CN104859989A - Device facilitating taking of wafer - Google Patents
Device facilitating taking of wafer Download PDFInfo
- Publication number
- CN104859989A CN104859989A CN201410066506.2A CN201410066506A CN104859989A CN 104859989 A CN104859989 A CN 104859989A CN 201410066506 A CN201410066506 A CN 201410066506A CN 104859989 A CN104859989 A CN 104859989A
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- China
- Prior art keywords
- axle
- plate
- wafer
- pallet
- tooth bar
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Transmission Devices (AREA)
Abstract
The invention provides a device facilitating taking of a wafer. The device is arranged on a working platform and comprises a wafer box, a shifting mechanism as well as an operating mechanism and a geneva mechanism which are controlled by motors respectively, wherein the wafer box comprises a top plate, a bottom plate, side plates, a third shaft and trays; the top plate, the bottom plate and the side plates are connected to form an accommodating cavity, and the accommodating cavity is a semi-closed accommodating cavity with an opening in one side; the third shaft is vertically connected between the top plate and the bottom plate and located on one side of the opening; the third shaft is sleeved with the trays through clamp rings arranged on edges of the trays, and one first shifting plate is arranged on the outer surface of one side, opposite to the corresponding tray, of each clamp ring; the operating mechanism comprises tracks and a panel; the shifting mechanism comprises a gear rack and a gear meshed with the gear rack, a second shifting plate is arranged at the upper end of the gear rack, the gear rack is fixedly nested to a second shaft, and the gear rack is vertically and movably arranged on the panel. By means of the device, the wafer can be automatically picked up through a manipulator.
Description
Technical field
The present invention relates to semiconductor fabrication, especially about the device for taking of wafer.
Background technology
In prior art, along with the fast development of electronic product, the technical personnel of China also proposes higher requirement to the research of chip and production, for enhancing productivity, the production of chip is tending towards automation, in actual production, in field of semiconductor manufacture, the qualified wafer finished product that process refinement obtains and silicon chip need mark to confirm, be generally more wafers superposition the wafer tray being positioned in wafer cassette on, its working process is: sucking disc type mechanical hand draws a wafer in wafer cassette, then mark place is placed in, after mark completes, manipulator is drawn by wafer complete for mark again and playback is put in wafer tray, then manipulator draws next wafer again.This mode of operation greatly enhances efficiency, but its exist shortcoming be due to sucking disc type mechanical hand take wafer time need to be deep in wafer cassette, be therefore inconvenient to wafer of taking.
Summary of the invention
The problem to be solved in the present invention is to provide one and is convenient to wafer device for taking, applies this device and conveniently to take wafer, thus realizes automation when taking wafer.
For solving the problems of the technologies described above, the technical solution used in the present invention is: one is convenient to wafer device for taking, and this device is located on workplatform, comprises wafer cassette, toggle mechanism, operating unit and Geneva mechanism, described operating unit is connected with the first motor, and Geneva mechanism is connected with the second motor;
Described Geneva mechanism comprise the first axle, the second axle, with straight pin runner, there is the sheave of four radial slots, described runner is fixedly installed on the first axle, and this first axle is circumscribed with motor, and described sheave is fixedly installed on the second axle;
Described wafer cassette is arranged on the support that workplatform is provided with, and this wafer cassette comprises top board, base plate and side plate, and also comprise the 3rd axle and pallet, described top board, base plate and side plate are connected to form container cavity, and this container cavity is the semiclosed container cavity that side is provided with opening, described 3rd axle is vertically connected between top board and base plate, and the 3rd axle is positioned at the side of opening, described pallet is circular and is horizontally placed in container cavity, its edge is provided with snap ring, described snap ring is provided with the first plate runing counter to a side external surface with pallet, the upper surface of described pallet is provided with multiple arc latch, and the plurality of arc latch inside face is positioned at circumferentially same, described tray number is multiple, the snap ring that the plurality of pallet is all provided with by pallet is rotationally connected with on the 3rd axle with superposing, the axle center of described 3rd axle is greater than this axle center and tray edge ultimate range to the distance of opening opposite side, described each pallet and the equal level of side sheet room are provided with spring,
Described operating unit comprises track and flat board, described track is arranged at workplatform upper surface, described dull and stereotyped upper surface is vertically provided with stay bearing plate, described first axle and the second axle are arranged on this stay bearing plate with all horizontally rotating, described flat board is positioned on track by the wheel that its lower surface is provided with, described track comprises straight line portion and circular arc portion, and described straight line portion is positioned at the open side of wafer cassette, described circular arc portion is positioned at the closed side of wafer cassette, and the straight line portion of described track is vertical with the first plate, the center of circle of the circular arc portion of described track and the axis coinciding of the 3rd axle,
The gear that described toggle mechanism comprises tooth bar and is meshed with this tooth bar, described gear is fixedly sleeved on the second axle, vertically and be movably set on flat board, and all to wear injection dull and stereotyped at these tooth bar two ends for described tooth bar, and the top of described tooth bar is provided with the second plate can stirred the first plate and rotate;
Described workplatform be provided with parallel track run through groove, and this runs through groove and tooth bar is just right.
