CN104867851A - Wafer cassette - Google Patents
Wafer cassette Download PDFInfo
- Publication number
- CN104867851A CN104867851A CN201410066880.2A CN201410066880A CN104867851A CN 104867851 A CN104867851 A CN 104867851A CN 201410066880 A CN201410066880 A CN 201410066880A CN 104867851 A CN104867851 A CN 104867851A
- Authority
- CN
- China
- Prior art keywords
- pallet
- wafer cassette
- axle
- plate
- snap ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67333—Trays for chips
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
Abstract
The invention provides a wafer cassette. The wafer cassette comprises a top plate, a base plate and side plates, and also comprises a shaft and trays. The top plate, the base plate and the side plates are connected to form an accommodating cavity which is a semi-closed accommodating cavity with an opening at one side. The shaft is vertically connected between the top plate and the base plate, and the shaft is positioned at one side of the opening. The trays are circular and horizontally arranged in the accommodating cavity, and snap rings are arranged at the edges of the trays. Each snap ring is provided with a dialing plate on the outer surface of one side, opposite to the corresponding tray. The upper surface of each tray is provided with a plurality of arc-shaped latches, inner surfaces of the plurality of arc-shaped latches are positioned on a same circumference. Multiple trays are provided, and the multiple trays are connected on the shaft in a rotated manner through superposition of the snap rings. The distance from the axis of the shaft to the other side of the opening is greater than the maximum distance from the axis to the edge of each tray. The wafer cassette is convenient to use; the trays rotate around the shaft under the action of the dialing plates, thus space is saved; in addition, frequency of displacing the wafer cassette is reduced, thereby increasing efficiency.
Description
Technical field
The present invention relates to semiconductor fabrication, especially a kind of wafer cassette.
Background technology
In prior art, along with the fast development of electronic product, integrated circuit becomes the focus of people's research, so make IC design, the technology general layouts such as chip manufacturing are also rapidly developed, under the guiding of this technique direction, China proposes very high requirement to the production of chip, reduce the demand to the import of high-tech chip further, in actual production, in field of semiconductor manufacture, the qualified wafer finished product that process refinement obtains and silicon chip need mark to confirm, be generally more wafers superposition the wafer tray being positioned in wafer cassette on, wafer and pallet are one-to-one relationship, in order to ensure the flatness of wafer, the manipulator of wafer of taking mostly is sucked type, its course of work is: manipulator draws a wafer in wafer cassette, then mark place is placed in, after mark completes, manipulator is drawn by wafer complete for mark again and playback is put in wafer tray, then next wafer drawn again by manipulator.The program makes production achieve automation, greatly enhance efficiency, but its exist shortcoming be due to sucking disc type mechanical hand take wafer time need to be deep in wafer cassette, therefore wafer of taking is inconvenient to, require will there be very large distance between each wafer tray of wafer cassette simultaneously, cause the waste in wafer cassette space like this, and the frequency changing wafer cassette in the course of processing also can increase, and reduces efficiency to a certain extent.
Summary of the invention
The problem to be solved in the present invention is to provide a kind of wafer cassette, and manipulator is taken to wafer very easily.
For solving the problems of the technologies described above, the technical solution used in the present invention is: a kind of wafer cassette, comprises top board, base plate and side plate, also comprises axle and pallet, described top board, base plate and side plate are connected to form container cavity, and this container cavity is the semiclosed container cavity that side is provided with opening;
Described axle is vertically connected between top board and base plate, and this axle is positioned at the side of opening;
Described pallet is circular and is horizontally placed in container cavity, its edge is provided with snap ring, described snap ring is provided with plate runing counter to a side external surface with pallet, the upper surface of described pallet is provided with multiple arc latch, and the plurality of arc latch inner surface is positioned at circumferentially same, described tray number is multiple, the snap ring superposition that the plurality of pallet is all provided with by pallet be rotationally connected with on axle, the axle center of described axle is greater than this axle center and tray edge ultimate range to the distance of opening opposite side.
Further, the level corresponding with pallet at the side wall inner surfaces of opening opposite side is provided with supporting plate, and the edge of described pallet lower surface is equipped with supporting bracket, and when pallet is positioned at container cavity, described pallet is all slidably connected on supporting plate by supporting bracket.
Further, each pallet and the equal level of side sheet room are provided with spring.
Further, the circular surfaces that described arc latch and pallet are formed is provided with nonwoven fabrics.
Further, bearing is provided with between described snap ring and axle.
Further, be provided with sleeve between described snap ring, described sleeve is fixedly sleeved on axle.
The advantage that the present invention has and good effect are: this wafer cassette is easy to use, pallet sways under the effect of plate, realize manipulator conveniently grasping silicon wafer, save space, in addition owing to placed more wafer in identical space, therefore the frequency changing wafer cassette reduces, thus improves efficiency.
