CN104767009B - A kind of waveguide of comprehensive artificial surface phasmon device and the wave filter of substrate integration wave-guide - Google Patents

A kind of waveguide of comprehensive artificial surface phasmon device and the wave filter of substrate integration wave-guide Download PDF

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CN104767009B
CN104767009B CN201510084784.5A CN201510084784A CN104767009B CN 104767009 B CN104767009 B CN 104767009B CN 201510084784 A CN201510084784 A CN 201510084784A CN 104767009 B CN104767009 B CN 104767009B
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waveguide
guide
substrate
artificial surface
surface phasmon
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CN104767009A (en
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崔铁军
张茜
张浩驰
范逸风
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Southeast University
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Southeast University
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Abstract

The invention discloses a kind of waveguide of comprehensive artificial surface phasmon device and the wave filter of substrate integration wave-guide, including the waveguide of artificial surface phasmon and substrate integration wave-guide;The substrate integration wave-guide includes first medium substrate, the first metal layer, and first medium substrate is provided with two row's metallization VIAs;The artificial surface phasmon waveguide includes second medium substrate, the second metal layer, more than one metal groove is provided with second metal layer, and the depth of the metal groove is from both sides to middle arrangement incremented by successively, and the depth of metal groove is incremented by up to identical with the second metallization layer thickness, while the metal groove opening direction of the second metal layer on upper and lower two surfaces is opposite.The wave filter of the present invention has the advantages that easy to process, cost is low, thickness of thin, in light weight, convenient to make general character circuit, has very high practical value;Ultra wide band and narrow band filter are additionally provided simultaneously, realizes good filtering performance.

Description

A kind of waveguide of comprehensive artificial surface phasmon device and the filter of substrate integration wave-guide Ripple device
Technical field
The present invention relates to a kind of wave filter for the waveguide and substrate integration wave-guide for combining artificial surface phasmon device, Belong to Novel manual electromagnetic material field.
Background technology
Novel manual electromagnetic material (Metamaterials) refer to have when electromagnetic wave is propagated wherein special conduction or The artificial composite material of radiation characteristic, it may also be said to be one kind can with engineer, meet specific effective dielectric constant and magnetic conductance The electromagnetic material of rate requirement.Novel manual electromagnetic material is to be based on equivalent medium theory, you can with by changing novel artificial electricity The size of magnetic material cell structure changes effective dielectric constant and magnetic conductivity.By the development of more than ten years, novel artificial electromagnetism Material has obtained significant progress, is all widely used in stealthy, antenna works etc..
Because surface phasmon structure has unique property, in data storage, super-resolution imaging and negative refractive index material Etc. have important application prospect, become one of current hot research field extensively paid attention to by domestic and foreign scholars.But It is due to that metal can not show the characteristic that its dielectric constant is negative value in relatively low frequency range so that the excellent specific property of this structure It can not be reproduced in relatively low frequency range.Recently, people utilize cycle fold by means of the concept of Novel manual electromagnetic material Structure successfully simulates property of the surface phasmon in optical band, and this special construction is referred to as artificial surface etc. from sharp in the industry Member.This new transmission structure to the surface phasmon of traditional optical band there is similar characteristic to be likely to become microwave electricity One of direction of road future development.
Existing surface phasmon wave filter is largely manufactured the characteristics of utilizing cycle pleated structure itself, and Physical dimension is larger, is subject to many limitations in actual applications.And this time provide a kind of based on the filter of artificial surface phasmon The novel integrated method of ripple device, the waveguide with reference to artificial surface phasmon device and the filter of substrate integration wave-guide have been successfully made it Ripple device.
The content of the invention
Goal of the invention:In order to overcome the deficiencies in the prior art, the present invention provide a kind of comprehensive artificial surface etc. from The waveguide of excimer device and the wave filter of substrate integration wave-guide, the wave filter can realize good transmission in broad frequency band Characteristic, and there is good squareness factor.Meanwhile corresponding parameter is adjusted, ultra wide band and arrowband mode filter can also be realized, And all there is preferable transmission characteristic.The wave filter has the advantages that easy to process, cost is low, thickness of thin, in light weight, easily General character circuit is made, there is very high practical value.