Further, be provided with protective case outside described Geneva mechanism, this protective case is fixed on flat board, and described second axle wears injection protective case, and described gear is positioned at the second axle and wears injection protective case end.
Further, described Geneva mechanism is external toothing formula Geneva mechanism.
Further, be provided with orienting lug between described tooth bar and flat board, this orienting lug is fixed on flat board.
Further, bearing is provided with between described snap ring and the 3rd axle.
Further, be provided with highly identical sleeve between described snap ring, described sleeve is fixedly sleeved on the 3rd axle.
The advantage that the present invention has and good effect are:
1). the wafer tray that the wafer cassette in this device holds can produce around axle, convenient and swift when wafer drawn by manipulator sucker, increases work efficiency;
2). realize, to the pallet machine automatization switch in wafer cassette, saving manual operation, and then reducing artificial loss under toggle mechanism and operating unit synergy;
3). in this device, the application of Geneva mechanism achieves under the effect of this device, and toggle mechanism, to the automatic switch of pallet interval in order, thus improves efficiency.
Accompanying drawing explanation
Fig. 1 is front view of the present invention;
Fig. 2 is left side view of the present invention;
Fig. 3 is birds-eye view of the present invention;
Fig. 4 is wafer cassette A-A view in the present invention;
Fig. 5 is Geneva mechanism schematic diagram of the present invention;
Fig. 6 is middle plateform of the present invention and section of rack cutaway view;
In figure:
1. dull and stereotyped, 2. stay bearing plate, 3. sheave, 4. the second motor, 5. runner,
6. the first axle, 7. straight pin, 8. tooth bar, 9. wafer cassette, 10. gear,
11. second axles, 12. orienting lugs, 13. tracks, 14. workplatformes, 15. wheels,
16. supports, 17. second plates, 18. run through groove, 19. protective cases, 20. first motors
91, pallet, 92, spring, 93, arc latch, 94, snap ring, the 95, first plate.
Detailed description of the invention
Now present invention is described with reference to the accompanying drawings, as shown in Fig. 1 ~ Fig. 6, one is convenient to wafer device for taking, this device is located on workplatform 14, comprise wafer cassette 9, toggle mechanism, operating unit and Geneva mechanism, described operating unit is controlled by the first motor 20, and Geneva mechanism is controlled by the second motor 4;
Described Geneva mechanism comprise the first axle 6, second axle 11, with straight pin 7 runner 5, there is the sheave 3 of four radial slots, described runner 5 is fixedly installed on the first axle 6, and this first axle 6 is circumscribed with motor 4, described sheave 3 is fixedly installed on the second axle 11; The application of Geneva mechanism can realize intermittent movement requirement, and can ensure the accuracy requirement of miles of relative movement;
Described wafer cassette 9 is arranged on the support 16 that workplatform 14 is provided with, this wafer cassette comprises top board, base plate and side plate, also comprise the 3rd axle 96 and pallet 91, described top board, base plate and side plate are connected to form container cavity, and this container cavity is the semiclosed container cavity that side is provided with opening, described 3rd axle 96 is vertically connected between top board and base plate, and the 3rd axle 96 is positioned at the side of opening, described pallet 91 is circular and is horizontally placed in container cavity, its edge is provided with snap ring 94, described snap ring 94 is provided with the first plate 95 runing counter to a side external surface with pallet 91, the upper surface of described pallet 91 is provided with multiple arc latch 93, and the plurality of arc latch 93 inside face is positioned at circumferentially same, described pallet 91 quantity is multiple, the snap ring 94 that the plurality of pallet 91 is all provided with by pallet is rotationally connected with on the 3rd axle 96 with superposing, the axle center of described 3rd axle 96 is greater than this axle center and pallet 91 edge ultimate range to the distance of opening opposite side, described each pallet 91 and the equal level of side sheet room are provided with spring 92, the design of this wafer cassette makes wafer tray to shift out wafer cassette, thus makes manipulator absorption wafer be carry out outside box, and not by the restriction in space, wafer of taking is convenient and swift,
Described operating unit comprises track 13 and dull and stereotyped 1, described track 13 is arranged at workplatform 14 upper surface, described dull and stereotyped 1 upper surface is vertically provided with stay bearing plate 2, described first axle 6 and the second axle 11 all horizontally rotate and are arranged on this stay bearing plate 2, described dull and stereotyped 1 wheel be provided with by its lower surface is positioned on track 13, described track 13 comprises straight line portion and circular arc portion, and described straight line portion is positioned at the open side of wafer cassette 9, described circular arc portion is positioned at the closed side of wafer cassette 9, the straight line portion of described track 13 is vertical with the first plate 95, the center of circle of the circular arc portion of described track 13 and the axis coinciding of the 3rd axle 96, the design of operating unit realizes the automatic dial-out of toggle mechanism to pallet, and then eliminates manual operation, saves labour power,
The gear 10 that described toggle mechanism comprises tooth bar 8 and is meshed with this tooth bar 8, described gear 10 is fixedly sleeved on the second axle, described tooth bar 8 vertically and be movably set on dull and stereotyped 1, and injection dull and stereotyped 1 is all worn at these tooth bar 8 two ends, the top of described tooth bar 8 is provided with can stir the first plate and turn 95 the second dynamic plates 17; This structure applies wheel and rack and interacts, and this arrangement works state steadily also can ensure the amount of movement of the second plate;
Described workplatform 14 be provided with parallel track run through groove 18, and this to run through groove 18 just right with tooth bar 8.This design has enough spaces when tooth bar is moved down.
