CN104749706B - A kind of silicon optoisolator - Google Patents

A kind of silicon optoisolator Download PDF

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Publication number
CN104749706B
CN104749706B CN201510112986.6A CN201510112986A CN104749706B CN 104749706 B CN104749706 B CN 104749706B CN 201510112986 A CN201510112986 A CN 201510112986A CN 104749706 B CN104749706 B CN 104749706B
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waveguide segment
projection
port
length
directional coupler
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CN104749706A (en
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孙敏
朱以胜
赵彦立
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Huawei Technologies Co Ltd
Huazhong University of Science and Technology
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Huawei Technologies Co Ltd
Huazhong University of Science and Technology
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/09—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on magneto-optical elements, e.g. exhibiting Faraday effect
    • G02F1/095—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on magneto-optical elements, e.g. exhibiting Faraday effect in an optical waveguide structure
    • G02F1/0955—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on magneto-optical elements, e.g. exhibiting Faraday effect in an optical waveguide structure used as non-reciprocal devices, e.g. optical isolators, circulators

Abstract

The invention discloses a kind of silicon optoisolator, first object waveguide segment is used to produce when making the second spectroscopic signal transmit from the second branch of the first branch coupler to the second port of the first directional couplerNonreciprocal phase shift；Produced during the second port transmission that the second target waveguide segment is used to make the first spectroscopic signal from the 4th port of the first directional coupler to the second directional couplerNonreciprocal phase shift；Produced during the first port transmission that the 3rd target waveguide segment is used to make the second spectroscopic signal from the 3rd port of the first directional coupler to the second directional couplerNonreciprocal phase shift；4th target waveguide segment is used to produce when making the first spectroscopic signal transmit from the 3rd port of the second directional coupler to reciprocal phase shift deviceNonreciprocal phase shift；Reciprocal phase shift device is used to make the first spectroscopic signal generation by reciprocal phase shift deviceReciprocal phase shift.Using the program, the area of Distribution of Magnetic Field can be efficiently reduced, improves the utilization ratio in magnetic field.

Description

A kind of silicon optoisolator
Technical field
The present invention relates to optical arena, more particularly to a kind of silicon optoisolator.
Background technology
Silicon optoisolator is that a kind of permission light transmits from first direction, and forbids what light transmitted from the opposite direction of first direction Device.Silicon optoisolator is widely used in optical communications, for example, wanting energy from optical signal caused by semiconductor laser Enough sent by silicon optoisolator and then to receiving terminal (i.e. first direction), however, the reflection reflected from reception extreme direction Light (i.e. the opposite direction of first direction) must then be isolated out by silicon optoisolator, to prevent the light guide induced semiconductor reflected from swashing The oscillating characteristic deterioration of light device.
Refering to Fig. 1, prior art provides a kind of silicon optoisolator 100, including substrate 110, ducting layer 120 and magnetic field Produce layer 130.Wherein, ducting layer 120 is grown on substrate 110, and magnetic field produces layer 130 and is arranged on ducting layer 120.Magnetic Producing layer 130 includes the clad that is made up of magnetooptic material, and what is set on clad be used for regulation side To the magnetized magnetic field applying mechanism of magnetooptic material.Magnetic field produces layer 130 and passes through magnetic field applying mechanism magnetooptic material Orientation magnetization, so as to produce magnetic field.
Refering to Fig. 2, ducting layer 120 is by depositing and etching waveguide material, to form 4 mutually non-touching waveguides Footpath.Waveguide is the path that optical signal transmission optical signal is propagated.4 articles of waveguides are respectively first wave guide path 121, Two waveguides 122, the 3rd waveguide 123 and the 4th waveguide 124.
First wave guide path 121 is made up of waveguide segment mn and waveguide segment no.Second waveguide path 122 by waveguide segment a ' b ', Waveguide segment b ' c ', waveguide segment c ' d ', waveguide segment d ' e ', waveguide segment e ' f ', waveguide segment f ' g ', waveguide segment g ' h ', waveguide segment h ' i ' And waveguide segment i ' j ' are formed.3rd waveguide 123 is by waveguide segment ab, waveguide segment bc, waveguide segment cd, waveguide segment de, waveguide Section ef, waveguide segment fg, waveguide segment gh, waveguide segment hi and waveguide segment ij are formed.4th waveguide is by waveguide segment o ' n ' and ripple Section n ' m ' are led to form.
Magnetic field, which produces layer 130 and oriented by magnetic field applying mechanism magnetooptic material, to be magnetized, so as on waveguide segment ef The first magnetic field is produced, and the second magnetic field is produced on waveguide segment e ' f ', and, it is parallel and square between the first magnetic field and the second magnetic field To opposite (as shown by arrows in FIG.).It is understood that phase shift effect can occur under the influence of a magnetic field for optical signal, moreover, The direction of propagation and magnetic field of the positive and negative and optical signal of the phase of phase shift are related.So optical signal is from a direction along waveguide Section ef is propagated, and compared with optical signal is propagated from opposite direction along waveguide segment ef, both magnetic directions are identical, but optical signal The direction of propagation on the contrary, so, phase shift it is positive and negative also just opposite.And the size of the phase of phase shift then with the first magnetic field Waveguide segment ef length is directly proportional, and bigger with the length of the waveguide segment ef in the first magnetic field, then the size of the phase of phase shift is got over Greatly.Similarly, the second magnetic field also produces similar effect on waveguide segment e ' f '.So waveguide segment ef, waveguide segment e ' f ' and Magnetic field produces layer 130 and constitutes non-reciprocal phase-shifter 126.And optical signal passes through waveguide segment e ' by waveguide segment ef or optical signal Phase shift is referred to as nonreciprocal phase shift caused by f '.
