CN104848928A - High-speed vibration measurement system based on wide spectrum light source interference principle and method thereof - Google Patents
High-speed vibration measurement system based on wide spectrum light source interference principle and method thereof Download PDFInfo
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Abstract
The present invention discloses a high-speed vibration measurement system based on a wide spectrum light source interference principle and a method thereof. The high-speed vibration measurement system comprises a light source for emitting coherent light, an optical fiber coupler for splitting the coherent light, a reference arm for returning reference light according to a first light signal after splitting, a sample arm for returning signal light according to a second light signal after splitting, and a spectral demodulator for demodulating the interference signal formed by the reference light and the signal light. The spectral demodulator comprises a spectroscope and a diode array. After the interference signal is split by the spectroscope, a part of the signal is reflected to the diode array to measure a sample vibration parameter. The high-speed vibration measurement method corresponding to the system can measure the sample vibration parameter. The system and the method have the advantages of high sensitivity and high accuracy and are especially suitable for the precise measurement of the vibration parameter of a high-speed vibration sample.
Description
Technical field
The present invention relates to optical coherent chromatographic imaging (OCT, Optical Coherence Tomography) field, particularly a kind of vibration at high speed measuring system based on wide spectrum light source principle of interference and method.
Background technology
At present, the optical interference sensing technology based on wide spectrum light source characteristic is widely used in high-acruracy survey, wherein, has become especially popular research topic for position or displacement or other high-acruracy survey that can be converted into displacement.
Usually should be applied in high precision, distributed interference capability Fibre Optical Sensor based on the optical interference sensing technology of wide spectrum light source characteristic.But, in the application of reality, often need the coherence knowing light source reality exactly, and beam coupling assembly (CCD, Charge-Coupled Device) although can be embodied as the measurement with low speed vibration, but, because the sensitivity of CCD measuring vibrations is lower, the accurate measurement of the sample to vibration at high speed cannot be realized.
Summary of the invention
The object of the present invention is to provide a kind of vibration at high speed measuring system based on wide spectrum light source principle of interference and method, the problem of the accurate measurement of the sample to vibration at high speed cannot be realized for solving CDD of the prior art.
In order to solve the problems of the technologies described above, the invention provides following technical scheme:
A kind of vibration at high speed measuring system based on wide spectrum light source principle of interference, comprise: for sending the light source of coherent light, for this coherent light being carried out the fiber coupler of beam splitting, for according to the reference arm of the first light signal after beam splitting referring back to light, for the sample arm according to the second light signal return signal light after beam splitting, and the interference signal for being formed this reference light and flashlight carries out the spectrum demodulator of demodulation, wherein, described spectrum demodulator comprises spectroscope and diode array, described interference signal is after described spectroscope light splitting, wherein a part reflexes to the measurement for sample vibration parameters in diode array.
Preferably, described spectrum demodulator also comprises: lenticulation assembly and beam coupling assembly, after described interference signal exports described spectroscope to by described lenticulation assembly, wherein a part reflexes to measurement for sample vibration parameters in described diode array, and another part to be transmitted through in described beam coupling assembly for OCT imaging to monitor the measuring surface of sample.
Preferably, described in described spectroscope transmission and reflection, the number percent of interference signal is 90% ~ 95%:5% ~ 10%.
Preferably, described in described spectroscope transmission and reflection, the number percent of interference signal is 95%:5%.
Preferably, described lenticulation assembly comprises the first lens, grating and the second lens that set gradually, and wherein, the described interference signal received exports described spectroscope to by described second lens.
Preferably, described light source is wide spectrum light source, and the centre wavelength of described wide spectrum light source is 810nm – 850nm.
Preferably, described reference arm comprises the 3rd lens and the completely reflecting mirror set gradually, and wherein, described reference light is back to described fiber coupler through described completely reflecting mirror, the 3rd lens.
