CN104849791B - A kind of reflective one-dimensional metal wave plate of sub-wavelength and preparation method thereof - Google Patents
A kind of reflective one-dimensional metal wave plate of sub-wavelength and preparation method thereof Download PDFInfo
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- CN104849791B CN104849791B CN201510285816.8A CN201510285816A CN104849791B CN 104849791 B CN104849791 B CN 104849791B CN 201510285816 A CN201510285816 A CN 201510285816A CN 104849791 B CN104849791 B CN 104849791B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
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Abstract
The invention provides reflective one-dimensional metal wave plate of a kind of sub-wavelength and preparation method thereof, it can realize the function of 1/2nd and quarter-wave plate in not unison wave band, and the wave plate includes dielectric grating and the metal level being disposed thereon；Nanometer dielectric grating structure setting last layer class grating metal level, the cycle of dielectric grating is 80~350nm, and dutycycle is 0.3~0.8, and thickness is 50~200nm, more than the thickness ratio dielectric grating thickness 30nm of metal level（Interlamellar spacing is more than 30nm）.The material of dielectric layer can be SiO2、MgF2, PMMA, metal level is the high material of gold, silver, aluminium, cadmium isoreflectance.The present invention has simple in construction, it is easy in the advantages of making, optical sensor system, advanced nano-photon device and integrated optics system afterwards, with very big application value.
Description
Technical field
The present invention relates to optical element technology of preparing, and in particular to a kind of reflective one-dimensional metal wave plate of sub-wavelength and its system
Preparation Method.
Background technology
Research and application field in light, generation and the conversion and control of the polarization state of light are vital.Polarization is ripple
The attribute of piece, traditional polarization state is produced and control device is all to utilize birefringent crystal material mostly, when light incide it is double
During refracting crystal, due to there are different light refractive indexes along parallel and vertical optical axis two orthogonal directions, therefore when light is saturating
Transmitted light can produce position difference on the two orthogonal directions when crossing birefringece crystal, so as to change the polarization state of light.It is traditional brilliant
Bulk wave piece is limited as a kind of important optics by physical size, it is difficult to meet the requirement of micro-nano optoelectronic intagration.
Explore and the wave plate that is easy to micro-nano optoelectronic intagration of the research based on new principle seems very urgent.
The interaction of light and material is controlled because the surface of metal and medium can produce surface plasma resonance, when
Preceding second wavelength metallic structure increasingly causes the extensive concern of people.Khoo and Zhao propose transmission-type plasma quarter wave plate
Structure and implementation method, i.e., the perpendicular rectangular slot of design cycle property, narrow by control rectangle on metallic film
Transmitted light can be achieved mutually adjustable along the amplitude in two slit directions and position with arrangement mode in the length of seam, width, thickness, and
And can realize that 90 degree of position is differed on two orthogonal directions at target wavelength by optimal solution.2012,
Roberts et al. proposes a kind of similar structure i.e. using the metal Ag films with sub-wavelength decussate texture pattern, leads to
The criss-cross physical dimension of cyclic array is overregulated, plasma quarter wave plate can be realized in near-infrared certain wave strong point
Function.
In addition to transmission-type polarization converted device, due to being actually needed, reflective polarizing device also result in many
The attention of research group.2012, Pors et al. devised reflection-type plasma bit phase delay device, respectively by controlling cross
Shape, the brachium of rectangular configuration two and the length of side, to control the scattering resonance of orthogonal electric dipole, so that real in certain wave strong point
The function of existing reflective phase delayer.2013, Wang Qinhua et al. realized reflection-type four using sub-wavelength rectangle ring structure
The function of/mono- wave plate.The wave plate includes first layer metal layer, glassy layer, second layer metal layer.Wherein, second layer metal layer
It is made up of some periodic two-dimensional rectangle ring arrays, orthogonal point of mirror field is controlled by the way that the brachium and arm of control rectangle ring are wide
The phase difference of amount.2014, E. A. Shaner et al. were designed and have been made the reflective half-wave plate of tunable multiband, the wave plate
Including first layer metal layer, glassy layer, second layer metal grating layer.Half can be realized by adjusting incident angle in different wave length
The function of wave plate.