But the size due to nonreciprocal phase shift and the waveguide segment length in the waveguide segment of non-reciprocal phase-shifter are directly proportional, Under prior art conditions, enough nonreciprocal phase shifts are obtained by the spectroscopic signals of waveguide segment ef first and pass through waveguide Section e ' f ' cause the second spectroscopic signal to obtain enough nonreciprocal phase shifts, it is necessary to set in magnetic field enough to big, the profit in magnetic field With inefficient.
The content of the invention
The technical problems to be solved by the invention are, there is provided a kind of silicon optoisolator, it is possible to increase the utilization rate in magnetic field.
First aspect present invention provides a kind of silicon optoisolator, including substrate, the ducting layer being stacked from bottom to up And magnetic field produces layer, the magnetic field produces layer and is used to produce the first magnetic field and the second magnetic field in opposite direction；
The ducting layer includes the first branch coupler, the first directional coupler, the second directional coupler, reciprocal phase shift device And second branch coupler,
First output end of first branch coupler pass through first wave guide section and first directional coupler the Single port is connected, and the second output end of first branch coupler passes through second waveguide section and first directional coupler Second port be connected,
First branch coupler is used to the optical signal that the input of first branch coupler inputs being divided into First spectroscopic signal and the second spectroscopic signal, the first output end of first spectroscopic signal from first branch coupler are defeated Go out, second spectroscopic signal exports from the second output end of first branch coupler；First directional coupler is used In first port of first spectroscopic signal from first directional coupler is coupled into first directional coupler 4th port, and for second port of second spectroscopic signal from first directional coupler to be coupled into described 3rd port of one directional coupler；
3rd port of first directional coupler is connected to second directional coupler by the 3rd waveguide segment First port, the 4th port of first directional coupler are connected to second directional coupler by the 4th waveguide segment Second port；
Second directional coupler is used for the first end by second spectroscopic signal from second directional coupler Mouth is coupled to the 4th port of second directional coupler, and for first spectroscopic signal to be oriented from described first The second port of coupler is coupled to the 3rd port of second directional coupler；
3rd port of second directional coupler is connected by the 5th waveguide segment with the reciprocal phase shift device, described Reciprocal phase shift device is connected by the 6th waveguide segment with the first input end of second branch coupler, the second orientation coupling 4th port of clutch is connected by the 7th waveguide segment with the second input of second branch coupler,
Second branch coupler is used for input the first input end of second branch coupler described first Second spectroscopic signal of second input of spectroscopic signal and second branch coupler input merges into light letter all the way Number, and the optical signal all the way is exported from the output end of first branch coupler；
Using at least one section of fiber waveguide in the second waveguide section as first object waveguide segment, the first object waveguide Section is located in first magnetic field, and the first object waveguide segment is used to make second spectroscopic signal from first branch coupling Second branch of clutch produces when being transmitted to the second port of the first directional couplerNonreciprocal phase shift；
Using at least one section of fiber waveguide in the 4th waveguide segment as the second target waveguide segment, the second target waveguide Section is located in first magnetic field, and the second target waveguide segment is used to make first spectroscopic signal from the described first orientation coupling 4th port of clutch produces when being transmitted to the second port of second directional couplerNonreciprocal phase shift；
Using at least one section of fiber waveguide in the 3rd waveguide segment as the 3rd target waveguide segment, the 3rd target waveguide Section is located in second magnetic field, and the 3rd target waveguide segment is used to make second spectroscopic signal from the described first orientation coupling 3rd port of clutch produces when being transmitted to the first port of second directional couplerNonreciprocal phase shift；
Using at least one section of fiber waveguide in the 5th waveguide segment as the 4th target waveguide segment, the 4th target waveguide Section is located in second magnetic field, and the 4th target waveguide segment is used to make first spectroscopic signal from the described second orientation coupling 3rd port of clutch produces when being transmitted to the reciprocal phase shift deviceNonreciprocal phase shift；
The reciprocal phase shift device is used to make first spectroscopic signal generation by the reciprocal phase shift deviceReciprocity Phase shift.
With reference in a first aspect, in the first possible embodiment of first aspect,
First magnetic field is between first branch coupler and second branch coupler；
By the company between the geometric center of first branch coupler and the geometric center of second branch coupler Straight line where line is as first straight line, then the magnetic direction in first magnetic field is equal with the direction where the first straight line OK.
With reference to the possible embodiment of the first of first aspect or first aspect, second in first aspect is possible In embodiment,
The length of the first wave guide section is equal to the length of the 7th waveguide segment, and the 5th waveguide segment and described the The length sum of six waveguide segments is equal to the length of the second waveguide section.
In the first possible embodiment or second of possible embodiment with reference to first aspect, first aspect Any one, in the third possible embodiment of first aspect,
The length of 3rd waveguide segment is equal to the length of the 4th waveguide segment.
With reference to the possible embodiment of the first of first aspect or first aspect into the third possible embodiment Any one, in the 4th kind of possible embodiment of first aspect,
The first object waveguide segment is used to make second spectroscopic signal defeated from the second of first branch coupler Go out when end is transmitted to the second port of first directional coupler and produceNonreciprocal phase shift, specifically include：
The length of the projection of the first object waveguide segment, for making second spectroscopic signal from first branch coupling Second output end of clutch produces during being transferred to the second port of first directional couplerNonreciprocal phase shift；
Using the face perpendicular with the magnetic direction in first magnetic field as the first plane, and by first plane and institute The line that plane where stating ducting layer intersects is as second straight line, by the first object waveguide segment in first plane The first projection as the first object waveguide segment is projected, then the length of the projection of the first object waveguide segment refers to described The length of projection where the first of first object waveguide segment is projected in the second straight line on direction.