Technical scheme:To achieve the above object, the technical solution adopted by the present invention is:A kind of comprehensive artificial surface etc. is from sharp The waveguide of component and the wave filter of substrate integration wave-guide, including the waveguide of artificial surface phasmon and substrate integration wave-guide, and The waveguide of artificial surface phasmon and substrate integration wave-guide, the waveguide of artificial surface phasmon and port, substrate integration wave-guide and Port is connected by microstrip line converter;
The substrate integration wave-guide includes first medium substrate, and the upper and lower surface of the first medium substrate is provided with One metal layer, while the first medium substrate is along the waveguide of artificial surface phasmon and the center line pair of substrate integration wave-guide Title is provided with two row's metallization VIAs;
The artificial surface phasmon waveguide includes second medium substrate, and the upper and lower surface of the second medium substrate is equal The second metal layer is provided with, more than one metal groove, and the metal groove are provided with second metal layer Depth from both sides to middle arrangement incremented by successively, and the depth of metal groove be incremented by until with the second metallization layer thickness phase Together, the metal groove opening direction of the second metal layer while on two surfaces above and below second medium substrate is opposite.
Preferably:It is identical with the spacing between the metallization VIA of row;Spacing is identical between metal groove.
Preferably:The main body of the microstrip transitions device is one section of linear micro-strip transition line, and this micro-strip transition line can be realized Impedance conversion between waveguide and 50 ohm microstrips.
Beneficial effect:A kind of waveguide of comprehensive artificial surface phasmon device provided by the invention and substrate integration wave-guide Wave filter, compared with prior art, have the advantages that:
1. the present invention makes simply, easy to process.It can complete to add the present invention using the PCB process technologies of maturation Work.
2. the present invention provides a kind of novel integrated method based on artificial surface phasmon wave filter.With reference to artificial surface The waveguide of phasmon device and the wave filter of substrate integration wave-guide, all there is good transmission characteristic and square in broad frequency band Shape coefficient.
It is the wave filter 3. the present invention can change the dispersion characteristics of device only by the physical dimension of adjustment structure Frequency range in ultra wide band and arrowband is also respectively provided with good transmission characteristic and squareness factor.Regulation is simple, and autgmentability is good.Because Structure is to reduce its equivalent body phase plasma resonant vibration frequency using the resonance effect of metal unit structure on the whole, therefore, Metal structure is adjusted, equivalent to the resonance frequency that have adjusted its metal structure, plasma frequency is changed, so as to change it Dispersion characteristics.
4. the present invention is provided simultaneously with portable, in light weight, the advantages that being easily integrated.
Brief description of the drawings
Fig. 1 is the cellular construction schematic diagram of waveguide in the present invention, and Fig. 1 (a) is the knot of the cellular construction of substrate integration wave-guide Structure schematic diagram;The upward structural representation of the slot opening of the metal layer of Fig. 1 (b) artificial surface phasmon waveguides, Fig. 1 (c) be artificial surface phasmon waveguide metal layer the downward structural representation of slot opening.
Fig. 2 is the structural representation of artificial surface plasmon waveguide of the invention.
Fig. 3 is the structural representation of substrate integration wave-guide of the present invention.
Fig. 4 is the knot of the wave filter for the waveguide and substrate integration wave-guide that artificial surface phasmon device is combined in the present invention Structure schematic diagram.Wherein, the front schematic view of Fig. 4 (a) filter constructions, Fig. 4 (b) are the reverse side signals of the filter construction Figure.
