CN104848928B - Vibration at high speed measuring system and method based on wide spectrum light source principle of interference - Google Patents
Vibration at high speed measuring system and method based on wide spectrum light source principle of interference Download PDFInfo
- Publication number
- CN104848928B CN104848928B CN201510280497.1A CN201510280497A CN104848928B CN 104848928 B CN104848928 B CN 104848928B CN 201510280497 A CN201510280497 A CN 201510280497A CN 104848928 B CN104848928 B CN 104848928B
- Authority
- CN
- China
- Prior art keywords
- vibration
- high speed
- sample
- lens
- speed measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a kind of vibration at high speed measuring system and method based on wide spectrum light source principle of interference, the vibration at high speed measuring system includes：For send coherent light light source, for the coherent light is split fiber coupler, for according to the first optical signal after beam splitting referring back to the reference arm of light, for the sample arm according to the second optical signal return signal light after beam splitting and spectrum demodulator that the interference signal for being formed to the reference light and flashlight is demodulated, wherein, the spectrum demodulator includes spectroscope and diode array, for the interference signal after spectroscope light splitting, a portion reflexes in the diode array measurement for being used for sample vibration parameters.The vibration at high speed measuring method, which corresponds to the system, can measure sample vibration parameters.Vibration at high speed measuring system and method for the present invention has the advantages that high sensitivity, accuracy are high, the vibration parameters for the sample for accurately measuring vibration at high speed that is particularly suitable for use in.
Description
Technical field
The present invention relates to optical coherent chromatographic imaging (OCT, Optical Coherence Tomography) field, especially
It is related to a kind of vibration at high speed measuring system and method based on wide spectrum light source principle of interference.
Background technology
At present, the optical interference sensing technology based on wide spectrum light source characteristic has obtained widely should in high-acruracy survey
With, wherein, for position, either displacement or other high-acruracy surveys that can be converted into displacement have turned into especially popular
Research topic.
The optical interference sensing technology based on wide spectrum light source characteristic is generally applied to high accuracy, distributed interference capability light
In fiber sensor.However, in the application of reality, generally require to know the coherence that light source is actual exactly, and electronics coupling
Seaming element (CCD, Charge-Coupled Device) although can be implemented as and low speed vibration measurement, due to
The sensitivity of CCD measurement vibrations is relatively low, can not realize the accurate measurement to the sample of vibration at high speed.
The content of the invention
It is an object of the invention to provide a kind of vibration at high speed measuring system and method based on wide spectrum light source principle of interference,
For solving the problems, such as that CDD of the prior art can not realize the accurate measurement to the sample of vibration at high speed.
In order to solve the above-mentioned technical problem, the present invention provides following technical scheme：
A kind of vibration at high speed measuring system based on wide spectrum light source principle of interference, including：For send coherent light light source,
For the coherent light is split fiber coupler, for the reference according to the first optical signal after beam splitting referring back to light
Arm, for the sample arm according to the second optical signal return signal light after beam splitting and for the reference light and flashlight institute
The spectrum demodulator that the interference signal of formation is demodulated, wherein, the spectrum demodulator includes spectroscope and diode array,
After spectroscope light splitting, a portion reflexes in diode array for sample vibration parameters the interference signal
Measurement.
Preferably, the spectrum demodulator also includes：Lenticulation component and electronics coupled component, the interference signal by
The lenticulation component is exported to the spectroscope, and a portion is reflexed in the diode array shakes for sample
The measurement of dynamic parameter, another part, which is transmitted through in the electronics coupled component, is used for OCT image to monitor the measuring surface of sample.
Preferably, the spectroscope transmission is 90%~95% with the percentage for reflecting the interference signal:5%~
10%.
Preferably, the spectroscope transmission is 95% with the percentage for reflecting the interference signal:5%.
Preferably, the lenticulation component includes the first lens, grating and the second lens set gradually, wherein, connect
The interference signal received is exported to the spectroscope by second lens.
