CN104749768A - Hybrid drive MEMS tunable optical driver - Google Patents
Hybrid drive MEMS tunable optical driver Download PDFInfo
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- CN104749768A CN104749768A CN201510018810.4A CN201510018810A CN104749768A CN 104749768 A CN104749768 A CN 104749768A CN 201510018810 A CN201510018810 A CN 201510018810A CN 104749768 A CN104749768 A CN 104749768A
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Abstract
The invention relates to a hybrid drive MEMS tunable optical driver. The hybrid drive MEMS tunable optical driver comprises a thermal driving deformation beam 1, a magnetic driving deformation beam 2, drive electrodes 3-6, electrical isolation trenches 7-11 and a micro-mirror surface 12 and is characterized in that the magnetic driving beam 2 and thermal driving beam 1 are connected with the micro-mirror surface 12 through drive connecting structures, and the driving beams generate different driving force to change the movement direction of the micro-mirror surface according to different magnetic field directions and exerted voltage. The beam 1 and beam 2 are electrically isolated and thermally isolated through the isolation trenches. The hybrid drive MEMS tunable optical driver uses the magnetic-thermal compatible hybrid drive structure design and uses different isolating structures to isolate the electric drive, the power consumption of the thermal driving beam is reduced, and the light attenuation can be increased without increasing the thermal driving power consumption. By means of the electric isolating and thermal isolating, the influence of the thermal change on the thermal driving beam to the micro-mirror surface structure is avoided, and the whole performance and reliability of the device are improved.
Description
Technical field
The present invention relates to a kind of MEMS tunable optical driver, particularly the MEMS tunable optical decay driver of the combination drive mode of a kind of miniaturization, high reliability.
Background technology
Under the background of global IT application and large data age, high speed optical communication network also more and more comes into one's own and plays a part socio-economic development very important.Novel high speed optical communication network, in order to process the data of day by day complicated and magnanimity, is developed and is enabled large quantities of intellectuality, the optoelectronic function device of dynamic-tuning and module and realize carrying out the function such as Dynamic controlling and switching to the light signal in high speed optical communication network.The optical drive device of miniaturization, dynamic-tuning and high reliability becomes Primary Component indispensable in Novel photo-communication network.
Tunable optical attenuator (Variable Optical Attenuator, VOA) is a kind of optical path signal drived control device, and in optical communication network, major function is used for the adjustment of light signal strength and the overload protection etc. of optical path signal.The optical-fiber network information a large amount of along with modern data center and processing requirements, adjustable optical attenuator application is also more and more extensive.
Existing tunable optical attenuator has multiple technologies scheme, if any traditional step motor type optical attenuator, and macromolecule tunable diffraction gratings type, magneto-optic technology, liquid crystal technology, Planar waveguide technology and MEMS technology.
Tradition step motor type optical attenuator adopts one to be with the stepper motor of FEEDBACK CONTROL to regulate pad value; Adopt the position of a precision resistor feedback attenuation sheet simultaneously.External drive signal orders about stepper motor and rotates to the left or to the right with unified stepping amplitude, which provides accurate attenuation accuracy.Program optical index is excellent, can resist higher luminous power, but bulky, response speed is slow.
Macromolecule tunable diffraction gratings type VOA is based on a kind of film surface modulation technique.Originally, the exploitation of this technology is in order to the LCDs (LCD) in alternative projector and projector and Digital Light Processor (DLP).The top layer of this tunable diffraction gratings is glass, below one deck be indium tin oxide (ITO), centre is air, high molecular polymer and ITO array, and bottom is substrate of glass.This kind of technical speed is fast, but macromolecular material exists device reliability issues under high power light signal function.
Magneto-optic VOA is the change of the optical property utilizing some materials to show under magnetic fields, such as, utilize magnetic rotation effect (Faraday effect) to realize the decay of luminous energy, thus reaches the object regulating light signal.Its fast response time, but its Polarization Dependent Loss and temperature characterisitic index error.
The birefringence effect that liquid crystal VOA make use of liquid-crystal refractive-index anisotropy and demonstrates.When applying external electric field, liquid crystal molecular orientation rearranges, and its light transmission features will be caused to change.Therefore, by applying the change of different Control of Voltage light intensity on two electrodes of liquid crystal, different decay can be realized.This kind of technology volume is little, but power consumption is high, polarization and temperature characterisitic index error.
Planar optical waveguide VOA has three kinds.One is based on Mach-Zehnder interferometer (MZI) principle, and utilizes thermo-optic effect, and the refractive index of material is changed, thus changes the length of the interference arm of MZI, makes two-arm produce different optical path differences, realizes the control to light decrement.This method must carry out beam splitting and coupling to light beam, and this will introduce larger insertion loss.Another kind of is after waveguide is heated based on thermo-optic effect, create more multi-mode light, and the light of a part of pattern leaks from waveguide, achieves the decay of light like this in waveguide.The third is directly based on electric absorption (EA) modulation, utilizes carrier injection to change absorption coefficient to realize the decay of luminous power.It is little that waveguide type VOA has volume, integrated level advantages of higher, but its power consumption is comparatively large, and polarization characteristic is poor and have the shortcomings such as preheating time.
