CN107272216A - Transmission-type metal Meta Materials light beam polarization distribution transformation device - Google Patents

Transmission-type metal Meta Materials light beam polarization distribution transformation device Download PDF

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Publication number
CN107272216A
CN107272216A CN201710649485.0A CN201710649485A CN107272216A CN 107272216 A CN107272216 A CN 107272216A CN 201710649485 A CN201710649485 A CN 201710649485A CN 107272216 A CN107272216 A CN 107272216A
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metal
metallic particles
light beam
transformation device
meta materials
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CN201710649485.0A
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韦欣
胡晓斌
宋国峰
李健
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Institute of Semiconductors of CAS
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Institute of Semiconductors of CAS
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Priority to CN201710649485.0A priority Critical patent/CN107272216A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/286Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/002Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • G02B5/3025Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3058Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles

Abstract

The invention provides a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device, including:Dielectric substrate;Metal metamaterial layer, is arranged in dielectric substrate;The metal metamaterial layer includes metallic particles cyclic array;Media packs layer, is arranged in metal metamaterial layer;Each metallic particles in metallic particles cyclic array at least has a pair of parallel smooth flat side wall, to form fabry perot cavity between the adjacent metal particles perpendicular to smooth flat sidewall direction;Metal metamaterial layer, which is included, has an azimuthal metallic particles cyclic array, and the larization rotation angle of incident light is regulated and controled by changing the azimuth;Or metal metamaterial layer includes multiple metallic particles cyclic arrays with different orientations, it is distributed by changing the spatial polarization of spatial arrangement mode conversion incident light of multiple metallic particles cyclic arrays.The device, which has, adapts to the characteristics of wide waveband, operating efficiency are high, device architecture is simple and easily prepared.

