CN109581571A - Bar shaped sub-wavelength aluminum metal polarization grating - Google Patents
Bar shaped sub-wavelength aluminum metal polarization grating Download PDFInfo
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- CN109581571A CN109581571A CN201811509019.3A CN201811509019A CN109581571A CN 109581571 A CN109581571 A CN 109581571A CN 201811509019 A CN201811509019 A CN 201811509019A CN 109581571 A CN109581571 A CN 109581571A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
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Abstract
The present invention relates to a kind of bar shaped sub-wavelength aluminum metal polarization gratings, belong to Application Optics technical field.A length of 12mm, the width 1.5mm of the bar shaped sub-wavelength aluminum metal polarization grating are formed by 12000 aluminum metal grizzly bar units are arranged in parallel, the grizzly bar direction of each unit successively changes 60 ' ', screen periods are 200nm, and duty ratio 0.5, grating ridge is with a thickness of 200mm.Grating has significant polarization beam splitting to act on the linearly polarized light that wavelength is greater than 3 times of its period or more, light wave components TE wave i.e. parallel with aluminum metal grizzly bar direction is reflected or absorbed, light wave components TM wave normal thereto is directed through, and the TM wave transmitance of grating is higher than 0.80, and extinction ratio is greater than 34dB.Linearly polarized light forms the bright dark staggered striped hot spot of a vertical direction by grating, and as the rotating linear of plane of polarization translates.The bar shaped sub-wavelength aluminum metal polarization grating can be used for the measurement of linearly polarized light angle of rotation.
Description
Technical field
The present invention relates to Application Optics technical field, in particular to a kind of bar shaped applied in visible light and near infrared range
Sub-wavelength aluminum metal polarization grating.
Background technique
In polarized light detection survey technology, polarizer both can be used as the polarizer and generate polarised light, can also be used as analyzing
Device detects the polarization state of output light, is indispensable important devices.Polarizer according to the difference of production method be divided into
Under it is several: reflection-type, birefringence mode, dichroism type, scatter-type and sub-wave length metal grating type.Wherein, sub-wavelength metal
Grating has the characteristics that small in size, clear field is big, compact-sized, polarization property is good, is easily integrated, and is production polarizer
Ideal method has obtained the extensive research of domestic and foreign scholars.It is different from other polarizers, the polarization of sub-wave length metal grating
The direction that the direction of extinction depends on grizzly bar can form arbitrary polarisation distribution by being controlled to grizzly bar direction.
1888, Hertz first proposed the polarization characteristic of sub-wave length metal grating, it is indicated that polarization direction and metal grizzly bar
Perpendicular electromagnetism wave energy is by grating, and the polarization direction wave parallel with grizzly bar is then prevented from.2001, Bomzon et al.
A kind of novel sub-wave length metal grating is made using holographic computing technique, but screen periods are much larger than 1 μm.In recent years, it transports
The period of grating can be reduced to several hundred nanometers with electron-beam direct writing, plasma etching technology, and be extended its effective wavelength
To visible light and near infrared range.2010, Tsinghua University Zhou Zhehai et al. was prepared for polarization purity up to 98.4% polarised light
Beam switching device can be applied compared with broadband, and achromatic properties are preferable.Z.Ghadyani in 2011 et al. has studied the period and is
200nm concentric ring metal grating, operation wavelength 632.8nm can generate the radial polarisation light in visible-range.
The measuring principle of existing electric power optical transformer is based on Malus' law, i.e., turns the rotation of linearly polarized light plane of polarization
The cyclic fluctuation of output intensity is turned to, thus measurement result has optical power correlation, and measurement range is extremely restricted.
Summary of the invention
The purpose of the present invention is to provide a kind of bar shaped sub-wavelength aluminum metal polarization gratings, solve of the existing technology
The above problem.The rotation of linearly polarized light plane of polarization is converted to fixed light by bar shaped sub-wavelength aluminum metal polarization grating by the present invention
The linear translation of spot, can be used for the measurement of linearly polarized light angle of rotation, and have the advantages that optical power independence, measurement range is big.This
The gratings strips direction of invention in the horizontal direction rule variation, linearly polarized light by grating formed one along the vertical direction it is bright secretly interlock
Striped hot spot, and with the rotating linear of plane of polarization translate.The TM wave transmitance of grating is higher than 80%, and extinction ratio is greater than
34dB.By detect hot spot displacement, it can be achieved that linearly polarized light angle of rotation measurement.