Fig. 5 is the dispersion relation figure of each several part waveguide device in the present invention.Wherein, Fig. 5 (a) is labor statement in the wave filter Face phasmon Wave guide unit structure (solid black lines) and substrate integrated waveguide single meta structure (black dotted lines) and light (black Pecked line) dispersion relation;Fig. 5 (b) is that artificial surface phasmon waveguiding structure becomes with metal groove depth in the wave filter Change and produce the dispersion characteristic curve changed;Substrate integrated wave guide structure changes and produced with equivalent width in Fig. 5 (c) wave filters The raw dispersion characteristic curve changed.
Fig. 6 is the S21 (black dotted lines) of the wave filter in the present invention and the simulation result curve of S11 (solid black lines) parameter Figure.
Fig. 7 is the imitative of the S21 parameters of the wave filter of the metal groove depth with different artificial surface plasmon waveguides True result curve figure.
Fig. 8 is the simulation result curve map of the S21 parameters of the wave filter of the equivalent width with substrates of different integrated waveguide.
Fig. 9 is the metal groove depth and substrates of different integrated waveguide according to different artificial surface phasmon waveguides Equivalent width, and the simulation result curve map of the S21 parameters of manufactured ultra-wide band filter and narrow band filter.
Wherein, 1 is substrate integration wave-guide, and 11 be first medium substrate, and 12 be the first metal layer, and 13 be to metallize Hole, 2 be artificial surface plasmon waveguide, and 21 be second medium substrate, and 22 be the second metal layer that upper surface is set, and 23 are The second metal layer that lower surface is set, 24 be metal groove.
Embodiment
The present invention is further described below in conjunction with the accompanying drawings.
A kind of waveguide of comprehensive artificial surface phasmon device and the wave filter of substrate integration wave-guide, as shown in Fig. 1,4, Including artificial surface phasmon waveguide 2 and substrate integration wave-guide 1, and artificial surface phasmon waveguide 2 integrates ripple with substrate 1, artificial surface phasmon waveguide 2 is led to be connected by microstrip line converter with port with port, substrate integration wave-guide 1;
As shown in Fig. 1 (a), Fig. 3, the substrate integration wave-guide 1 includes first medium substrate 11, the first medium substrate 11 upper and lower surface is provided with the first metal layer 12, while the first medium substrate 11 is along artificial surface phasmon ripple Lead 2 has two row's metallization VIAs 13 with the center line symmetrical setting of substrate integration wave-guide 1.
As shown in Fig. 1 (b), Fig. 2, the artificial surface phasmon waveguide 2 includes second medium substrate 21, and described second The upper and lower surface of dielectric substrate 21 is provided with the second metal layer (22,23), is set on second metal layer (22,23) There is a more than one metal groove 24, and the depth of the metal groove 24 is from both sides to middle arrangement incremented by successively, and metal The depth of groove is incremented by up to identical with the second metal layer (22,23) thickness, while positioned at second medium substrate two about 21 The opening direction of metal groove 24 of the second metal layer (22,23) on individual surface is on the contrary, the lower surface of second medium substrate 21 The opening upwards of the metal groove 24 of the second metal layer 23 set, the metal for the second metal layer 22 that upper surface is set are recessed Open Side Down for groove 24.
It is identical with the spacing between the metallization VIA 13 of row;Spacing is identical between metal groove 24.
The main body of the microstrip transitions device is one section of linear micro-strip transition line, and this micro-strip transition line can realize waveguide and 50 Impedance conversion between ohm microstrip.
A kind of novel integrated method based on artificial surface phasmon wave filter, combines artificial surface phasmon device The waveguide of part and substrate integration wave-guide.As shown in Fig. 1 (a) is the cellular construction of typical single substrate integrated waveguide, in figure The upper and lower surface of dielectric substrate is metal layer, and two row's metallization VIAs are made in the center of dielectric substrate;Labor statement Shown in cellular construction such as Fig. 1 (b) of face phasmon waveguide and (c), the relative metal groove of the upper and lower surface of dielectric substrate.