Relative to the adjustable optical attenuator of above technology, the novel optical attenuator based on MEMS technology has fast response time, the main flow of miniaturization and advantage becomes the gradually adjustable optical attenuator such as optical index is good.
Adjustable optical attenuator based on MEMS technology mainly contains two kinds of technical schemes.Be a VOA device for the reflective encapsulation of light based on micromirror, its couple variations utilizing the reflection angle reflected light signal of micromirror to form light signal realizes the decay of light signal.CN200410053563.3 discloses the quiet electrically driven (operated) MEMS optical attenuator chip design of a kind of employing and method for making.The optical attenuator technical scheme of reflective encapsulation has low-power consumption, the advantages such as damping capacity is large, but its optical polarization characteristic and wavelength dependent characteristics poor, simultaneously the anti-vibration ability of device is also more weak.
Another kind is that its principle is upon application of a voltage based on thermal expansion light-barrier type MEMS VOA, and when electric current is by MEMS mechanical arm, mechanical arm fever expansion promotes light barrier motion, blocks a part of light, thus realizes decay.But the power consumption of thermal expansion light-barrier type VOA is slightly high relative to MEMS electrostatic return formula VOA, also there is the problem that large amount of movement needs high power consumption simultaneously.
Summary of the invention
For the problems referred to above, the object of the invention is to meet the more and more higher requirement of the miniaturization of present sun adjuster part, low-power consumption and device reliability, propose a kind of can the compact MEMS optical drive device of thermal expansion and electromagnetism combination drive.
For achieving the above object, the invention provides a kind of MEMS tunable optical driver of combination drive, it is characterized in that:
Described MEMS adjustable optical driver chip structure as shown in Figure 1, comprises thermal drivers variable shaped beam 1, Magnetic driving variable shaped beam 2, drive electrode 3, drive electrode 4, drive electrode 5, drive electrode 6, electric isolution groove 7, electric isolution groove 8, electric isolution groove 9, electric isolution groove 10, electric isolution groove 11, beam and micro mirror structure 12.
Described Magnetic driving beam 2 is connected with micromirror 12 by driving syndeton with thermal drivers beam 1, according to the voltage of different magnetic field direction and applying, described Magnetic driving beam and thermal drivers beam can produce different electromagnetic actuation forces and thermal drivers power thus change the direction of motion of dynamic micromirror, carry out electric isolution and heat is isolated between described Magnetic driving beam 2 and thermal drivers beam 1 with isolation channel 11; Described thermal drivers beam carries out thermal expansion deformation by the voltage be applied between drive electrode 3 and drive electrode 4, described Magnetic driving beam is out of shape under magnetic fields by the electric current be applied between drive electrode 5 and drive electrode 6, described drive electrode 3 is isolated by electric isolution groove 7 and drive electrode 5, and described drive electrode 4 is isolated by electric isolution groove 8 and drive electrode 6; Isolated by electric isolution groove 9 between drive electrode 3 and drive electrode 4, isolated by electric isolution groove 10 between drive electrode 5 and drive electrode 6.
Its compared with prior art, present invention employs can the design of Magnetic driving and compatible thermal actuator, adopts different isolation structures to drive its electricity simultaneously and isolates.When combination drive, decrease the power consumption of thermal drivers beam, its beneficial effect is power consumption required when Electromagnetic Drive can be utilized can to reduce single employing thermal drivers technology, utilizes Electromagnetic Drive to increase its light decrement when not increasing thermal drivers power consumption.Simultaneously owing to adopting isolation channel to carry out electric isolation and calorifics isolation to thermal drivers beam and Magnetic driving beam, avoid the impact of the thermal distortion on thermal drivers beam on micro mirror structure, improve overall performance and the reliability of device.Combination drive MEMS optical drive proposed by the invention, can apply but be not limited to optical attenuator, photoswitch etc.
Accompanying drawing explanation
Fig. 1 is the basic structure schematic diagram of traditional thermal drivers bent beam.
Fig. 2 is the structural representation of MEMS combination drive tunable optical driver of the present invention.
Fig. 3 is the application schematic perspective view of MEMS combination drive tunable optical driver of the present invention.
Direction of current schematic diagram A when Fig. 4 is MEMS combination drive of the present invention in device.
Direction of current schematic diagram B when Fig. 5 is MEMS combination drive of the present invention in device.
Embodiment
Below in conjunction with accompanying drawing, technical scheme of the present invention is elaborated: the present invention premised on the preferred embodiment provided under implement, give detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.Accompanying drawing of the present invention is signal reference diagram, should not be considered to the proportionate relationship strictly reflecting physical dimension, also should not be considered to limit the scope of the invention.
Traditional thermal drivers bent beam structure comprises drive electrode 1 and drive electrode 2, bent beam 3, as shown in Figure 1.After apply voltage in drive electrode 1 and drive electrode 2, after current flow heats bent beam 3, the thermal expansion of its bent beam causes bent beam 3 to carry out displacement deformation.Its structure is simple, and driving force is large, but in use bent beam power consumption is large, drives the thermal distortion on beam to affect its connected micro mirror structure simultaneously, finally affects optical property and the reliability of device.
Fig. 2 is MEMS tunable optical driver chip structure of the present invention, and it comprises: thermal drivers variable shaped beam 1, Magnetic driving variable shaped beam 2, drive electrode 3, drive electrode 4, drive electrode 5, drive electrode 6, electric isolution groove 7, electric isolution groove 8, electric isolution groove 9, electric isolution groove 10, electric isolution groove 11, beam and micro mirror structure 12.Described Magnetic driving beam 2 is connected with micromirror 12 by driving syndeton with thermal drivers beam 1, according to the voltage of different magnetic field direction and applying, described Magnetic driving beam and thermal drivers beam can produce different electromagnetic actuation forces and thermal drivers power thus change the direction of motion of dynamic micromirror, carry out electric isolution and heat is isolated between described Magnetic driving beam 2 and thermal drivers beam 1 with isolation channel 11; Described thermal drivers beam carries out thermal expansion deformation by the voltage be applied between drive electrode 3 and drive electrode 4, described Magnetic driving beam is out of shape under magnetic fields by the electric current be applied between drive electrode 5 and drive electrode 6, described drive electrode 3 is isolated by electric isolution groove 7 and drive electrode 5, and described drive electrode 4 is isolated by electric isolution groove 8 and drive electrode 6; Isolated by electric isolution groove 9 between drive electrode 3 and drive electrode 4, isolated by electric isolution groove 10 between drive electrode 5 and drive electrode 6.
Thermal drivers beam carries out the thermal expansion deformation of thermal drivers beam by the voltage be applied between drive electrode 3 and drive electrode 4, isolation channel 9 is utilized to carry out isolation drive electrode 3 and drive electrode 4, isolation channel 7, isolation channel 8 and isolation channel 11 is utilized to carry out the isolation with Magnetic driving, also utilize isolation channel 11 to carry out heat conducting isolation simultaneously, decrease and the thermal distortion of mirror surface structure is affected.
Novel Magnetic driving beam provides extra deformation force at magnetic fields, by being applied to the electric current between drive electrode 5 and drive electrode 6, the isolation of two electrodes is carried out by isolation channel 10, utilize isolation channel 7, isolation channel 8 and isolation channel 11 to carry out the isolation with thermal drivers simultaneously, also utilize isolation channel 11 to carry out heat conducting isolation simultaneously, decrease and the thermal distortion of mirror surface structure is affected.
The application of the optical drive attenuator of a kind of combination drive that the present invention proposes as shown in Figure 3, when combination drive optical attenuator chip is placed in magnetic field, the power of being undertaken driving micro mirror structure to realize light signal by being applied to thermal actuator and the structural driving of Magnetic driving respectively regulates.Magnetic driving girder construction can increase the overall attenuation amount of device, and reduces power consumption needed for thermal drivers in the application, finally realizes the minimizing of the power consumption of integral device.Isolation structure simultaneously in thermal drivers and Magnetic driving also can reduce the impact of thermal distortion on micro mirror structure.
Based on the combination drive structure that the present invention proposes, when magnetic direction be vertical paper inwards time, its apply time chip internal current trend as shown in Figure 4, its electric current is from left to right, its thermal drivers power is also consistent with electromagnetic actuation force simultaneously, is micromirror direction of motion upwards.
Based on the combination drive structure that the present invention proposes, when magnetic direction be vertical paper outside time, its apply time chip internal current trend as shown in Figure 5, its electric current is turns left from the right side, its thermal drivers power is also consistent with electromagnetic actuation force simultaneously, is micromirror direction of motion upwards.As the direction of motion of micromirror need be changed, different electric currents and magnetic direction trend can be designed.
Combination drive MEMS optical drive proposed by the invention, can apply but be not limited to optical attenuator, photoswitch etc.
In sum, the present invention has the following advantages:
1. combination drive project organization is novel.This chip have employed can the design of Magnetic driving and compatible thermal actuator, adopts different isolation structures to drive its electricity simultaneously and isolates.When combination drive, decrease the power consumption of thermal drivers beam, achieve the lower power consumption of integral device.