Above-mentioned purpose of the invention is achieved through the following technical solutions:
Bar shaped sub-wavelength aluminum metal polarization grating advises in the metal grizzly bar direction of sub-wavelength aluminum metal grating in the horizontal direction
Then change, obtains bar shaped sub-wavelength aluminum metal polarization grating；Sub-wavelength aluminum metal grating, which is one, has periodic spatial structure
Diffraction screen, the light wave components TE wave parallel with metal grizzly bar direction be reflected or absorbed, the light vertical with metal grizzly bar direction
Wave component TM wave is directed through；Linearly polarized light is secretly interlocked by bar shaped sub-wavelength aluminum metal polarization grating in a vertical direction is bright
Striped hot spot, and with the rotating linear of plane of polarization translate.
It is formed by 12000 aluminum metal grizzly bar units are arranged in parallel, from left to right the direction of each grizzly bar unit gradually becomes
Change 60 ", wherein 0 ° of metal grating direction for being located at middle is vertical direction, and as benchmark, 45 ° and 90 ° of metal light
The direction of grizzly bar unit has rotated clockwise 45 ° and 90 ° respectively, and -45 ° with -90 ° of metal grating cell orientations respectively along the inverse time
Needle has rotated -45 ° and -90 °；When the plane of polarization direction of incident ray polarized light is horizontal direction, with 0 ° of metal grating unit
Direction it is vertical, TM wave can not penetrate, and correspond to the center of emergent light spot dark line at this time；With 90 ° and -90 ° of metal grating items
The direction of unit is parallel, and TM wave is completely through corresponding to the center of bright rays；Therefore, it ultimately forms bright dark along the vertical direction
Staggered stripe pattern, and translated with the rotating linear of linearly polarized light plane of polarization.
Long l=12mm, wide d=1.5mm, the screen periods 200nm of the bar shaped sub-wavelength aluminum metal polarization grating,
Duty ratio is 0.5, and grating ridge is with a thickness of 200mm, and grating ridge is wide and grating groove width is 100nm.
The TM wave transmitance of the bar shaped sub-wavelength aluminum metal polarization grating be 0.80~0.87, delustring be 34~
39dB。
It is the linear translation of fixed hot spot by the translating rotation of linearly polarized light plane of polarization, and the displacement and rotation angle of striped
Spend direct, linear measurement directly proportional, therefore that angle of rotation can be realized by location spot.
The beneficial effects of the present invention are: the linearly polarized light optically-active angular measurement based on bar shaped sub-wavelength aluminum metal polarization grating
Method, by the linear translation for being converted to light and shade striped of linearly polarized light plane of polarization, and the displacement of striped and rotation angle
It is directly proportional, the measurement of angle of rotation can be realized by ccd image sensor location spot.Solves existing electric power optical transformer
Middle Faraday rotation angle or electric light phase delay angle nonlinear measurement, the problems such as optical power is related improve measurement range and steady
It is qualitative.
Detailed description of the invention
The drawings described herein are used to provide a further understanding of the present invention, constitutes part of this application, this hair
Bright illustrative example and its explanation is used to explain the present invention, and is not constituted improper limitations of the present invention.
Fig. 1 is bar shaped sub-wavelength aluminum metal polarization grating structure chart；
Fig. 2 is the specific schematic diagram of bar shaped sub-wavelength aluminum metal polarization grating；
Fig. 3 is the surface of intensity distribution after bar shaped sub-wavelength aluminum metal polarization grating analyzing；
Fig. 4 is each parameter schematic diagram of bar shaped sub-wavelength aluminum metal polarization grating；
Fig. 5 is the pictorial diagram of bar shaped sub-wavelength aluminum metal polarization grating；
Fig. 6 is the TM wave transmitance and extinction ratio optical system for testing of bar shaped sub-wavelength aluminum metal polarization grating；
Fig. 7 is the polarization property optical system for testing of bar shaped sub-wavelength aluminum metal polarization grating.
In figure: 1, sub-wave length metal grating；2, grating ridge thickness；3, screen periods；4, grating ridge is wide；5, grating groove width；
6, grating substrate；7, light source；8, the polarizer；9, half-wave plate；10, diaphragm；11, bar shaped sub-wavelength aluminum metal polarization grating；12, light
Electric explorer；13, beam expanding lens；14, ccd image sensor.
Specific embodiment
Detailed content and its specific embodiment of the invention are further illustrated with reference to the accompanying drawing.