The cellular construction of the present invention, preiodic type arrangement is carried out using the structure shown in multiple Fig. 1.As shown in figure 4, labor statement The dielectric-slab top and bottom metal groove opening direction of face phasmon waveguiding structure on the contrary, and the groove at both ends depth present by Decrescence it is small until with metallic plate it is highly identical.The connection of artificial surface phasmon and substrate integration wave-guide and with port and base What piece integrated waveguide was connected with port uses microstrip line converter.
With reference to artificial surface phasmon fold shape structure and substrate integrated wave guide structure fundamental property, such as Fig. 4 institutes Show, the wave filter of different multiple frequency ranges can be designed.
Described filter construction is with ultra wide band and narrow band filter all with good performance.
A kind of waveguiding structure based on artificial surface phasmon device, the waveguiding structure include dielectric substrate and medium The relative metal groove of substrate upper and lower surface.Wherein, the relative metal groove of upper and lower surface is based on shown in Fig. 1 (b) and (c) Cellular construction is carried out made of cycle arrangement, and metal groove opening is opposite.In order to be matched with microstrip line converter, this waveguiding structure The sheet metal of upper and lower surface be progressively smaller until and metallic plate height identical method using the depth of groove at both ends.
One kind is typical single substrate integrated wave guide structure, and the waveguiding structure includes dielectric substrate and dielectric substrate The metal layer of upper and lower surface, the distance that some cycles are separated by dielectric substrate make two row's plated-through holes.
In order to facilitate testing and connecting, the design of microstrip transitions device realizes the waveguide of artificial surface phasmon and substrate collection It is connected into waveguide and port and the waveguide of artificial surface phasmon, substrate integration wave-guide.The main body of microstrip transitions device is one The linear micro-strip transition line of section, this micro-strip transition line can realize the impedance conversion between waveguide and 50 ohm microstrips.
In addition, the dispersion characteristics of the waveguide of artificial surface phasmon and substrate integration wave-guide as shown in Fig. 5 (b), (c), The fundamental property of artificial surface phasmon fold shape waveguiding structure and substrate integrated wave guide structure can be known.Artificial surface etc. There is direct relation from the cut-off frequency of excimer waveguide and the depth of fold shape metal groove, the cut-off frequency of substrate integration wave-guide is then There is direct relation with the equivalent width of the waveguide.Thus ultra wide band and narrow band filter can also be designed, and is all had good Transmission characteristic and squareness factor, this feature cause it to have bigger development prospect under practical application.
A kind of waveguiding structure based on artificial surface phasmon device of the present embodiment and typical single substrate integrate Waveguiding structure wave filter.For artificial surface phasmon waveguiding structure, including dielectric substrate and dielectric substrate upper and lower surface Relative metal groove, and the relative metal groove of upper and lower surface is carried out based on the cellular construction shown in Fig. 1 (b) and (c) Made of cycle arrangement, metal groove opening is opposite.The sheet metal of the upper and lower surface of waveguiding structure uses the depth of the groove at both ends Degree is progressively smaller until and metallic plate height identical method.For substrate integrated wave guide structure, including dielectric substrate and Jie The metal layer of the upper and lower surface of matter substrate, the distance that some cycles are separated by dielectric substrate make two row's plated-through holes. The microstrip transitions device of one section of linear microstrip transition line is devised, realizes the waveguide of artificial surface phasmon and substrate integration wave-guide And port and the waveguide of artificial surface phasmon, substrate integration wave-guide are connected, this micro-strip transition line can realize waveguide and 50 Impedance conversion between ohm microstrip.
As shown in figure 5, the dispersion relation for the present embodiment each several part waveguide device.(a) it is artificial surface in the wave filter Phasmon Wave guide unit structure (solid black lines) and substrate integrated waveguide single meta structure (black dotted lines) and light (black color dots Dotted line) dispersion relation;(b) it is that artificial surface phasmon waveguiding structure produces with metal groove change in depth in the wave filter The raw dispersion characteristic curve changed;(c) substrate integrated wave guide structure changes with equivalent width and produces what is changed in the wave filter Dispersion characteristic curve.