Preferably, described sample arm comprises lens confocal system, described lens confocal system comprises the 4th lens, galvanometer and the 5th lens that set gradually, and wherein, described flashlight is back to described fiber coupler through described 5th lens, galvanometer, the 4th lens.
Preferably, the described vibration at high speed measuring system based on wide spectrum light source principle of interference also comprises computing machine, described computing machine is connected with described spectrum demodulator and sample arm, for controlling the speed of the galvanometer of described sample arm and carrying out the calculating of follow-up vibration parameters.
Based on a vibration at high speed measuring method for wide spectrum light source principle of interference, comprising: beam splitting is carried out to the coherent light that light source sends; According to first, second light signal after beam splitting respectively referring back to light and flashlight; Described reference light and flashlight are interfered, forms interference signal; And spectroscope and diode array are set in spectrum demodulator, described interference signal is after described spectroscope light splitting, and wherein a part reflexes to the measurement for sample vibration parameters in described diode array.
From above technical scheme provided by the present invention, compared with prior art, the present invention has following beneficial effect:
By arranging spectroscope and diode array in spectrum demodulator, the interference signal that spectrum demodulator is received is after this spectroscope light splitting, and wherein a part reflexes to the measurement for sample vibration parameters in diode array.That is, vibration at high speed measuring system based on wide spectrum light source principle of interference of the present invention and method utilize cooperatively interacting of spectroscope and diode array, instead of the test mode of existing beam coupling assembly, sensitivity to atomic weak interference signal detects greatly is improved, and then the measuring accuracy of the vibration parameters achieving the sample to vibration at high speed can reach nanoscale.
Accompanying drawing explanation
In order to be illustrated more clearly in various embodiments of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in various embodiments of the present invention or description of the prior art below.Apparently, the accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Figure 1A is the structured flowchart of the vibration at high speed measuring system based on wide spectrum light source principle of interference of an embodiment.
Figure 1B is the structured flowchart of the vibration at high speed measuring system based on wide spectrum light source principle of interference of another embodiment.
Fig. 2 is the structured flowchart of the spectrum demodulator of the vibration at high speed measuring system based on wide spectrum light source principle of interference of another embodiment.
Fig. 3 is the process flow diagram of the vibration at high speed measuring method based on wide spectrum light source principle of interference of an embodiment.
The oscillogram that the second spectral information that the diode array of the vibration at high speed measuring system based on wide spectrum light source principle of interference that Fig. 4 is an embodiment detects is corresponding.
Fig. 5 is the time dependent oscillogram of light intensity of one of them diode of the diode array of the vibration at high speed measuring system based on wide spectrum light source principle of interference of another embodiment.
The oscillogram that the first spectral information that the CCD of the vibration at high speed measuring system based on wide spectrum light source principle of interference that Fig. 6 is an embodiment detects is corresponding.
Embodiment
Technical scheme in the present invention is understood better in order to make those of ordinary skill in the art, and enable above-mentioned purpose of the present invention, feature and advantage become apparent more, below in conjunction with accompanying drawing, the technical scheme in various embodiments of the present invention is elaborated further.
Refer to Figure 1A, in one embodiment, a kind of vibration at high speed measuring system 1 based on wide spectrum light source principle of interference comprises: for send coherent light light source 10, for this coherent light is carried out beam splitting fiber coupler 11, be used for the first light signal after according to beam splitting referring back to light reference arm 12, be used for the sample arm 13 of the second light signal return signal light after according to beam splitting and be used for carrying out the interference signal that this reference light and flashlight are formed the spectrum demodulator 14 of demodulation.
Wherein, spectrum demodulator 14 comprises spectroscope 142 and diode array 144, and interference signal is after spectroscope 142 light splitting, and wherein a part reflexes to the measurement for sample vibration parameters in diode array 144.Spectroscope 142 can be semi-permeable and semi-reflecting mirror, can be cubic type, also can be plane etc.