Referring to shown in Fig. 1 to Fig. 7, sub-wave length metal grating 1 is the diffraction screen with periodic spatial structure, is had
Good polarization characteristic, the light wave components TE parallel with metal grizzly bar direction (Transverse Electric) wave reflected or
It absorbs, light wave components TM normal thereto (Transverse Magnetic) wave is directed through.Therefore, sub-wave length metal grating 1
Polarization through direction depend on metal grizzly bar direction.Using this principle, by the sub-wave length metal grating 1 on grating substrate 6
Metal grizzly bar direction along horizontal rule variation, bar shaped sub-wavelength aluminum metal polarization grating is obtained, such as attached drawing 1, shown in 2.With rule
For lattice is 200 ° of (± 100 °) bar shaped sub-wave length metal gratings 1, formed by 12000 aluminum metal grizzly bar units are arranged in parallel,
From left to right the direction of gratings strips unit gradually changes 60 ", wherein 0 ° of metal grating direction for being located at middle is vertical side
To, and as benchmark, the direction of 45 ° and 90 ° metal grating units has rotated clockwise 45 ° and 90 ° respectively, -45 ° and -
90 ° of metal grating cell orientations have rotated -45 ° and -90 ° along counterclockwise respectively.When the plane of polarization direction of incident ray polarized light
When for horizontal direction, vertical with the direction of 0 ° of metal grating unit, TM wave can not be penetrated, and correspond to emergent light spot dark line at this time
Center；Parallel with the direction of 90 ° and -90 ° metal grating units, TM wave is completely through corresponding to the centre bit of bright rays
It sets.Therefore, bright dark staggered stripe pattern along the vertical direction is ultimately formed, and mild-natured with the rotational line of linearly polarized light plane of polarization
It moves.
According to Vector Diffraction Theory, incident light can be with one with sky by the process of bar shaped sub-wavelength aluminum metal polarization grating
Between the Jones matrix that changes indicate:
In formula,For spin matrix, wherein(change between -90 °~90 °) for metal grizzly bar direction；G[κ
(x, y)] it can be indicated with diagonal matrix:
In formula, tTM、tTEIt is the diffraction efficiency (referred to as transmitance) of the transmitted component of TM wave and TE wave respectively；ξ is two
Phase difference between light wave.Since grating has very high extinction ratio (tTM<<tTE), tTEIt is negligible.Therefore, bar shaped Asia wave
Long aluminum metal polarization grating can be described as light transmission shaft perpendicular to grating azimuthLinear polarizer, formula (1) can be rewritten as:
Assuming that the direction of incident ray polarized light plane of polarization and system x-axis angle are α, amplitude 1, then the fine jade of incidence light vector
This matrix are as follows:
After bar shaped sub-wavelength aluminum metal polarization grating, the Jones matrix for being emitted light vector be may be expressed as:
Obtain the light intensity expression of Transmission field are as follows:
Output intensity is as shown in Fig. 3, changes linearly polarized light plane of polarization angle [alpha], and emergent light spot is linearly put down with the variation of α
It moves.Therefore by the displacement of detection hot spot, it can be achieved that direct, the linear measurement of linearly polarized light angle of rotation.
The parameter designing of bar shaped sub-wavelength aluminum metal polarization grating:
Sub-wave length grating is as polarizer, and transmitance can reflect device to the utilization rate of light, and extinction ratio can be measured partially
Vibration effect.Divided using TM wave transmitance and extinction ratio of the rigorous coupled-wave method to bar shaped sub-wavelength aluminum metal polarization grating
Analysis and comparison, so that it is determined that the parameters of grating, as shown in Fig. 4.
The relationship of grating performance and grating ridge thickness:
Assuming that a length of 780nm of incident light wave, aluminum metal screen periods are 200nm, and duty ratio 0.5 enables grating ridge thickness
Variation range is 100~250nm, obtains the variation relation of grating performance Yu grating ridge thickness, as shown in table 1.As it can be seen that grating
The variation of TM wave transmitance is not obvious, and extinction ratio increases with grating ridge thickness and increased.In addition, it is contemplated that grating ridge thickness mistake
Great Yi collapses, therefore chooses with a thickness of 200nm.
The relationship of table 1 grating performance and grating ridge thickness
| Grating ridge thickness/nm | TM wave transmitance | Extinction ratio/dB |
| 100 | 0.8037 | 21.7 |
| 150 | 0.7832 | 31.1 |
| 200 | 0.8226 | 41.3 |
| 250 | 0.8426 | 49.9 |
The relationship of grating performance and duty ratio:
It is assumed that a length of 780nm of incident light wave, aluminum metal screen periods are 200nm, and grating ridge provides with a thickness of 200nm, table 2
The situation of change of grating performance at different duty (0.2-0.5).As it can be seen that the transmitance of TM wave with the increase of duty ratio and
Reduce, and extinction ratio increases with the increase of duty ratio.