Accompanying drawing explanation
Fig. 1 is the main parallax stereogram of the present invention;
Fig. 2 is schematic diagram on the left of the present invention;
Fig. 3 is the A-A view of schematic diagram on the left of the present invention;
In figure:
1, top board, 2, axle, 3, pallet, 4, plate, 5, bearing, 7, sleeve, 8, snap ring, 9, arc latch, 10, nonwoven fabrics, 11, base plate, 12, supporting plate, 13, supporting bracket, 14, spring.
Embodiment
First the present invention will be described with reference to the accompanying drawings, as shown in Figure 1, Figure 2, Figure 3 shows, and a kind of wafer cassette, comprise top board 1, base plate 11 and side plate, also comprise axle 2 and pallet 3, described top board 1, base plate 11 and side plate are connected to form container cavity, and this container cavity is the semiclosed container cavity that side is provided with opening;
Described axle 2 is vertically connected between top board 1 and base plate 11, and this axle 2 is positioned at the side of opening;
Described pallet 3 is circular and is horizontally placed in container cavity, its edge is provided with snap ring 8, described snap ring 8 is provided with plate 4 runing counter to a side external surface with pallet 3, the upper surface of described pallet 3 is provided with multiple arc latch 9, and the plurality of arc latch 9 inner surface is positioned at same level circumferentially, described pallet 3 quantity is multiple, what the plurality of pallet 3 was all superposed by snap ring 8 is rotationally connected with on axle 2, and the axle center of described axle 2 is greater than this axle center and pallet 3 edge ultimate range to the distance of opening opposite side.
Further, supporting plate 12 is provided with in the level that the side wall inner surfaces of opening opposite side is corresponding with pallet 3, the edge of described pallet 3 lower surface is equipped with supporting bracket 13, and when pallet 3 is positioned at container cavity, described pallet 3 is all slidably connected on supporting plate 12 by supporting bracket 13.This design makes when pallet 3 is positioned at container cavity, and supporting plate 12 and supporting bracket 13 pairs of pallets have supporting role, has prevented from pallet 3 of long duration to tilt.
Further, each pallet 3 and the equal level of side sheet room are provided with spring 14.This design can, to pallet return, can also prevent pallet from skidding off freely in addition, and then protects the wafer that pallet holds.
Further, the circular surfaces that described arc latch 9 and pallet 3 are formed is provided with nonwoven fabrics 10.Because the surface finish requirements of wafer is higher, therefore this design can ensure the fineness of crystal column surface.
Further, bearing 5 is provided with between described snap ring 8 and axle 2.This design can better Rotary tray, time saving and energy saving.
Further, be provided with sleeve 7 between described snap ring 8, described sleeve 7 is fixedly sleeved on axle 2.This design ensure that the independence worked between pallet.
The course of work of the present invention is: stir plate 4 counterclockwise, pallet 3 skids off by container cavity, now wafer pallet 3 being positioned at arc latch 9 drawn by manipulator, after wafer is processed, wafer is drawn and is put back on the pallet 3 that skids off by manipulator again, unclamps plate 4, pallet 3 return under action from the spring 14, then stir another plate 4, repeat a workflow.
Above embodiments of the invention have been described in detail, but described content being only preferred embodiment of the present invention, can not being considered to for limiting practical range of the present invention.All equalizations done according to the scope of the invention change and improve, and all should still belong within this patent covering scope.
Claims (6)
1. a wafer cassette, comprises top board, base plate and side plate, it is characterized in that: also comprise axle and pallet, and described top board, base plate and side plate are connected to form container cavity, and this container cavity is the semiclosed container cavity that side is provided with opening;
Described axle is vertically connected between top board and base plate, and this axle is positioned at the side of opening;
Described pallet is circular and is horizontally placed in container cavity, its edge is provided with snap ring, described snap ring is provided with plate runing counter to a side external surface with pallet, the upper surface of described pallet is provided with multiple arc latch, and the plurality of arc latch inner surface is positioned at circumferentially same, described tray number is multiple, the snap ring superposition that the plurality of pallet is all provided with by pallet be rotationally connected with on axle, the axle center of described axle is greater than this axle center and tray edge ultimate range to the distance of opening opposite side.
2. a kind of wafer cassette according to claim 1, it is characterized in that: the level corresponding with pallet at the side wall inner surfaces of opening opposite side is provided with supporting plate, the edge of described pallet lower surface is equipped with supporting bracket, when pallet is positioned at container cavity, described pallet is all slidably connected on supporting plate by supporting bracket.
3. a kind of wafer cassette according to claim 1, is characterized in that: each pallet and the equal level of side sheet room are provided with spring.
4. a kind of wafer cassette according to claim 1, is characterized in that: the circular surfaces that described arc latch and pallet are formed is provided with nonwoven fabrics.
5. a kind of wafer cassette according to claim 1, is characterized in that: be provided with bearing between described snap ring and axle.
