CN104749736B - High-compactness precision linear driving device applied to vacuum environment - Google Patents
High-compactness precision linear driving device applied to vacuum environment Download PDFInfo
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- CN104749736B CN104749736B CN201310726082.3A CN201310726082A CN104749736B CN 104749736 B CN104749736 B CN 104749736B CN 201310726082 A CN201310726082 A CN 201310726082A CN 104749736 B CN104749736 B CN 104749736B
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
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Abstract
The invention relates to a high-compactness precision linear driving device applied to a vacuum environment, comprising a base. The high-compactness precision linear driving device is characterized in that the base is composed of an X-axis motion system, a Y-axis motion system and a Z-axis motion system sequentially from bottom to top; a second guide rail mounting plate of the Y-axis motion system is mounted on a first guide rail slide block connecting plate of the X-axis motion system by bolts; the bottom surface of an L-shaped frame of the Z-axis motion system is connected to a second guide rail slide block connecting plate of the Y-axis motion system by bolts; the Z-axis motion system can move linearly along an X axis and a Y axis; and the Z-axis motion system can move along a Z axis which is vertical to an X-Y plane, and an ion source incident angle operating system is connected to the Z-axis motion system by a bolt. Compared with a linear motion system adopting a rotary motor screw and the like, the cleanliness of a vacuum chamber is improved as there is no intermediate transmission link, and the accuracy of repeated positioning is essentially improved as there is no reverse motion gap.
Description
Technical field
The present invention relates to a kind of high compactness precision linear driving device for vacuum environment, especially to vacuum environment
The ion beam of lower aspheric optical lens repairs the linear actuation motion device of polishing.
Background technology
With developing rapidly for science and technology, light laser optical system and fine definition optical system, such as Armt Tactical Laser is military
Device optical system, remote ultraviolet and infrared imaging detection system, deep space Photodetection system, lightweight are steady as seeing system of taking aim at, swashing
Optical detection and ranging system, deep ultraviolet and extreme ultraviolet lithography system etc., to Subnano-class surface roughness and nanoscale surface precision
The demand of optical element is increasingly urgent, needs to be realized by optical super-precision surface and its manufacturing technology.Advanced electro-optical system
The requirement of development is increasingly lifted, and the precision and surface quality corresponding to " ultraprecise " is also increasingly becoming more meticulous.With surface roughness
As a example by surface precision, the yardstick of ultra-smooth has evolved to surface roughness and reaches below 1nm, and surface precision is better than 10nm.
Processing superhigh precision optical element, needs using polish pressure close to zero contactless Ultraprecise polished technology, keeps away
Exempt from the generation of optical element surface and sub-surface microscopic damage defect.In terms of this, thrown with plasma shaping and ion beam
Light technology is the noncontact processing technology of representative, possesses the multiple advantages for meeting superhigh precision Optical element manufacturing rigors.
Ion beam polishing technology is unstressed, the contactless ultra-precise optical technology in atom magnitude, with processing essence
Spend height, not damaged, the clean free of contamination feature of medium-high frequency minute waviness, machined surface can be suppressed, be particularly suitable for high precision plane, depth
The ultraprecise of the special optical elements such as degree aspherical mirror, special-shaped minute surface, Free Surface minute surface and laser crystal and material adds
Work, both coordinate machining accuracy to reach sub- nanometer scale, with the incomparable superiority of traditional handicraft, while can also improve
Operating efficiency, makes workmanship be guaranteed.
To ensure that ion beam polishing process is effectively implemented, ion beam polishing is needed by essence under vacuum and high-cleanness, high environment
The driving means of true, quick response realize, by this device control ion beam source to be processed optical element sweep speed,
The technical parameters such as the incidence angle of residence time and ion beam.
A kind of accurate feeding for vacuum environment, quick response are designed for this, ensures processing environment high cleanliness
Linear drive apparatus, are capable of achieving ion gun movement velocity stepless time adjustment, and high acceleration and repetitive positioning accuracy reach micron-sized
Position control is technical problem in the urgent need to address.
The content of the invention
The technical problem to be solved is to provide a kind of compact conformation, manipulation for above-mentioned state of the art
Convenience, fast response time, kinematic accuracy and repetitive positioning accuracy are high and can be used for the linear drives of the linear motion of vacuum environment
Device.