With reference to the 4th kind of possible embodiment of first aspect, in the 5th kind of possible embodiment of first aspect In,
The first object waveguide segment is perpendicular to the magnetic direction in first magnetic field, and the first object waveguide segment is put down Row is in the plane where the ducting layer.
With reference to the possible embodiment of the first of first aspect or first aspect into the 5th kind of possible embodiment Any one, in the 6th kind of possible embodiment of first aspect,
The second waveguide section also includes the 2nd 1 waveguide segment, the input of the 2nd 1 waveguide segment with described first point Second output end of branch coupler is connected, the output end of the 2nd 1 waveguide segment and the input of the first object waveguide segment End is connected, and the output end of the first object waveguide segment is connected with the second port of first directional coupler；
In the case where the first wave guide section is inverted L shape, the 2nd 1 waveguide segment is L-type, the first wave guide section It is symmetrical on first branch coupler with the 2nd 1 waveguide segment.
With reference to the 6th kind of possible embodiment of first aspect, in the 7th kind of possible embodiment of first aspect In,
The distance between first output end and the second output end of first branch coupler, the first wave guide section The length sum of the projection of the length of projection and the 2nd 1 waveguide segment is more than the projection of the first object waveguide segment Length；
The first projection using projection of the first wave guide section in first plane as the first wave guide section, then The length of the projection of the first wave guide section refers to that the first of the first wave guide section is projected in direction where the second straight line On projection length；
Thrown using projection of the 2nd 1 waveguide segment in first plane as the first of the 2nd 1 waveguide segment Shadow, then the length of the projection of the 2nd 1 waveguide segment refer to that the first of the 2nd 1 waveguide segment is projected in the second straight line The length of projection on the direction of place.
With reference to first aspect the 4th kind of possible embodiment to the 7th kind of possible embodiment in any one, In the 8th kind of possible embodiment of first aspect,
The first projection using projection of the 6th waveguide segment in first plane as the 6th waveguide segment, then The length of the projection of 6th waveguide segment refers to that the first of the 6th waveguide segment is projected in direction where the second straight line On projection length；
The first projection using projection of the 7th waveguide segment in first plane as the 7th waveguide segment, then The length of the projection of 7th waveguide segment refers to that the first of the 7th waveguide segment is projected in direction where the second straight line On projection length；
Using projection of second branch coupler in first plane as the of second branch coupler One projection, then the length of the projection of second branch coupler refer to the first of second branch coupler be projected in it is described The length of projection where second straight line on direction；
The first projection using projection of the optoisolator in first plane as the optoisolator, then it is described The length of the projection of optoisolator refers to the first of the optoisolator projection being projected on the direction of the second straight line place Length；
Wherein, the length of the projection of the 6th waveguide segment, the 7th waveguide segment projection length and described second The length sum of the projection of branch coupler is equal to the length of the projection of the optoisolator.
With reference to first aspect the 6th kind of possible embodiment to the 8th kind of possible embodiment in any one, In the 9th kind of possible embodiment of first aspect,
The perpendicular part of the magnetic direction in the first magnetic field described in the first wave guide Duan Zhongyu and the first object ripple It is parallel to lead section.
With reference to the possible embodiment of the first of first aspect or first aspect into the 9th kind of possible embodiment Any one, in the tenth kind of possible embodiment of first aspect, the first wave guide section and the first object ripple The spacing for leading section is more than or equal to 10 microns.
With reference to first aspect the 4th kind of possible embodiment to the 9th kind of possible embodiment in any one, In tenth kind of possible embodiment of first aspect,
The second target waveguide segment is used to make first spectroscopic signal from the 4th end of first directional coupler Mouth produces when being transmitted to the second port of second directional couplerNonreciprocal phase shift, specifically include：
The length of the projection of the second target waveguide segment, for making second spectroscopic signal from the described first orientation coupling 4th port transmission of clutch to second directional coupler second port during produceNonreciprocal phase shift；
Using projection of the second target waveguide segment in first plane as the of the second target waveguide segment One projection, then the length of the projection of the second target waveguide segment refer to the first of the second target waveguide segment be projected in it is described The length of projection where second straight line on direction.
With reference to the possible embodiment of the first of first aspect or first aspect into the tenth kind of possible embodiment Any one, in a kind of the tenth possible embodiment of first aspect,
The first object waveguide segment and the second target waveguide segment are symmetrical on first directional coupler.
With reference to first aspect a kind of the 4th kind of possible embodiment to the tenth possible embodiment in it is any one Kind, in the 12nd kind of possible embodiment of first aspect,
The 3rd target waveguide segment is used to make second spectroscopic signal from the 3rd end of first directional coupler Mouth produces when being transmitted to the first port of second directional couplerNonreciprocal phase shift, specifically include：
The length of the projection of the 3rd target waveguide segment, for making second spectroscopic signal from the described first orientation coupling 3rd port transmission of clutch to second directional coupler first port during produceNonreciprocal phase shift；
Using projection of the 3rd target waveguide segment in first plane as the of the 3rd target waveguide segment One projection, then the length of the projection of the 3rd target waveguide segment refer to the first of the 3rd target waveguide segment be projected in it is described The length of projection where second straight line on direction.