Preferably, the light source is wide spectrum light source, and the centre wavelength of the wide spectrum light source is 810nm -850nm.
Preferably, the reference arm includes the 3rd lens and completely reflecting mirror set gradually, wherein, the reference light is through institute
State completely reflecting mirror, the 3rd lens are back to the fiber coupler.
Preferably, the sample arm includes lens confocal system, and the lens confocal system includes what is set gradually
4th lens, galvanometer and the 5th lens, wherein, the flashlight is back to described through the 5th lens, galvanometer, the 4th lens
Fiber coupler.
Preferably, the vibration at high speed measuring system based on wide spectrum light source principle of interference also includes computer, the meter
Calculation machine is connected with the spectrum demodulator and sample arm, for the galvanometer that controls the sample arm speed and carry out follow-up
The calculating of vibration parameters.
A kind of vibration at high speed measuring method based on wide spectrum light source principle of interference, including：The coherent light that light source is sent is entered
Row beam splitting；According to first, second optical signal after beam splitting respectively referring back to light and flashlight；To the reference light and flashlight
Interfered, form interference signal；And spectroscope and diode array are set in spectrum demodulator, the interference signal is through institute
After stating spectroscope light splitting, a portion reflexes in the diode array measurement for being used for sample vibration parameters.
The technical scheme provided by the present invention more than, compared with prior art, the present invention have below beneficial to effect
Fruit：
By setting spectroscope and diode array in spectrum demodulator so that the interference letter that spectrum demodulator receives
Number through the spectroscope light splitting after, a portion reflex in diode array be used for sample vibration parameters measurement.Namely
Say, vibration at high speed measuring system and method for the invention based on wide spectrum light source principle of interference utilize spectroscope and diode array
Mutual cooperation, instead of the test mode of existing electronics coupled component so that atomic weak interference signal is detected
Sensitivity greatly improve, and then realize nanometer can be reached to the measurement accuracy of the vibration parameters of the sample of vibration at high speed
Level.
Brief description of the drawings
, below will be each to the present invention in order to illustrate more clearly of various embodiments of the present invention or technical scheme of the prior art
The required accompanying drawing used is briefly described in embodiment or description of the prior art.It is it should be evident that attached in description below
Figure is only some embodiments of the present invention, for one of ordinary skill in the art, is not paying creative work
Under the premise of, other accompanying drawings can also be obtained according to these accompanying drawings.
Figure 1A is the structured flowchart of the vibration at high speed measuring system based on wide spectrum light source principle of interference of an embodiment.
Figure 1B is the structured flowchart of the vibration at high speed measuring system based on wide spectrum light source principle of interference of another embodiment.
Fig. 2 is the spectrum demodulator of the vibration at high speed measuring system based on wide spectrum light source principle of interference of another embodiment
Structured flowchart.
Fig. 3 is the flow chart of the vibration at high speed measuring method based on wide spectrum light source principle of interference of an embodiment.
Fig. 4 is visited by the diode array of the vibration at high speed measuring system based on wide spectrum light source principle of interference of an embodiment
Oscillogram corresponding to the second spectral information measured.
Fig. 5 is the diode array of the vibration at high speed measuring system based on wide spectrum light source principle of interference of another embodiment
The oscillogram that the luminous intensity of one of diode changes over time.
Fig. 6 is detected by the CCD of the vibration at high speed measuring system based on wide spectrum light source principle of interference of an embodiment
Oscillogram corresponding to first spectral information.
Embodiment
In order that one of ordinary skill in the art more fully understands the technical scheme in the present invention, and make that the present invention's is upper
Stating objects, features and advantages can be more obvious understandable, below in conjunction with the accompanying drawings to the technical scheme in various embodiments of the present invention
Further elaborate.
Figure 1A is referred to, in one embodiment, a kind of vibration at high speed measuring system 1 based on wide spectrum light source principle of interference is wrapped
Include：For send coherent light light source 10, for the coherent light is split fiber coupler 11, for after according to beam splitting
The first optical signal referring back to the reference arm 12 of light, for the sample arm according to the second optical signal return signal light after beam splitting
13 and the spectrum demodulator 14 that is demodulated of the interference signal for being formed to the reference light and flashlight.
