vibration of cutting tool 60
Number vibration signal generating device (vibration signal generation component) 68 and according to the vibration generated by vibration signal generation device 68
Signal determines the control device (control member) 78 of the state of cutting tool 60, therefore, can suitably detect along with
Exception in the cutting of the vibration of cutting tool 60.
Also, in the cutting apparatus of present embodiment 2, to voltage (vibration signal) and time change comparable waveform
(waveform of time-domain) carries out Fourier transformation, therefore compared with the case where directly parsing vibration signal, occurs in cutting
Abnormal parsing becomes easy.Thereby, it is possible to detect the exception in cutting with high precision.
In addition, the present invention is not limited to the records of above embodiment.For example, it is also possible to not to voltage (vibration signal) into
Row Fourier transformation and parsed.In addition, the structure of above embodiment, method etc., without departing from the purpose of the present invention
Range, it will be able to suitably change to implement.
Claims (2)
1. a kind of cutting apparatus comprising: chuck table keeps machined object；And cutting member, have to have and cut
The cutting tool of sword is cut, the cutting tool with cutting edge cuts the machined object for being held in the chuck table,
The cutting member has: main shaft is supported on main shaft shell in a manner of it can rotate；And the 1st vibrating part and the 2nd
Vibrating part, they are installed on the end of the main shaft, and clamp the cutting tool with cutting edge,
The cutting apparatus is characterized in that,
The cutting apparatus has:
Vibration signal generates component, generates vibration signal corresponding with having the vibration of the cutting tool of cutting edge；And
Control member determines the cutting with cutting edge according to the vibration signal that component generates is generated by the vibration signal
The state of cutter,
The vibration signal generates component and consists of the following parts:
Ultrasonic oscillator is disposed on the 1st vibrating part, is generated and the vibration corresponding to the cutting tool with cutting edge
The dynamic comparable voltage of the vibration signal；And
Transmission member is connect with the ultrasonic oscillator, which is sent to the control member,
The transmission member includes: the 1st coil member, is installed on the 1st vibrating part；And the 2nd coil member, with this
1 coil member is opposed at spaced intervals, and is disposed in the main shaft shell,
Multiple ultrasounds different from the resonance frequency that the 1st coil member is connected in parallel are equipped on the 1st vibrating part
Wave oscillator,
Multiple ultrasonic oscillators are symmetrically configured about the axle center of the main shaft, and the cutting tool is by the described 1st
Vibrating part and the 2nd vibrating part clamping, thus accurately detect the vibration of the cutting tool.
2. cutting apparatus according to claim 1, which is characterized in that
The control member is parsed to the vibration signal with the comparable waveform progress Fourier transformation of time change,
The variation of the state of cutting tool is determined according to the variation of vibration component.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014044995A JP6223238B2 (en) | 2014-03-07 | 2014-03-07 | Cutting equipment |
| JP2014-044995 | 2014-03-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104889868A CN104889868A (en) | 2015-09-09 |
| CN104889868B true CN104889868B (en) | 2019-07-30 |
Family
ID=54023048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510090442.4A Active CN104889868B (en) | 2014-03-07 | 2015-02-28 | Cutting apparatus |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6223238B2 (en) |
| KR (1) | KR102228491B1 (en) |
| CN (1) | CN104889868B (en) |
| MY (1) | MY177230A (en) |
| TW (1) | TWI651179B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108297178B (en) * | 2018-01-23 | 2021-05-07 | 东莞理工学院 | Double-column cutting device with feedback function |
| WO2021153042A1 (en) * | 2020-01-29 | 2021-08-05 | 株式会社ノリタケカンパニーリミテド | Ae signal detection device for grindstone |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP6223238B2 (en) | 2017-11-01 |
| KR20150105222A (en) | 2015-09-16 |
| KR102228491B1 (en) | 2021-03-15 |
| JP2015170744A (en) | 2015-09-28 |
| CN104889868A (en) | 2015-09-09 |
| TW201540457A (en) | 2015-11-01 |
| TWI651179B (en) | 2019-02-21 |
| MY177230A (en) | 2020-09-09 |
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