As shown in fig. 6, the S21 (black dotted lines) of wave filter and the simulation result curve map of S11 (solid black lines) parameter.
As shown in fig. 7, the S21 parameters of the wave filter of the metal groove depth of different artificial surface plasmon waveguides is imitative True result curve.
As shown in figure 8, the simulation result curve of the S21 parameters of the wave filter of the equivalent width of same substrate integrated waveguide.
As shown in figure 9, the metal groove depth and substrates of different integrated waveguide of different artificial surface phasmon waveguides Equivalent width, and the simulation result of the S21 parameters of manufactured ultra-wide band filter and narrow band filter is bent.
Being shown by above-mentioned simulation result, the transmission coefficient of the wave filter can reach between 11.2GHz and 21.9GHz- 1dB or so.
The metal groove depth of artificial surface phasmon waveguide and the equivalent width of substrates of different integrated waveguide are adjusted, if The transmission coefficient of the ultra-wide band filter of meter can reach -1dB or so between 8.0GHz and 22.5GHz, about 14.5GHz bandwidth;The transmission coefficient of narrow band filter can reach -1.5dB or so between 16.9GHz and 18.7GHz, About 0.8GHz bandwidth.
From the foregoing, the filter cell of the present invention is by the way that according to specifically rearranging, the convenient curved surface that makes is total to Type circuit, there is very high practical value;Ultra wide band and narrow band filter are additionally provided simultaneously, realizes filtering property well Energy.
Described above is only the preferred embodiment of the present invention, it should be pointed out that:For the ordinary skill people of the art For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should It is considered as protection scope of the present invention.

Claims (3)

1. a kind of waveguide of comprehensive artificial surface phasmon device and the wave filter of substrate integration wave-guide, it is characterised in that:Bag Include the waveguide of artificial surface phasmon and substrate integration wave-guide, and the waveguide of artificial surface phasmon and substrate integration wave-guide, people Work surface plasmon waveguide is connected with port, substrate integration wave-guide and port by microstrip line converter;
The substrate integration wave-guide includes first medium substrate, and the upper and lower surface of the first medium substrate is provided with the first gold medal Categoryization layer, while the first medium substrate is symmetrically set along the center line of the waveguide of artificial surface phasmon and substrate integration wave-guide It is equipped with two row's metallization VIAs;
The artificial surface phasmon waveguide includes second medium substrate, and the upper and lower surface of the second medium substrate is respectively provided with There is the second metal layer, more than one metal groove, and the depth of the metal groove are provided with second metal layer Degree is from both sides to middle arrangement incremented by successively, and the depth of metal groove is incremented by up to identical with the second metallization layer thickness, together When positioned at the second metal layer above and below second medium substrate on two surfaces metal groove opening direction it is opposite.
2. a kind of waveguide of comprehensive artificial surface phasmon device according to claim 1 and the filter of substrate integration wave-guide Ripple device, it is characterised in that:It is identical with the spacing between the metallization VIA of row;Spacing is identical between metal groove.
3. a kind of waveguide of comprehensive artificial surface phasmon device according to claim 1 and the filter of substrate integration wave-guide Ripple device, it is characterised in that:The main body of the microstrip transitions device is one section of linear micro-strip transition line, and this micro-strip transition line can be realized Impedance conversion between waveguide and 50 ohm microstrips.
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CN106486754B (en) * 2016-10-13 2019-06-25 东南大学 A kind of Qie Lunkefu radiation appliance based on artificial surface phasmon
CN108011164A (en) * 2017-12-27 2018-05-08 厦门大学 Substrate integrates artificial surface phasmon waveguide
CN112909456B (en) * 2019-12-04 2024-05-17 成都众志天成科技有限公司 Substrate integrated waveguide filter based on artificial surface plasmon
CN112886168B (en) * 2021-01-11 2021-11-19 中国人民解放军国防科技大学 Mode division multiplexing transmission line based on substrate integrated waveguide and artificial surface plasmon

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