The relationship of table 2 grating performance and duty ratio
| Duty ratio | TM wave transmitance | Extinction ratio/dB |
| 0.2 | 0.8741 | 13.1 |
| 0.3 | 0.8471 | 22.7 |
| 0.4 | 0.8303 | 32.6 |
| 0.5 | 0.8226 | 41.3 |
Comprehensively consider, the period for selecting bar shaped sub-wavelength aluminum metal polarization grating is 200nm, duty ratio 0.5, grating ridge
With a thickness of 200mm.
The performance test of bar shaped sub-wavelength aluminum metal polarization grating:
The pictorial diagram of bar shaped sub-wavelength aluminum metal polarization grating is as shown in Fig. 5, using rigorous coupled-wave method to bar shaped
The TM wave transmitance and extinction ratio of sub-wavelength aluminum metal polarization grating are analyzed and are compared, and determine the parameters of grating are as follows:
As shown in Fig. 1, grating total length l=12mm, width d=1.5mm, it is arranged in parallel by 12000 aluminum metal grizzly bar units altogether
It forms, the grizzly bar direction of each unit successively changes 60 "；As shown in Fig. 4, screen periods 3 are 200nm, grating ridge wide 4 and light
Grid groove width 5 is 100nm, and duty ratio 0.5, grating ridge thickness 2 is 200nm；After tested, which polarizes
Grating transmitance is 0.80~0.87, and extinction ratio is 34~39dB, and realizes the survey that linearly polarized light angle of rotation is direct, linear
Amount.
The transmitance and extinction ratio optical system for testing of bar shaped sub-wavelength aluminum metal polarization grating are as shown in Fig. 6.Light source 7 is
The laser of 780nm, spot radius 2mm, the precision of photodetector are nW rank.The light that light source 7 issues passes through the polarizer
8, photodetector 12 is reached after half-wave plate 9, diaphragm 10 and bar shaped sub-wavelength aluminum metal polarization grating 11, wherein diaphragm 10 is used to
Adjust spot size.By rotatable halfwave plate 9, change the polarization direction of incident light, the maximum value of detection outgoing optical power and most
Small value, wherein maximum value corresponds to the polarization of TM wave through light intensity.Test result is as shown in table 3, each provides four, grating not
With the output intensity of position.It can be seen that the TM light transmission rate of grating is 0.80~0.87, extinction ratio is 34~39dB, with simulation result
It is consistent.
3 grating the performance test results of table
| Test point | Initial beam intensity/nW | Output intensity/nW | TM wave transmitance | Extinction ratio/dB |
| 1 | 25 | 21.7 | 0.87 | 39.6 |
| 2 | 25 | 19.9 | 0.80 | 34.2 |
| 3 | 25 | 20.4 | 0.82 | 36.1 |
| 4 | 25 | 20.6 | 0.82 | 36.5 |
In addition, testing the polarization property of bar shaped sub-wavelength aluminum metal polarization grating, optical path is as shown in Fig. 7.It is first
The fast axle of half-wave plate 9 is first placed in vertical direction, emergent light spot image is as shown in Fig. 3.The fast axis direction of half-wave plate 9 is adjusted,
In a clockwise direction be "+", be counterclockwise "-", make linearly polarized light plane of polarization rotate respectively -90 °, -45 ° ,+45 ° and+
90°.The light that light source 7 issues arrives after the polarizer 8, half-wave plate 9, beam expanding lens 13 and bar shaped sub-wavelength aluminum metal polarization grating 11
Up to photoelectricity ccd image sensor 14.After 11 analyzing of bar shaped sub-wavelength aluminum metal polarization grating, examined by ccd image sensor 14
The displacement of hot spot, respectively 5.45mm, 2.68mm, 2.71mm and 5.42mm are surveyed, is compared with theoretical value, error is less than 1%.
The foregoing is merely preferred embodiments of the invention, are not intended to restrict the invention, for the technology of this field
For personnel, the invention may be variously modified and varied.All any modification, equivalent substitution, improvement and etc. made for the present invention,
It should all be included in the protection scope of the present invention.