Description

Transmission-type metal Meta Materials light beam polarization distribution transformation device
Technical field
The present invention relates to optics field, and in particular to a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device Part.
Background technology
Compared with Traditional optics, Meta Materials optics can the device function of flexible design, sub-wavelength magnitude with it Active parts thickness and being easily integrated many outstanding advantages such as planer device structure and cause the wide of people General concern.The scheme for carrying out light beam polarization distribution transformation using optical metamaterial has also been appeared in the newspapers repeatly.According to functional unit material Species is divided, and existing Meta Materials light beam polarization control device can be divided into medium Meta Materials Polarization Control device and metal Meta Materials The class of Polarization Control device two.Wherein, polarization regulation and control are carried out to incident light using the meter Gong Zhen in media particle more than medium Meta Materials, And metal Meta Materials typically carry out polarization regulation and control using the surface plasmon resonance in metal structure.
Light beam polarization control device based on medium Meta Materials is more than in wavelength under the conditions of the wave band of its ABSORPTION EDGE, and it absorbs Loss is extremely low, thus device shows high operating efficiency;And under the conditions of wavelength is less than the wave band of its ABSORPTION EDGE, medium material Material shows strong absorption, thus can not efficient operation.Such as most common medium Meta Materials working media silicon, its service band is limited System can not realize efficient polarization regulation and control more than 1.1 microns in visible light wave range.Part utilizes broad stopband dielectric material such as Although the device of titanium oxide can work in visible light wave range, its structure depth-width ratio is too big, prepares difficulty greatly, cost pole It is high, it is difficult to popularize.
The metal Meta Materials light beam polarization control device of early stage is made up of individual layer super thin metal nanostructured mostly, such Meta Materials light beam polarization control device based on individual layer super thin metal nanostructured can not effectively suppress the reflection of metal structure With absorption, thus its efficiency is very low.Electric resonance and magnetic resonance can be produced in multiple layer metal nanostructured simultaneously, so as to portion Point suppress reflection with absorbing, its efficiency has very big carry compared to the phase regulation and control device of early stage individual layer super thin metal nanostructured Rise, but peak efficiency is still below 50% at present, and also the preparation technology of multiple layer metal nanostructured is complicated, cost is high.
The content of the invention
(1) technical problem to be solved
In view of above-mentioned technical problem, the invention provides a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device Part, it is simple and easily prepared that it adapts to wide waveband, operating efficiency height, device architecture.
(2) technical scheme
According to an aspect of the invention, there is provided a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device, Including:
Dielectric substrate;
Metal metamaterial layer, is arranged in the dielectric substrate;The metal metamaterial layer includes metallic particles periodicity battle array Row;
Media packs layer, is arranged in the metal metamaterial layer;Wherein,
Each metallic particles in the metallic particles cyclic array at least has a pair of parallel smooth flat side wall, To form fabry perot cavity between the adjacent metal particles perpendicular to smooth flat sidewall direction;
The metal metamaterial layer, which is included, has an azimuthal metallic particles cyclic array, by changing the orientation Angle regulates and controls the larization rotation angle of incident light;Or
The metal metamaterial layer includes multiple metallic particles cyclic arrays with different orientations, many by changing The spatial polarization distribution of the spatial arrangement mode conversion incident light of individual metallic particles cyclic array.
In some embodiments of the invention, the metallic particles in the metallic particles cyclic array is arranged by rectangular array Cloth.
In some embodiments of the invention, the thickness of the metallic particles is not less than incident light in media packs layer / 3rd of middle operation wavelength, form Fabry Perot resonance for incident light in the fabry perot cavity.
In some embodiments of the invention, between the smooth flat side wall by adjusting the adjacent metal particles away from From the chamber of i.e. fabry perot cavity is long, for the selection to the light beam polarization distribution transformation device operation wavelength.
In some embodiments of the invention, the azimuth of the metallic particles cyclic array is 30 °, and linear polarization enters The light polarization anglec of rotation is penetrated for 60 °.
In some embodiments of the invention, the metal metamaterial layer includes:
First metallic particles cyclic array, azimuth is 0 °, and positioned at the metal metamaterial layer first area, this first Region is included in the one one subregion and the one or two subregion being diagonally distributed;
Second metallic particles cyclic array, azimuth is 30 °, positioned at the metal metamaterial layer second area, and this Two regions are included in the 2nd 1 subregion and the two or two subregion being diagonally distributed;
And the 3rd metallic particles cyclic array, azimuth is -30 °, positioned at the region of metal metamaterial layer the 3rd, 3rd region is included in the 3rd 1 subregion and the three or two subregion being diagonally distributed;
Wherein, six sub-regions are integrally centrosymmetric distribution, the one one subregion, the 2nd 1 subregion, the 3rd One subregion, the one or two subregion, the two or two subregion and the three or two subregion are sequentially arranged around the center, so as to realize Linear polarization incident light is transformed to radial polarisation vector beam.
In some embodiments of the invention, the light beam polarization distribution transformation device operating wavelength range is visible ray to micro- Ripple wave band.
In some embodiments of the invention, the dielectric substrate and the material of media packs layer are distributed for the light beam polarization Medium without absorption in transformation device service band.
In some embodiments of the invention, the material of the dielectric substrate and media packs layer is silica or three oxygen Change two aluminium.
In some embodiments of the invention, the material of the metallic particles is gold, silver, copper, aluminium or its combination.
(3) beneficial effect
It can be seen from the above technical proposal that a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device of the invention At least have the advantages that one of them:
(1) compared to existing metal Meta Materials light beam polarization distribution transformation device, present invention obviates the gold of height loss Belong to body structure surface plasmon resonance, utilize the highly transmissive Fabry Perot resonance in metallic particles cyclic array and array side Parallactic angle come realize to light beam polarization be distributed conversion, improve operating efficiency;