Summary structure is two-dimensional structure mostly and needs to make by etching metal.Due to the etching of metal
Difficulty is big, therefore said structure all has technics comparing complexity, the problem of manufacture difficulty is big.In order to overcome existing technical problem,
The present invention proposes a kind of reflective one-dimensional metal wave plate of sub-wavelength, and the wave plate realizes 1/2nd and four in not unison wave band
The function of/mono- wave plate.
The content of the invention
It is an object of the invention to provide a kind of reflective one-dimensional metal wave plate of sub-wavelength；It makes simple, not unison
Wave band realizes the function of 1/2nd and quarter-wave plate, optical sensor system, advanced nano-photon device and
In integrated optics system, with very big application value.
To achieve the above object of the invention, the technical solution adopted by the present invention is：A kind of reflective one-dimensional metal ripple of sub-wavelength
Piece, including nanometer dielectric grating and the metal level on the nanometer dielectric grating；The metal level and the nanometer medium
Gapless between grating；The metal level upper surface is provided with class optical grating construction；The cycle of the nanometer dielectric grating be 80~
350nm, dutycycle is 0.3~0.8, and thickness is 50~200nm.
In above-mentioned technical proposal, the metal level is continuous.The table of nanometer dielectric grating is completely covered in the metal level of the present invention
Face, and surface forms class optical grating construction thereon upwards；The groove of nanometer dielectric grating is filled with metal, the metal with grating surface
Layer lower surface is connected as a single entity, i.e., gapless between metal level and nanometer dielectric grating；The groove profile and dimensioning of nanometer dielectric grating
The very little groove profile and physical dimension for directly determining metallic upper surface grating.
The optics referred to as grating being made up of a large amount of wide equidistant parallel slits.Typically conventional grating is in base
Piece（Medium）On carve a large amount of parallel scores and be made, the smooth part between two indentations can be with printing opacity, equivalent to a groove, grating
Channel opening upward.In the present invention, metal level upper surface is provided with spaced groove, forms the structure similar to grating, claims
For class optical grating construction.
Graduating accuracy is reached to the grating referred to as nanometer grating of nanometer scale, compared with traditional raster, it has two weights
The characteristics of wanting：Superfinishing, scribe line position error reaches nanometer scale；Ultra-fine, the width of groove reaches sub-micrometer scale.The present invention
In, it is SiO as the medium of nanometer dielectric grating2、MgF2Or PMMA.
Equivalent homogeneous medium theory is a kind of diffraction theory for solving sub-wave length grating.Sub-wave length grating refers to that wavelength is more than
The grating of cycle magnitude.Sub-wavelength grate structure is equivalent to a kind of homogeneous dielectric film by equivalent homogeneous medium theory, this film
Equivalent refractive index changes with the change of grating dutycycle, in general, and the equivalent refractive index of TE polarization TM polarizations is different, by light
Grid are equivalent to after anisotropic homogeneous dielectric film, just the method in Film Optics can be used to solve optical grating diffraction.
Existing dielectric grating is usually to utilize diffraction light splitting, and metal grating also has the effect of polarizer, i.e., when light wave enters
When being mapped to sub-wave length metal grating surface, TE polarizations are shielded, and TM polarizations pass through.Wave plate then needs the TE and TM of incident light to polarize
Ripple all by and intensity is equal, and phase difference change, so as to realize the change of incident light polarization state.When the orthogonal direction of light wave two
The phase difference of electric field component as quarter-wave plate when being 90 degree, with the function of line polarisation being converted into circularly polarized light,
It is 1/2nd wave plates when the phase difference of the electric field component of the orthogonal direction of light wave two is 180 degree, with rotation linearly polarized light
The effect of the angle of polarization.The present invention utilizes the shape of similar grating groove profile first, and the product of preparation has the performance of reflective wave plate,
And the function of 1/2nd and quarter-wave plate is realized in not unison wave band, while solving existing process presence
The problem of metal groove profile is difficult to make, achieve unexpected technique effect.