Further, diode array 144 comprises at least one diode, and the test surface of this diode is minimum, is conducive to measuring, and is particularly useful for the accurate measurement of sample vibration at high speed.Meanwhile, by adopting diode array 144, even make the sensitivity to atomic weak interference signal detects also greatly improve, thus the problem of the interference signal insufficient sensitivity that the sample of CCD to vibration at high speed produces in prior art is solved.
Refer to Figure 1B, in one embodiment, spectrum demodulator 14 based on the vibration at high speed measuring system 1 of wide spectrum light source principle of interference also comprises: lenticulation assembly 141 and beam coupling assembly 143 (CCD, Charge-Coupled Device).After the interference signal that lenticulation assembly 141 receives transfers to spectroscope 142, wherein a part reflexes to measurement for sample vibration parameters in diode array 144, and another part to be transmitted through in beam coupling assembly 143 for OCT imaging to monitor the measuring surface of sample.In the present embodiment, a kind of all consistent with Figure 1A based on all the other structures in the vibration at high speed measuring system 1 of wide spectrum light source principle of interference, this is no longer going to repeat them.
Wherein, the number percent of spectroscope 142 transmission and reflection interference signal is 90% ~ 95%:5% ~ 10%, and namely the interference signal of 90% ~ 95% is transmitted through in beam coupling assembly 143, and the interference signal of 5% ~ 10% is emitted in diode array 144.That is, the interference signal of 5% ~ 10% is for realizing the accurate measurement of the sample vibration parameters to vibration at high speed, the interference signal of 90% ~ 95% is used for OCT imaging to monitor the measuring surface of sample, by the monitoring to sample measuring surface, the roughly situation of the interference of light can be known, so that required during the accurate measurement of subsequent sample vibration parameters.
Preferably, when the number percent of spectroscope 142 transmission and reflection interference signal is 95%:5%, now, the measuring accuracy based on the sample vibration parameters of vibration at high speed measuring system 1 pair of vibration at high speed of wide spectrum light source principle of interference is the highest.
As shown in Figure 1B, in one embodiment, the vibration at high speed measuring system 1 based on wide spectrum light source principle of interference also comprises computing machine 15.Computing machine 15 is connected with spectrum demodulator 14 and sample arm 13, for the galvanometer of Quality control arm 13 speed and carry out the calculating of follow-up vibration parameters.
Wherein, when the speed of the galvanometer of computing machine 15 Quality control arm 13 is 0, now, sample geo-stationary, can realize this system and measure the vibration between sample arm 13 light path and sample.Computing machine 15 pairs of diode arrays 144 detect extraction and the calculating that spectral information that interference signal obtains carries out relative photo intensity, thus obtain sample vibration parameters.Such as, these vibration parameters involving vibrations phase place, vibration displacement and vibration frequency etc.
It should be noted that, in the present embodiment, above-mentioned Correlation method for data processing is all completed by the signal processing unit (not shown) of computing machine 15 inside, in other embodiments, this signal processing unit also can be arranged to realize above-mentioned Correlation method for data processing in embedded hardware system, and the present invention is not as limit.
Refer to Figure 1A to Figure 1B, in one embodiment, light source 10 is wide spectrum light source, and the scope of the centre wavelength of this wide spectrum light source is between 810nm – 850nm.Send coherent light by this light source 10 and export fiber coupler 11 to.In the present embodiment, by adopting wide spectrum light source, not only avoid and use expensive laser instrument to do light source, and the coherent light that light source is sent is not simple spectrum light, performance is more stable.Preferably, the centre wavelength of this wide spectrum light source is 830nm.
The input end of fiber coupler 11 is connected with light source 10, and its three output terminals are connected with the input end of the input end of reference arm 12, the input end of sample arm 13 and spectrum demodulator 14 respectively.The effect of fiber coupler 11 is not only that the coherent light sent by light source 10 carries out beam splitting and forms first, second light signal, and this first, second light signal is sent to the input end of reference arm 12 and the input end of sample arm 13 respectively, also be to interfere the reference light returned from reference arm 12 and the flashlight returned from sample arm 13, to form interference signal and to export the input end of spectrum demodulator 14 to.
