CN104793415A - 薄膜晶体管基板、显示面板及显示装置 - Google Patents
薄膜晶体管基板、显示面板及显示装置 Download PDFInfo
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- 239000010410 layer Substances 0.000 claims description 121
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- 239000011159 matrix material Substances 0.000 claims description 7
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- 238000005286 illumination Methods 0.000 claims description 2
- 229910003437 indium oxide Inorganic materials 0.000 claims description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical group [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 2
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
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- G02F1/1362—Active matrix addressed cells
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
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- G02F1/134363—Electrodes characterised by their geometrical arrangement for applying an electric field parallel to the substrate, i.e. in-plane switching [IPS]
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
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- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134372—Electrodes characterised by their geometrical arrangement for fringe field switching [FFS] where the common electrode is not patterned
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Abstract
本发明公开一种薄膜晶体管基板,包括底板、第一金属层、第一绝缘层、通道层、第二绝缘层及栅极层。第一金属层设置于底板上,且包括互相断开的第一部分及第二部分。第一绝缘层设置于第一金属层上。通道层设置于第一绝缘层上。第二绝缘层设置于通道层上。栅极层设置于第二绝缘层上。第一金属层的第一部分及第二部分分别与通道层部分重叠。
Description
技术领域
本发明是有关于一种薄膜晶体管基板、显示面板及显示装置,特别是关于一种采用上栅极式(top-gate)的薄膜晶体管基板、显示面板及显示装置。
背景技术
随着显示技术的快速发展,不论面板尺寸大小,高分辨率的显示器以逐渐成为市场主流,其能够处理数字信号,并显示更多的画面细节。液晶显示器(Liquid crystal display,LCD)由于具有低耗电、厚度薄、重量轻等优点,适用于此类高分辨率的产品中。
一般的薄膜晶体管(Thin film transistor,TFT)液晶显示器利用TFT对像素电极进行充放电,改变对应于像素电极的液晶分子的透光率。在现行液晶显示器设计中,常见的多晶硅薄膜晶体管的设计多采用下栅极(bottom gate)的晶体管设计,但在制作下栅极薄膜晶体管时,因制作通道层过程中会有高低落差,导致下栅极薄膜晶体管元件效能较差;而为了实现高分辨率液晶显示器,因此需要在显示区域中设计存储电容(storage capacitance,Cst),以保持稳定电压值防止画面闪烁(flicker)。然而,运用于高分辨率液晶显示器的设计采用下栅极(bottom gate)的晶体管以及存储电容电极位于像素区域中的设计,会使得在制作工艺上晶体管效能不佳,且又会降低显示器的开口率。
发明内容
本发明的目的在于一种薄膜晶体管基板及应用其的显示面板与显示装置,薄膜晶体管基板的像素结构设计可达成高分辨率成像,并在平行于栅极的走线处具有额外的存储电容。
为达上述目的,根据本发明的一方面,提出一种薄膜晶体管基板。薄膜晶体管基板包括底板、第一金属层、第一绝缘层、通道层、第二绝缘层及栅极层。第一金属层设置于底板之上,且包括互相分开的第一部分及第二部分。 第一绝缘层设置于第一金属层之上。通道层设置于第一绝缘层之上。第二绝缘层设置于通道层之上。栅极层设置于第二绝缘层之上。其中,第一金属层的第一部分及第二部分分别与通道层部分重叠。
