CN104269595A - Multi-channel wave splitter based on broadband slow-wave system - Google Patents
Multi-channel wave splitter based on broadband slow-wave system Download PDFInfo
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- CN104269595A CN104269595A CN201410492509.2A CN201410492509A CN104269595A CN 104269595 A CN104269595 A CN 104269595A CN 201410492509 A CN201410492509 A CN 201410492509A CN 104269595 A CN104269595 A CN 104269595A
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Abstract
The invention relates to a multi-channel wave splitter based on a broadband slow-wave system. The multi-channel wave splitter comprises a dielectric slab and a thin metal-insulator-metal (MIM) grating structure on the dielectric slab. The MIM grating structure is composed of two metal grating structure bodies and an insulator, wherein rectangular or trapezoid periodic grooves are etched in the inner sides of the metal grating structure bodies. The thickness of each metal grating structure body is smaller than 1% of an operating wavelength. In shape, the grooves of the metal grating structure bodies are each composed of a long and straight transverse groove body and a plurality of short and straight longitudinal groove bodies in a vertical intersection mode, wherein the short and straight longitudinal groove bodies are vertically distributed at equal intervals, the lengths of the short and straight longitudinal groove bodies gradually change, and the geometric parameters such as the depths, the widths and/or the periods of the groove bodies gradually change. The insulator is air or any other insulating medium. The MIM grating structure aims to enable electromagnetic waves at different frequencies to be restrained in the grooves in different positions, and being arranged on the dielectric slab, the MIM grating structure can be conveniently integrated with active devices.
Description
Technical field
The present invention relates to a kind of multichannel channel-splitting filter based on broadband slow wave system, this multichannel channel-splitting filter can be used for the communications field, to realize point wave energy of microwave section, millimere-wave band or terahertz wave band.
Background technology
Surface phasmon is the electromagnetic wave being bound by metal and dielectric surface, not by the restriction of optical diffraction limit, thus can be used for structure compact element, in surface or interface tech and data storage etc., there is important application, form surface plasma.The propagation of imitative surface phasmon can be supported by the manual electromagnetic structure formed desirable conductive surface process-cycle micro-structural (its characteristic size is much smaller than wavelength).Utilize manual electromagnetic structure can handle electromagnetic wave propagation more easily, realize various new function element.The broadband slow wave system based on graded metal groove structure proposed at present also has the following disadvantages: 1. also do not have to discharge electromagnetic method in bond simply and effectively, forefathers proposed can in metal groove the thermally sensitive dielectric material of filling, changed the dispersion relation of slow wave structure by the dielectric constant of temperature regulating medium, thus discharge electromagnetic wave in bond.But the method realization complexity and precision are difficult to control; 2. the structure proposed is simple metal structure, and the thickness of metal is generally approximately infinitely great, is unfavorable for other flat surface active device integrated like this.The present invention proposes a kind ofly to be convenient to the MIM optical grating construction broadband slow wave system integrated with flat surface active device, and proposes a kind of simple and effective way to discharge bound electromagnetic wave, thus realizes a kind of multichannel channel-splitting filter.
Summary of the invention
The object of the invention is to the deficiency existed for prior art, a kind of multichannel channel-splitting filter based on broadband slow wave system is provided, realizes multichannel partial wave.For achieving the above object, design of the present invention is: the broadband slow wave system based on MIM optical grating construction that the present invention proposes is made up of MIM optical grating construction very thin on dielectric-slab, this MIM optical grating construction is made up of two metal grating structures of inner side etching period rectangle or the groove such as trapezoidal and insulator, metal grating structure thickness very little (being less than one of percentage operation wavelength), depth of groove in metal grating structure, the geometric parameter gradual change such as width and/or cycle, insulator can be air or other dielectrics, the function of very thin MIM optical grating construction is in the groove of the diverse location that the electromagnetic wave of different frequency is strapped in, the stub branched structure of different length is introduced in notch end, this branched structure forms without the two panels metal of groove and insulator by inside dielectric-slab, its length (calculating from notch end) should be this branch-waveguide wavelength X
g1/4th odd-multiple, the electromagnetic wave be bound by groove can guide by this length-specific branched structure, different length branched structure is introduced in diverse location notch end, just the different frequency electromagnetic wave being bound by diverse location place can be discharged and make it propagate along different stub branches respectively, thus realizing the function of multichannel partial wave.For increasing the isolation between each stub branch, filter can be introduced in the front end of stub branch, this filter is made up of dark and shallow a pair groove compound, by the band-stop response regulating the degree of depth, number of unit etc. of depth groove can regulate filter, thus be high-frequency branch structure by the filtering of unwanted Frequency component, improve the isolation between each branch.This multichannel channel-splitting filter can work in microwave section, millimere-wave band and terahertz wave band.
