CN104826850A - Silicon wafer cleaning basket - Google Patents
Silicon wafer cleaning basket Download PDFInfo
- Publication number
- CN104826850A CN104826850A CN201510307101.8A CN201510307101A CN104826850A CN 104826850 A CN104826850 A CN 104826850A CN 201510307101 A CN201510307101 A CN 201510307101A CN 104826850 A CN104826850 A CN 104826850A
- Authority
- CN
- China
- Prior art keywords
- basket
- cleaning
- gear
- cleaning basket
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
Abstract
The invention provides a silicon wafer cleaning basket which comprises a cleaning basket body, a wafer basket, a rotating shaft, a bearing, a gear, a gear rack and a gravity transmission weight. The wafer basket is arranged on the bottom of the cleaning basket, the rotating shaft, the bearing and the gear are sequentially mounted from inside to outside in a sleeved mode, the rotating shaft is fixed to the bottom of the position, where the wafer basket is located, in the cleaning basket body, the gear rack is meshed with the gear, the lower end of the gear rack is connected with the gravity transmission weight, and the rotating shaft makes contact with wafers arranged in the wafer basket. The silicon wafer cleaning basket has the advantages that all positions of the wafers can evenly receive ultrasonic effects, cleaning dead corners or wafer basket marks are avoided, the cleaning effect of the surfaces of the wafers can be improved effectively, the quality of the surfaces of the wafers is improved, and the market competitiveness of products is further improved.
Description
Technical field
The invention belongs to silicon materials manufacture field, especially relates to a kind of Wafer Cleaning basket.
Background technology
In the face of the semi-conducting material market that current competitive is more and more fierce, self quality improving silicon chip product is one of effective way improving product competitiveness, and the cleaning performance of silicon chip surface is the important parameter investigating silicon chip surface quality.
The cleaning basket that original supersonic wave cleaning machine uses, is only the carrier of loading standard sheet basket, plays band moving plate basket and shifts in each groove of supersonic wave cleaning machine along with the manipulator of cleaning machine and in rinse bath, carry out throwing along with throwing arm.Silicon chip is in relative static conditions in sheet basket, to be stopped by sheet basket due to ultrasonic wave or wash one's hands, cleaning fluid cannot flow freely in narrow space, there is sheet basket and print in the position causing silicon chip to contact with sheet basket, affects the cleaning performance of silicon chip surface.
Summary of the invention
The problem that the invention will solve is to provide a kind of Wafer Cleaning basket that effectively can improve cleaning performance.
For solving the problems of the technologies described above, the technical scheme that the invention adopts is: a kind of Wafer Cleaning basket, comprise cleaning basket and sheet basket, described basket is placed in bottom cleaning basket, in described basket, discharge has silicon chip, also comprise turning cylinder, bearing, gear, tooth bar and gravity drive pendant, described turning cylinder, bearing and gear are set with from inside to outside successively, described turning cylinder is fixed on the bottom of cleaning basket internal sheet basket position, described rack and pinion engagement, described tooth bar lower end falls with gravity drive and is connected, and described turning cylinder contacts with the silicon chip be emitted in sheet basket.
Preferably, described bearing is unilateral bearing.
The advantage that the invention has and good effect are: each position of silicon chip can be made all evenly to receive ultrasonication, prevent cleaning dead angle or sheet basket print, effective cleaning performance improving silicon chip surface, improves silicon chip surface quality, further increases the competitiveness of product in market.
Accompanying drawing explanation
Fig. 1 is the invention structural representation;
Fig. 2 be the invention clean basket upwards throwing time operation principle schematic diagram;
Fig. 3 is the operation principle schematic diagram of the invention when the downward throwing of cleaning basket;
In figure: 1-cleans basket, 2-sheet basket, 3-silicon chip, 4-turning cylinder, 5-bearing, 6-gear, 7-tooth bar, 8-power transmission falls.
Detailed description of the invention
Elaborate below in conjunction with the specific embodiment of accompanying drawing to the invention.
A kind of Wafer Cleaning basket, comprise cleaning basket 1 and sheet basket 2, described basket 2 is placed in bottom cleaning basket 1, in described basket 2, discharge has silicon chip 3, also comprise turning cylinder 4, bearing 5, gear 6, tooth bar 7 and gravity drive pendant 8, described turning cylinder 4, bearing 5 and gear 6 are set with from inside to outside successively, wherein said bearing 5 is unilateral bearing, described turning cylinder 4 is fixed on the bottom of cleaning basket 1 internal sheet basket 2 position, described tooth bar 7 engages with gear 6, described tooth bar 7 lower end falls 8 with gravity drive and is connected, and described turning cylinder 4 contacts with the silicon chip 3 be emitted in sheet basket 2.
The operation principle of former Wafer Cleaning basket is as follows: cleaning basket 1 moves up and down in equipment, and throwing action done by band moving plate basket 2, and silicon chip 3 also does throwing action thereupon simultaneously.Silicon chip 3 remains static in sheet basket 2, and being stopped by sheet basket 2 due to ultrasonic wave or absorb, cleaning fluid cannot flow freely in narrow space, and the position causing silicon chip 3 to contact with sheet basket 2 exists sheet basket and prints.