(2) thickness of the metal metamaterial layer for the metal Meta Materials light beam polarization distribution transformation device that the present invention is provided is in Asia Wavelength magnitude, can be integrated with other optics, is conducive to improving the integrated level of optical system, and device architecture is simple, easily In preparation;
(3) by adjusting the distance between adjacent metal particles smooth flat side wall, the i.e. chamber of fabry perot cavity It is long, the selection to the light beam polarization distribution transformation device operation wavelength is realized, the light beam polarization distribution transformation device is fitted For broader wave band, without being limited by dielectric material energy gap.
Brief description of the drawings
Fig. 1 is a kind of section of transmission-type metal Meta Materials light beam polarization distribution transformation device in first embodiment of the invention Structural representation.
Fig. 2 a are the metallic particles periodicity battle array of azimuth angle theta=30 ° in metal metamaterial layer in first embodiment of the invention Array structure schematic top plan view.
Fig. 2 b are the metallic particles cyclic array of azimuth angle theta=0 ° in metal metamaterial layer in first embodiment of the invention Structure schematic top plan view.
Fig. 2 c are the metallic particles periodicity battle array of azimuth angle theta=- 30 ° in metal metamaterial layer in first embodiment of the invention Array structure schematic top plan view.
Fig. 3 is azimuth and the polarization of linear polarization incident light of metallic particles cyclic array in first embodiment of the invention The relation curve of the anglec of rotation.
Fig. 4 is partially incident by line for the different metallic particles cyclic array composition in azimuth in second embodiment of the invention Optical beam transformation is the metal metamaterial layer structural representation of radial polarisation vector beam.
【Symbol description】
1 dielectric substrate;2 metal metamaterial layers;3 media packs layer;
The metallic particles cyclic array of 4,7 azimuth angle theta=0 °;
The metallic particles cyclic array of 5,8 azimuth angle theta=30 °;
The metallic particles cyclic array of 6,9 azimuth angle theta=- 30 °.
Embodiment
For the object, technical solutions and advantages of the present invention are more clearly understood, below in conjunction with specific embodiment, and reference Accompanying drawing, the present invention is described in more detail.
It should be noted that in accompanying drawing or specification description, similar or identical part all uses identical figure number.It is attached The implementation for not illustrating or describing in figure, is form known to a person of ordinary skill in the art in art.In addition, though this Text can provide the demonstration of the parameter comprising particular value, it is to be understood that parameter is without being definitely equal to corresponding value, but be able to can connect The error margin received is similar to corresponding value in design constraint.The direction term mentioned in embodiment, for example " on ", " under ", "front", "rear", "left", "right" etc., are only the directions of refer to the attached drawing, not for limiting the scope of the invention.
The invention provides a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device.Fig. 1 is the present invention first A kind of cross-sectional view of transmission-type metal Meta Materials light beam polarization distribution transformation device, wherein z coordinate side in embodiment Xiang representing device vertical direction, x, y-coordinate direction represent device horizontal direction.It refer to Fig. 1, transmission-type gold proposed by the present invention Category Meta Materials light beam polarization distribution transformation device includes:
Dielectric substrate 1;
Metal metamaterial layer 2, is arranged in the dielectric substrate, and the metal metamaterial layer includes periodicity metallic particles Array;
Media packs layer 3, is arranged in metal metamaterial layer;
Wherein, the thickness of metal metamaterial layer 2, can be integrated with other optics in sub-wavelength magnitude, is conducive to carrying The integrated level of high optical system, and device architecture is simple, it is easy to prepare.
Metallic particles in the metallic particles cyclic array that metal metamaterial layer 2 is included is arranged by rectangular array, described Each metallic particles in metallic particles cyclic array at least there is a pair of parallel smooth flat side wall and thickness to be not less than Incident light the media packs layer in operation wavelength 1/3rd, for perpendicular to the smooth flat sidewall direction Adjacent metal particles between form fabry perot cavity.
Compared to existing metal Meta Materials light beam polarization distribution transformation device, present invention obviates the metal knot of height loss Structure surface plasmon resonance, utilizes the highly transmissive Fabry Perot resonance in metallic particles cyclic array and array orientation angle To realize the conversion being distributed to light beam polarization.Incident light is coupled in Fabry Perot resonant cavity after being scattered by the metallic particles Horizontal Fabry Perot resonance is formed, so as to realize the conversion being distributed to light beam polarization, operating efficiency is improved.
The width of the fabry perot cavity is adjusted by changing the size of particle, so as to adjust the limit of resonator The factor processed, and then adjust the phase that polarization direction is parallel and perpendicular between the transmission light component of fabry perot cavity respectively Delay.
The distance between smooth flat side wall by adjusting adjacent metal particles, the i.e. chamber of fabry perot cavity It is long, the selection to transmission-type metal Meta Materials light beam polarization distribution transformation device operation wavelength is realized, so that the work of the device Wavelength tuning to visible ray to any wavelength of microwave band at, the operation wavelength of the light beam polarization distribution transformation device is also incident Operation wavelength of the light in media packs layer.The material of the metallic particles is gold, silver, copper, aluminium or its combination.
The dielectric substrate and media packs layer is used to providing support for metal metamaterial layer, protect and external environment and Impedance matching between metallic particles, its material is selected according to the service band of metal Meta Materials light beam polarization distribution transformation device Take, to ensure that dielectric material is without absorption, such as silica or alundum (Al2O3) in service band.
For the object, technical solutions and advantages of the present invention are more clearly understood, below in conjunction with specific embodiment, and reference Accompanying drawing, the present invention is described in more detail.
First, first embodiment