2. add the thermal reliability of micro mirror structure.Owing to adopting isolation channel, electric isolation is carried out to thermal drivers beam and Magnetic driving beam, this isolation channel also can realize the calorifics isolation between thermal drivers beam and Magnetic driving beam simultaneously, avoid the impact of the thermal distortion on thermal drivers beam on micro mirror structure, improve overall performance and the reliability of device.
3. volume is little.Owing to have employed the combination drive principle of MEMS design and compact Magnetic driving and thermal drivers, encapsulate with the magnet mated and apply, hybrid drive-type MEMS tunable optical driver closely can be realized.
Claims (5)
1. a combination drive MEMS tunable optical driver, it is characterized in that described combination drive tunable optical driver comprises Magnetic driving beam and thermal drivers beam, described Magnetic driving beam is connected with micromirror by driving syndeton with thermal drivers beam, according to the voltage of different magnetic field direction and applying, described Magnetic driving beam and thermal drivers beam can produce different electromagnetic actuation forces and thermal drivers power thus change the direction of motion of dynamic micromirror, carry out electric isolution and heat is isolated between described Magnetic driving beam and thermal drivers beam with isolation channel (11).
2. combination drive MEMS tunable optical driver according to claim 1, wherein said thermal drivers beam carries out thermal expansion deformation by the voltage be applied between drive electrode (3) and drive electrode (4), described Magnetic driving beam is out of shape under magnetic fields by the electric current be applied between drive electrode (5) and drive electrode (6), described drive electrode (3) is isolated by electric isolution groove (7) and drive electrode (5), and described drive electrode (4) is isolated by electric isolution groove (8) and drive electrode (6).
3. combination drive MEMS tunable optical driver according to claim 2, is wherein isolated by electric isolution groove (9) between drive electrode (3) and drive electrode (4).
4. the combination drive MEMS tunable optical driver according to Claims 2 or 3, is wherein isolated by electric isolution groove (10) between drive electrode (5) and drive electrode (6).
5. the combination drive MEMS tunable optical driver according to claim 2-4, its application can comprise optical attenuator, light shutter device, also can be other field of optical applications.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101544347A (en) * | 2009-04-23 | 2009-09-30 | 上海交通大学 | Bidirectional bistable microdrive based on electrothermal and electromagnetic drive |
| KR20100097943A (en) * | 2009-02-27 | 2010-09-06 | 연세대학교 산학협력단 | Bidirectional electrothermal electromagnetic torsional microactuators and it's manufacturing method |
| CN101963698A (en) * | 2010-09-30 | 2011-02-02 | 西北工业大学 | Micro-mechanical space optical modulator |
| CN103684039A (en) * | 2013-12-23 | 2014-03-26 | 南昌工程学院 | Magnetostrictive inertial impact driver |
| CN104201059A (en) * | 2014-09-03 | 2014-12-10 | 太原理工大学 | Radio-frequency MEMS switch based on electrostatic repulsion and attraction hybrid driving |
| CN204719329U (en) * | 2015-01-15 | 2015-10-21 | 深圳市盛喜路科技有限公司 | A kind of tunable optical driver of combination drive |
-
2015
- 2015-01-15 CN CN201510018810.4A patent/CN104749768A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20100097943A (en) * | 2009-02-27 | 2010-09-06 | 연세대학교 산학협력단 | Bidirectional electrothermal electromagnetic torsional microactuators and it's manufacturing method |
| CN101544347A (en) * | 2009-04-23 | 2009-09-30 | 上海交通大学 | Bidirectional bistable microdrive based on electrothermal and electromagnetic drive |
| CN101963698A (en) * | 2010-09-30 | 2011-02-02 | 西北工业大学 | Micro-mechanical space optical modulator |
| CN103684039A (en) * | 2013-12-23 | 2014-03-26 | 南昌工程学院 | Magnetostrictive inertial impact driver |
| CN104201059A (en) * | 2014-09-03 | 2014-12-10 | 太原理工大学 | Radio-frequency MEMS switch based on electrostatic repulsion and attraction hybrid driving |
| CN204719329U (en) * | 2015-01-15 | 2015-10-21 | 深圳市盛喜路科技有限公司 | A kind of tunable optical driver of combination drive |
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Effective date of registration: 20180522 Address after: 215028 513, room 20, Nanbei Town, 99 Suzhou Jinji Road, Suzhou Industrial Park, Jiangsu. Applicant after: Suzhou Sheng Sheng Electronic Technology Co., Ltd. Address before: 518000 A, 22A.B.Cb.Ca.D.E-E-8, office building of Silver Garden, West Red Li Road, Futian District, Shenzhen, Guangdong. Applicant before: Sheng Xi road, Shenzhen Science and Technology Ltd. |