With reference to the possible embodiment of the first of first aspect or first aspect to the 12nd kind of possible embodiment In any one, in the 13rd kind of possible embodiment of first aspect,
The 3rd target waveguide segment is perpendicular to the magnetic direction in second magnetic field, and the 3rd target waveguide segment is put down Row is in the ducting layer.
With reference to 13 kinds of possible embodiments of first aspect, in the 14th kind of possible embodiment of first aspect In,
The 3rd target waveguide segment is parallel to the second target waveguide segment.
With reference to first aspect the 4th kind of possible embodiment to the 14th kind of possible embodiment in it is any one Kind, in the 15th kind of possible embodiment of first aspect,
The 4th target waveguide segment is used to make first spectroscopic signal from the 3rd end of second directional coupler Mouth produces when being transmitted to the reciprocal phase shift deviceNonreciprocal phase shift, specifically include：
The length of the projection of the 4th target waveguide segment, for making first spectroscopic signal from the described second orientation coupling 3rd port transmission of clutch is to producing during the reciprocal phase shift deviceNonreciprocal phase shift；
Using projection of the 4th target waveguide segment in first plane as the of the 4th target waveguide segment One projection, then the length of the projection of the 4th target waveguide segment refer to the first of the 4th target waveguide segment be projected in it is described The length of projection where second straight line on direction.
With reference to the possible embodiment of the first of first aspect or first aspect to the 15th kind of possible embodiment In any one, in the 16th kind of possible embodiment of first aspect,
The 3rd target waveguide segment and the 4th target waveguide segment are symmetrical on second directional coupler.
With reference to the possible embodiment of the first of first aspect or first aspect to the 16th kind of possible embodiment In any one, in the 17th kind of possible embodiment of first aspect,
First wave guide section is in the length of the projection in the second straight line direction, first directional coupler described second The length of the projection of the length of the projection of rectilinear direction, the 3rd waveguide segment in the second straight line direction, described second are determined To coupler in the length of the projection in the second straight line direction and the 7th waveguide segment in the second straight line direction Projection length and less than 600 microns.
With reference to the 17th kind of possible embodiment of first aspect, in the 18th kind of possible embodiment party of first aspect In formula,
The reciprocal phase shift device is hanging down in the length of the projection perpendicular to second magnetic direction, the 5th waveguide segment Directly in second magnetic direction projection length and second directional coupler perpendicular to second magnetic direction Projection length and less than 330 microns.
In the present invention, by the way that there is provided the first directional coupler and the second directional coupler, the first light splitting can be changed The transmission path of signal and the second spectroscopic signal, it is achieved thereby that " folding " effect of the waveguide segment for realizing nonreciprocal phase shift Fruit.Compared with prior art realizes nonreciprocal phase shift by two sections of waveguide segments, it can be realized by four sections of waveguide segments of " folding " Nonreciprocal phase shift, the area of Distribution of Magnetic Field is efficiently reduced, improve the utilization ratio in magnetic field.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is the structural representation of the embodiment of prior art silicon optoisolator one；
Fig. 2 is the structural representation of the embodiment of ducting layer one of prior art silicon optoisolator；
Fig. 3 is the structural representation of the embodiment of silicon optoisolator one of the present invention；
Fig. 4 is the structural representation of the embodiment of ducting layer one of silicon optoisolator of the present invention；
Fig. 5 is that the optical signal of silicon optoisolator of the present invention travels to the second branch coupler direction from the first branch coupler The structural representation of one embodiment；
Fig. 6 is that the optical signal of silicon optoisolator of the present invention travels to the first branch coupler direction from the second branch coupler The structural representation of one embodiment；
Fig. 7 is the dimensional drawing of each several part of the embodiment of silicon optoisolator one of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made Embodiment, belong to the scope of protection of the invention.
It should be noted that the term used in embodiments of the present invention is only merely for the mesh of description specific embodiment , and it is not intended to be limiting the present invention." one of singulative used in the embodiment of the present invention and appended claims Kind ", " described " and "the" are also intended to including most forms, unless context clearly shows that other implications.It is also understood that this Term "and/or" used herein refers to and comprising any or all possible group associated of list items purpose of one or more Close.
Refering to Fig. 3, Fig. 3 is the structural representation of the embodiment of silicon optoisolator one of the present invention.The silicon of the present invention is optically isolated The substrate 210, ducting layer 220 and magnetic field that device includes stacking gradually from bottom to up produce layer 230.
Substrate 210 can use semiconducting compound substrate, such as InP substrate etc., moreover, used semiconductor transformation Compound substrate is corresponding with the wave band of the operation wavelength of laser.
Ducting layer 220 can use semi-conducting material.Moreover, ducting layer 220 can be with the active layer of semiconductor laser Completed using same process, so that the active layer of the ducting layer 220 of optoisolator and semiconductor laser crystallizes life simultaneously It is long, the optical axis alignment of thickness direction can be realized automatically.In a specific embodiment, when the material of substrate 210 is InP When, ducting layer 220 can be formed using GaInAsP semi-conducting materials, to cause the lattice between substrate 210 and ducting layer 220 Matched well.
Magnetic field produces the clad that layer 230 includes being made up of magnetooptic material, and the use set on clad In to prescribed direction to the magnetized magnetic field applying mechanism of magnetooptic material.Magnetic field produces layer 230 and passes through magnetic field applying mechanism Magnetooptic material orientation magnetization, so as to produce the first magnetic field M in opposite directionsWith the second magnetic field Mn。
The overall structure of silicon optoisolator is described generally above, below the ducting layer 220 by emphasis to silicon optoisolator It is described.