In the present embodiment, the metal metamaterial layer, which is included, has an azimuthal metallic particles cyclic array, passes through Change the larization rotation angle that the azimuth regulates and controls incident light.Fig. 2 a is in metal metamaterial layers in first embodiment of the invention The metallic particles periodic array arrangement schematic top plan view of azimuth angle theta=30 °, Fig. 2 b surpass for metal in first embodiment of the invention The metallic particles periodic array arrangement schematic top plan view of azimuth angle theta=0 ° in material layer, Fig. 2 c are first embodiment of the invention The metallic particles periodic array arrangement schematic top plan view of azimuth angle theta=- 30 ° in middle metal metamaterial layer, wherein, metallic particles It is P1 along the cycle of long axis direction, cycle of the metallic particles along short-axis direction is P2, and particle long axis length is 1, and minor axis length is W, particle long axis direction reference axis x-axis angular separation to that indicated in the drawings is the azimuth angle theta of metallic particles cyclic array, azimuth Scope is -90 ° to 90 °.
As shown in Fig. 2 a, Fig. 2 b and Fig. 2 c, metallic particles is shaped as cuboid in metal metamaterial layer, and metallic particles is long Two relative planes where axle are a pair of parallel smooth flat side wall, along in smooth flat sidewall direction Fabry perot cavity is formed between (i.e. particle short-axis direction) adjacent metal particles.The incident light of linear polarization is broken down into flat Row is in the component and the component perpendicular to particle long axis direction of particle long axis direction.Because metallic particles is sufficiently thick, i.e. the metal The thickness of particle not less than incident light media packs layer in operation wavelength 1/3rd, parallel to particle long axis direction point Amount forms standing wave by scattering coupling between particle in the fabry perot cavity, so as to obtain high-transmission rate and phase Delay.Component and metallic particles cyclic array perpendicular to particle long axis direction do not produce strong interaction, thus obtain yet Obtain highly transmissive and certain phase delay.
Cause the component parallel to particle major axis and the transmission point perpendicular to particle major axis by adjusting particle long axis length Phase delay between amount is π, thus transmitted light remains as linearly polarized light.
For the different metallic particles cyclic array in azimuth, because the light component perpendicular to particle major axis with parallel to The light component amplitude of grain length axle is different, so that the incident light of identical polarization state is through the different metallic particles periodicity in azimuth Larization rotation angle after array is different.Fig. 3 be first embodiment of the invention in metallic particles cyclic array azimuth with The relation curve of the linear polarization incident light polarization anglec of rotation.Refer to Fig. 3, the incident light of linear polarization is 30 ° by azimuth, 0 ° ,- After 30 ° of metal cyclic array, the larization rotation angle of linear polarization incident light is respectively 60 °, 0 °, -60 °.
2nd, second embodiment
In the present embodiment, the metal metamaterial layer includes multiple metallic particles periodicity battle arrays with different orientations The incident beam of linear polarization, is transformed to radially partially by row by the spatial arrangement mode for changing multiple metallic particles cyclic arrays Shake vector beam.
The dielectric substrate and media packs layer material of the device are all quartz, and the material of metallic particles is silver.Metallic particles Size be:Long axis length l=340nm, minor axis length w=200nm, grain thickness h=360nm.Metallic particles is along major axis side To cycle be P1=600nm, cycle of the metallic particles along short-axis direction be P2=620nm, the device operation wavelength be 1.1 μ m。
Fig. 4 is partially incident by line for the different metallic particles cyclic array composition in azimuth in second embodiment of the invention Optical beam transformation is the metal metamaterial layer structural representation of radial polarisation vector beam, refer to Fig. 4, whole metal metamaterial layer It is made up of 6 regions, respectively region 4, region 5, region 6, region 7, region 8, region 9, regions of different colours, which is included, to be had The metallic particles cyclic array of different orientations, wherein:
Region 4 and region 7 include azimuth angle theta=0 ° metallic particles cyclic array, to along x coordinate axle side shown in figure It it is 0 ° to the po-larization rotational angular of incident linearly polarized light, the four-headed arrow in corresponding region represents the polarization direction of transmitted light;
Region 5 and region 8 include azimuth angle theta=30 ° metallic particles cyclic array, to along x coordinate axle shown in figure The po-larization rotational angular of the incident linearly polarized light in direction is 60 °, and the four-headed arrow in corresponding region represents the polarization direction of transmitted light;
Region 6 and region 9 include azimuth angle theta=- 30 ° metallic particles cyclic array, to along x coordinate axle shown in figure The po-larization rotational angular of the incident linearly polarized light in direction is the polarization side that four-headed arrow in -60 °, corresponding region represents transmitted light To.
Linearly polarized light of the polarization direction along x-axis direction in Fig. 4 is impinged perpendicularly on after device surface, and outgoing beam is transformed to The vector beam of radial polarisation.
So far, the present embodiment is described in detail combined accompanying drawing.According to above description, those skilled in the art There should be clear understanding to a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device of the invention.
It should be noted that in accompanying drawing or specification text, the implementation for not illustrating or describing is affiliated technology Form known to a person of ordinary skill in the art, is not described in detail in field.In addition, the above-mentioned definition to each element and method is simultaneously Various concrete structures, shape or the mode mentioned in embodiment are not limited only to, those of ordinary skill in the art can carry out letter to it Singly change or replace.
It should also be noted that, the demonstration of the parameter comprising particular value can be provided herein, but these parameters are without definite etc. In corresponding value, but analog value can be similar in acceptable error margin or design constraint.The side mentioned in embodiment Only it is the direction of refer to the attached drawing such as " on ", " under ", "front", "rear", "left", "right" to term, not for limiting this The protection domain of invention.Particular embodiments described above, is entered to the purpose of the present invention, technical scheme and beneficial effect One step is described in detail, be should be understood that the specific embodiment that the foregoing is only the present invention, is not limited to this hair Bright, within the spirit and principles of the invention, any modification, equivalent substitution and improvements done etc. should be included in the present invention Protection domain within.