Wherein, spectrum demodulator 14 includes spectroscope 142 and diode array 144, and interference signal is divided through spectroscope 142
Afterwards, a portion reflexes in diode array 144 measurement for being used for sample vibration parameters.Spectroscope 142 can be semi-transparent
Half-reflecting mirror, can be cubic type or plane etc..
Further, diode array 144 includes at least one diode, and the test surface of the diode is minimum, is advantageous to
Measurement, the accurate measurement for the sample vibration at high speed that is particularly suitable for use in.Meanwhile by using diode array 144 so that even right
The sensitivity that atomic weak interference signal is detected also greatly improves, so as to solve in the prior art CCD to vibration at high speed
Sample caused by interference signal sensitivity it is inadequate the problem of.
Figure 1B is referred to, in one embodiment, a kind of vibration at high speed measuring system 1 based on wide spectrum light source principle of interference
Spectrum demodulator 14 also includes：Lenticulation component 141 and electronics coupled component 143 (CCD, Charge-Coupled
Device).The interference signal that lenticulation component 141 receives is transmitted to spectroscope 142, and a portion reflexes to two poles
It is used for the measurement of sample vibration parameters in pipe array 144, another part, which is transmitted through in electronics coupled component 143, is used for OCT image
To monitor the measuring surface of sample.In the present embodiment, in a kind of vibration at high speed measuring system 1 based on wide spectrum light source principle of interference
Remaining structure is with consistent in Figure 1A, and this is no longer going to repeat them.
Wherein, the transmission of spectroscope 142 and the percentage of reflected interference signal are 90%~95%:5%~10%, i.e., 90%
~95% interference signal is transmitted through in electronics coupled component 143, and 5%~10% interference signal is launched to diode array
In 144.That is, 5%~10% interference signal is used to realize the accurate measurement to the sample vibration parameters of vibration at high speed,
90%~95% interference signal is used for OCT image to monitor the measuring surface of sample, can be with by the monitoring to sample measuring surface
Know the substantially situation of the interference of light, so as to subsequent sample vibration parameters accurate measurement when it is required.
Preferably, the percentage of the transmission of spectroscope 142 and reflected interference signal is 95%:When 5%, now, based on wide range
Measurement accuracy highest of the vibration at high speed measuring system 1 of light source principle of interference to the sample vibration parameters of vibration at high speed.
As shown in Figure 1B, in one embodiment, the vibration at high speed measuring system 1 based on wide spectrum light source principle of interference also includes
Computer 15.Computer 15 is connected with spectrum demodulator 14 and sample arm 13, for control sample arm 13 galvanometer speed with
And carry out the calculating of follow-up vibration parameters.
Wherein, it is 0 when computer 15 controls the speed of the galvanometer of sample arm 13, now, sample geo-stationary can be real
Now the system measures to the vibration between the light path of sample arm 13 and sample.Computer 15 detects dry to diode array 144
Extraction and calculating that the spectral information obtained by signal carries out related luminous intensity are related to, so as to obtain sample vibration parameters.For example, should
Vibration parameters include vibration phase, vibration displacement and vibration frequency etc..
It should be noted that in the present embodiment, above-mentioned Correlation method for data processing is by the signal inside computer 15
Manage what unit (not shown) was completed, in other embodiments, the signal processing unit can also be arranged at embedded hardware
To realize above-mentioned Correlation method for data processing in system, the present invention is not limited thereto.
Figure 1A to Figure 1B is referred to, in one embodiment, light source 10 is wide spectrum light source, the centre wavelength of the wide spectrum light source
Scope is between 810nm -850nm.Coherent light is sent by the light source 10 and exported to fiber coupler 11.In the present embodiment,
By using wide spectrum light source, it not only avoid and do light source using expensive laser, and light source is sent relevant
Light is not simple spectrum light, and performance is relatively stable.Preferably, the centre wavelength of the wide spectrum light source is 830nm.