The present invention solve the technical scheme that adopted of above-mentioned technical problem for：A kind of high compactness essence for vacuum environment
Close linear drive apparatus, including support, it is characterised in that：The support is followed successively by from the bottom to top X-axis kinematic system, Y-axis motion
System, Z axis kinematic system, the second guide rails assembling plate of Y-axis kinematic system first is led by what screw was installed on X-axis kinematic system
On rail slide attachment plate, X-axis kinematic system drives the first guide rail slide block connecting plate to drive Y-axis kinematic system by linear electric motors
It is for linear motion along X-axis；The underrun mode connects for screw of the L-shaped support body of Z axis kinematic system is in the second guide rail of Y-axis kinematic system
On slide attachment plate, Y-axis kinematic system drives the second guide rail slide block connecting plate to drive Z axis kinematic system edge by linear electric motors
Y-axis is for linear motion, and Z axis kinematic system can be for linear motion along X, Y-axis in X/Y plane；Z axis kinematic system itself can along with
The vertical Z axis movement of X/Y plane, has been connected by screw ion gun incidence angle operating system in Z axis kinematic system.
Above-mentioned X-axis kinematic system includes being located at the first guide rails assembling plate below the first guide rail slide block connecting plate, institute
The left side top for stating the first guide rails assembling plate has been connected by screw the first feedback system grid chi, the first guide rail slide block connection
The left side lower section of plate has been connected by screw the first feedback system read head, the first guide rail peace on the right side of the first feedback system grid chi
Dress plate is arranged at intervals with two the first guide rails, and the first guide rail slide block connecting plate is fixed with the guide rail of even number first by screw
Slide block, each first guide rail slide block and the first guide rail cooperatively form slide fit structure, and first straight line electricity is provided between two the first guide rails
Machine, the stator of first straight line motor is connected by screw on the first guide rails assembling plate, and the mover of first straight line motor passes through screw
It is connected on the first guide rail slide block connecting plate, the motion of X-axis kinematic system 1 drives the by the mover 108 of first straight line motor
One guide rail slide block connecting plate, the first guide rail slide block are moved along the first guide rail.
Aforementioned X-axis kinematic system speed by control system by encoder control, the first feedback system grid chi and first time
Feedback system read head constitutes the control of the first grating feedback system, and positional precision is controlled by the first grating feedback system, the first feedback
The signal transmission of detection can be constituted totally-enclosed control loop by system read head to control system.The X-axis kinematic system has
The advantages of reasonable compact, the manipulation convenience of topology layout, fast response time, kinematic accuracy and high repetitive positioning accuracy.
The two ends of above-mentioned first guide rails assembling plate are provided with corresponding with the first guide rail slide block position by screw
One limiting buffer block, when the first guide rails assembling plate slides onto extreme position along X-axis, first guide rail slide block and first is limited
Bit buffering block gear is matched somebody with somebody.First effect for arranging the first limiting buffer block is the movement travel for limiting the first guide rail slide block,
Another effect is to weaken the first guide rail slide block to stop vibration.
Above-mentioned Y-axis kinematic system includes being located at the second guide rail slide block connecting plate above the second guide rails assembling plate, institute
The left side top for stating the second guide rails assembling plate has been connected by screw the second feedback system grid chi, the second guide rail slide block connection
The left side lower section of plate has been connected by screw the second feedback system read head, the second guide rail peace on the right side of the second feedback system grid chi
Dress plate is arranged at intervals with two the second guide rails, and the second guide rail slide block connecting plate is fixed with the guide rail of even number second by screw
Slide block, each second guide rail slide block and the second guide rail cooperatively form slide fit structure, and second straight line motor is provided between two guide rails, the
The stator of two linear electric motors is connected by screw on the second guide rails assembling plate, and the mover of second straight line motor is connected by screw
On second guide rail slide block connecting plate, the motion of Y-axis kinematic system drives the second guide rail slide block by the mover of second straight line motor
Connecting plate, the second guide rail slide block are moved along the second guide rail.
Aforementioned Y-axis kinematic system speed by control system by encoder control, the second feedback system grid chi and second time
Feedback system read head constitutes the control of the second grating feedback system, and positional precision is controlled by the second grating feedback system, the second feedback
The signal transmission of detection can be constituted totally-enclosed control loop by system read head to control system.The Y-axis kinematic system has
The advantages of reasonable compact, the manipulation convenience of topology layout, fast response time, kinematic accuracy and high repetitive positioning accuracy.
The two ends of above-mentioned second guide rails assembling plate are provided with corresponding with the second guide rail slide block position by screw
Two limiting buffer blocks, when the second guide rails assembling plate slides onto extreme position along Y-axis, second guide rail slide block and second is limited
Bit buffering block gear is matched somebody with somebody.First effect for arranging the second limiting buffer block is the movement travel for limiting the second guide rail slide block,
Another effect is to weaken the second guide rail slide block to stop vibration.