Claims (10)

1. a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device, including:
Dielectric substrate;
Metal metamaterial layer, is arranged in the dielectric substrate;The metal metamaterial layer includes metallic particles cyclic array;
Media packs layer, is arranged in the metal metamaterial layer;Wherein,
Each metallic particles in the metallic particles cyclic array at least has a pair of parallel smooth flat side wall, is used to Fabry perot cavity is formed between the adjacent metal particles perpendicular to smooth flat sidewall direction;
The metal metamaterial layer, which is included, has an azimuthal metallic particles cyclic array, is adjusted by changing the azimuth Control the larization rotation angle of incident light;Or
The metal metamaterial layer includes multiple metallic particles cyclic arrays with different orientations, by changing multiple gold The spatial polarization distribution of the spatial arrangement mode conversion incident light of metal particles cyclic array.
2. a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device according to claim 1, wherein, the gold Metallic particles in metal particles cyclic array is arranged by rectangular array.
3. a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device according to claim 2, wherein, the gold The thickness of metal particles not less than incident light the media packs layer in operation wavelength 1/3rd, for incident light described Fabry Perot resonance is formed in fabry perot cavity.
4. a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device according to claim 3, wherein, by adjusting The distance between smooth flat side wall of the adjacent metal particles is saved, i.e. the chamber of fabry perot cavity is long, for this The selection of light beam polarization distribution transformation device operation wavelength.
5. a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device according to claim 1, wherein, the gold The azimuth of metal particles cyclic array is 30 °, and the incident light polarization anglec of rotation of linear polarization is 60 °.
6. a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device according to claim 1, wherein, the gold Category metamaterial layer includes:
First metallic particles cyclic array, azimuth is 0 °, positioned at the metal metamaterial layer first area, the first area Including in the one one subregion being diagonally distributed and the one or two subregion;
Second metallic particles cyclic array, azimuth is 30 °, positioned at the metal metamaterial layer second area, secondth area Domain is included in the 2nd 1 subregion and the two or two subregion being diagonally distributed;
And the 3rd metallic particles cyclic array, azimuth is -30 °, positioned at the region of metal metamaterial layer the 3rd, and this Three regions are included in the 3rd 1 subregion and the three or two subregion being diagonally distributed;
Wherein, six sub-regions are integrally centrosymmetric distribution, the one one subregion, the 2nd 1 subregion, the 3rd 1 son Region, the one or two subregion, the two or two subregion and the three or two subregion are sequentially arranged around the center, so as to realize line Polarized incident light is transformed to radial polarisation vector beam.
7. a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device according to claim 1, wherein, the light beam Polarisation distribution transformation device operating wavelength range is visible ray to microwave band.
8. a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device according to claim 1, wherein, given an account of The material of matter substrate and media packs layer is the medium without absorption in the light beam polarization distribution transformation device service band.
9. a kind of metal Meta Materials wave plate according to claim 8, wherein, the dielectric substrate and the material of media packs layer Expect for silica or alundum (Al2O3).
10. a kind of transmission-type metal Meta Materials light beam polarization distribution transformation device according to claim 1, wherein, it is described The material of metallic particles is gold, silver, copper, aluminium or its combination.
CN201710649485.0A 2017-08-01 2017-08-01 Transmission-type metal Meta Materials light beam polarization distribution transformation device Pending CN107272216A (en)

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