The input of fiber coupler 11 is connected with light source 10, its three output ends respectively the input with reference arm 12,
The input of sample arm 13 and the input connection of spectrum demodulator 14.The effect of fiber coupler 11 is not only in that light source 10
The coherent light sent is split to form first, second optical signal, and first, second optical signal is respectively sent into reference arm
12 input and the input of sample arm 13, also reside in the reference light returned from reference arm 12 with from the return of sample arm 13
Flashlight is interfered, to form interference signal and export to the input of spectrum demodulator 14.
Reference arm 12 is connected to the first output end of fiber coupler 11, and it includes the 3rd lens set gradually and is all-trans
Mirror is penetrated, so that the optical signal received reflects to form reference after the 3rd the beams extended by lens is incident upon on the completely reflecting mirror
Light.Meanwhile the reference light is back to fiber coupler 11 through completely reflecting mirror, the 3rd lens.Certainly, in other embodiments, join
Other modes can also be had by examining the composition of arm, but steady obtained by the building form of the 3rd lens and completely reflecting mirror in the present embodiment
Qualitative effect is optimal.
Sample arm 13 is connected to the second output end of fiber coupler 11, and it includes lens confocal system, and the lens are total to
Focusing system includes the 4th lens, galvanometer and the 5th lens set gradually, by the optical signal received while passes through lens
Flashlight is formed after confocal system.Meanwhile the flashlight is back to fiber coupler through the 5th lens, galvanometer, the 4th lens
11.Certainly, in other embodiments, the composition of sample arm can also have other modes, but the four, the 5th in the present embodiment are saturating
The building form of mirror and a galvanometer will not cause the distortion of image field, and imaging effect is optimal.
Further, in the present embodiment, reference arm 12 will be assembled in same cabinet with sample arm 13, and reference arm 12
The brachium of brachium and sample arm 13 be 13cm, (for example, sample during avoiding sample arm 13 and reference arm 12 from being in varying environment
Product arm 13 is located at outside cabinet, and reference arm 12 is located at cabinet inside), the brachium of sample arm 13 vibrates caused shadow to sample
Ring.
Referring to Fig. 2, in one embodiment, it is the 3rd defeated to be connected to fiber coupler 11 for the input of spectrum demodulator 14
Go out end, the output end of spectrum demodulator 14 is connected to computer.
Wherein, lenticulation component 141 includes the first lens 1411, the lens of grating 1412 and second set gradually
1413.Preferably, the first lens 1411 and the second lens 1413 are condenser lens.Interference signal is by the of fiber coupler 11
Three output ends export, and are focused on through the first lens 1411, defeated through the interference diffraction of grating 1412, then after the focusing of the second lens 1413
Go out.
Second lens 1413 export the interference signal that fiber coupler 11 exports to spectroscope 142, divide through spectroscope 142
After light, a portion interference signal (being 5% interference signal in the present embodiment) is reflexed in diode array 144, another portion
Interference signal (being 95% interference signal in the present embodiment) is divided to be transmitted through in electronics coupled component 143.Electronics coupled component 143 will
The first transfer spectral information to computer, the diode array 144 detected obtained by 95% interference signal also will the interference of detection 5%
The second transfer spectral information obtained by signal is to computer, in order to which computer carries out follow-up data processing.For example, to two
The second spectral information that pole pipe array 144 exports carries out the calculating of sample vibration parameters.
Further, diode array 144 includes 16 compact arranged diodes.Those diodes can be opened with timesharing
With closing.
When only opening a diode, the vibration at high speed measuring system 1 based on wide spectrum light source principle of interference can be directed to
The diode of the unlatching carries out the measurement that luminous intensity changes over time, and resulting waveform is as shown in figure 4, can be with using the waveform
Realize the measurement to the sample vibration parameters of vibration at high speed.