Conceive the present invention according to foregoing invention and adopt following technical scheme:
A kind of multichannel channel-splitting filter based on broadband slow wave system, comprise dielectric-slab and upper thin metal-insulator-metal type MIM optical grating construction thereof, it is characterized in that: described MIM optical grating construction is made up of two metal grating structures of inner side etching period rectangle or trapezoidal groove and insulator, metal grating structure thickness is less than one of percentage operation wavelength, the shape of the described groove in metal grating structure is: one laterally long, and straight groove is crossing with the short straight texturearunaperpendicular of the longitudinal direction that many vertical length be equally spaced gradually change forms, depth of groove, the geometric parameter gradual change such as width and cycle, exhausted described edge body is air or other dielectrics, the function of MIM optical grating construction is in the groove of the diverse location that the electromagnetic wave of different frequency is strapped in, MIM optical grating construction be placed in dielectric-slab is convenient to active device integrated.
Introduce the stub branched structure of different length in the short straight notch end of some described longitudinal directions, this branched structure extends the extension slot of the longitudinal short straight groove of salient pole intermediate etch by dielectric-slab and the insulator formed in two panels metal and extension slot forms, its length (
l 1,
l 2,
l 3,
l 4) from notch end calculating should be this branch-waveguide wavelength X
g1/4th odd-multiple.The electromagnetic wave be bound by groove can guide by this length-specific branched structure, at diverse location longitudinally short straight notch end introducing different length branched structure, just the different frequency electromagnetic wave being bound by diverse location place can be discharged and make it propagate along different stub branches respectively, thus realizing the function of multichannel partial wave, the microstrip line at the use dielectric-slab back side excites the surface electromagnetic wave in MIM optical grating construction as driving source.
For increasing the isolation between each stub branch, filter can be introduced in the front end of described stub arm extension groove, this filter is made up of the groove compound that dark and shallow a pair intersects vertically with described extension slot, by regulating the degree of depth of depth groove, the band-stop response of number of unit tunable filter, thus be that high-frequency branch structure is by the filtering of unwanted Frequency component.
The present invention compared with prior art, has following apparent outstanding substantive distinguishing features and remarkable technological progress:
The present invention achieves a kind of broadband slow wave system being convenient to Planar integration first, particularly on this slow wave basis, broadband, can discharge bound electromagnetic wave easily by introducing length-specific stub branched structure, thus achieve multichannel channel-splitting filter.This channel-splitting filter can be separated the different frequency electromagnetic wave being bound by MIM optical grating construction diverse location place effectively, is a kind of new method realizing point wave energy, and this realization is simply effective, is convenient to processing and existing maturation process compatibility.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the broadband slow wave system based on MIM optical grating construction that the present invention proposes.
Fig. 2 is the curve chart that in Fig. 1 broadband slow wave system, the electromagnetic group velocity of different frequency changes with depth of groove.
Fig. 3 is the multichannel channel-splitting filter structural representation based on broadband slow wave device in the present invention.
Embodiment
The technological means realized for making the present invention, creation characteristic, reaching object and effect and be easy to understand and understand, below in conjunction with accompanying drawing and preferred embodiment, set forth the present invention further.
Embodiment one:
See Fig. 1 and Fig. 3, this is based on the multichannel channel-splitting filter of broadband slow wave system, comprise dielectric-slab (2) and upper thin metal-insulator-metal type MIM optical grating construction thereof, it is characterized in that: described MIM optical grating construction is by two metal grating structures (3 of inner side etching period rectangle or trapezoidal groove (6), 4) and insulator (5) composition, metal grating structure (3, 4) thickness is less than one of percentage operation wavelength, the shape of the described groove (6) in metal grating structure is: one laterally long, and straight groove is crossing with the short straight texturearunaperpendicular of the longitudinal direction that many vertical length be equally spaced gradually change forms, depth of groove, the geometric parameter gradual change such as width and cycle, described insulator is air or other dielectrics, the function of MIM optical grating construction is in the groove of the diverse location that the electromagnetic wave of different frequency is strapped in, MIM optical grating construction be placed in dielectric-slab is convenient to active device integrated.
Embodiment two:
The present embodiment is substantially identical with embodiment one, and special feature is as follows:
The stub branched structure (7,8,9,10) of different length is introduced in the short straight notch end of some described longitudinal directions, this branched structure extends the extension slot of the longitudinal short straight groove of salient pole intermediate etch by dielectric-slab (2) and the insulator (5) formed in two panels metal and extension slot forms, its length (
l 1,
l 2,
l 3,
l 4) from notch end calculating should be this branch-waveguide wavelength X
g1/4th odd-multiple.The electromagnetic wave be bound by groove can guide by this length-specific branched structure, diverse location longitudinally short straight notch end introducing different length branched structure (7,8,9,10), just the different frequency electromagnetic wave being bound by diverse location place can be discharged and make it propagate along different stub branches respectively, thus realizing the function of multichannel partial wave, the microstrip line (1) at use dielectric-slab (2) back side excites the surface electromagnetic wave in MIM optical grating construction as driving source; For increasing the isolation between each stub branch, filter (11,12) can be introduced in the front end of described stub arm extension groove, this filter (11,12) is made up of the groove compound that dark and shallow a pair intersects vertically with described extension slot, by regulating the degree of depth of depth groove, the band-stop response of number of unit tunable filter, thus be that high-frequency branch structure is by the filtering of unwanted Frequency component.
Embodiment three:
See Fig. 1 and 2, this is based on the broadband slow wave system of MIM optical grating construction, and the principle realizing broadband slow wave is identical with described in forefathers, unlike the metal grating thickness in the present embodiment
dvery thin, and be placed on medium substrate, be convenient to flat surface active device integrated like this; Fig. 1 medium substrate thickness is
d, dielectric-slab upper strata metal grating thickness is
t, metal groove width and cycle be divided into
wwith
p, depth of groove
depgradual change, air seam width
w_air.The metal thickness of the microstrip line (1) at the dielectric-slab back side is also
t, excite the surface electromagnetic wave in MIM optical grating construction as driving source.Can find out in Fig. 2, increase with depth of groove, the electromagnetic group velocity of different frequency can reduce gradually, is even kept to zero, shows that this electromagnetic wave can be tied to this groove, no longer continues forward direction, and the electromagnetic rest position of different frequency is different.
Comprise see Fig. 3, Fig. 3: the broadband slow wave system being carved with the metal groove structure of degree of depth gradual change, and the Waveguide branching structure of four different lengths (7,8,9,10), microstrip waveguide (1).Four Waveguide branching length are respectively
l 1,
l 2,
l 3with
l 4.This is based on the multichannel channel-splitting filter (the present embodiment is four tunnels) of broadband slow wave system, by introducing the stub branched structure (7,8,9,10) of length-specific at electromagnetic wave place in bond, the different frequency electromagnetic wave being bound by diverse location place can be discharged and make it propagate along different stub branches respectively, thus realizing the function of multichannel partial wave.Here length-specific refers to the odd-multiple (this example selects the quarter-wave guide wavelength of three times) of 1/4th of electromagnetic wave guide wavelength in this stub Waveguide branching structure, and the microstrip line (1) at the use dielectric-slab back side excites the surface electromagnetic wave in MIM optical grating construction as driving source; The embodiment that Fig. 3 provides, for No. four channel-splitting filters, is also fine more than 4 branches.
In the present embodiment, the metal grating structure of support surface wave traveling is different according to working frequency range, different processing technology can be adopted to be realized, such as PCB technology, Electric Discharge Wire-cutting Technology or photoetching process etc.
In the present embodiment, first by the dispersion curve of Electromagnetic Simulation tool analysis MIM optical grating construction, by controlling the gradual change of the surface groove degree of depth of limited thickness metal grating structure, the function of broadband slow wave is realized, thus choose different position introducing Waveguide branchings, realize the function of multichannel partial wave.The limited thickness metal grating structure processing of microwave section, millimere-wave band and terahertz wave band is fairly simple.
More than show and describe general principle of the present invention and principal character and advantage of the present invention.The technical staff of the industry should understand; the present invention is not restricted to the described embodiments; what describe in above-described embodiment and specification just illustrates principle of the present invention; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and these changes and improvements all fall in the claimed scope of the invention.Application claims protection range is defined by appending claims and equivalent thereof.