Also referring to Fig. 4, Fig. 4 is the structural representation of the embodiment of ducting layer one of silicon optoisolator of the present invention.Ripple Conducting shell 220 is by depositing and etching waveguide material, to form 4 mutually non-touching continuous waveguides.4 waveguides Respectively first wave guide path 221, second waveguide path 222, the 3rd waveguide 223 and the 4th waveguide 224.
Wherein, first wave guide path 221 is by waveguide segment R1S1With waveguide segment S1T1Form.Second waveguide path 222 is by waveguide Section A1B1, waveguide segment B1C1, waveguide segment C1D1, waveguide segment D1E1, waveguide segment E1F1, waveguide segment F1G1, waveguide segment G1H1, waveguide segment H1I1, waveguide segment I1J1, waveguide segment J1K1, waveguide segment K1L1, waveguide segment L1M1, waveguide segment M1N1, waveguide segment N1O1, waveguide segment O1P1 And waveguide segment P1Q1Form.3rd waveguide 223 is by waveguide segment A2B2, waveguide segment B2C2, waveguide segment C2D2, waveguide segment D2E2、 Waveguide segment E2F2, waveguide segment F2G2, waveguide segment G2H2, waveguide segment H2I2, waveguide segment I2J2, waveguide segment J2K2, waveguide segment K2L2, waveguide Section L2N2, waveguide segment N2O2, waveguide segment O2P2And waveguide segment P2Q2Form.4th waveguide 224 is by waveguide segment R2S2And waveguide Section S2T2Form.
Wherein, waveguide segment A1B1And waveguide segment A2B2It is parallel and be away from first wave guide path 221, to ensure waveguide segment A1B1And waveguide segment A2B2Coupling will not occur between first wave guide path 221.Ripple in first wave guide path 221 Lead a section R1S1The first central end can be used as, for inputting or exporting optical signal, waveguide segment A1B1And waveguide segment A2B2The can be used as One remaining light output end, for exporting unnecessary remaining light.
Waveguide segment B1C1It is waveguide segment A1B1And waveguide segment C1D1Between changeover portion, waveguide segment B2C2It is waveguide segment A2B2 And waveguide segment C2D2Between changeover portion.Changeover portion can play a part of seamlessly transitting between two waveguide segments.
Waveguide segment C1D1And waveguide segment C2D2Parallel and close to the waveguide segment S in first wave guide path 2211T1, generally Waveguide segment C1D1With waveguide segment S1T1The distance between be more than 10 microns, that is, for waveguide segment C1D1On every bit, according to Below for waveguide segment C1D1On the method for point 1 operated, waveguide segment S1T1The distance of the nearest point of upper range points 1 and point 1 More than 10 microns.Likewise, waveguide segment C2D2With waveguide segment S1T1The distance between also greater than 10 microns, that is, for waveguide segment C2D2On every bit, according to below for waveguide segment C2D2On the method for point 2 operated, waveguide segment S1T1Upper range points The distance of 2 nearest points and point 2 is more than 10 microns.Waveguide segment C1D1, waveguide segment S1T1And waveguide segment C2D2Constitute first point Branch coupler 225, moreover, waveguide segment S1T1For the pars intermedia of the first branch coupler 225, waveguide segment C1D1For first branch's coupling First branch of clutch 225, waveguide segment C2D2For the second branch of the first branch coupler 225.First branch coupler 225 can To cause waveguide segment C1D1And waveguide segment C2D2With waveguide segment S1T1Between produce branch coupling.In branch's coupling, Branch's effect refers to that optical signal all the way will be branched the spectroscopic signal for producing two-way, and coupling refers to the spectroscopic signal of two-way Optical signal all the way will be coupled into.
Waveguide segment F1G1And waveguide segment G2H2Between it is parallel to each other close to constitute the first directional coupler 226, generally Waveguide segment F1G1With waveguide segment G2H2The distance between be more than 10 microns, that is, for waveguide segment F1G1On every bit, according to Below for waveguide segment F1G1On the method for point 3 operated, waveguide segment G2H2The distance of the nearest point of upper range points 3 and point 3 More than 10 microns.Wherein, waveguide segment F1G1End points F1First port F as the first directional coupler 2261, waveguide segment G2H2 End points G2Second port G as the first directional coupler 2262, waveguide segment F1G1End points G1As the first directional coupler 226 the 3rd port G1, waveguide segment G2H2End points H2The 4th port H as the first directional coupler 2262.First orientation coupling The first port F of clutch 2261With the 4th port H of the first directional coupler 2262It is to match port, the first directional coupler 226 Second port G2With the 3rd port G of the first directional coupler 2261It is pairing port.So from the first directional coupler 226 First port F1The optical signal of input is by from the 4th port H of the first directional coupler 2262Output, from the first directional coupler 226 second port G2The optical signal of input is by from the 3rd port G of the first directional coupler 2261Output.It is conversely, fixed from first To the 4th port H of coupler 2262The optical signal of input is by from the first port F of the first directional coupler 2261Output, from the 3rd port G of one directional coupler 2261The optical signal of input is by from the second port G of the first directional coupler 2262Output. So the practical function of the first directional coupler 226 is the transmission path for changing optical signal, and in general, light letter Number it is transmitted along waveguide, i.e. under the intervention of no directional coupler, from the first of the first directional coupler 226 Port F1The optical signal of input is by from the 3rd port G of the first directional coupler 2261Output, from the first directional coupler 226 Second port G2The optical signal of input is by from the 4th port H of the first directional coupler 2262Output.Conversely, orient coupling from first 3rd port G of clutch 2261The optical signal of input is by from the first port F of the first directional coupler 2261Output, it is fixed from first To the 4th port H of coupler 2262The optical signal of input is by from the first port F of the first directional coupler 2261Output.But Under the intervention of the first directional couple 226, the transmission path of optical signal is changed.