根据本发明的另一方面,提出一种显示面板。显示面板包括上述的薄膜晶体管基板、对向基板及液晶层。对向基板相对于薄膜晶体管基板设置。液晶层位于薄膜晶体管基板及对向基板之间。
根据本发明的再一方面,提出一种显示装置。显示装置包括上述的显示面板及背光模块。背光模块设置于显示面板邻近薄膜晶体管基板的一侧。
为了对本发明的上述及其他方面有更佳的了解,下文特举实施例,并配合所附图式,作详细说明如下:
附图说明
图1绘示依照本发明一实施例的显示装置的示意图。
图2A绘示依照本发明一实施例的薄膜晶体管基板中,部分像素结构的上视图。
图2B绘示图2A的薄膜晶体管基板沿虚线A-A’的剖面图。
图3A绘示依照本发明另一实施例的显示面板。
图3B绘示依照本发明又一实施例的显示面板。
图3C绘示依照本发明再一实施例的显示面板。
符号说明
1:显示装置
2、3、4:显示面板
10:薄膜晶体管基板
100:底板
110:第一金属层
111:第一部分
112:第二部分
120:第一绝缘层
130:通道层
130A、130B:通道区
140:第二绝缘层
150:栅极层
160:第三绝缘层
170:第二金属层
180:平坦层
190:薄膜晶体管元件
20:液晶层
30:对向基板
310、410:共用电极层
220、320、420:像素电极
330、430:层间绝缘层
40:背光模块
50:彩色滤光层
51:黑矩阵区
V1:第一接触孔
V2:第二接触孔
Cst:存储电容
具体实施方式
以下参照所附图式详细叙述本发明的实施例。图式中相同的标号用以标示相同或类似的部分。需特别注意的是,图式已经简化以利清楚说明实施例的内容,且图式上的尺寸比例并非按照实际产品等比例绘制,因此并非作为限缩本发明保护范围之用。
请参照图1,其绘示依照本发明一实施例的显示装置。显示装置1包括显示面板2及背光模块40。显示面板2为液晶显示面板,薄膜晶体管基板10、液晶层20以及对向基板30组成。液晶层20位于薄膜晶体管基板10及对向基板30之间,可受电压驱动而改变其透光率。对向基板30相对于薄膜晶体管基板10设计,例如是彩色滤光片基板,使显示面板2能够显示彩色。
薄膜晶体管基板10为显示面板2的主要元件,其上具有多个像素结构,每个像素结构对应一个像素。在单位面积能够呈现的像素数量,便为显示器的分辨率(resolution),以PPI(每英吋的像素数量Pixel Per Inch)为单位。
图2A及图2B绘示依照本发明一实施例的薄膜晶体管基板10的像素结 构,其中图2A为上视图,图2B为沿着图2A的虚线A-A’的剖面图。如图2B所示,薄膜晶体管基板10包括底板100、第一金属层110、第一绝缘层120、通道层130、第二绝缘层140、栅极层150、第三绝缘层160、第二金属层170、平坦层180以及像素电极220。
请同时参照图2A及图2B,底板100为透明基板,其上形成有第一金属层110。第一金属层110被图案化成两个分开的部分,分别为第一部分111及第二部分112。第一部分111的第一金属层110作为金属遮光层,阻挡背光模块(图1元件40)发出的光照射到晶体管元件(于后详述),避免其电性改变(例如光漏电)。第二部分112的第一金属层110则可形成外加的存储电容(亦于后详述),增加薄膜晶体管基板10的稳定性。
如图2A及图2B所示,第一绝缘层120设置并覆盖整个第一金属层110,通道层130则设置在第一绝缘层120之上。也就是说,第一绝缘层120分隔第一金属层110及通道层130。本例中的第一绝缘层120为3层的多层结构,但实际应用上亦可为单层或更多层的设计,并不做为限制。请参照图2A,通道层130以U形排列在薄膜晶体管基板10上。这样的排列方式可减少开口率的损失使得排列较为紧密,单位面积上可放入较多的像素,因此能够制作高分辨率的显示面板。一实施例中,U形的电路设计可达到至少538PPI的分辨率。相较于另一种L形的电路设计最高仅能达到500PPI的分辨率,L形较难实现于高于538PPI的分辨率,故本实施例的薄膜晶体管基板10可应用在高分辨率的显示面板及显示器。
通道层130的材质例如是多晶硅、氧化铟镓锌等材料,本实施例的通道层130以多晶硅材料为例,其可掺杂不同浓度的杂质,使其具有不同的导电型(例如P型或N型)。本例中,通道层130、第一绝缘层120以及第一金属层110的第二部分112于底板100的法线方向(z轴)上重叠,形成一存储电容Cst(图2A及图2B的区域B,通道层130与第一导电层110的第二部分112重叠的位置),提升薄膜晶体管基板10的稳定性。通道层130对应栅极层150,且通道层130、栅极层150及第二绝缘层140构成晶体管元件。
如图2A及图2B所示,在本实施例的薄膜晶体管基板10中,栅极层150之上还可设置第三绝缘层160、第二金属层170及平坦层180。第三绝缘层160设置于栅极层150之上,用以保护栅极层150,并具有第一接触孔V1贯通第二绝缘层140与第三绝缘层160,以暴露通道层130。第二金属层170 通过第一接触孔V1与通道层130电性连接。平坦层180则形成于第三绝缘层160之上,并具有第二接触孔V2,以暴露第二金属层170。像素电极220位于平坦层180上,并且通过第二接触孔V2与第二金属层170电性连接。