When opening multiple different diodes, the vibration at high speed measuring system 1 based on wide spectrum light source principle of interference can be with pin
Those diodes opened are carried out with the measurement that luminous intensity changes over time respectively, resulting waveform is as shown in figure 4, using respectively
Waveform can realize the measurement to the sample vibration parameters of vibration at high speed, and by measuring what is obtained respectively to those diodes
Sample vibration parameters are averaged, and are advantageous to improve the precision of vibration at high speed measurement.Or enter for the diode of those unlatchings
The statistical measurement of row luminous intensity changes in amplitude, resulting waveform is as shown in figure 3, wherein, the different pixel of X-axis expression is (i.e.
The position of different diodes), Y-axis represents luminous intensity.Ripple obtained by the interference signal arrived due to the waveform and CCD detection
Shape (as shown in Figure 5) is similar, so, diode array 144 also can be used for OCT image to monitor the measuring surface of sample simultaneously.
It is noted that the vibration at high speed measuring system 1 based on wide spectrum light source principle of interference utilizes CCD or diode
Array can also realize the measurement of correlation of traditional OCT systems.Such as applied in biological field, progress ophthalmology, skin burn are examined
Look into, blood microcirculation measure, Buccodental imaging of tissue, the detection of animal tissue's organ, diagnosis etc.；Applied to Material Field
In, monitoring, Non-Destructive Testing etc. in real time is carried out to material in industrial production line；Applied in historical relic field, to valuable jewelry,
Pearl, antique detect etc..
That is, in the present embodiment, the vibration at high speed measuring system 1 based on wide spectrum light source principle of interference not only can be real
Now to the accurate measurement of the sample vibration parameters of vibration at high speed, the measurement of correlation of traditional OCT systems can also be realized so that be based on
The application scenarios of the vibration at high speed measuring system 1 of wide spectrum light source principle of interference have obtained further extension.
Referring to Fig. 3, in one embodiment, a kind of vibration at high speed measuring method 2 based on wide spectrum light source principle of interference is wrapped
Include following steps：
Step 21, the coherent light that light source is sent is split.
Step 22, according to first, second optical signal after beam splitting respectively referring back to light and flashlight.
Step 23, reference light and flashlight are interfered, forms interference signal.
Step 24, spectroscope and diode array are set in spectrum demodulator, interference signal after spectroscope is divided, its
A middle part reflexes to the measurement that diode array is used for sample vibration parameters.
In conjunction with Fig. 1 to Fig. 2, the vibration at high speed based on wide spectrum light source principle of interference in a specific embodiment of the invention is surveyed
The operation principle of amount system 1 is described in detail as follows.
In step 21, the low-coherent light sent by the wide spectrum light source 10 that centre wavelength is 830nm passes through fiber coupler
1*2,50:After 50 beam splitting, two-beam signal, i.e. first, second optical signal are formed.The two-beam signal is respectively sent to reference
The input of arm 12 and the input of sample arm 13.
In step 22, the first optical signal transmission is incident upon through the 3rd the beams extended by lens and is all-trans to the input of reference arm 12
Reflected after penetrating on mirror, after forming reference light, the reference light is according to backtracking to fiber coupler 11.Second optical signal passes
The input of sample arm 13 is transported to, the lens confocal system through sample arm 13 focuses on the measuring surface of sample, forms flashlight
Afterwards, the flashlight is according to backtracking to fiber coupler 11.
In step 23, the reference light of the reference arm 12 and the flashlight of sample arm 13 are carried out in fiber coupler 11
Interference, interference signal is formed, and sent to the input of spectrum demodulator 14.
In step 24, the interference signal is transmitted to spectrum demodulator 14, is received, connect by lens-grating combination 141
After the light splitting of spectroscope 142,95% interference signal is transmitted in electronics coupled component 143 interference signal received, 5% interference
Signal is reflected onto in the diode array 144 with 16 compact arranged diodes.