Reference arm 12 is connected to the first output terminal of fiber coupler 11, and it comprises the 3rd lens and the completely reflecting mirror set gradually, and to be incident upon after on this completely reflecting mirror to reflect to form reference light to make the light signal that receives through the 3rd the beams extended by lens.Meanwhile, this reference light is back to fiber coupler 11 through completely reflecting mirror, the 3rd lens.Certainly, in other embodiments, the composition of reference arm can also have other modes, but the stabilizing effect that in the present embodiment, the building form of the 3rd lens and completely reflecting mirror obtains is best.
Sample arm 13 is connected to the second output terminal of fiber coupler 11, it comprises lens confocal system, this lens confocal system comprises the 4th lens, galvanometer and the 5th lens that set gradually, to form flashlight by after the light signal received simultaneously scioptics confocal system.Meanwhile, this flashlight is back to fiber coupler 11 through the 5th lens, galvanometer, the 4th lens.Certainly, in other embodiments, the composition of sample arm can also have other modes, but the building form of the 4th in the present embodiment, the 5th lens and a galvanometer can not cause the distortion of image field, and imaging effect is best.
Further, in the present embodiment, reference arm 12 and sample arm 13 will be assembled in same cabinet, and the brachium of the brachium of reference arm 12 and sample arm 13 is 13cm, when being in varying environment to avoid sample arm 13 and reference arm 12 (such as, sample arm 13 is positioned at cabinet outside, and reference arm 12 is positioned at cabinet inside), the brachium of sample arm 13 vibrates the impact caused on sample.
Refer to Fig. 2, in one embodiment, the input end of spectrum demodulator 14 is connected to the 3rd output terminal of fiber coupler 11, and the output terminal of spectrum demodulator 14 is connected to computing machine.
Wherein, lenticulation assembly 141 comprises the first lens 1411, grating 1412 and the second lens 1413 that set gradually.Preferably, the first lens 1411 and the second lens 1413 are condenser lens.Interference signal is exported by the 3rd output terminal of fiber coupler 11, focuses on through the first lens 1411, through grating 1412 interference diffraction, then exports after the second lens 1413 focus on.
Second lens 1413 export the interference signal that fiber coupler 11 exports to spectroscope 142, after spectroscope 142 light splitting, wherein a part of interference signal (being 5% interference signal in the present embodiment) reflexes in diode array 144, and another part interference signal (being 95% interference signal in the present embodiment) is transmitted through in beam coupling assembly 143.The first transfer spectral information that detection 95% interference signal obtains by beam coupling assembly 143 is to computing machine, the second transfer spectral information that detection 5% interference signal also obtains by diode array 144 to computing machine so that computing machine carries out follow-up data processing.Such as, the second spectral information exported diode array 144 carries out the calculating of sample vibration parameters.
Further, diode array 144 comprises 16 compact arranged diodes.Those diodes can open and close in timesharing.
When only opening a diode, vibration at high speed measuring system 1 based on wide spectrum light source principle of interference can carry out the time dependent measurement of light intensity for the diode of this unlatching, the waveform obtained as shown in Figure 4, utilizes this waveform can realize the measurement of the sample vibration parameters to vibration at high speed.
When opening multiple different diode, the diode can opened for those based on the vibration at high speed measuring system 1 of wide spectrum light source principle of interference carries out the time dependent measurement of light intensity respectively, the waveform obtained as shown in Figure 4, utilize each waveform all can realize the measurement of the sample vibration parameters to vibration at high speed, and average by measuring to those diodes the sample vibration parameters obtained respectively, be conducive to the precision improving vibration at high speed measurement.Or carry out the statistical measurement of light intensity changes in amplitude for those diodes opened, as shown in Figure 3, wherein, X-axis represents different pixels (i.e. the position of different diode) to the waveform obtained, and Y-axis represents light intensity.Due to this waveform and CCD detection to the waveform (as shown in Figure 5) that obtains of interference signal similar, so diode array 144 also may be used for OCT imaging to monitor the measuring surface of sample simultaneously.