Claims (5)
1. a kind of bar shaped sub-wavelength aluminum metal polarization grating, it is characterised in that: by the metal grizzly bar side of sub-wavelength aluminum metal grating
To rule variation in the horizontal direction, bar shaped sub-wavelength aluminum metal polarization grating is obtained；Sub-wavelength aluminum metal grating, which is one, to be had
The diffraction screen of periodic spatial structure, the light wave components TE wave parallel with metal grizzly bar direction is reflected or absorbed, with metal gate
The vertical light wave components TM wave in direction is directed through；Linearly polarized light is perpendicular in one by bar shaped sub-wavelength aluminum metal polarization grating
Straight Directional Brightness secretly staggered striped hot spot, and as the rotating linear of plane of polarization translates.
2. bar shaped sub-wavelength aluminum metal polarization grating according to claim 1, it is characterised in that: by 12000 aluminum metals
Grizzly bar unit is arranged in parallel to be formed, and from left to right the direction of each grizzly bar unit gradually changes 60 ' ', wherein being located at middle
0 ° of metal grating direction is vertical direction, and as benchmark, up time is distinguished in the direction of 45 ° and 90 ° metal grating units
Needle has rotated 45 ° and 90 °, and -45 ° and -90 ° of metal grating cell orientations have rotated -45 ° and -90 ° along counterclockwise respectively；When
When the plane of polarization direction of incident ray polarized light is horizontal direction, vertical with the direction of 0 ° of metal grating unit, TM wave can not be saturating
It crosses, corresponds to the center of emergent light spot dark line at this time；Parallel with the direction of 90 ° and -90 ° metal grating units, TM wave is complete
Full impregnated mistake corresponds to the center of bright rays；Therefore, bright dark staggered stripe pattern along the vertical direction is ultimately formed, and with line
The rotating linear of polarised light plane of polarization translates.
3. bar shaped sub-wavelength aluminum metal polarization grating according to claim 1 or 2, it is characterised in that: the bar shaped is sub-
The length of wavelength aluminum metal polarization gratingl=12mm, it is wided=1.5mm, screen periods 200nm, duty ratio 0.5, grating ridge thickness
For 200mm, grating ridge is wide and grating groove width is 100nm.
4. bar shaped sub-wavelength aluminum metal polarization grating according to claim 1 or 2, it is characterised in that: the bar shaped is sub-
The TM wave transmitance of wavelength aluminum metal polarization grating is 0.80 ~ 0.87, and delustring is 34 ~ 39dB.
5. bar shaped sub-wavelength aluminum metal polarization grating according to claim 1 or 2, it is characterised in that: linearly polarized light is inclined
The translating rotation in vibration face is the linear translation of fixed hot spot, and the displacement of striped is directly proportional to rotation angle, therefore by fixed
Direct, the linear measurement of angle of rotation can be realized in position hot spot.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111221068A (en) * | 2020-01-21 | 2020-06-02 | 东南大学 | Polarizer based on sub-wavelength grating structure |
| CN113937171A (en) * | 2021-11-23 | 2022-01-14 | 长春理工大学 | Ultraviolet polarization spectrum detector based on metal wire grid composite film |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103149615A (en) * | 2013-03-14 | 2013-06-12 | 上海交通大学 | Preparation method of multilayer metal grating |
| CN103675968A (en) * | 2012-09-19 | 2014-03-26 | 徐启峰 | Annular radial line aluminum metal polarization transmission grating |
| CN107203018A (en) * | 2015-05-29 | 2017-09-26 | 苏州大学 | A kind of preparation method of the reflective one-dimensional metal wave plate of sub-wavelength |
-
2018
- 2018-12-11 CN CN201811509019.3A patent/CN109581571A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103675968A (en) * | 2012-09-19 | 2014-03-26 | 徐启峰 | Annular radial line aluminum metal polarization transmission grating |
| CN103149615A (en) * | 2013-03-14 | 2013-06-12 | 上海交通大学 | Preparation method of multilayer metal grating |
| CN107203018A (en) * | 2015-05-29 | 2017-09-26 | 苏州大学 | A kind of preparation method of the reflective one-dimensional metal wave plate of sub-wavelength |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111221068A (en) * | 2020-01-21 | 2020-06-02 | 东南大学 | Polarizer based on sub-wavelength grating structure |
| CN111221068B (en) * | 2020-01-21 | 2021-11-09 | 东南大学 | Polarizer based on sub-wavelength grating structure |
| CN113937171A (en) * | 2021-11-23 | 2022-01-14 | 长春理工大学 | Ultraviolet polarization spectrum detector based on metal wire grid composite film |
| CN113937171B (en) * | 2021-11-23 | 2024-06-04 | 长春理工大学 | Ultraviolet polarized spectrum detector based on metal wire grid composite film |
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