Specifically, the spectral information obtained by 95% interference signal of the detection of electronics coupled component 143 is the first spectral information,
Spectral information obtained by 5% interference signal of detection of diode array 144 is the second spectral information.Wherein, first spectrum is believed
The luminous intensity changes in amplitude figure of corresponding 95% interference signal of breath, as shown in fig. 6, corresponding 5% interference signal of second spectral information
Luminous intensity changes in amplitude figure, as shown in Figure 4.
Further, above-mentioned second spectral information obtained by diode array 144 is transferred to computer, by calculating
Machine carries out two dimension or three-dimensional picture construction, obtains corresponding luminous intensity changes in amplitude figure, that is, sample Oscillation Amplitude becomes
Change figure, as shown in Figure 4.As shown in figure 4, when sample vibrates, the position of each diode detection in diode array 144 is not
Become so that same sensing point is only that luminous intensity amplitude is changed, i.e., in the luminous intensity changes in amplitude figure, waveform is along Y-axis
Fluctuation up and down.After luminous intensity changes in amplitude figure corresponding with the second spectral information is obtained, it will close in diode array 144
Wherein several diodes, the measurement that changes over time of luminous intensity is carried out respectively again for the diode of reservation, to the luminous intensity with
Time variation diagram carries out luminous intensity extraction, that is, obtains waveform as shown in Figure 5.As shown in figure 5, due to sample vibration displacement with
The amplitude of luminous intensity is proportional, can draw the vibration displacement of the sample, vibration phase by further solving coiling computing, shake
Dynamic frequency etc..
Above-mentioned steps to be done so that vibration at high speed measuring system and method based on wide spectrum light source principle of interference being capable of essences
Really measure the vibration parameters of the sample of vibration at high speed.
The above, only presently preferred embodiments of the present invention, are not intended to limit the scope of the present invention..It is any
Modifications, equivalent substitutions and improvements made within the spirit and principles in the present invention etc., should be included in protection scope of the present invention
Within.
Claims (10)
1. a kind of vibration at high speed measuring system based on wide spectrum light source principle of interference, including：For sending the light source of coherent light, using
In the fiber coupler for being split the coherent light, for the reference according to the first optical signal after beam splitting referring back to light
Arm, for the sample arm according to the second optical signal return signal light after beam splitting and for the reference light and flashlight institute
The spectrum demodulator that the interference signal of formation is demodulated, it is characterised in that the spectrum demodulator includes spectroscope and two poles
Pipe array, for the interference signal after spectroscope light splitting, a portion, which reflexes to, is used for sample in the diode array
The measurement of product vibration parameters；
The diode array include it is multiple can timesharing open and close diode, when opening one of diode, quilt
The measurement that the diode opened will change over time for a portion interference signal progress luminous intensity, is carried out with this
The measurement of sample vibration parameters；When opening multiple diodes, those diodes opened will be directed to described a portion
Interference signal carries out the measurement of luminous intensity changes in amplitude, and OCT image is carried out using the measuring surface as monitoring sample with this.
2. vibration at high speed measuring system as claimed in claim 1, it is characterised in that the spectrum demodulator also includes：Lens
Grating assembly and electronics coupled component, the interference signal are exported to the spectroscope by the lenticulation component, wherein
A part reflexes in the diode array measurement for being used for sample vibration parameters, and another part is transmitted through the electronics coupled
It is used for OCT image in component to monitor the measuring surface of sample.
3. vibration at high speed measuring system as claimed in claim 2, it is characterised in that the spectroscope transmission is described dry with reflecting
The percentage for relating to signal is 90%~95%:5%~10%.
4. vibration at high speed measuring system as claimed in claim 2, it is characterised in that the spectroscope transmission is described dry with reflecting
The percentage for relating to signal is 95%:5%.
5. vibration at high speed measuring system as claimed in claim 2, it is characterised in that the lenticulation component includes setting successively
The first lens, grating and the second lens put, wherein, the interference signal is exported to the spectroscope by second lens.