Claims (3)
1. the multichannel channel-splitting filter based on broadband slow wave system, comprise dielectric-slab (2) and upper thin metal-insulator-metal type (MIM) optical grating construction thereof, it is characterized in that: described MIM optical grating construction is by two metal grating structures (3 of inner side etching period rectangle or trapezoidal groove (6), 4) and insulator (5) composition, metal grating structure (3, 4) thickness is less than one of percentage operation wavelength, the shape of the described groove (6) in metal grating structure is: one laterally long, and straight groove is crossing with the short straight texturearunaperpendicular of the longitudinal direction that many vertical length be equally spaced gradually change forms, depth of groove, the geometric parameter gradual change such as width and cycle, described insulator is air and/or other dielectrics, the function of MIM optical grating construction is in the groove of the diverse location that the electromagnetic wave of different frequency is strapped in, MIM optical grating construction be placed in dielectric-slab is convenient to active device integrated.
2. the multichannel channel-splitting filter based on broadband slow wave system according to claims 1, it is characterized in that: the stub branched structure (7,8,9,10) introducing different length in the short straight notch end of some described longitudinal directions, this branched structure extends the extension slot of the longitudinal short straight groove of salient pole intermediate etch by dielectric-slab (2) and the insulator (5) formed in two panels metal and extension slot forms, its length (
l 1,
l 2,
l 3,
l 4) from notch end calculating should be this branch-waveguide wavelength X
g1/4th odd-multiple; The electromagnetic wave be bound by groove can guide by this length-specific branched structure, diverse location longitudinally short straight notch end introducing different length branched structure (7,8,9,10), just the different frequency electromagnetic wave being bound by diverse location place can be discharged and make it propagate along different stub branches respectively, thus realizing the function of multichannel partial wave, the microstrip line (1) at use dielectric-slab (2) back side excites the surface electromagnetic wave in MIM optical grating construction as driving source.
3. the multichannel channel-splitting filter based on broadband slow wave system according to claims 2, it is characterized in that: for increasing the isolation between each stub branch, filter (11,12) can be introduced in the front end of described stub arm extension groove, this filter (11,12) is made up of the groove compound that dark and shallow a pair intersects vertically with described extension slot, by regulating the degree of depth of depth groove, the band-stop response of number of unit tunable filter, thus be that high-frequency branch structure is by the filtering of unwanted Frequency component.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104767009A (en) * | 2015-02-16 | 2015-07-08 | 东南大学 | Filter synthesizing artificial surface plasmon device waveguide and substrate integrated waveguide |
| CN104852119A (en) * | 2015-04-07 | 2015-08-19 | 上海大学 | Compact broadband slow wave system based on double curved-groove metal grating structures |
| CN105280996A (en) * | 2015-10-08 | 2016-01-27 | 中国矿业大学 | Artificial surface plasmon broadband bandstop filter based on composite U-shaped groove structure |
| CN109378559A (en) * | 2018-10-24 | 2019-02-22 | 中山大学 | A kind of radio-frequency filter with periodic structure |
| CN112383997A (en) * | 2020-10-05 | 2021-02-19 | 四川大学 | High-power microwave plasma pulverized coal cracking device |
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| CN102231622A (en) * | 2011-06-22 | 2011-11-02 | 东南大学 | Tortuous two-way surface wave splitter |
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| CN102231622A (en) * | 2011-06-22 | 2011-11-02 | 东南大学 | Tortuous two-way surface wave splitter |
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| YONG JIN ZHOU ET AL: "A 4-way wavelength demultiplexer based on the plasmonic broadband slow wave system", 《OPTICS EXPRESS》 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104767009A (en) * | 2015-02-16 | 2015-07-08 | 东南大学 | Filter synthesizing artificial surface plasmon device waveguide and substrate integrated waveguide |
| CN104767009B (en) * | 2015-02-16 | 2017-12-05 | 东南大学 | A kind of waveguide of comprehensive artificial surface phasmon device and the wave filter of substrate integration wave-guide |
| CN104852119A (en) * | 2015-04-07 | 2015-08-19 | 上海大学 | Compact broadband slow wave system based on double curved-groove metal grating structures |
| CN104852119B (en) * | 2015-04-07 | 2018-04-27 | 上海大学 | Compact wideband slow wave system based on tangent bend excess metal optical grating construction |
| CN105280996A (en) * | 2015-10-08 | 2016-01-27 | 中国矿业大学 | Artificial surface plasmon broadband bandstop filter based on composite U-shaped groove structure |
| CN109378559A (en) * | 2018-10-24 | 2019-02-22 | 中山大学 | A kind of radio-frequency filter with periodic structure |
| CN109378559B (en) * | 2018-10-24 | 2019-09-24 | 中山大学 | A kind of radio-frequency filter with periodic structure |
| CN112383997A (en) * | 2020-10-05 | 2021-02-19 | 四川大学 | High-power microwave plasma pulverized coal cracking device |
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Application publication date: 20150107 |