Above-mentioned Z axis kinematic system includes being close-coupled at the anterior forward track installing plate of L-shaped support body by screw, anterior
The front portion of guide rails assembling plate has been connected by screw two forward tracks, and two forward track front portions are provided with forward track slide block,
Forward track slide block is connected by screw on forward track slide attachment plate, and each forward track and forward track slide block coordinate shape
Into slide fit structure, ion gun incidence angle steerable system is arranged on the top of guide rail slide block connecting plate by screw；
What L-shaped support body rear portion was connected by screw has back track installing plate, and the rear portion of back track installing plate is by spiral shell
Nail is connected with two back tracks, and two back track rear portions are provided with back track slide block, and back track slide block is connected by screw
It is connected on back track slide attachment plate, each back track and back track slide block cooperatively form slide fit structure, and the rear portion is led
Counterweight is provided with by screw on rail slide attachment plate, the 3rd linear electric motors, the 3rd linear electric motors are provided between two back tracks
Stator be arranged on back track installing plate by screw, the mover of the 3rd linear electric motors is arranged on back track by screw
On slide attachment plate；
Knot is coordinated by the sprocket wheel on L-shaped support body between the forward track connecting plate and back track connecting plate
Structure links together；
The motion of Z axis fitness machine system is slided by the mover of the 3rd linear electric motors along the upper and lower drive back track of moving of Z axis
Block connecting plate is moved, and the motion of back track slide attachment plate connects further through the forward track that steel strip driving is fixedly connected with steel band
Fishplate bar is moved and then drives ion gun incidence angle manipulation device along moving along Z axis are upper and lower along Z axis are upper and lower.
Z axis kinematic system is typically characterised by described kinematic system for vertical movement system, the 3rd linear servo drive
Motor drive source does not have braking system, causes vertical direction to stop at a difficult problem for fixed position.The present invention dexterously takes
The equal process program of pts wt for being connected to steel band both sides solves this problem.Because being connected on front side of L-shaped support body
Guide rail splice is connected with ion gun incident angle steerable system, heavier-weight, therefore is connected to the company of the guide rail on rear side of L-shaped support body
It has been connected by screw balancing weight on fishplate bar to balance each other therewith.The another characteristic feature of Z axis kinematic system design is to be connected to L-shaped
In addition to the driving force as Z axis, another effect is straight line to the mover of the linear electric motors on the guide rail contiguous block at support body rear portion
A part of the mover of the servo drive motor weight of as counterweight itself.The Z axis kinematic system has topology layout rationally tight
The advantages of gathering, manipulate convenience, fast response time, kinematic accuracy and high repetitive positioning accuracy.
What above-mentioned sprocket wheel fit structure was included in the vertical plane of L-shaped support body 301 is respectively provided on two sides with two wheeled steels, wheeled steel
Axis hole in be provided with bearing, end ring and spacer, wheeled steel is connected by bearing with steel band axle, steel band axle and L-shaped support body
The steel band axis hole interference fit of both sides, the outer surface of wheeled steel is provided with the groove for installing steel band and steel wire rope, is set in wheeled steel ditch
Steel band, steel wire rope in groove is all connected with the forward track connecting plate and back track connecting plate of L-shaped support body.
Steel wire rope is the same with steel band, is all connected with the guide rail slide block before and after L-shaped support body.This steel wire rope shields, just
Often steel band be connected relatively tightly with guide rail slide block during work, and steel wire rope connects more loose, once strip breakage, steel wire rope will play a role,
Prevent from the ion gun incidence angle manipulation device being connected with L-shaped support body fromer rail slide block from sliding to damage.
By being provided with the grid chi of the 3rd feedback system, the forward track slide block connection on above-mentioned forward track installing plate
The read head of the 3rd feedback system is installed on plate by screw.
Aforementioned Z axis kinematic system speed by control system by encoder control, the 3rd feedback system grid chi and the 3rd time
Feedback system read head constitutes the control of the 3rd grating feedback system, and the 3rd feedback system is the eyes of Z axis motion, positional precision
Controlled by the second grating feedback system, the second feedback system read head can constitute the signal transmission of detection to control system complete
Closed control loop.The Z axis kinematic system have rationally compact topology layout, manipulation convenience, fast response time, kinematic accuracy and
The advantages of repetitive positioning accuracy is high.
The upper and lower ends of above-mentioned L-shaped support body are respectively equipped with front portion limiting buffer gear corresponding with forward track slide position
Block, and rear portion limiting buffer block corresponding with back track slide position；The limit is slid onto in forward track connecting plate along Z axis
During position, the forward track slide block is matched somebody with somebody with anterior limiting buffer block gear；Slide onto along Z axis in back track slide attachment plate
During extreme position, the back track slide block is matched somebody with somebody with rear portion limiting buffer block gear.Anterior limiting buffer block and rear portion are set
First effect of limiting buffer block is the movement travel for limiting forward track slide block and back track slide block, another effect
It is to weaken forward track slide block and guide rail slide block stopping vibration.