6. the vibration at high speed measuring system as described in claim 1 to 5 is any, it is characterised in that the light source is wide spectrum light source,
The centre wavelength of the wide spectrum light source is 810nm -850nm.
7. vibration at high speed measuring system as claimed in claim 6, it is characterised in that the reference arm includes the set gradually
Three lens and completely reflecting mirror, wherein, the reference light is back to the fiber coupler through the completely reflecting mirror, the 3rd lens.
8. vibration at high speed measuring system as claimed in claim 6, it is characterised in that the sample arm includes the burnt system of lens copolymerization
System, the lens confocal system include the 4th lens, galvanometer and the 5th lens set gradually, wherein, the flashlight warp
5th lens, galvanometer, the 4th lens are back to the fiber coupler.
9. vibration at high speed measuring system as claimed in claim 6, it is characterised in that also including computer, the computer with
The spectrum demodulator and sample arm connection, for the galvanometer that controls the sample arm speed and carry out follow-up vibration ginseng
Several calculating.
A kind of 10. vibration at high speed measuring method based on wide spectrum light source principle of interference, it is characterised in that including：
The coherent light that light source is sent is split；
According to first, second optical signal after beam splitting respectively referring back to light and flashlight；
The reference light is interfered with flashlight, forms interference signal；And
Spectroscope and diode array are set in spectrum demodulator, the interference signal after spectroscope light splitting, wherein
A part reflexes in the diode array measurement for being used for sample vibration parameters；Wherein,
The diode array include it is multiple can timesharing open and close diode, when opening one of diode, quilt
The measurement that the diode opened will change over time for a portion interference signal progress luminous intensity, is carried out with this
The measurement of sample vibration parameters；When opening multiple diodes, those diodes opened will be directed to described a portion
Interference signal carries out the measurement of luminous intensity changes in amplitude, and OCT image is carried out using the measuring surface as monitoring sample with this.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510280497.1A CN104848928B (en) | 2015-05-27 | 2015-05-27 | Vibration at high speed measuring system and method based on wide spectrum light source principle of interference |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510280497.1A CN104848928B (en) | 2015-05-27 | 2015-05-27 | Vibration at high speed measuring system and method based on wide spectrum light source principle of interference |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104848928A CN104848928A (en) | 2015-08-19 |
| CN104848928B true CN104848928B (en) | 2018-04-03 |
Family
ID=53848746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510280497.1A Active CN104848928B (en) | 2015-05-27 | 2015-05-27 | Vibration at high speed measuring system and method based on wide spectrum light source principle of interference |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104848928B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019195955A1 (en) * | 2018-04-08 | 2019-10-17 | 雄安华讯方舟科技有限公司 | Coating pan monitoring system and monitoring method |
| CN111121944B (en) * | 2018-11-30 | 2022-02-01 | 南方科技大学 | Vibration measuring system and vibration measuring method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6421164B2 (en) * | 1991-04-29 | 2002-07-16 | Massachusetts Institute Of Technology | Interferometeric imaging with a grating based phase control optical delay line |
| CN1875242A (en) * | 2003-10-27 | 2006-12-06 | 通用医疗公司 | Method and apparatus for performing optical imaging using frequency-domain interferometry |
| CN101718520A (en) * | 2009-11-16 | 2010-06-02 | 浙江大学 | System for quickly measuring surface quality |
| CN101907485A (en) * | 2010-08-25 | 2010-12-08 | 福州大学 | Non-contact structure micro-vibration monitoring device |
| CN102657518A (en) * | 2012-04-19 | 2012-09-12 | 中国科学院上海光学精密机械研究所 | Method of complex frequency-domain optical coherence tomography using differential sinusoidal phase modulation |