如图2A及图2B所示,第二绝缘层140设置并覆盖整个通道层130,栅极层150则设计在第二绝缘层140之上,也就是第二绝缘层140分隔通道层130及栅极层150。栅极层150与通道层130交错的部分构成一晶体管元件190(图2B中的栅极层150、第二绝缘层140及通道层130重叠的位置)。通道层130的图案可为L型或U型,在图2A中通道层130的图案以U型为例。U型通道层130在与栅极层150重叠的区域形成两通道区130A与130B,使得晶体管元件190具有两通道区130A与130B。「重叠」指通道层130与栅极层150在底板100的法线方向(z轴)上重合,不须互相接触。这样的设计可减少漏电流,进而提升其电性特性。
上述实施例薄膜晶体管基板,藉由在形成金属遮光层时将其图案化成断开的两个部分,不需要额外制作工艺则可在薄膜晶体管基板形成外加的存储电容,增加稳定性。此外,此设计能够应用在通道层U形排列的像素结构,因此可以制作高分辨率的显示面板及显示装置。
图3A至图3C绘示本发明显示面板的实施例。请参照图3A,其绘示FFS(Fringe Field Switching,边界电场切换)型的液晶显示面板。显示面板3由薄膜晶体管基板10、液晶层20与具有彩色滤光层50的对向基板30所组成,且彩色滤光层50上具有一黑矩阵区51(Black Matrix,BM)。此外,在薄膜晶体管基板10上还具有一共用电极层310、层间绝缘层330及像素电极320。共用电极层310、层间绝缘层330及像素电极320依序堆叠于平坦层180上,由共用电极层310与像素电极320产生一可使液晶层20转向的水平电场。在本发明中又一实施例中,共用电极层310与像素电极320的堆叠顺序亦可互换,如图3B所示。
图3C所示的显示面板4为IPS(In-Plane Switching,水平电场切换)型的液晶显示面板。显示面板4由薄膜晶体管基板10、液晶层20与具有彩色滤光层50的对向基板30所组成。此外,薄膜晶体管基板10上还具有一共用电极层410及像素电极420。共用电极层410及像素电极420依序堆叠于平坦层180上,由共用电极层410与像素电极420产生一可使液晶层转向的水平电场。
值得注意的是,上述实施例的显示面板中,第一金属层110的第二部分112与通道层130重叠所形成的存储电容Cst,形成在邻近第一接触孔V1与第二接触孔V2处,并平行于栅极层电路走线,设置于非显示区域中。如图3A至图3C所示,因第一接触孔V1与该第二接触孔V2处的位置本就会被对向基板的黑矩阵区51所遮蔽,因此这样的设计不会降低组合后显示面板的开口率。此外,形成的外加电容位于电路走线处,因此不会降低开口率,且能减少串音现象发生。
综上所述,虽然结合以上实施例公开了本发明,然而其并非用以限定本发明。本发明所属技术领域中具有通常知识者,在不脱离本发明的精神和范围内,当可作各种的更动与润饰。因此,本发明的保护范围应以附上的权利要求所界定的为准。
Claims (15)
1.一种薄膜晶体管基板,包括:
底板;
第一金属层,设置于该底板之上,该第一金属层包括互相分开的第一部分及第二部分;
第一绝缘层,设置于该第一金属层之上;
通道层,设置于该第一绝缘层之上;
第二绝缘层,设置于该通道层之上;以及
栅极层,设置于该第二绝缘层之上,
其中,该第一金属层的该第一部分及该第二部分分别与该通道层部分重叠。
2.如权利要求1所述的薄膜晶体管基板,其中该栅极层、该第二绝缘层及该通道层构成一晶体管元件。
3.如权利要求1所述的薄膜晶体管基板,其中该第一金属层的第二部分、该通道层与该第二部分重叠的区域、以及该第一绝缘层构成一存储电容。
4.如权利要求1所述的薄膜晶体管基板,其中该通道层与该第一部分及第二部分分别部分重叠的区域为连续。
5.如权利要求1所述的薄膜晶体管基板,其还包括:
第三绝缘层,位于该栅极层之上,其中该第三绝缘层具有第一接触孔,贯通该第二绝缘层与该第三绝缘层;以及
第二金属层,位于该第三绝缘层上,并通过该第一接触孔与该通道层电性连接。
6.如权利要求5所述的薄膜晶体管基板,其还包括:
平坦层,位于该第三绝缘层与第二金属层之上,该平坦层具有第二接触孔;以及
像素电极,位于该平坦层上,该像素电极通过该第二接触孔与该第二金属层电性连接。
7.如权利要求1所述的薄膜晶体管基板,其中该通道层与该栅极层有两区域重叠,形成两通道区。
8.如权利要求7所述的薄膜晶体管基板,其中该通道层的形状为U型。
9.如权利要求1所述的薄膜晶体管基板,其中该通道层的材质为氧化铟镓锌(IGZO)或多晶硅。
10.一种显示面板,包括:
如权利要求1所述的薄膜晶体管基板;
对向基板,相对于该薄膜晶体管基板设置;以及
液晶层,位于该薄膜晶体管基板及该对向基板之间。
11.如权利要求10所述的显示面板,还包含:
彩色滤光层,位于该对向基板上。
12.如权利要求11所述的显示面板,其中该彩色滤光层包括黑矩阵层(black matrix),该黑矩阵层的位置与该第一金属层的该第二部分对应。
13.如权利要求10所述的显示面板,其中该显示面板为水平电场切换型(In-Plane Switching)或边界电场切换型(Fringe Field Switching)液晶显示面板。
14.一种显示装置,包括:
如权利要求10所述的显示面板;以及
背光模块,设置于该显示面板邻近该薄膜晶体管基板的一侧。
15.如权利要求14所述的显示装置,其中该第一金属层的该第一部分用以阻挡该背光模块发出的光照射到该晶体管元件。
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