Compared with prior art, it is an advantage of the current invention that：With using electric rotating machine leading screw isoline kinematic system ratio, do not have
There is intermediate transmission link, one is advantageous for improving the cleanliness factor of vacuum chamber；Two is do not have counter motion gap, and from essence weight is improved
Multiple positioning precision；Three is compact conformation, simple；Four is that drive mechanism is simple and direct, and motion slide unit response frequency is high, quick action,
Meet the precise control of ion beam polishing residence time；Five is that linear servo drive motor is organic with high accuracy grating scale matches,
Realize high-precision control.
Description of the drawings
Fig. 1 is the overall construction drawing of the embodiment of the present invention；
Fig. 2 is the front view of X-axis kinematic system in the embodiment of the present invention；
Fig. 3 is the front view of Y-axis kinematic system in the embodiment of the present invention；
Fig. 4 removes the top view of the X after Z axis kinematic system and Y-axis kinematic system for the embodiment of the present invention；
Fig. 5 is the front view of Z axis kinematic system in the embodiment of the present invention；
Fig. 6 is the top view of Z axis kinematic system in the embodiment of the present invention；
Fig. 7 is the anterior direction view of Z axis kinematic system in the embodiment of the present invention；
Fig. 8 is the rear portion direction view of Z axis fitness machine system in the embodiment of the present invention.
Each label is represented in figure：1st, X-axis kinematic system；2nd, Y-axis kinematic system；3rd, Z axis kinematic system.
101st, the first guide rails assembling plate；102nd, the first feedback system grid chi；103rd, the first feedback system read head；104th,
One guide rail slide block connecting plate；105th, the first guide rail slide block；106th, the first guide rail；107th, first straight line motor stator；108th, first
Linear motor rotor；109th, the 110, first guide rail slide block buffer.
201st, the second guide rails assembling plate；202nd, the second feedback system grid chi；203rd, the second feedback system read head；204th,
Two guide rail slide block connecting plates；205th, the second guide rail slide block；206th, the second guide rail；207th, second straight line motor stator；208th, second
Linear motor rotor；209th, the 210, second guide rail slide block buffer.
301st, L-shaped support body；302nd, forward track slide attachment plate；303rd, forward track slide block；304th, forward track；305、
Forward track installing plate；306th, wheeled steel；307th, back track installing plate；308th, back track slide block；309th, the 3rd straight-line electric
Machine stator；310th, the 3rd linear motor rotor；311st, back track slide attachment plate；312 back tracks；313rd, counterweight；314、
Steel band axle；315th, 318, spacer；316th, bearing；317th, end ring；319th, steel wire rope；320th, steel band；321st, the 3rd feedback system
System grid chi；322nd, the 3rd feedback system read head；323rd, 324, forward track slide block buffers device；325th, 326, back track slide block
Buffer.
Specific embodiment
The present invention is described in further detail below in conjunction with accompanying drawing embodiment.
It is a preferred embodiment of the present invention as shown in Fig. 1～8.
A kind of high compactness precision linear driving device for vacuum environment, including support, support is from the bottom to top successively
For X-axis kinematic system 1, Y-axis kinematic system 2, Z axis kinematic system 3, the second guide rails assembling plate 201 of Y-axis kinematic system 2 passes through
Screw is installed on the first guide rail slide block connecting plate 104 of X-axis kinematic system 1, and X-axis kinematic system 1 drives institute by linear electric motors
Stating the first guide rail slide block connecting plate 104 drives Y-axis kinematic system 2 for linear motion along X-axis；The L-shaped support body of Z axis kinematic system 3
On the second guide rail slide block connecting plate 204 of Y-axis kinematic system 2, Y-axis kinematic system 2 is by straight for 301 underrun mode connects for screw
Second guide rail slide block connecting plate 204 described in line Motor drive drives Z axis kinematic system 3 for linear motion along Y-axis, Z axis kinetic system
System 3 can be for linear motion along X, Y-axis in X/Y plane；Z axis kinematic system 3 itself can be moved along the Z axis vertical with X/Y plane, Z
Ion gun incidence angle operating system 4 has been connected by screw on axis motion system 3.
X-axis kinematic system 1 includes being located at the first guide rails assembling plate 101 of the lower section of the first guide rail slide block connecting plate 104,
The left side top of the first guide rails assembling plate 101 has been connected by screw the first feedback system grid chi 102, first guide rail
The left side lower section of slide attachment plate 104 has been connected by screw the first feedback system read head 103, the first feedback system grid chi
The first guide rails assembling plate 101 on 102 right sides is arranged at intervals with two the first guide rails 106, the first guide rail slide block connecting plate 104
The first guide rail slide block of even number 105 is fixed with by screw, the guide rail 106 of each first guide rail slide block 105 and first cooperatively forms cunning
Distribution structure, is provided with first straight line motor between two the first guide rails 106, first straight line motor stator 107 is connected by screw
On one guide rails assembling plate 101, the mover 108 of first straight line motor 10 is connected by screw on the first guide rail slide block connecting plate 104,
The motion of X-axis kinematic system 1 drives the first guide rail slide block connecting plate 104, the first guide rail to slide by first straight line electric mover 108
Block 105 is moved along the first guide rail 106.
The two ends of the first guide rails assembling plate 101 are provided with corresponding with the position of the first guide rail slide block 105 by screw
First limiting buffer block 109,110, when the first guide rails assembling plate 101 slides onto extreme position along X-axis, first guide rail
Slide block 105 is matched somebody with somebody with the gear of the first limiting buffer block 109,110.
Y-axis kinematic system 2 includes being located at the second guide rail slide block connecting plate 204 of the top of the second guide rails assembling plate 201,
The left side top of the second guide rails assembling plate 201 has been connected by screw the second feedback system grid chi 202, second guide rail
The left side lower section of slide attachment plate 204 has been connected by screw the second feedback system read head 203, the second feedback system grid chi
The second guide rails assembling plate 201 on 202 right sides is arranged at intervals with two the second guide rails 206, the second guide rail slide block connecting plate 204
The second guide rail slide block of even number 205 is fixed with by screw, the guide rail 206 of each second guide rail slide block 205 and second cooperatively forms cunning
Distribution structure, is provided with second straight line motor between two guide rails 206, second straight line motor stator 207 is connected by screw second and leads
On rail installing plate 201, second straight line electric mover 208 is connected by screw on the second guide rail slide block connecting plate 204, Y-axis fortune
The motion of dynamic system 2 drives the second guide rail slide block connecting plate 204, the second guide rail slide block 205 by second straight line electric mover 208
Move along the second guide rail 206.
The two ends of the second guide rails assembling plate 201 are provided with corresponding with the position of the second guide rail slide block 205 by screw
Second limiting buffer block 209,210, when the second guide rails assembling plate 201 slides onto extreme position along Y-axis, second guide rail
Slide block 205 is matched somebody with somebody with the gear of the second limiting buffer block 209,210.
Z axis kinematic system 3 includes being close-coupled at the forward track installing plate 305 of the front portion of L-shaped support body 301 by screw,
The front portion of forward track installing plate 305 has been connected by screw two forward tracks 304, and two front portions of forward track 304 are provided with
Forward track slide block 303, forward track slide block 303 is connected by screw on forward track slide attachment plate 302, and each front portion is led
Rail 304 and forward track slide block 303 cooperatively form slide fit structure, and ion gun incidence angle steerable system 4 is arranged on by screw and is led
The top of rail slide attachment plate 302；
What the rear portion of L-shaped support body 301 was connected by screw has back track installing plate 307, back track installing plate 307
Rear portion be connected by screw two back tracks 312, two rear portions of back track 312 are provided with back track slide block 308, after
Portion's guide rail slide block 308 is connected by screw on back track slide attachment plate 311, and each back track 312 and back track are slided
Block 308 cooperatively forms slide fit structure, and counterweight 313 is provided with by screw on the back track slide attachment plate 311, and described two
The 3rd linear electric motors are provided between back track 312, the 3rd linear motor stator electric 309 is installed by screw installed in back track
On plate 307, the 3rd linear motor rotor 310 is arranged on back track slide attachment plate 311 by screw；
By on L-shaped support body 301 between the forward track connecting plate 302 and back track connecting plate 311
Sprocket wheel fit structure links together；What sprocket wheel fit structure was included in the vertical plane of L-shaped support body 301 is respectively provided on two sides with two steel
Belt wheel 306, is provided with bearing 316, end ring 317 and spacer 315,318 in the axis hole of wheeled steel 306, wheeled steel 306 passes through axle
Hold 316 to be connected with steel band axle 314, the steel band axis hole interference fit of the both sides of steel band axle 314 and L-shaped support body 301, wheeled steel 306
Outer surface be provided with the groove for installing steel band 320 and steel wire rope 319, steel band 320, the steel wire rope 319 being set in wheeled steel groove
All it is connected with the forward track connecting plate 302 and back track connecting plate 311 of L-shaped support body 301.
The motion of Z axis fitness machine system 3 moves drive back track along Z axis are upper and lower by the 3rd linear motor rotor 310
Slide attachment plate 311 is moved, and the motion of back track slide attachment plate 311 drives to be fixed with steel band 320 further through steel band 320 and connects
The forward track connecting plate 302 for connecing further drive ion gun incidence angle manipulation device along along the upper and lower fortune of Z axis along upper and lower the moving of Z axis
It is dynamic.
By being provided with the grid chi 321 of the 3rd feedback system on forward track installing plate 305, the forward track slide block connects
The read head 322 of the 3rd feedback system is installed on fishplate bar 302 by screw.
The upper and lower ends of L-shaped support body 301 are respectively equipped with front portion limiting buffer gear corresponding with the position of forward track slide block 303
Block 323,324, and rear portion limiting buffer block 325,326 corresponding with the position of back track slide block 308；In forward track connection
Plate 302 along Z axis slide onto extreme position when, the forward track slide block 303 is matched somebody with somebody with the anterior gear of limiting buffer block 323,324；
When back track slide attachment plate 311 slides onto extreme position along Z axis, the back track slide block 308 is spacing with rear portion slow
Rush the gear of block 325,326 to match somebody with somebody.
It is three coordinate systems of the optical glass of ion beam polishing 430mmX430mm in embodiment, X, Y, Z axis is most
Big movement velocity is 1000mm/min；The range of X, Y, Z axis is respectively 500mm, 500mm, 200mm；The repetition of X, Y, Z axis
Positioning precision is ± 0.004mm.
Specific operation process is：
It is processed after conveying and mechanism are transported to by vacuum chamber processing stations, closes the slotting valve of vacuum chamber, vacuum system
System startup makes the indexs such as vacuum meet technological requirement, and now control system sends instruction, the first motor of X-axis kinematic system 1
Mover 108 starts, and the first guide rail slide block connecting plate 104 for driving X-axis fitness machine system 1 is moved along X-axis, X-axis kinematic system 1
First guide rail slide block connecting plate 104 drives the second guide rails assembling plate 201 of connected Y-axis kinematic system 2 to move, that is, drive
Whole Y-axis kinematic system 2 is moved along X-axis, and Y-axis kinematic system 2 drives the second guide rail slide block connecting plate with Y-axis kinematic system 2
The L-shaped support body 301 of the Z axis fitness machine system 3 of 204 connections is moved, that is, drive whole Z axis kinematic system 3 to move along X-axis.Simultaneously
The second straight line motor of the also Y-axis kinematic system 2 of linkage, second straight line electric mover 206 drives the connection of the second guide rail slide block
Plate 204 is moved along Y-axis, and the second guide rail slide block connecting plate 204 of Y-axis kinematic system 2 drives the second guide rail of Y-axis kinematic system 2
The L-shaped support body 301 of the Z axis kinematic system 3 of the connection of slide attachment plate 204 is moved, that is, drive whole Z axis kinematic system 3 to transport along Y-axis
It is dynamic.3rd linear electric motors of the also Z axis kinematic system 3 of linkage simultaneously, the 3rd linear motor rotor 310 of Z axis kinematic system 3
Back track slide attachment plate 311 is driven to move drives along Z axis are upper and lower, back track slide attachment plate 311 is solid with steel band 320
Fixed connection, drives the forward track connecting plate 302 being fixedly connected with steel band 320 to move further along Z axis are upper and lower by steel band 320
Ion gun incidence angle manipulation device and ion gun are driven along moving along Z axis are upper and lower.Movement travel and speed have totally-enclosed feedback system
System control.Full closed position feedback linear motion system is constituted by upper X, Y, Z three-shaft linkage, the ion beam for meeting optical element is thrown
Light and sputtering sedimentation, meet modern technologies demand.