| CN103344569A (en) * | 2013-06-21 | 2013-10-09 | 中国科学院上海光学精密机械研究所 | Optical coherence tomography method and optical coherence tomography system for complex polarization frequency domain |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140293290A1 (en) * | 2010-11-08 | 2014-10-02 | Netra Systems Inc. | Method and System for Compact Optical Coherence Tomography |
-
2015
- 2015-05-27 CN CN201510280497.1A patent/CN104848928B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6421164B2 (en) * | 1991-04-29 | 2002-07-16 | Massachusetts Institute Of Technology | Interferometeric imaging with a grating based phase control optical delay line |
| CN1875242A (en) * | 2003-10-27 | 2006-12-06 | 通用医疗公司 | Method and apparatus for performing optical imaging using frequency-domain interferometry |
| CN101718520A (en) * | 2009-11-16 | 2010-06-02 | 浙江大学 | System for quickly measuring surface quality |
| CN101907485A (en) * | 2010-08-25 | 2010-12-08 | 福州大学 | Non-contact structure micro-vibration monitoring device |
| CN102657518A (en) * | 2012-04-19 | 2012-09-12 | 中国科学院上海光学精密机械研究所 | Method of complex frequency-domain optical coherence tomography using differential sinusoidal phase modulation |
| CN103344569A (en) * | 2013-06-21 | 2013-10-09 | 中国科学院上海光学精密机械研究所 | Optical coherence tomography method and optical coherence tomography system for complex polarization frequency domain |
Non-Patent Citations (1)
| Title |
|---|
| 光干涉测试技术中的抗振技术研究;吴新民;《中国优秀博硕士学位论文全文数据库（博士）工程科技Ⅱ辑》;20021215(第2（2002年）期);C028-10 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104848928A (en) | 2015-08-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100491907C (en) | Three-dimensional shape measuring instrument | |
| CN102192714B (en) | Light-interference measuring apparatus | |
| CN105842257A (en) | Sub-micron scale glass subsurface defect detection device and method | |
| CN104296698A (en) | Method for measuring evenness of optical surface with ultrahigh precision | |
| CN107036534A (en) | Method and system based on laser speckle measurement Vibration Targets displacement | |
| CN105277271B (en) | A kind of the phase-shifted fiber grating sensor measuring system and its application of ultrasonic vibration | |
| US11131539B2 (en) | Multimodal image data acquisition system and method | |
| CN103528524A (en) | Device and method of perspective measurement of distribution of out-of-plane displacement field in resin matrix composite | |
| JP2012510610A (en) | Method and apparatus for collecting structural data using spectral optical coherence tomography | |
| CN102657519A (en) | OCT (optical coherence tomography)-based high-sensitivity measurement system and method with large dynamic range of flow speed | |
| CA2895878A1 (en) | System and method for imaging subsurface of specimen | |
| CN103499392A (en) | TeraHertz-wave far-field detection super-diffraction resolution imaging instrument | |
| CN107515253B (en) | The non-contact quantitative Diagnosis method of girder construction defect based on convolutional neural networks | |
| WO2016056522A1 (en) | Optical response measuring device and optical response measuring method | |
| CN107179132A (en) | Optical fiber image transmission beam velocity interferometer and shock velocity computational methods | |
| CN105865613A (en) | Underwater optical detection and imaging sensing method and system used for ocean stereo monitoring | |
| CN106618496A (en) | All-optical photoacoustic Doppler transverse flow speed measuring method and device | |
| CN104848928B (en) | Vibration at high speed measuring system and method based on wide spectrum light source principle of interference | |
| JP2007248448A (en) | Internal structure inspecting method and internal structure inspecting device for pearl or precious stones | |
| CN108155540A (en) | A kind of detecting system of single-frequency laser mode hopping | |
| CN105928605A (en) | Method for detecting underwater sound field information, device and underwater acoustic sensor | |
| CN110617890A (en) | Frequency domain F-P type speed measurement system with strong anti-interference capability and speed measurement method thereof | |
| CN202537487U (en) | High-sensitivity measuring system for flow velocity in large dynamic range on basis of optical coherence tomography (OCT) | |
| CN104777133B (en) | A kind of self-alignment refractometer | |
| CN203489968U (en) | Terahertz wave far field detection super diffraction resolution imager |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |