CN104818531A - Method for supporting tungsten crucible in sapphire crystal growth furnace and tungsten crucible supporting device - Google Patents
Method for supporting tungsten crucible in sapphire crystal growth furnace and tungsten crucible supporting device Download PDFInfo
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- CN104818531A CN104818531A CN201510261736.9A CN201510261736A CN104818531A CN 104818531 A CN104818531 A CN 104818531A CN 201510261736 A CN201510261736 A CN 201510261736A CN 104818531 A CN104818531 A CN 104818531A
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Abstract
The invention discloses a method for supporting a tungsten crucible in a sapphire crystal growth furnace and a tungsten crucible supporting device. The method comprises the following steps: arranging a lug boss on the bottom of the tungsten crucible, arranging a groove on the top surface of a tungsten tray, arranging zirconium oxide sand in the groove of the tungsten tray, inserting the lug boss into the groove, and contacting the lug boss with the zirconium oxide sand to support the zirconium oxide sand so that the tungsten crucible is supported on the tungsten tray; and leaving a clearance between the outer side surface of the lug boss and the inner side surface of the groove, and leaving a clearance between the bottom surface of the tungsten crucible and the top surface of the tungsten tray. The method can also comprise the following steps: arranging a lug boss on the top surface of a tungsten tray, arranging a groove on the bottom of the tungsten crucible, arranging a zirconium oxide sheet on the lug boss of the tungsten tray, inserting the lug boss in the groove, and contacting the lug boss with the zirconium oxide sheet to support the zirconium oxide sheet so that the tungsten crucible is supported on the tungsten tray; and leaving a clearance between the outer side surface of the lug boss and the inner side surface of the groove, and leaving a clearance between the bottom surface of the tungsten crucible and the top surface of the tungsten tray. The method can readjust to ensure the concentricity after the tungsten crucible is deformed by heating.
Description
Technical field
The present invention relates to method for supporting and the tungsten crucible bracing or strutting arrangement of tungsten crucible in a kind of sapphire crystallization furnace, belong to sapphire material producing apparatus technical field.
Background technology
As shown in Figure 1, existing sapphire crystallization furnace comprises the heating element 1, support bar 2, tungsten pallet 3 and the tungsten crucible 4 that are arranged on furnace interior; Tungsten pallet 3 is arranged on one end of support bar 2, and tungsten crucible 4 is arranged on tungsten pallet 3 and tungsten crucible 4 is positioned at the inside of heating element 1, during work, carries out heating impel crystal growth by heating element 1 pair of tungsten crucible 4.For improving the quality of crystal, need central position tungsten crucible 4 being placed on heating element 1 in theory, namely tungsten crucible 4 wants consistent with the concentricity of heating element 1, for ensureing the concentricity of tungsten crucible 4 and heating element 1, first tungsten pallet 3 to be arranged on the central position of heating element 1 in existing sapphire crystallization furnace, then by carrying out wringing fit between tungsten pallet 3 and tungsten crucible 4 thus ensureing the concentricity of tungsten crucible and heating element.
In practical work process, due to in-furnace temperature can up to more than 2000 degree and processing one stove time can reach about 10 to 20 days, in this case, heating element can deform (as shown in phantom in FIG.) in use for some time, at this moment tungsten pallet and tungsten crucible just can not ensure concentricity, need to carry out center adjustment by mobile in level for tungsten crucible, but, due between tungsten pallet of the prior art and tungsten crucible by tight fit connection, thus tungsten crucible of the prior art just cannot carry out the adjustment in horizontal direction.
Authorization Notice No. is CN202090095U, authorized announcement date is that the Chinese utility model patent on December 28th, 2011 discloses a kind of crucible used for growth of single-component oxide crystal, there is connected pot wall and the bottom of a pan, described pot wall is cylindrical drum, its internal surface is inverted first frusto-conical surface, and outside surface is straight cylinder cylinder face; And the described the bottom of a pan is configured to: its upper surface is inverted second frusto-conical surface or inverted sharp conical surface, its lower surface has at the location division of the bottom of a pan central authorities and inverted 3rd frusto-conical surface around described location division.
According to [0021] section in above-mentioned patent documentation and accompanying drawing 1, the tungsten crucible in this patent documentation carries out wringing fit by the groove bottom it and between bracing frame (being equivalent to tungsten pallet), makes tungsten crucible not easily depart from the center of heating system.
Authorization Notice No. is CN201962404U, Authorization Notice No. is that the Chinese utility model patent on September 7th, 2011 discloses a kind of sapphire single-crystal furnace, comprise crucible and the support for supporting described crucible, it also comprises crucible tray, the lower end of described crucible tray is connected with described support, the upper end of described crucible tray is provided with tapered boss, and the bottom of described crucible is provided with the tapered concave inward structure matched with described boss.
Above-mentioned patent documentation is that close-fitting is incompatible reaches higher concentricity requirement by the taper concave inward structure of crucible bottom and the cone boss of crucible tray upper end being carried out.
Thus, can find out, the tungsten pallet in above-mentioned two sections of patent documentations and between tungsten crucible all by tight fit connection, therefore, after heating element deforms, the tungsten crucible in above-mentioned two sections of patent documentations all cannot carry out central position adjustment in level.
To sum up, how to design a kind of method for supporting and tungsten crucible bracing or strutting arrangement of tungsten crucible, make it after heating member distortion, in level, again can also carry out the adjustment of central position to guarantee that the concentricity of tungsten crucible and heating element is the technical problem being badly in need of solving.
Summary of the invention
Technical problem to be solved by this invention is the defect for existing in prior art, method for supporting and the tungsten crucible bracing or strutting arrangement of tungsten crucible in a kind of sapphire crystallization furnace are provided, it after heating member distortion, can again can also carry out the adjustment of central position to guarantee the concentricity of tungsten crucible and heating element in level.
For solving the problems of the technologies described above, the technical solution used in the present invention is: the method for supporting of tungsten crucible in a kind of sapphire crystallization furnace, described method for supporting first arranges boss in the bottom of tungsten crucible, the end face of tungsten pallet arranges groove, be provided with zirconium white sand in groove again on tungsten pallet, finally by the groove boss of tungsten crucible being inserted into tungsten pallet and the boss of described tungsten crucible and zirconium white sand support mutually to contact and make tungsten crucible be supported on tungsten pallet, now, gap L 1 is left between the medial surface of the outer side of the boss of tungsten crucible and the groove of tungsten pallet, also gap L 2 is left between the bottom surface of tungsten crucible and the end face of tungsten pallet, L1 is set to 1mm to 4mm, L2 is set to 1mm to 10mm, support is from top to bottom followed successively by tungsten crucible smoothly, husky and the tungsten pallet of zirconium white or described method for supporting are that elder generation arranges boss on the end face of tungsten pallet, in the bottom of tungsten crucible, groove is set, zirconium white sheet is set on the boss of tungsten pallet again, finally by the groove boss of tungsten pallet being inserted into tungsten crucible and the boss of described tungsten pallet and zirconium white sheet support mutually to contact and make tungsten crucible be supported on tungsten pallet, now, gap L 3 is left between the medial surface of the outer side of the boss of tungsten pallet and the groove of tungsten crucible, also gap L 4 is left between the bottom surface of tungsten crucible and the end face of tungsten pallet, L3 is set to 1mm to 3mm, L4 is set to 1mm to 4mm, and support is from top to bottom followed successively by tungsten crucible, zirconium white sheet and tungsten pallet smoothly.
Preferably, when being set to by zirconium white in the groove on tungsten pallet, what described zirconium white sand adopted is that the thick zirconium white of 20 order to 200 object is husky, and thick zirconium white sand spills in the groove that is put on tungsten pallet.
Preferably, when being spilt in the groove be put on tungsten pallet by thick zirconium white sand, husky the spilling of different positions in a groove of thick zirconium white high-volume matches with the bottom surface form of the bottom surface form of the boss of tungsten crucible and the groove of tungsten pallet.
Preferably, the end face of tungsten pallet smears nano zircite.
Preferably, what described tungsten crucible adopted is the tungsten crucible that a kind of the bottom of a pan thickeies, and after the bottom of a pan thickeies, the bottom of a pan thickness of tungsten crucible is 1.1 times of the bottom of a pan thickness of former tungsten crucible to 1.7 times.
The present invention also discloses a kind of tungsten crucible bracing or strutting arrangement, comprise tungsten crucible, tungsten pallet and support bar, the bottom surface of described tungsten pallet is arranged on one end of support bar, other one end of support bar is arranged on furnace bottom, the bottom of described tungsten crucible is provided with boss, the end face of tungsten pallet is provided with groove, in the groove of tungsten pallet, is provided with zirconium white sand; By in the groove that the boss of tungsten crucible is inserted into tungsten pallet and the boss of described tungsten crucible and zirconium white sand support mutually to contact and make tungsten crucible be supported on tungsten pallet, now, gap is left between the medial surface of the outer side of the boss of tungsten crucible and the groove of tungsten pallet, also leave gap between the bottom surface of tungsten crucible and the end face of tungsten pallet or boss is set on the end face of tungsten pallet, groove is set in the bottom of tungsten pallet, the boss of tungsten pallet arranges zirconium white sheet; By in the groove that the boss of tungsten pallet is inserted into tungsten crucible and the groove of described tungsten crucible and zirconium white sheet support mutually to contact and make tungsten crucible be supported on tungsten pallet; Now, between the medial surface of the outer side of the boss of tungsten pallet and the groove of tungsten crucible, leave gap, between the bottom surface of tungsten crucible and the end face of tungsten pallet, also leave gap.
Preferably, described boss is conical boss, and described groove is cylindrical grooves.
Preferably, furnace bottom is provided with preset pieces, described preset pieces is provided with zirconia brick, other one end of described support bar to be inserted in zirconia brick and is contacted with preset pieces.
Preferably, described support bar is solid cylinder, and one end of described support bar has support bar groove.
Preferably, other one end of described support bar also has support bar groove.
Beneficial effect of the present invention is: after heating member distortion, level can be carried out the adjustment of central position again to guarantee the concentricity of tungsten crucible and heating element by the invention enables tungsten crucible; In the present invention, tungsten crucible does not directly contact with tungsten pallet, thus the tungsten crucible phenomenon mutually bonding with tungsten pallet can not occur, and when to get pot, is directly sling by tungsten crucible and takes out, and avoids and occurs because knocking the phenomenon causing tungsten crucible to damage; By forming the position limiting structure in horizontal direction between boss and groove to tungsten crucible, make tungsten crucible can not occurring contact with heating element when running pot phenomenon, avoid the stove phenomenon that is short-circuited and it also avoid the crystal phenomenon bonding with tungsten crucible simultaneously; Nano zircite sand can be replaced with thick zirconium white by structure design husky, reduce the difficulty removing zirconium sand, improve production efficiency and avoid because zirconium sand is removed in employing Vehicle Processing or grinding and cause tungsten crucible to damage the generation of phenomenon, reducing production cost; By the control of spilling high-volume to thick zirconium white sand, the phenomenon of the tungsten crucible instability that a part causes because of tungsten crucible or the distortion of tungsten pallet can be alleviated; By thickening the bottom of a pan, the generation of phenomenon of turning over flower in tungsten crucible can be avoided.
Accompanying drawing explanation
Fig. 1 is the structural representation being positioned at tungsten crucible place in prior art in stove;
Fig. 2 is the sectional structure schematic diagram of the tungsten crucible bracing or strutting arrangement in the embodiment of the present invention 1 along support bar axis;
Fig. 3 is the structure for amplifying schematic diagram in A portion in Fig. 2;
Fig. 4 is the sectional structure schematic diagram of the tungsten crucible bracing or strutting arrangement in the embodiment of the present invention 2 along support bar axis;
Fig. 5 is the structure for amplifying schematic diagram in B portion in Fig. 4;
In figure: 1. heating element, 2. support bar, 3. tungsten pallet, 4. tungsten crucible, 5. boss, 6. groove, 7. zirconium white is husky, 8. heat insulation lower screen, 9. nano zircite, 10. furnace bottom, 11. preset piecess, 12. zirconia bricks, 13. support bar grooves, 14. zirconium white sheets.
Embodiment
Below in conjunction with the drawings and specific embodiments, elaboration detailed is further done to technical scheme of the present invention.
Embodiment 1: as shown in Figures 2 and 3, the method for supporting of tungsten crucible in a kind of sapphire crystallization furnace, described method for supporting first arranges boss 5 in the bottom of tungsten crucible 4, the end face of tungsten pallet 3 arranges groove 6, in groove 6 again on tungsten pallet 3, zirconium white sand 7 is set, finally by the groove 6 boss 5 of tungsten crucible 4 being inserted into tungsten pallet 3 and the boss 5 of described tungsten crucible 4 support to contact with husky 7 phases of zirconium white and make tungsten crucible 4 be supported on tungsten pallet 3; Now, gap L 1 is left between the medial surface of the outer side of the boss 5 of tungsten crucible 4 and the groove 6 of tungsten pallet 3, also leave gap L 2 between the bottom surface of tungsten crucible 4 and the end face of tungsten pallet 3, support is from top to bottom followed successively by tungsten crucible 4, zirconium white husky 7 and tungsten pallet 3 smoothly.L1 is set to 1mm, 2.5mm or 4mm, and L2 is set to 1mm, 5mm or 10mm.Support well, the distance between boss 5 bottom surface to groove 6 bottom surface is 1mm to 6mm, and wherein L1 is less than the distance between the outer side of tungsten crucible 4 and the medial surface of outer hot body 1.Adopt said structure, make to leave adjusting play between the groove of the boss of tungsten crucible and tungsten pallet, when processing after a stove heating member deforms, tungsten crucible movement in the horizontal direction can carry out the adjustment of central position easily, to guarantee the concentricity of tungsten crucible and heating element.In addition, in two sections of documents in the introduction, tungsten pallet is directly contact with the groove side bottom tungsten crucible, because the atom of solid surface at high temperature can be moved, thus after causing processing a stove, tungsten crucible and tungsten pallet can bond together, when to get pot, if very firmly bonding between tungsten crucible with tungsten pallet, just must knock with flitch, along with tungsten crucible uses the increase of stove number, the grain growth of tungsten crucible, the breaking tenacity of material obviously reduces, when knocking, tungsten crucible is easy to rupture, cause the damage of tungsten crucible, and the tungsten crucible in the present embodiment does not directly contact with tungsten pallet, thus the tungsten crucible phenomenon mutually bonding with tungsten pallet can not be there is, when to get pot, directly tungsten crucible is sling and take out, avoid and occur because knocking the phenomenon causing tungsten crucible to damage.In the prior art, the end face of some tungsten pallets and the bottom surface of tungsten crucible are all planes, tungsten crucible is directly placed on tungsten pallet, can occur like this to run pot phenomenon, because tungsten crucible is arranged on heating element inside, if occur to run pot phenomenon, tungsten crucible runs the words to contacting with heating element, the situation that will cause the short circuit of whole stove that crystal simultaneously also can be caused to glue pot produces, and in the present embodiment, by forming the position limiting structure in horizontal direction to tungsten crucible between boss and groove, even if tungsten crucible occurs to run pot, the distance of maximum L1 that also can only run, and gap L 1 is less than the distance between the outer side of tungsten crucible and the medial surface of outer hot body, thus tungsten crucible can not be contacted with heating element when there is race pot phenomenon, avoid the stove phenomenon that is short-circuited and it also avoid the crystal phenomenon bonding with tungsten crucible simultaneously.
When zirconium white sand 7 being set in the groove 6 on tungsten pallet 3, what described zirconium white husky 7 adopted is that the thick zirconium white of 20 object is husky, thick zirconium white sand spills in the groove 6 that is put on tungsten pallet 3, the thick zirconium white of 40 orders, 90 orders, 120 orders, 160 orders or 200 objects also can be adopted husky here.In the prior art, nano zircite (namely thin zirconium white is husky) can be scribbled between the bottom surface of tungsten crucible and the end face of tungsten pallet isolate, when to get after processing a stove pot, very firmly bonding on the bottom surface that nano zircite sand can be bonded in tungsten crucible, nano zircite sand is difficult to remove from the bottom surface of tungsten crucible, need the method adopting Vehicle Processing or grinding, if doing so production process can be caused complicated, reduce production efficiency and in Vehicle Processing or grinding operation easier very large, slightly careless, the damage of tungsten crucible will be caused, add production cost, and it is husky in the present embodiment nano zircite sand to be replaced with thick zirconium white, like this when to get pot, what be bonded in tungsten crucible bottom surface is exactly that thick zirconium white is husky, found by applicant's test of many times, thick zirconium white is husky very loosely bonding with between tungsten crucible bottom surface, insecure, as long as go to knock thick zirconium white sand with hair clasp just can efficiently thick zirconium white sand be got rid of from the bottom surface of tungsten crucible aspect very much, reduce the difficulty removing zirconium sand, improve production efficiency and avoid because adopting Vehicle Processing or grinding to remove the husky and generation of the phenomenon that causes tungsten crucible to damage of zirconium, reduce production cost.In addition, directly nano zircite sand can not be changed into thick zirconium white in the prior art husky, this is because in order to heat-insulation and heat-preservation, the support bar 2 be positioned at below tungsten pallet 3 also can be provided with heat insulation lower screen 8, smear up again after nano zircite mixes with dispersion liquid by thin zirconium white sand, nano zircite sand can be bonded on tungsten pallet, can not drop downwards, and thick zirconium white sand is directly spilt, thin zirconium white sand is changed into thick zirconium white sand if direct in the prior art, spilling the thick zirconium white sand put can drop on heat insulation lower screen downwards, cause the damage of heat insulation lower screen, by arranging groove on tungsten pallet in the present embodiment, being spilt by thick zirconium white sand puts in a groove, can avoid because thick zirconium white sand drops and cause the phenomenon of the damage of heat insulation lower screen to occur.
When being spilt in the groove 6 be put on tungsten pallet 3 by thick zirconium white sand, thick zirconium white sand spilling of different positions in groove 6 high-volume matches with the bottom surface form of the bottom surface form of the boss 5 of tungsten crucible 4 and the groove 6 of tungsten pallet 3.After processing a stove or many stoves, tungsten crucible or tungsten pallet likely can deform, the bottom surface of the groove of the bottom surface of the boss of tungsten crucible or tungsten pallet is caused to there will be rugged form, thus make tungsten crucible be supported on the phenomenon that there will be tungsten crucible instability after on tungsten pallet, in the present embodiment, because thick zirconium white sand is sand-like thing, can also be regulated when being spilled in groove, the position of protruding downwards in the bottom surface of the boss of tungsten crucible by thick zirconium white sand is spilt less, spill some more in the position that the bottom surface of tungsten crucible is upwards recessed or spill less in the position that the bottom surface of the groove of tungsten pallet is protruding upward, some are spilt in the position recessed down in the bottom surface of the groove of tungsten pallet more, the phenomenon of the tungsten crucible instability that a part causes because of tungsten crucible or the distortion of tungsten pallet can be alleviated by above-mentioned adjustment.
The end face of tungsten pallet 3 is coated with nano zircite 9, namely be coated with one deck nano zircite 9 on groove 6 edge, this is safeguard procedures, namely just in case the bottom of tungsten crucible deforms, the bottom surface of tungsten crucible just likely can contact with the end face of tungsten pallet, at this moment the nano zircite smeared herein just can be isolated between the bottom surface of tungsten crucible and the end face of tungsten pallet, avoids its generation bonding.
What described tungsten crucible 4 adopted is the tungsten crucible 4 that a kind of the bottom of a pan thickeies, and after the bottom of a pan thickeies, the bottom of a pan thickness of tungsten crucible is 1.1 times, 1.4 times or 1.7 times of the bottom of a pan thickness of former tungsten crucible.Operationally, phenomenon of turning over flower is there is sometimes in tungsten crucible, namely in the seeding stage, crystalloid solution can at crucible internal recycle, thus having reactive force to produce, this reactive force can cause tungsten crucible that slight skew or vibrations occur, and makes solution circulated unstable, produce turbulent flow (bubbling), make seeding difficulty or can not successful seeding.The present embodiment solves this problem by thickening the bottom of a pan, is proved, the bottom of a pan of tungsten crucible is thickeied above-mentioned scope, can well solve phenomenon of turning over flower by test of many times.
Testing data is as shown in the table:
| The bottom of a pan thickness of conventional tungsten crucible | The phenomenon of turning over flower of conventional tungsten crucible | The bottom of a pan thickness of tungsten crucible after thickening | The phenomenon of turning over flower of tungsten crucible after thickening | The bottom of a pan thickeies multiple |
| 22 | Have | 37.4 | Nothing | 1.7 |
| 40 | Have | 56 | Nothing | 1.4 |
| 45 | Have | 49.5 | Nothing | 1.1 |
As shown in Figures 2 and 3, the present invention also discloses a kind of tungsten crucible bracing or strutting arrangement, comprise tungsten crucible 4, tungsten pallet 3 and support bar 2, the bottom surface of described tungsten pallet 3 is arranged on one end of support bar 2, other one end of support bar 2 is arranged on furnace bottom 10, the bottom of described tungsten crucible 4 is provided with boss 5, the end face of tungsten pallet 3 is provided with groove 6, in the groove 6 of tungsten pallet 3, be provided with zirconium white sand 7; By in the groove 6 that the boss 5 of tungsten crucible 4 is inserted into tungsten pallet 3 and the boss 5 of described tungsten crucible 4 support to contact with husky 7 phases of zirconium white and make tungsten crucible 4 be supported on tungsten pallet 3, now, leave gap L 1 between the medial surface of the outer side of the boss 5 of tungsten crucible 4 and the groove 6 of tungsten pallet 3, between the bottom surface of tungsten crucible 4 and the end face of tungsten pallet 3, also leave gap L 2.The bottom surface of tungsten pallet 3 has bottom recesses, and one end of support bar 2 is fastened in the bottom recesses of tungsten pallet 3 and is coupled together in one end of support bar 2 and tungsten pallet 3.
Described boss 5 is cylinder boss, and described groove 6 is cylindrical grooves.Here, also boss 5 can be set to conical boss, groove 6 is still cylindrical grooves (not shown), compared with columned boss, boss is set to conical boss, one is can more be convenient to insert, two is to save a part of material, three is when occurring to run pot, when the outer side of boss contacts with the medial surface of groove, outer side due to conical boss is inclined-plane, is the equal of the contact between face and point, can more effectively carries out spacing to tungsten crucible like this when it contacts with the medial surface of groove.
On furnace bottom 10 and the central position being positioned at heating element 1 is provided with preset pieces 11, described preset pieces 11 is provided with zirconia brick 12, other one end of described support bar 2 to be inserted in zirconia brick 12 and is contacted with preset pieces 11.By preset pieces 11, support bar 2 is arranged on the central position of heating element 1, to ensure the concentricity of tungsten crucible and heating element further.
Described support bar 2 is solid cylinder, and one end of described support bar 2 has support bar groove 13.Support bar of the prior art is the tubular body arranged inside of hollow, under the long term of furnace high-temperature Working environment, support bar likely can bend, support bar bends to a certain degree, serious inclination can be there is in tungsten pallet, what cause that tungsten crucible can not be stable drops on tungsten pallet, so can only support bar be scrapped, in the present embodiment, the tubular body arranged inside of hollow is changed into solid, thermosteresis is avoided in the space only leaving support bar end, arranges the intensity strengthening support bar like this, support bar can be avoided to bend.
Other one end of described support bar 2 also has support bar groove 13, arranging main purpose is like this reduce thermal conduction, avoid heat heavy losses simultaneously when after one end wearing and tearing of producing for some time support bar 2, can by inverted for support bar 2, utilize other one end of support bar 2 to be connected with tungsten pallet 3 to continue to use, and the support bar 2 that need not more renew, improve the work-ing life of support bar 2, reduce production cost.