Claims (8)
1. a kind of high compactness precision linear driving device for vacuum environment, including support, it is characterised in that：The support
It is followed successively by X-axis kinematic system (1) from the bottom to top, Y-axis kinematic system (2), Z axis kinematic system (3), the of Y-axis kinematic system (2)
Two guide rails assembling plates (201) are installed on the first guide rail slide block connecting plate (104) of X-axis kinematic system (1) by screw, X-axis
Kinematic system (1) drives the first guide rail slide block connecting plate (104) to drive Y-axis kinematic system (2) to make along X-axis by linear electric motors
Linear motion；The underrun mode connects for screw of the L-shaped support body (301) of Z axis kinematic system (3) is in the second of Y-axis kinematic system (2)
On guide rail slide block connecting plate (204), Y-axis kinematic system (2) drives the second guide rail slide block connecting plate (204) by linear electric motors
Drive Z axis kinematic system (3) for linear motion along Y-axis, Z axis kinematic system (3) can make straight line fortune in X/Y plane along X, Y-axis
It is dynamic；Z axis kinematic system (3) itself can be moved along the Z axis vertical with X/Y plane, and Z axis kinematic system has been connected by screw on (3)
Ion gun incidence angle operating system (4)；
The X-axis kinematic system (1) includes being located at the first guide rails assembling plate below the first guide rail slide block connecting plate (104)
(101), the left side top of the first guide rails assembling plate (101) has been connected by screw the first feedback system grid chi (102), institute
The left side lower section for stating the first guide rail slide block connecting plate (104) has been connected by screw the first feedback system read head (103), and first
The first guide rails assembling plate (101) on the right side of feedback system grid chi (102) is arranged at intervals with two the first guide rails (106), and described
One guide rail slide block connecting plate (104) is fixed with the guide rail slide block of even number first (105), each first guide rail slide block by screw
(105) slide fit structure is cooperatively formed with the first guide rail (106), between two the first guide rails (106) first straight line motor is provided with, the
One linear motor stator electric (107) is connected by screw on the first guide rails assembling plate (101), and first straight line electric mover (108) leads to
Mode connects for screw is crossed on the first guide rail slide block connecting plate (104), the motion of X-axis kinematic system (1) passes through first straight line motor
Sub (108) drive the first guide rail slide block connecting plate (104), the first guide rail slide block (105) to move along the first guide rail (106).
2. the high compactness precision linear driving device for vacuum environment according to claim 1, it is characterised in that：Institute
The two ends for stating the first guide rails assembling plate (101) are provided with corresponding with the first guide rail slide block (105) position by screw
One limiting buffer block (109,110), when the first guide rails assembling plate (101) slides onto extreme position along X-axis, described first leads
Rail slide block (105) is matched somebody with somebody with the first limiting buffer block (109,110) gear.
3. the high compactness precision linear driving device for vacuum environment according to claim 1, it is characterised in that：Institute
Stating Y-axis kinematic system (2) includes being located at the second guide rail slide block connecting plate (204) above the second guide rails assembling plate (201),
The left side top of the second guide rails assembling plate (201) has been connected by screw the second feedback system grid chi (202), and described second
The left side lower section of guide rail slide block connecting plate (204) has been connected by screw the second feedback system read head (203), the second feedback system
The second guide rails assembling plate (201) on the right side of system grid chi (202) is arranged at intervals with two the second guide rails (206), second guide rail
Slide attachment plate (204) is fixed with the guide rail slide block of even number second (205) by screw, each second guide rail slide block (205) and the
Two guide rails (206) cooperatively form slide fit structure, and second straight line motor is provided between two guide rails (206), and second straight line motor is determined
Sub (207) are connected by screw on the second guide rails assembling plate (201), and second straight line electric mover (208) is connected by screw
On second guide rail slide block connecting plate (204), the motion of Y-axis kinematic system (2) drives the by second straight line electric mover (208)
Two guide rail slide block connecting plates (204), the second guide rail slide block (205) are moved along the second guide rail (206).
4. the high compactness precision linear driving device for vacuum environment according to claim 3, it is characterised in that：Institute
The two ends for stating the second guide rails assembling plate (201) are provided with corresponding with the second guide rail slide block (205) position by screw
Two limiting buffer blocks (209,210), when the second guide rails assembling plate (201) slides onto extreme position along Y-axis, described second leads
Rail slide block (205) is matched somebody with somebody with the second limiting buffer block (209,210) gear.
5. the high compactness precision linear driving device for vacuum environment according to claim 1, it is characterised in that：Institute
Stating Z axis kinematic system (3) includes being close-coupled at the anterior forward track installing plate (305) of L-shaped support body (301) by screw,
The front portion of forward track installing plate (305) has been connected by screw two forward tracks (304), before two forward tracks (304)
Portion is provided with forward track slide block (303), and forward track slide block (303) is connected by screw in forward track slide attachment plate
(302) on, each forward track (304) and forward track slide block (303) cooperatively form slide fit structure, and ion gun incidence angle manipulates system
System (4) is arranged on the top of guide rail slide block connecting plate (302) by screw；
What L-shaped support body (301) rear portion was connected by screw has back track installing plate (307), back track installing plate
(307) rear portion has been connected by screw two back tracks (312), and two back track (312) rear portions are provided with back track
Slide block (308), back track slide block (308) is connected by screw on back track slide attachment plate (311), each back track
312) slide fit structure is cooperatively formed with back track slide block (308), screw is passed through on the back track slide attachment plate (311)
Counterweight (313) is installed, the 3rd linear electric motors, the 3rd linear motor stator electric (309) are provided between two back track (312)
It is arranged on back track installing plate (307) by screw, the 3rd linear motor rotor (310) is led by screw installed in rear portion
On rail slide attachment plate (311)；
By on L-shaped support body (301) between the forward track connecting plate (302) and back track connecting plate (311)
Sprocket wheel fit structure link together；
The motion of Z axis fitness machine system (3) moves drive back track along Z axis are upper and lower by the 3rd linear motor rotor (310)
Slide attachment plate (311) is moved, and the motion of back track slide attachment plate (311) drives and steel band further through steel band (320)
(320) the forward track connecting plate (302) being fixedly connected further drive ion gun incidence angle manipulation device along upper and lower the moving of Z axis
Along moving along Z axis are upper and lower.
6. the high compactness precision linear driving device for vacuum environment according to claim 5, it is characterised in that：Institute
That states that sprocket wheel fit structure is included in L-shaped support body (301) vertical plane is respectively provided on two sides with two wheeled steels (306), wheeled steel
(306) bearing (316), end ring (317) and spacer (315,318) are provided with axis hole, wheeled steel (306) is by bearing
(316) it is connected with steel band axle (314), the steel band axis hole interference fit of the both sides of steel band axle (314) and L-shaped support body (301), steel band
The outer surface of wheel (306) is provided with the groove for installing steel band (320) and steel wire rope (319), the steel band being set in wheeled steel groove
(320), steel wire rope (319) all connects with the forward track connecting plate (302) and back track connecting plate (311) of L-shaped support body (301)
Connect.
7. the high compactness precision linear driving device for vacuum environment according to claim 5, it is characterised in that：Institute
State on forward track installing plate (305) by being provided with the grid chi (321) of the 3rd feedback system, the forward track slide block connection
The read head (322) of the 3rd feedback system is installed on plate (302) by screw.
8. the high compactness precision linear driving device for vacuum environment according to claim 5, it is characterised in that：Institute
The upper and lower ends for stating L-shaped support body (301) are respectively equipped with front portion limiting buffer block corresponding with forward track slide block (303) position
(321,322), and rear portion limiting buffer block corresponding with the position of back track slide block 308 (323,324)；Connect in forward track
Fishplate bar (302) along Z axis slide onto extreme position when, the forward track slide block (303) and anterior limiting buffer block (321,
322) gear is matched somebody with somebody；When back track slide attachment plate (311) slides onto extreme position along Z axis, the back track slide block (308)
Match somebody with somebody with rear portion limiting buffer block (323,324) gear.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310726082.3A CN104749736B (en) | 2013-12-25 | 2013-12-25 | High-compactness precision linear driving device applied to vacuum environment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310726082.3A CN104749736B (en) | 2013-12-25 | 2013-12-25 | High-compactness precision linear driving device applied to vacuum environment |
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| CN104749736B true CN104749736B (en) | 2017-05-10 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106181772A (en) * | 2016-07-15 | 2016-12-07 | 宁波安杰森精密机械制造有限公司 | A kind of linear servo drive repairs emery wheel mechanism |
| CN107248328A (en) * | 2017-08-08 | 2017-10-13 | 苏州育龙科教设备有限公司 | Multimedia projection systems |
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| CN1672234A (en) * | 2002-07-29 | 2005-09-21 | 艾克塞利斯技术公司 | Adjustable implantation angle workpiece support structure for an ion beam implanter |
| CN201156440Y (en) * | 2007-12-03 | 2008-11-26 | 西安理工大学 | Self-propelled three-dimensional working table applicable to large length |
| CN101539652A (en) * | 2008-03-21 | 2009-09-23 | 株式会社腾龙 | Lens holding frame, lens driving device, and imaging device |
| CN203212560U (en) * | 2013-04-25 | 2013-09-25 | 江苏瑞祺生命科学仪器有限公司 | Four-axis differential precise micromanipulator |
| CN103744161A (en) * | 2014-01-07 | 2014-04-23 | 中国科学院西安光学精密机械研究所 | High-accuracy automatic image plane adjustment device and adjustment method thereof |
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|---|---|---|---|---|
| CN1672234A (en) * | 2002-07-29 | 2005-09-21 | 艾克塞利斯技术公司 | Adjustable implantation angle workpiece support structure for an ion beam implanter |
| CN201156440Y (en) * | 2007-12-03 | 2008-11-26 | 西安理工大学 | Self-propelled three-dimensional working table applicable to large length |
| CN101539652A (en) * | 2008-03-21 | 2009-09-23 | 株式会社腾龙 | Lens holding frame, lens driving device, and imaging device |
| CN203212560U (en) * | 2013-04-25 | 2013-09-25 | 江苏瑞祺生命科学仪器有限公司 | Four-axis differential precise micromanipulator |
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