In above-mentioned technical proposal, the metal is the high material of gold, silver, aluminium, cadmium isoreflectance；Preferably aluminium.It can adopt
Metal level is set on the nanometer dielectric grating with magnetron sputtering mode.The groove of nanometer dielectric grating is filled with metal, raised
Part is also sputtered the metal of same thickness, so as to form the trench structure of similar grating.
In above-mentioned technical proposal, the distance of the metal level top and dielectric grating upper surface is 30~50nm.If most
Narrow spacing is less than 30nm, and incident light can pass through metal level and then form super in the surface excitation surface plasma contacted with medium
Phenomenon, so that the reflection efficiency of wave plate can be substantially reduced.But if metal level is too thick, the metal watch during product is made
The pattern of layer can send out distortion upper, cause the performance reduction of designed wave plate, or even can not use.
The cycle of the nanometer dielectric grating is 80~350nm, and dutycycle is 0.3~0.8, and thickness is 50~200nm.Symbol
The conventional wavelengths that multiplex piece is used.In the design process of wave plate, the height H1 and dutycycle W/P of dielectric grating structure are to wave plate
Phase difference play main function, the thickness of metal level mainly influences the reflection efficiency of wave plate, and the cycle of dielectric grating is in Asia
Have an impact in wave-length coverage to the performance of wave plate, if the cycle of dielectric grating exceeds OK range, the wave plate meeting of last gained
Grating diffration effect is produced, the using effect of wave plate is influenceed；If the cycle is too small simultaneously, wave plate making can be greatly increased
Difficulty.
The invention also discloses the preparation method of the reflective one-dimensional metal wave plate of above-mentioned sub-wavelength, comprise the following steps：It is first
First, the resist coating on dielectric material；Then exposed development, then etch photoresist, then removes residual photoresist and is received
Rice dielectric grating；Finally, metal level is set on nanometer dielectric grating, that is, obtains the reflective one-dimensional metal wave plate of sub-wavelength.This
The wave plate of invention is the graphic structure of one-dimentional structure rather than two dimension, therefore can use traditional technique large-area manufacturing, and not
Need to etch metal, make simple, there is preferable application prospect.
In the present invention, the use dual-beam exposure imaging；Use reactive ion beam etching (RIBE) photoresist；Using magnetron sputtering side
Formula sets metal level on the nanometer dielectric grating.
Physical dimension as needed, develop pattern on a photoresist, with the uncured photoresist of reactive ion beam etching (RIBE)
And dielectric material, in dielectric surface formation grating groove；Acetone soln removal solidification photoresist is immersed again obtains a nanometer medium
Grating；Last splash-proofing sputtering metal formation metalloid grating groove profile structure sheaf, so as to obtain the reflective one-dimensional metal wave plate of sub-wavelength.
The present invention principle be：Because class grating groove profile has an anisotropic characteristic, parallel grid line and vertical grid line
Refractive index in both direction is differed, when incident linearly polarized light is incided on wire grating with polarization direction and grid line angulation
When, phase of the mirror field along two orthogonal direction components can be variant.When both phase differences meet be 180 degree odd-multiple, and
When amplitude Ex, Ey are equal, as 1/2nd wave plates；It is 90 degree of odd-multiple to be met when both phase differences, and amplitude Ex,
When Ey is equal, as quarter-wave plate.The present invention designs simple structure and simple preparation technology first, is had
There is the functional product of 1/2nd and quarter-wave plate, achieve unexpected effect.
Because above-mentioned technical proposal is used, the present invention has following advantages compared with prior art:
1. present invention firstly discloses the reflective one-dimensional metal wave plate of the sub-wavelength with similar optical grating construction, it is in difference
The wave band of degree realizes the function of 1/2nd and quarter-wave plate, average when at the polarized incident angle of line polarisation being 45 degree
Reflectivity is more than 80%.
2. the reflective one-dimensional metal wave plate of sub-wavelength disclosed in this invention is rational in infrastructure, be easy to make, nanometer grating knot
The dimensional parameters of structure are adjustable, and preparation method is applicable different metal levels；Overcoming prior art needs cumbersome preparation process
The defect of wave plate can be obtained.