Embodiment 2: as shown in Fig. 4 and Fig. 5, compared with embodiment 1, difference is: described method for supporting first on the end face of tungsten pallet 3, arranges boss 5, in the bottom of tungsten crucible 4, groove 6 is set, again zirconium white sheet 14 is set on the boss 5 of tungsten pallet 3, finally by the groove 6 boss 5 of tungsten pallet 3 being inserted into tungsten crucible 4 and the boss 5 of described tungsten pallet 3 and zirconium white sheet 14 phase support to contact and make tungsten crucible 4 be supported on tungsten pallet 3; Now, gap L 3 is left between the medial surface of the outer side of the boss 5 of tungsten pallet 3 and the groove 6 of tungsten crucible 4, also leave gap L 4 between the bottom surface of tungsten crucible 4 and the end face of tungsten pallet 3, support is from top to bottom followed successively by tungsten crucible 4, zirconium white sheet 14 and tungsten pallet 3 smoothly.L3 is set to 1mm, 2mm or 3mm, and L4 is set to 1mm, 2.5mm or 4mm.Support well, the distance between boss bottom surface to groove floor is 1mm to 4mm, and wherein L3 is less than the distance between the outer side of tungsten crucible 4 and the medial surface of outer hot body 1.
The present embodiment also discloses a kind of tungsten crucible bracing or strutting arrangement, compared with the tungsten crucible bracing or strutting arrangement in embodiment 1, difference is: a kind of tungsten crucible bracing or strutting arrangement, comprise tungsten crucible 4, tungsten pallet 3 and support bar 2, the bottom surface of described tungsten pallet 3 is arranged on one end of support bar 2, and other one end of support bar 2 is arranged on furnace bottom 10, and the end face of tungsten pallet 3 arranges boss 5, groove 6 is set in the bottom of tungsten crucible 4, the boss 5 of tungsten pallet 3 arranges zirconium white sheet 14; By in the groove 6 that the boss 5 of tungsten pallet 3 is inserted into tungsten crucible 4 and the boss 5 of described tungsten pallet 3 and zirconium white sheet 14 phase support to contact and make tungsten crucible 4 be supported on tungsten pallet 3; Now, between the medial surface of the outer side of the boss 5 of tungsten pallet 3 and the groove 6 of tungsten crucible 4, leave gap L 3, between the bottom surface of tungsten crucible 4 and the end face of tungsten pallet 3, also leave gap L 4.
To sum up, by the invention enables tungsten crucible after heating member distortion, level can be carried out the adjustment of central position again to guarantee the concentricity of tungsten crucible and heating element; In the present invention, tungsten crucible does not directly contact with tungsten pallet, thus the tungsten crucible phenomenon mutually bonding with tungsten pallet can not occur, and when to get pot, is directly sling by tungsten crucible and takes out, and avoids and occurs because knocking the phenomenon causing tungsten crucible to damage; By forming the position limiting structure in horizontal direction between boss and groove to tungsten crucible, make tungsten crucible can not occurring contact with heating element when running pot phenomenon, avoid the stove phenomenon that is short-circuited and it also avoid the crystal phenomenon bonding with tungsten crucible simultaneously; Nano zircite sand can be replaced with thick zirconium white by structure design husky, reduce the difficulty removing zirconium sand, improve production efficiency and avoid because zirconium sand is removed in employing Vehicle Processing or grinding and cause tungsten crucible to damage the generation of phenomenon, reducing production cost; By the control of spilling high-volume to thick zirconium white sand, the phenomenon of the tungsten crucible instability that a part causes because of tungsten crucible or the distortion of tungsten pallet can be alleviated; By thickening the bottom of a pan, the generation of phenomenon of turning over flower in tungsten crucible can be avoided.
Above embodiment is used for illustrative purposes only; but not limitation of the present invention; person skilled in the relevant technique without departing from the spirit and scope of the present invention; can also make a variety of changes or convert; therefore all equivalent technical schemes also should belong to protection scope of the present invention, and protection scope of the present invention should be limited by each claim.
Claims (10)
1. the method for supporting of tungsten crucible in a sapphire crystallization furnace, it is characterized in that: described method for supporting first arranges boss in the bottom of tungsten crucible, the end face of tungsten pallet arranges groove, be provided with zirconium white sand in groove again on tungsten pallet, finally by the groove boss of tungsten crucible being inserted into tungsten pallet and the boss of described tungsten crucible and zirconium white sand support mutually to contact and make tungsten crucible be supported on tungsten pallet, now, gap is left between the medial surface of the outer side of the boss of tungsten crucible and the groove of tungsten pallet, also gap is left between the bottom surface of tungsten crucible and the end face of tungsten pallet, support is from top to bottom followed successively by tungsten crucible smoothly, husky and the tungsten pallet of zirconium white or described method for supporting are that elder generation arranges boss on the end face of tungsten pallet, in the bottom of tungsten crucible, groove is set, zirconium white sheet is set on the boss of tungsten pallet again, finally by the groove boss of tungsten pallet being inserted into tungsten crucible and the boss of described tungsten pallet and zirconium white sheet support mutually to contact and make tungsten crucible be supported on tungsten pallet, now, leave gap between the medial surface of the outer side of the boss of tungsten pallet and the groove of tungsten crucible, also leave gap between the bottom surface of tungsten crucible and the end face of tungsten pallet, support is from top to bottom followed successively by tungsten crucible, zirconium white sheet and tungsten pallet smoothly.
2. method for supporting according to claim 1, is characterized in that: when being set to by zirconium white in the groove on tungsten pallet, and what described zirconium white sand adopted is that the thick zirconium white of 20 order to 200 object is husky, and thick zirconium white sand spills in the groove that is put on tungsten pallet.
3. method for supporting according to claim 2, it is characterized in that: when being spilt in the groove be put on tungsten pallet by thick zirconium white sand, husky the spilling of different positions in a groove of thick zirconium white high-volume matches with the bottom surface form of the bottom surface form of the boss of tungsten crucible and the groove of tungsten pallet.
4. method for supporting according to claim 1, is characterized in that: on the end face of tungsten pallet, smear nano zircite.
5. method for supporting according to claim 1, is characterized in that: what described tungsten crucible adopted is the tungsten crucible that a kind of the bottom of a pan thickeies, and after the bottom of a pan thickeies, the bottom of a pan thickness of tungsten crucible is 1.1 times of the bottom of a pan thickness of former tungsten crucible to 1.7 times.
6. a tungsten crucible bracing or strutting arrangement, comprise tungsten crucible, tungsten pallet and support bar, the bottom surface of described tungsten pallet is arranged on one end of support bar, other one end of support bar is arranged on furnace bottom, it is characterized in that: the bottom of described tungsten crucible is provided with boss, the end face of tungsten pallet is provided with groove, in the groove of tungsten pallet, is provided with zirconium white sand; By in the groove that the boss of tungsten crucible is inserted into tungsten pallet and the boss of described tungsten crucible and zirconium white sand support mutually to contact and make tungsten crucible be supported on tungsten pallet, now, gap is left between the medial surface of the outer side of the boss of tungsten crucible and the groove of tungsten pallet, also leave gap between the bottom surface of tungsten crucible and the end face of tungsten pallet or boss is set on the end face of tungsten pallet, groove is set in the bottom of tungsten pallet, the boss of tungsten pallet arranges zirconium white sheet; By in the groove that the boss of tungsten pallet is inserted into tungsten crucible and the groove of described tungsten crucible and zirconium white sheet support mutually to contact and make tungsten crucible be supported on tungsten pallet; Now, between the medial surface of the outer side of the boss of tungsten pallet and the groove of tungsten crucible, leave gap, between the bottom surface of tungsten crucible and the end face of tungsten pallet, also leave gap.
7. tungsten crucible bracing or strutting arrangement according to claim 6, is characterized in that: described boss is conical boss, and described groove is cylindrical grooves.
8. tungsten crucible bracing or strutting arrangement according to claim 6, is characterized in that: on furnace bottom, be provided with preset pieces, and described preset pieces is provided with zirconia brick, and other one end of described support bar to be inserted in zirconia brick and contacted with preset pieces.
9. tungsten crucible bracing or strutting arrangement according to claim 8, is characterized in that: described support bar is solid cylinder, and one end of described support bar has support bar groove.
10. tungsten crucible bracing or strutting arrangement according to claim 9, is characterized in that: on other one end of described support bar, also have support bar groove.
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| CN104818531B (en) | 2017-07-11 |
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