Further, be provided with protective case 19 outside described Geneva mechanism, this protective case 19 is fixed on dull and stereotyped 1, and described second axle 11 wears injection protective case 19, and described gear 10 is positioned at the second axle 11 and wears injection protective case 19 end.This device can play the dust-proof effect of anti-gray to this structure.
Further, described Geneva mechanism is external toothing formula Geneva mechanism.This structure design is simple, fast easy to assembly.
Further, be provided with orienting lug 12 between described tooth bar 8 and dull and stereotyped 1, this orienting lug 12 is fixed on dull and stereotyped 1.The movement that this design further ensures tooth bar is vertical direction.
Further, bearing is provided with between described snap ring 94 and the 3rd axle 96.
Further, be provided with highly identical sleeve 9.7 between described snap ring 94, described sleeve 9.7 is fixedly sleeved on the 3rd axle 96.This design ensure that the independence that works between pallet and ensures that the spacing between the first adjacent plate is equal.
Tooth bar 8 working process from top to bottom now with regard to this device is that example is described: the second motor 4 opening control slit wheel mechanism, make Geneva mechanism in running order, second plate 17 is adjusted to topmost, now the second plate 17 is just right with first first plate 95 of the top of wafer cassette 9, open the first motor 20 of controlling run mechanism, now operating unit runs forward, namely moved to circular arc portion by the straight line portion of track 13 in this device, when moving to the second plate 17 and leaning on the first plate 95 phase, second plate 17 stirs the first plate 95, because the now operating unit arch section along track 13 moves, now the second plate 17 drives the first plate 95 to rotate around the 3rd axle 96, and then the pallet 91 of wafer cassette 9 is produced, the motor stalling of controlling run mechanism, quiescence after pallet 95 is in and produces, now manipulator is drawn the wafer in pallet 91 and is processed, machine rear manipulator again wafer drawn and be placed in the pallet 95 that shifts out, open the motor of controlling run mechanism and make it reversion, operating unit moves back until position when starting, pallet 95 resets under the action of the spring, in the process of operating unit work, as shown in Figure 2, runner 5 rotates clockwise under the drive of the first axle 6, on runner 5 with straight pin 7 rotate with runner 5, when operating unit moves to starting position, now runner 5 turns over the curved surface that sheave 3 coordinates, straight pin 7 proceeds to in the groove of sheave 3, straight pin 7 is stirred sheave while moving radially in this groove and is rotated counterclockwise, thus drive the second axle 11 to rotate, gear 10 rotates under the effect of the second axle, and then stir the tooth bar 8 engaged with gear 10 and move down, make the second plate 17 just to second the first plate 95, now straight pin 7 produces by the groove of sheave 3, runner 5 now rotates along the curved surface coordinated with sheave 3, sheave 3 stops operating, gear 19 remains static, and then the position of the vertical direction of tooth bar 8 is fixed, open the motor of controlling run mechanism, operating unit is run forward along track 13, thus drive the second plate 17 to move forward, and then repeat a workflow.
Above embodiments of the invention have been described in detail, but described content being only preferred embodiment of the present invention, can not being considered to for limiting practical range of the present invention.All equalizations done according to the scope of the invention change and improve, and all should still belong within this patent covering scope.