Waveguide segment D1E1And waveguide segment E1F1Form first wave guide section D1F1.Wherein, first wave guide section D1F1For connecting the The first port F of first output end of one branch coupler 225 and the first directional coupler 2261.Waveguide segment D2E2, waveguide segment E2F2And waveguide segment F2G2Form second waveguide section D2G2.Wherein, second waveguide section D2G2For connecting the first branch coupler The second port G of 225 the second output end and the first directional coupler 2262.Second waveguide section D2G2In at least one section of light Waveguide is located at the first magnetic field M as first object waveguide segment (dash area in figure), first object waveguide segmentsIn (the left side in figure The signified direction of arrow is the first magnetic field MsDirection), first object waveguide segment is used to make the from the first branch coupler 225 Two output end D2To the second port G of the first directional coupler 2262The optical signal of transmission producesNonreciprocal phase shift, from first The second port G of directional coupler 2262Produced to the optical signal of the second multi-branch transport of the first branch coupler 225It is non- Reciprocal phase shift.In the present embodiment, first object waveguide segment is perpendicular to the first magnetic field MsMagnetic direction, and first object ripple Section is led parallel to the plane where ducting layer 220., can will be with the first magnetic field M in another specific embodimentsMagnetic field side To perpendicular face as the first plane, and the line that the first plane is intersected with the plane where ducting layer 220 is straight as second Line, projected using the projection of first object waveguide segment on the first plane as the first of first object waveguide segment, then first object The length of the projection of waveguide segment refers to the length of the first of the first object waveguide segment projection being projected on the direction of second straight line place Degree.Making the length of the projection of first object waveguide segment makes from the second branch of the first branch coupler 225 to the first directional couple The second port G of device 2262The optical signal of transmission producesNonreciprocal phase shift, from the second port of the first directional coupler 226 G2Produced to the optical signal of the second multi-branch transport of the first branch coupler 225Nonreciprocal phase shift.
Waveguide segment I1J1And waveguide segment J2K2Between be parallel to each other close to constituting the second directional coupler 227, usual ripple Lead a section I1J1With waveguide segment J2K2The distance between be more than 10 microns, that is, for waveguide segment I1J1On every bit, under Face is directed to waveguide segment I1J1On the method for point 4 operated, waveguide segment J2K2The distance of the nearest point of upper range points 4 and point 4 is big In 10 microns.Wherein, waveguide segment I1J1End points I1First port I as the second directional coupler 2271, waveguide segment J2K2's End points J2Second port J as the second directional coupler 2272, waveguide segment I1J1End points J1As the second directional coupler 227 The 3rd port J1, waveguide segment J2K2End points K2The 4th port K as the second directional coupler 2272.Second directional coupler 227 first port I1With the 4th port K of the second directional coupler 2272It is pairing port, the of the second directional coupler 227 Two-port netwerk J2With the 3rd port J of the second directional coupler 2271It is pairing port.So from the second directional coupler 227 Single port I1The optical signal of input is by from the 4th port K of the second directional coupler 2272Output, from the second directional coupler 227 Second port J2The optical signal of input is by from the 3rd port J of the second directional coupler 2271Output.Conversely, oriented from second 4th port K of coupler 2272The optical signal of input is by from the first port I of the second directional coupler 2271Output, from second 3rd port J of directional coupler 2271The optical signal of input is by from the second port J of the second directional coupler 2272Output.Institute With, the practical function of the second directional coupler 227 is the transmission path for changing optical signal, in general, optical signal It is transmitted along waveguide, i.e. under the intervention of no directional coupler, from the first end of the second directional coupler 227 Mouth I1The optical signal of input is by from the 3rd port J of the second directional coupler 2271Output, from the of the second directional coupler 227 Two-port netwerk J2The optical signal of input is by from the 4th port K of the second directional coupler 2272Output.Conversely, from the second directional couple 3rd port J of device 2271The optical signal of input is by from the first port I of the second directional coupler 2271Output, from the second orientation 4th port K of coupler 2272The optical signal of input is by from the first port I of the second directional coupler 2271Output.But Under the intervention of second directional couple 227, the transmission path of optical signal is changed.
Waveguide segment G1H1And waveguide segment H1I1Form the 3rd waveguide segment G1I1, wherein, the 3rd waveguide segment G1I1For connecting the 3rd port G of one directional coupler 2261And second directional coupler 227 first port I1.3rd waveguide segment G1I1In At least one section of fiber waveguide be located at the second magnetic field M as the 3rd target waveguide segment (dash area in figure), the 3rd target waveguide segmentn (the signified direction of right arrow is the second magnetic field M in figurenDirection) in, the 3rd target waveguide segment be used for make from first orientation coupling 3rd port G of clutch 2261To the first port I of the second directional coupler 2271The optical signal of transmission producesNonreciprocal phase Move, from the first port I of the second directional coupler 2271To the 3rd port G of the first directional coupler 2261The optical signal of transmission ProduceNonreciprocal phase shift.In the present embodiment, the 3rd target waveguide segment is perpendicular to the second magnetic field MnMagnetic direction, And the 3rd target waveguide segment parallel to ducting layer 220.In another specific embodiment, by the 3rd target waveguide segment first First projection of the projection as the 3rd target waveguide segment in plane, then the length of the projection of the 3rd target waveguide segment refers to the 3rd The length of projection where the first of target waveguide segment is projected in second straight line on direction.The length of the projection of 3rd target waveguide segment Degree makes the 3rd port G from the first directional coupler 2261To the first port I of the second directional coupler 2271The optical signal of transmission ProduceNonreciprocal phase shift, from the first port I of the second directional coupler 2271To the 3rd end of the first directional coupler 226 Mouth G1The optical signal of transmission producesNonreciprocal phase shift.