It is worth mentioning that, the vibration at high speed measuring system 1 based on wide spectrum light source principle of interference utilizes CCD or diode array can also realize the measurement of correlation of traditional OCT system.Such as be applied in biological field, carry out the detection, diagnosis etc. of ophthalmology, skin burn inspection, blood microcirculation mensuration, Buccodental imaging of tissue, animal tissue's organ; Be applied in Material Field, industrial production line carries out Real-Time Monitoring, Non-Destructive Testing etc. to material; Be applied in historical relic field, valuable jewelry, pearl, antique are detected etc.
That is, in the present embodiment, vibration at high speed measuring system 1 based on wide spectrum light source principle of interference not only can realize the accurate measurement of the sample vibration parameters to vibration at high speed, the measurement of correlation of traditional OCT system can also be realized, make the application scenarios of the vibration at high speed measuring system 1 based on wide spectrum light source principle of interference obtain further expansion.
Refer to Fig. 3, in one embodiment, a kind of vibration at high speed measuring method 2 based on wide spectrum light source principle of interference comprises the following steps:
Step 21, carries out beam splitting to the coherent light that light source sends.
Step 22, according to first, second light signal after beam splitting respectively referring back to light and flashlight.
Step 23, interferes reference light and flashlight, forms interference signal.
Step 24, arranges spectroscope and diode array in spectrum demodulator, and interference signal is after spectroscope light splitting, and wherein a part reflexes to the measurement of diode array for sample vibration parameters.
Existing composition graphs 1 to Fig. 2, in the present invention one specific embodiment, based on the principle of work of the vibration at high speed measuring system 1 of wide spectrum light source principle of interference, in addition detailed description is as follows.
In step 21, the low-coherent light that the wide spectrum light source 10 being 830nm by centre wavelength sends, after fiber coupler 1*2,50:50 beam splitting, forms two-beam signal, i.e. first, second light signal.This two-beam signal is respectively sent to the input end of reference arm 12 and the input end of sample arm 13.
In step 22, the first optical signal transmission, to the input end of reference arm 12, is incident upon after on completely reflecting mirror through the 3rd the beams extended by lens and reflects, and after forming reference light, this reference light is back to fiber coupler 11 according to former road.Second optical signal transmission is to the input end of sample arm 13, and the lens confocal system through sample arm 13 focuses on the measuring surface of sample, and after forming flashlight, this flashlight is back to fiber coupler 11 according to former road.
In step 23, in fiber coupler 11, the flashlight of the reference light of this reference arm 12 and sample arm 13 is interfered, form interference signal, and be sent to the input end of spectrum demodulator 14.
In step 24, this interference signal transfers to spectrum demodulator 14, received by lens-grating combination 141, the interference signal received is after spectroscope 142 light splitting, 95% interference signal is transmitted in beam coupling assembly 143, and 5% interference signal is reflected onto to be had in the diode array 144 of 16 compact arranged diodes.
Particularly, it is the first spectral information that beam coupling assembly 143 detects the spectral information that 95% interference signal obtains, and it is the second spectral information that diode array 144 detects the spectral information that 5% interference signal obtains.Wherein, the light intensity changes in amplitude figure of corresponding 95% interference signal of this first spectral information, as shown in Figure 6, the light intensity changes in amplitude figure of corresponding 5% interference signal of this second spectral information, as shown in Figure 4.