Claims (6)
1. be convenient to a wafer device for taking, this device is located on workplatform, it is characterized in that: comprise wafer cassette, toggle mechanism, operating unit and Geneva mechanism, and described operating unit is connected with the first motor, and Geneva mechanism is connected with the second motor;
Described Geneva mechanism comprise the first axle, the second axle, with straight pin runner and there is the sheave of four radial slots, described runner is fixedly installed on the first axle, and this first axle is circumscribed with motor, and described sheave is fixedly installed on the second axle;
Described wafer cassette is arranged on the support that workplatform is provided with, and this wafer cassette comprises top board, base plate and side plate, and also comprise the 3rd axle and pallet, described top board, base plate and side plate are connected to form container cavity, and this container cavity is the semiclosed container cavity that side is provided with opening, described 3rd axle is vertically connected between top board and base plate, and the 3rd axle is positioned at the side of opening, described pallet is circular and is horizontally placed in container cavity, its edge is provided with snap ring, described snap ring is provided with the first plate runing counter to a side external surface with pallet, the upper surface of described pallet is provided with multiple arc latch, and the plurality of arc latch inside face is positioned at circumferentially same, described tray number is multiple, the snap ring that the plurality of pallet is all provided with by pallet is rotationally connected with on the 3rd axle with superposing, the axle center of described 3rd axle is greater than this axle center and tray edge ultimate range to the distance of opening opposite side, described each pallet and the equal level of side sheet room are provided with spring,
Described operating unit comprises track and flat board, described track is arranged at workplatform upper surface, described dull and stereotyped upper surface is vertically provided with stay bearing plate, described first axle and the second axle are arranged on this stay bearing plate with all horizontally rotating, described flat board is positioned on track by the wheel that its lower surface is provided with, described track comprises straight line portion and circular arc portion, and described straight line portion is positioned at the open side of wafer cassette, described circular arc portion is positioned at the closed side of wafer cassette, and the straight line portion of described track is vertical with the first plate, the center of circle of the circular arc portion of described track and the axis coinciding of the 3rd axle,
The gear that described toggle mechanism comprises tooth bar and is meshed with this tooth bar, described gear is fixedly sleeved on the second axle, vertically and be movably set on flat board, and all to wear injection dull and stereotyped at these tooth bar two ends, is provided with the second plate can stirred the first plate and rotate on the top of this tooth bar for described tooth bar;
Described workplatform be provided with parallel track run through groove, and this runs through groove and tooth bar is just right.
2. one according to claim 1 is convenient to wafer device for taking, it is characterized in that: be provided with protective case outside described Geneva mechanism, and this protective case is fixed on flat board, and described second axle wears injection protective case, and described gear is positioned at the second axle and wears injection protective case end.
3. one according to claim 1 is convenient to wafer device for taking, it is characterized in that: described Geneva mechanism is external toothing formula Geneva mechanism.
4. one according to claim 1 is convenient to wafer device for taking, it is characterized in that: be provided with orienting lug between described tooth bar and flat board, and this orienting lug is fixed on flat board.
5. one according to claim 1 is convenient to wafer device for taking, it is characterized in that: be provided with bearing between described snap ring and the 3rd axle.
6. one according to claim 1 is convenient to wafer device for taking, it is characterized in that: be provided with highly identical sleeve between described snap ring, and described sleeve is fixedly sleeved on the 3rd axle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410066506.2A CN104859989A (en) | 2014-02-26 | 2014-02-26 | Device facilitating taking of wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410066506.2A CN104859989A (en) | 2014-02-26 | 2014-02-26 | Device facilitating taking of wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104859989A true CN104859989A (en) | 2015-08-26 |
Family
ID=53906255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410066506.2A Pending CN104859989A (en) | 2014-02-26 | 2014-02-26 | Device facilitating taking of wafer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104859989A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105729219A (en) * | 2015-10-27 | 2016-07-06 | 芜湖市泰能电热器具有限公司 | Pushing device of electric heating tube blanking device |
| CN110962030A (en) * | 2019-12-31 | 2020-04-07 | 郑州盈万电子科技有限公司 | Metal plate surface polishing device for electronic product processing |
| CN118183314A (en) * | 2024-03-29 | 2024-06-14 | 南通南博旺智能科技有限公司 | Powder conveying and drying device |
-
2014
- 2014-02-26 CN CN201410066506.2A patent/CN104859989A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105729219A (en) * | 2015-10-27 | 2016-07-06 | 芜湖市泰能电热器具有限公司 | Pushing device of electric heating tube blanking device |
| CN110962030A (en) * | 2019-12-31 | 2020-04-07 | 郑州盈万电子科技有限公司 | Metal plate surface polishing device for electronic product processing |
| CN110962030B (en) * | 2019-12-31 | 2022-04-29 | 江西宏鼎盛光电有限公司 | Metal plate surface polishing device for electronic product processing |
| CN118183314A (en) * | 2024-03-29 | 2024-06-14 | 南通南博旺智能科技有限公司 | Powder conveying and drying device |
| CN118183314B (en) * | 2024-03-29 | 2024-08-20 | 南通南博旺智能科技有限公司 | Powder conveying and drying device |
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Legal Events
| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150826 |