Waveguide segment H2I2And waveguide segment I2J2Form the 4th waveguide segment H2J2, wherein, the 4th waveguide segment H2J2For connecting the 4th port H of one directional coupler 2262And second directional coupler 227 second port J2.4th waveguide segment H2J2In At least one section of fiber waveguide be located at the first magnetic field M as the second target waveguide segment (dash area in figure), the second target waveguide segments In, the second target waveguide segment is used to make the 4th port H from the first directional coupler 2262To the of the second directional coupler 227 Two-port netwerk J2The optical signal of transmission producesNonreciprocal phase shift, from the second port J of the second directional coupler 2272To first 4th port H of directional coupler 2262The optical signal of transmission producesNonreciprocal phase shift.In the present embodiment, the second mesh Waveguide segment is marked perpendicular to the first magnetic field MsMagnetic direction, and the second target waveguide segment is parallel to ducting layer 220.Another specific Embodiment in, using the second target waveguide segment on the first plane projection as the second target waveguide segment first project, Then the length of the projection of the second target waveguide segment refers to that the first of the second target waveguide segment is projected on the direction of second straight line place Projection length.The length of the projection of second target waveguide segment makes the 4th port H from the first directional coupler 2262To The second port J of two directional couplers 2272The optical signal of transmission producesNonreciprocal phase shift, from the second directional coupler 227 second port J2To the 4th port H of the first directional coupler 2262The optical signal of transmission producesNonreciprocal phase shift.
Waveguide segment K1L1Constitute reciprocal phase shift device 228.Port K1It is the first port K of reciprocal phase shift device 2281, port L1 It is the second port L of reciprocal phase shift device 2281.Phase shift effect can occur when propagating in the waveguide for light, moreover, the waveguide that light passes through Longer, then phase shift effect is bigger.It is understood that because length is scalar, optical signal is from a direction along waveguide segment K1L1 Propagate, with optical signal from opposite direction along waveguide segment K1L1Propagation is compared, and the length that both pass through is the same, the effect of phase shift And it is the same, so, the transmission direction of light can " reciprocity ".Optical signal passes through phase caused by reciprocal phase shift device 228 Shifting is properly termed as reciprocal phase shift.
Waveguide segment J1K1Constitute the 5th waveguide segment J1K1, wherein, the 5th waveguide segment J1K1For connecting the second directional couple 3rd port J of device 2271And the first port K of reciprocal phase shift device 2281.5th waveguide segment J1K1In at least one section of light wave Lead and be located at the second magnetic field M as the 4th target waveguide segment (dash area in figure), the 4th target waveguide segmentnIn, the 4th target ripple Section is led to be used to make the 3rd port J from the second directional coupler 2271The optical signal transmitted to reciprocal phase shift device 228 produces's Nonreciprocal phase shift, from reciprocal phase shift device 228 to the 3rd port J of the second directional coupler 2271The optical signal of transmission produces's Nonreciprocal phase shift.In the present embodiment, the 4th target waveguide segment is perpendicular to the second magnetic field MnMagnetic direction, and the second target Waveguide segment is parallel to ducting layer 220.In another specific embodiment, by the throwing of the 4th target waveguide segment on the first plane First projection of the shadow as the 4th target waveguide segment, then the length of the projection of the 4th target waveguide segment refers to the 4th target waveguide segment The first length for being projected in projection on direction where second straight line.Making the length of the projection of the 4th target waveguide segment makes from 3rd port J of two directional couplers 2271The optical signal transmitted to reciprocal phase shift device 228 producesNonreciprocal phase shift, from Threeth port J of the reciprocal phase shift device 228 to the second directional coupler 2271The optical signal of transmission producesNonreciprocal phase shift.
Waveguide segment N1O1And waveguide segment N2O2Parallel and close to the waveguide segment R in the 4th waveguide 2242S2, generally Waveguide segment N1O1With waveguide segment R2S2The distance between be more than 10 microns, that is, for waveguide segment N1O1On every bit, according to Below for waveguide segment N1O1On the method for point 5 operated, waveguide segment R2S2The distance of the nearest point of upper range points 5 and point 5 More than 10 microns.N2O2With waveguide segment R2S2The distance between also greater than 10 microns, that is, for waveguide segment N2O2On it is each Point, according to below for waveguide segment N2O2On the method for point 6 operated, waveguide segment R2S2The nearest point of upper range points 6 with The distance of point 6 is more than 10 microns.Waveguide segment N1O1, waveguide segment R2S2And waveguide segment N2O2The second branch coupler 229 is constituted, Moreover, waveguide segment R2S2For the pars intermedia of the second branch coupler 229, waveguide segment N1O1For the first of the second branch coupler 229 Branch, waveguide segment N2O2For the second branch of the second branch coupler 229.First branch coupler 229 can cause waveguide segment N1O1And waveguide segment N2O2With waveguide segment R2S2Between produce branch coupling.