3. the reflective one-dimensional metal wave plate raw material sources of sub-wavelength disclosed by the invention are wide, it is simple to prepare, compared to existing skill
Art financial resources, time cost are lower；And excellent performance, in optical sensor system, advanced nano-photon device and Integrated Light
In system, with very big application value.
Brief description of the drawings
Fig. 1 is the reflective one-dimensional metal wave plate structural representation of sub-wavelength of embodiment one；
Wherein, 1 is metal level, and 2 be nanometer dielectric grating；
Fig. 2 is the reflective one-dimensional metal wave plate cross section structure diagram of sub-wavelength of embodiment one；
Fig. 3 is the phase difference and the tendency of amplitude ratio of a kind of reflected light of the reflective one-dimensional metal wave plate of sub-wavelength of embodiment
Figure；
Fig. 4 is a kind of reflective one-dimensional metal wave plate of sub-wavelength of embodiment for the anti-of the incident line polarisation in different polarization direction
Penetrate rate curve map；
Fig. 5 is the phase difference and the tendency of amplitude ratio of the reflected light of the reflective one-dimensional metal wave plate of sub-wavelength of embodiment two
Figure；
Fig. 6 is the reflective one-dimensional metal wave plate of sub-wavelength of embodiment two for the anti-of the incident line polarisation in different polarization direction
Penetrate rate curve.
Embodiment
With reference to embodiment, accompanying drawing, the invention will be further described:
Referring to accompanying drawing 1, the reflective one-dimensional metal wave plate of sub-wavelength that the present invention is provided is by nanometer dielectric grating 2 and is located at
The metal level 1 of this nanometer of dielectric grating upper surface is constituted, and layer on surface of metal has class grating trench structure, nanometer dielectric grating
Groove is filled with metal；Wherein, the groove profile and physical dimension of dielectric grating directly determine the groove profile and dimensioning of metalloid grating
It is very little.The one-dimentional structure of the present invention refers to the structure only changed in three dimensions in a dimension, such as nano wire.
The preparation method of the reflective one-dimensional metal wave plate of sub-wavelength of the present invention comprises the following steps：First, in medium side
It is upper apply a layer thickness for H1（H1 is determined by designed grating depth）Photoresist, physical dimension as needed, warp
Dual-beam exposure imaging is crossed, develop pattern on a photoresist, and use the uncured photoresist of reactive ion beam etching (RIBE) and Jie
Material, in dielectric surface formation grating groove, groove depth H1；Immersion acetone soln removes residual photoresist and obtains dielectric grating；
Finally, magnetically controlled sputter method is used to plate a layer thickness for H1+H2 on the dielectric grating shifted（H2 is more than 30nm）Gold
Belong to layer, so as to obtain the reflective one-dimensional metal wave plate of sub-wavelength.
Embodiment one
Referring to accompanying drawing 2, medium grating material is SiO in the present embodiment2, cycle P=300nm, dielectric grating thickness H1=
100nm, dutycycle W/P=0.5, metallic aluminum class grating thickness H1+H2=140nm.The structure can in 514nm-536nm wave bands
Regard 1/2nd wave plates as, ellipticity is within 0.08；The structure has in 676nm-704nm simultaneously can regard quarter-wave as
Piece, ellipticity in the range of 0.87-0.91, the polarized incident angle of line polarisation be 45 degree when, average reflectance is more than 80%.
Referring to accompanying drawing 3, be the reflective one-dimensional metal wave plate of above-mentioned sub-wavelength in 0.4um~1um wave bands, reflected light two just
Hand over the phase difference of durection component Ex, Ey and the trend graph of amplitude ratio；By phase difference curve we can see that in short-wave band
（0.4um）The phase difference of two orthogonal direction components can reach 4.5rad, with the growth of wave band, and phase difference is into continuously successively decreasing
Gesture.It is that phase difference is 0.5rad at 1um in wavelength, therefore phase difference can reach 180 degree and 90 degree i.e. in two different wave bands
Phase difference needed for 1/2nd wave plates and quarter-wave plate.Meanwhile, stablized relatively in 0.4um~1um wave bands by amplitude ratio
Within 1.16-1.06, therefore the relative value of two components is considered as approximately equal.In phase difference in 5% error range
The structure can regard 1/2nd wave plates as in 514nm-536nm wave bands；The structure can regard four points as in 676nm-704nm simultaneously
One of wave plate.