Further, above-mentioned second spectral information that diode array 144 obtains is transferred to computing machine, carries out the picture construction of two dimension or three-dimensional through computing machine, obtains light intensity changes in amplitude figure corresponding with it, that is sample Oscillation Amplitude variation diagram, as shown in Figure 4.As shown in Figure 4, when sample vibrates, the invariant position of each diode detection in diode array 144, make same sensing point be only that light intensity amplitude there occurs change, namely in this light intensity changes in amplitude figure, waveform fluctuates up and down along Y-axis.After obtaining the light intensity changes in amplitude figure corresponding with the second spectral information, wherein several diodes in diode array 144 will be closed, the time dependent measurement of light intensity is carried out respectively again for the diode retained, to this light intensity in time variation diagram carry out light intensity extraction, namely obtain waveform as shown in Figure 5.As shown in Figure 5, due to the displacement of sample vibration and the amplitude of light intensity proportional, the vibration displacement of this sample, vibration phase, vibration frequency etc. can be drawn through separating coiling computing further.
Above-mentioned steps to be done, makes the vibration parameters accurately can measuring the sample of vibration at high speed based on the vibration at high speed measuring system of wide spectrum light source principle of interference and method.
Foregoing, is only preferred embodiment of the present invention, does not form limiting the scope of the present invention.Any amendment done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. the vibration at high speed measuring system based on wide spectrum light source principle of interference, comprise: for sending the light source of coherent light, for this coherent light being carried out the fiber coupler of beam splitting, for according to the reference arm of the first light signal after beam splitting referring back to light, for the sample arm according to the second light signal return signal light after beam splitting, and the interference signal for being formed this reference light and flashlight carries out the spectrum demodulator of demodulation, it is characterized in that, described spectrum demodulator comprises spectroscope and diode array, described interference signal is after described spectroscope light splitting, wherein a part reflexes to the measurement for sample vibration parameters in described diode array.
2. vibration at high speed measuring system as claimed in claim 1, it is characterized in that, described spectrum demodulator also comprises: lenticulation assembly and beam coupling assembly, after described interference signal exports described spectroscope to by described lenticulation assembly, wherein a part reflexes to measurement for sample vibration parameters in described diode array, and another part to be transmitted through in described beam coupling assembly for OCT imaging to monitor the measuring surface of sample.
3. vibration at high speed measuring system as claimed in claim 2, it is characterized in that, described in described spectroscope transmission and reflection, the number percent of interference signal is 90% ~ 95%:5% ~ 10%.
4. vibration at high speed measuring system as claimed in claim 2, it is characterized in that, described in described spectroscope transmission and reflection, the number percent of interference signal is 95%:5%.
5. vibration at high speed measuring system as claimed in claim 2, it is characterized in that, described lenticulation assembly comprises the first lens, grating and the second lens that set gradually, and wherein, described interference signal exports described spectroscope to by described second lens.
6. the vibration at high speed measuring system as described in as arbitrary in claim 1 to 5, it is characterized in that, described light source is wide spectrum light source, and the centre wavelength of described wide spectrum light source is 810nm – 850nm.
7. vibration at high speed measuring system as claimed in claim 6, it is characterized in that, described reference arm comprises the 3rd lens and the completely reflecting mirror set gradually, and wherein, described reference light is back to described fiber coupler through described completely reflecting mirror, the 3rd lens.
8. vibration at high speed measuring system as claimed in claim 6, it is characterized in that, described sample arm comprises lens confocal system, described lens confocal system comprises the 4th lens, galvanometer and the 5th lens that set gradually, wherein, described flashlight is back to described fiber coupler through described 5th lens, galvanometer, the 4th lens.
9. vibration at high speed measuring system as claimed in claim 6, it is characterized in that, also comprise computing machine, described computing machine is connected with described spectrum demodulator and sample arm, for controlling the speed of the galvanometer of described sample arm and carrying out the calculating of follow-up vibration parameters.
10., based on a vibration at high speed measuring method for wide spectrum light source principle of interference, it is characterized in that, comprising:
Beam splitting is carried out to the coherent light that light source sends;
According to first, second light signal after beam splitting respectively referring back to light and flashlight;
Described reference light and flashlight are interfered, forms interference signal; And
In spectrum demodulator, arrange spectroscope and diode array, described interference signal is after described spectroscope light splitting, and wherein a part reflexes to the measurement for sample vibration parameters in described diode array.
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