6. a kind of wafer cassette according to claim 1, it is characterized in that: be provided with sleeve between described snap ring, described sleeve is fixedly sleeved on axle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410066880.2A CN104867851A (en) | 2014-02-26 | 2014-02-26 | Wafer cassette |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410066880.2A CN104867851A (en) | 2014-02-26 | 2014-02-26 | Wafer cassette |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104867851A true CN104867851A (en) | 2015-08-26 |
Family
ID=53913604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410066880.2A Pending CN104867851A (en) | 2014-02-26 | 2014-02-26 | Wafer cassette |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104867851A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107316832A (en) * | 2017-07-05 | 2017-11-03 | 全讯射频科技(无锡)有限公司 | A kind of wafer plate body loading tool |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63283142A (en) * | 1987-05-15 | 1988-11-21 | Hitachi Ltd | Accommodating jig |
| CN201195116Y (en) * | 2008-03-10 | 2009-02-18 | 山东省千佛山医院 | Inspecting and sampling tube storing device |
| JP2009252947A (en) * | 2008-04-04 | 2009-10-29 | Nec Electronics Corp | Opening method of wafer transport device, and wafer supply device |
| JP2010074128A (en) * | 2008-09-17 | 2010-04-02 | Inotera Memories Inc | Mini clean room body structure for preventing wafer pollution and using method thereof |
| CN201767849U (en) * | 2010-09-15 | 2011-03-23 | 孙月 | Rotable washstand |
| CN202051249U (en) * | 2011-04-11 | 2011-11-30 | 福州天宇电气股份有限公司 | Cabinet with rotary drawers |
| CN203746809U (en) * | 2014-02-26 | 2014-07-30 | 天津宇晗电子科技有限公司 | Wafer cassette |
-
2014
- 2014-02-26 CN CN201410066880.2A patent/CN104867851A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63283142A (en) * | 1987-05-15 | 1988-11-21 | Hitachi Ltd | Accommodating jig |
| CN201195116Y (en) * | 2008-03-10 | 2009-02-18 | 山东省千佛山医院 | Inspecting and sampling tube storing device |
| JP2009252947A (en) * | 2008-04-04 | 2009-10-29 | Nec Electronics Corp | Opening method of wafer transport device, and wafer supply device |
| JP2010074128A (en) * | 2008-09-17 | 2010-04-02 | Inotera Memories Inc | Mini clean room body structure for preventing wafer pollution and using method thereof |
| CN201767849U (en) * | 2010-09-15 | 2011-03-23 | 孙月 | Rotable washstand |
| CN202051249U (en) * | 2011-04-11 | 2011-11-30 | 福州天宇电气股份有限公司 | Cabinet with rotary drawers |
| CN203746809U (en) * | 2014-02-26 | 2014-07-30 | 天津宇晗电子科技有限公司 | Wafer cassette |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107316832A (en) * | 2017-07-05 | 2017-11-03 | 全讯射频科技(无锡)有限公司 | A kind of wafer plate body loading tool |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203746809U (en) | Wafer cassette | |
| CN104867851A (en) | Wafer cassette | |
| CN206509643U (en) | A kind of positioning tool cut for film | |
| CN104386430A (en) | Rectilinear motion to circular motion mechanism | |
| CN104925520A (en) | Glass overturning mechanism used for glass processing | |
| CN102514874B (en) | Combined battery transferring device | |
| CN104669767A (en) | Four-shaft manipulator | |
| CN206278403U (en) | A kind of attraction type epicyclical mechanism | |
| CN203367242U (en) | Etching placing tool | |
| CN104859989A (en) | Device facilitating taking of wafer | |
| CN209963035U (en) | Silicon chip bearing disc and silicon chip bearing device | |
| CN203786461U (en) | Compatible type flower basket used for feeding and blanking of mask templates | |
| CN104470217A (en) | False sticking equipment | |
| CN204271061U (en) | Silicon wafer bearing disk | |
| CN206979385U (en) | A kind of Pizza stone | |
| CN205920884U (en) | Piece frock is arranged to condenser | |
| CN203277344U (en) | Silicon slice box and corresponding fixed tray | |
| CN208945657U (en) | A kind of positioning device for preventing edge milling machines from shifting | |
| CN203740436U (en) | Device for picking up wafers conveniently | |
| CN204183992U (en) | The loading tool structure of laminating machine | |
| CN108618392A (en) | A kind of intelligent table for outdoor charging | |
| CN218949259U (en) | Transfer device for transporting tubular magnetic cores | |
| CN214141180U (en) | Vacuum chuck for transferring green ceramic chips | |
| JP6256178B2 (en) | Breaking device for brittle material substrate | |
| CN203288572U (en) | Wafer rotation release device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150826 |
|
| WD01 | Invention patent application deemed withdrawn after publication |