Referring to accompanying drawing 4, be the reflective one-dimensional metal wave plate of above-mentioned sub-wavelength in 0.4um~1um wave bands for different polarizations
The reflectance curve figure of direction incidence line polarisation.The angle of polarization of incident light has an impact to the reflectivity of wave plate as figure shows, works as line
The polarized incident angle of polarisation（That is TM ripples）When, reflectivity is minimum, when the polarized incident angle of line polarisation（That is TE ripples）When, reflectivity is most
Greatly.When the polarized incident angle of line polarisation is 45 degree, reflectivity is more than 80%.
Embodiment two
Medium grating material is MgF in the present embodiment2, cycle P=250nm, dielectric grating thickness H1=118nm, dutycycle
W/P=0.4, metallic aluminum class grating thickness H1+H2=158nm.The structure can regard 1/2nd as in 511nm-549nm wave bands
Wave plate, ellipticity is within 0.07；The structure has in 763nm-810nm simultaneously can regard quarter-wave plate as, and ellipticity exists
In the range of 0.88-0.90, the polarized incident angle of line polarisation be 45 degree when, average reflectance is more than 75%.
It is the Central Asia wavelength reflection formula one-dimensional metal wave plate of examples detailed above two in 0.4um~1um wave bands referring to accompanying drawing 5, reflection
Light is in two orthogonal direction component Ex, Ey phase difference and the trend graph of amplitude ratio；By phase difference curve we can see that short
Wave band（0.4um）The phase difference of two orthogonal direction components can reach 4.5rad, with the growth of wave band, and phase difference is into continuously successively decreasing
Trend.It is that phase difference is 1.0rad at 1um in wavelength, therefore phase difference can reach 180 degree and 90 degree in two different wave bands
That is the phase difference needed for 1/2nd wave plates and quarter-wave plate.Meanwhile, it is relatively steady in 0.4um~1um wave bands by amplitude ratio
It is scheduled within 1.12-1.02, therefore the relative value of two components is considered as approximately equal.In error range of the phase difference 5%
The interior structure can regard 1/2nd wave plates as in 511nm-549nm wave bands；The structure can regard four as in 763nm-810nm simultaneously
/ mono- wave plate.
Referring to accompanying drawing 6, be the Central Asia wavelength reflection formula one-dimensional metal wave plate of examples detailed above two 0.4um~1um wave bands for
The reflectance curve figure of the incident line polarisation in different polarization directions.The angle of polarization of incident light has shadow to the reflectivity of wave plate as figure shows
Ring, when the polarized incident angle of line polarisation（That is TM ripples）When, reflectivity is minimum, when the polarized incident angle of line polarisation（That is TE ripples）When,
Reflectivity is maximum.When the polarized incident angle of line polarisation is 45 degree, reflectivity is more than 75%.
Claims (8)
1. a kind of reflective one-dimensional metal wave plate of sub-wavelength, it is characterised in that：The wave plate includes nanometer dielectric grating and is located at
Metal level on the nanometer dielectric grating；Gapless between the metal level and the nanometer dielectric grating；The metal level
Upper surface is provided with class optical grating construction；The cycle of the nanometer dielectric grating is 80~350nm, and dutycycle is 0.3~0.8, thickness
For 50~200nm.
2. the reflective one-dimensional metal wave plate of sub-wavelength according to claim 1, it is characterised in that：The metal level is continuous.
3. the reflective one-dimensional metal wave plate of sub-wavelength according to claim 1, it is characterised in that：The metal is gold, silver, aluminium
Or cadmium.
4. the reflective one-dimensional metal wave plate of sub-wavelength according to claim 3, it is characterised in that：The metal is aluminium.
5. the reflective one-dimensional metal wave plate of sub-wavelength according to claim 1, it is characterised in that：Existed using magnetron sputtering mode
Metal level is set on the nanometer dielectric grating.