The operation principle of the invention is as follows:
Cleaning basket 1 upwards throwing time, gravity drive pendant 8 band carry-over bars 7 relatively cleaning basket 1 move downward, and tooth bar 7 drives the gear 6 on turning cylinder to rotate, but due to bearing 5 be unilateral bearing, so the turning cylinder 4 now contacted with silicon chip 3 does not rotate.
Cleaning basket 1 downwards throwing time, gravity drive pendant 8 band carry-over bar 7 moves but is subject to bottom of rinse bath and stops, cleaning basket 1 moves upward relatively, and tooth bar 7 drives the gear 6 on turning cylinder to rotate, the turning cylinder 4 now contacted with silicon chip 3 rotates with gear 6, and in band moving plate basket 2, silicon chip 3 rotates.
Cleaning basket 1 circulate upper and lower throwing motion, silicon chip 3 carries out single direction rotation in sheet basket 2, thus each position realizing silicon chip 3 evenly can accept ultrasonication, effectively prevent cleaning dead angle.
Above an embodiment of the invention has been described in detail, but described content being only the preferred embodiment of the invention, the practical range for limiting the invention can not being considered to.All equalization changes done according to the invention application range with improve, within the patent covering scope that still all should belong to the invention.
Claims (2)
1. a Wafer Cleaning basket, comprise cleaning basket and sheet basket, described basket is placed in bottom cleaning basket, in described basket, discharge has silicon chip, it is characterized in that: also comprise turning cylinder, bearing, gear, tooth bar and gravity drive pendant, described turning cylinder, bearing and gear are set with from inside to outside successively, described turning cylinder is fixed on the bottom of cleaning basket internal sheet basket position, described rack and pinion engagement, described tooth bar lower end falls with gravity drive and is connected, and described turning cylinder contacts with the silicon chip be emitted in sheet basket.
2. a kind of Wafer Cleaning basket according to claim 1, is characterized in that: described bearing is unilateral bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510307101.8A CN104826850A (en) | 2015-06-04 | 2015-06-04 | Silicon wafer cleaning basket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510307101.8A CN104826850A (en) | 2015-06-04 | 2015-06-04 | Silicon wafer cleaning basket |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104826850A true CN104826850A (en) | 2015-08-12 |
Family
ID=53805253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510307101.8A Pending CN104826850A (en) | 2015-06-04 | 2015-06-04 | Silicon wafer cleaning basket |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104826850A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002093774A (en) * | 2000-09-13 | 2002-03-29 | Seiko Epson Corp | Wet treatment unit |
| KR20060035092A (en) * | 2004-10-21 | 2006-04-26 | 주식회사 하이닉스반도체 | Ultrasonic cleaning apparatus of the semiconductor device |
| CN200967049Y (en) * | 2006-10-31 | 2007-10-31 | 北京七星华创电子股份有限公司 | Bracket specially for cleaning solar battery silicon wafers |
| CN201374316Y (en) * | 2008-12-25 | 2009-12-30 | 北京有色金属研究总院 | Rotating device for cleaning or eroding wafers |
| CN103212551A (en) * | 2013-04-02 | 2013-07-24 | 苏州海铂晶体有限公司 | Ultrasonic wave cleaning device for wafer |
| CN204263211U (en) * | 2014-11-14 | 2015-04-15 | 重庆念记食品有限公司 | The breakage-proof sliced meat cutting device of the wheeled straight knife of loose roll |
| CN204747030U (en) * | 2015-06-04 | 2015-11-11 | 天津市环欧半导体材料技术有限公司 | Silicon chip washs basket |
-
2015
- 2015-06-04 CN CN201510307101.8A patent/CN104826850A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002093774A (en) * | 2000-09-13 | 2002-03-29 | Seiko Epson Corp | Wet treatment unit |
| KR20060035092A (en) * | 2004-10-21 | 2006-04-26 | 주식회사 하이닉스반도체 | Ultrasonic cleaning apparatus of the semiconductor device |
| CN200967049Y (en) * | 2006-10-31 | 2007-10-31 | 北京七星华创电子股份有限公司 | Bracket specially for cleaning solar battery silicon wafers |
| CN201374316Y (en) * | 2008-12-25 | 2009-12-30 | 北京有色金属研究总院 | Rotating device for cleaning or eroding wafers |
| CN103212551A (en) * | 2013-04-02 | 2013-07-24 | 苏州海铂晶体有限公司 | Ultrasonic wave cleaning device for wafer |
| CN204263211U (en) * | 2014-11-14 | 2015-04-15 | 重庆念记食品有限公司 | The breakage-proof sliced meat cutting device of the wheeled straight knife of loose roll |
| CN204747030U (en) * | 2015-06-04 | 2015-11-11 | 天津市环欧半导体材料技术有限公司 | Silicon chip washs basket |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150812 |