6. the reflective one-dimensional metal wave plate of sub-wavelength according to claim 1, it is characterised in that：The nanometer dielectric grating
Medium is SiO2、MgF2Or PMMA.
7. the reflective one-dimensional metal wave plate of sub-wavelength according to claim 1, it is characterised in that：The metal level top is with being situated between
The distance of matter grating upper surface is 30~50nm.
8. the reflective one-dimensional metal wave plate of sub-wavelength according to claim 1, it is characterised in that：The nanometer dielectric grating
Cycle is 250~300nm, and dutycycle is 0.4~0.5, and thickness is 100~120nm.
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| CN201510285816.8A CN104849791B (en) | 2015-05-29 | 2015-05-29 | A kind of reflective one-dimensional metal wave plate of sub-wavelength and preparation method thereof |
| CN201710572342.4A CN107203018B (en) | 2015-05-29 | 2015-05-29 | A kind of preparation method of the reflective one-dimensional metal wave plate of sub-wavelength |
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| CN105487153B (en) * | 2015-12-23 | 2018-03-09 | 中国科学院重庆绿色智能技术研究院 | A kind of high efficiency subtractive filter based on composite ultra-thin metal |
| CN105911709A (en) * | 2016-06-22 | 2016-08-31 | 深圳市华星光电技术有限公司 | 3d micro light emitting diode display device |
| CN106125186A (en) * | 2016-08-30 | 2016-11-16 | 南京大学 | A kind of wide frequency band angle reflection formula half-wave plate |
| CN108845385A (en) * | 2016-09-08 | 2018-11-20 | 苏州大学 | Pixel type based on plasma primitive is orientated double-layer nanometer grating linear polarizer more |
| CN107219723B (en) * | 2017-08-02 | 2021-01-22 | 京东方科技集团股份有限公司 | Manufacturing method of metal grating, metal grating and display device |
| CN107765359B (en) * | 2017-11-10 | 2020-04-21 | 中国科学院半导体研究所 | Efficient wave plate based on resonant cavity enhanced waveguide transmission |
| CN108761616B (en) * | 2018-03-23 | 2020-10-16 | 中国科学院上海光学精密机械研究所 | Multi-band high-reflection flexible wave plate and preparation method thereof |
| CN108761617A (en) * | 2018-03-23 | 2018-11-06 | 中国科学院上海光学精密机械研究所 | Cavity-enhanced high reflection wave plate of medium and preparation method thereof |
| CN109581571A (en) * | 2018-12-11 | 2019-04-05 | 龙岩学院 | Bar shaped sub-wavelength aluminum metal polarization grating |
| CN110737039A (en) * | 2019-11-04 | 2020-01-31 | 江苏集萃智能传感技术研究所有限公司 | reflection type color filter and application thereof |
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| CN101290371A (en) * | 2008-05-30 | 2008-10-22 | 苏州大学 | Sub-wavelength grate structure polarizing film and its manufacture method |
| CN102109625A (en) * | 2011-03-02 | 2011-06-29 | 中国科学院半导体研究所 | Method for manufacturing subwavelength grating reflector with high reflectivity and high bandwidth |
| CN102346269B (en) * | 2011-11-09 | 2014-08-13 | 苏州大学 | Reflective color filter |
| CN103293578A (en) * | 2012-03-05 | 2013-09-11 | 王广武 | Light permeating and shielding combined grating and manufacturing method thereof |
| CN102879849B (en) * | 2012-10-26 | 2015-04-15 | 苏州大学 | Sub-wavelength grating structure polarizer |
| CN102981205B (en) * | 2012-12-26 | 2015-02-04 | 苏州大学 | Sub-wavelength rectangular ring array quarter wave plate and fabrication method thereof |
| US9239432B2 (en) * | 2013-03-14 | 2016-01-19 | Micron Technology, Inc. | Photonics grating coupler and method of manufacture |
| CN104459852B (en) * | 2013-09-22 | 2017-02-01 | 清华大学 | Preparation method of metal grating |
| CN204758858U (en) * | 2015-05-29 | 2015-11-11 | 苏州大学 | Reflective one -dimensional metal wave plate of inferior wavelength |
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