Waveguide segment L1M1And waveguide segment M1N1Constitute the 6th waveguide segment L1N1, wherein, the 6th waveguide segment L1N1For connecting The second port L of reciprocal phase shift device 2281And second branch coupler 229 the first branch.Waveguide segment K2L2And L2N2Form 7th waveguide segment K2N2, wherein, the 7th waveguide segment K2N2For connecting the 4th port K of the second directional coupler 2272And the Second branch of two branch couplers 229.
Waveguide segment P1Q1And waveguide segment P2Q2It is parallel and be away from the 4th waveguide 224, to ensure waveguide segment P1Q1With And waveguide segment P2Q2Coupling will not occur between the 4th waveguide 224.Waveguide segment in 4th waveguide 224 S2T2The first central end can be used as, for inputting or exporting optical signal, waveguide segment P1Q1And waveguide segment P2Q2More than first can be used as Light output end, for exporting unnecessary remaining light.
Waveguide segment O1P1It is waveguide segment N1O1And waveguide segment P1Q1Between changeover portion, waveguide segment O2P2It is waveguide segment N2O2 And waveguide segment P2Q2Between changeover portion.
Wherein, first wave guide section D in present embodiment1F1In smooth inverted L shape, second waveguide section D2G2Also include second One waveguide segment D2F2, the 2nd 1 waveguide segment D2F2Input be connected with the second output end of the first branch coupler 225, 21 waveguide segment D2F2Output end be connected with the input of first object waveguide segment, the output end of first object waveguide segment with The second port G of first directional coupler 2262It is connected.2nd 1 waveguide segment is L-shaped, first wave guide section D1F1With the 2nd 1 ripple Lead a section D2F2It is symmetrical on the first branch coupler 225.
By first wave guide section D1F1Projection on the first plane is as first wave guide section D1F1The first projection, then first Waveguide segment D1F1The length of projection refer to first wave guide section D1F1First be projected in projection on direction where second straight line Length；By the 2nd 1 waveguide segment D2F2Projection on the first plane is as the 2nd 1 waveguide segment D2F2The first projection, then second One waveguide segment D2F2The length of projection refer to the 2nd 1 waveguide segment D2F2First be projected in throwing on direction where second straight line The length of shadow.The distance between first output end and the second output end of first branch coupler 225, first wave guide section D1F1's The length of projection and the 2nd 1 waveguide segment D2F2Projection length sum be more than first object waveguide segment projection length, To ensure that the length of the projection of first object waveguide segment can produce enough nonreciprocal phase shifts.
By the 6th waveguide segment L1N1Projection on the first plane is as the 6th waveguide segment L1N1The first projection, then the 6th Waveguide segment L1N1The length of projection refer to the 6th waveguide segment L1N1First be projected in projection on direction where second straight line Length；By the 7th waveguide segment K2N2Projection on the first plane is as the 7th waveguide segment K2N2First projection, then the 7th waveguide Section K2N2The length of projection refer to the 7th waveguide segment K2N2The first length for being projected in projection on direction where second straight line Degree；Projected using the projection of the second branch coupler 229 on the first plane as the first of the second branch coupler 229, then the The length of the projection of two branch couplers 229 refers to that the first of the second branch coupler 229 is projected in direction where second straight line On projection length.Projected using the projection of optoisolator on the first plane as the first of optoisolator, then optoisolator The length of projection refer to the length of the first of the optoisolator projection being projected on direction where second straight line；Wherein, the 6th Waveguide segment L1N1The length of projection, the 7th waveguide segment K2N2Projection length and the second branch coupler 229 projection length Spend the length that sum is equal to the projection of optoisolator.
In order to improve the utilization ratio in magnetic field, the first magnetic field M can be made in the present embodimentsAnd the second magnetic field MnPosition Between the first branch coupler 225 and the second branch coupler 229, by the geometric center of the first branch coupler 225 and The straight line where line between the geometric center of two branch couplers 229 is as first straight line, then the first magnetic field MsMagnetic field Direction where direction and first straight line is parallel, the second magnetic field MnMagnetic direction it is also equal with the direction where first straight line OK.It is appreciated that in other embodiments, the first magnetic field MsWith the second magnetic field MnCan also be with first straight line into certain Angle, the present invention are not especially limited.
In the present embodiment, first wave guide section D1F1Length be equal to the 7th waveguide segment K2N2Length, the 3rd waveguide segment G1I1Length be equal to the 4th waveguide segment H2J2Length, the 5th waveguide segment J1K1With the 6th waveguide segment L1N1Length sum be equal to Second waveguide section D2G2Length.And in other embodiments, only it need to ensure first wave guide section D1F1, the 4th waveguide segment H2J2, the 5th waveguide segment J1K1And the 6th waveguide segment L1N1Sum is equal to second waveguide section D2G2, the 3rd waveguide segment G1I1And the Seven waveguide segment K2N2Sum, the present invention are not especially limited.
In order that ducting layer design it is more attractive in appearance, also for reduce optical signal transmission during unnecessary loss, In the present embodiment, first wave guide section D is made1F1In with the first magnetic field MsThe perpendicular part of magnetic direction and first object Waveguide segment is parallel, and first object waveguide segment and the second target waveguide segment are on 226 symmetrical and the first mesh of the first directional coupler Mark waveguide segment and the second target waveguide segment is parallel to each other, the parallel 3rd target waveguide segment of the second target waveguide segment, the 3rd target ripple Section and the 4th target waveguide segment are led on the second directional coupler 227 symmetrical and the 3rd target waveguide segment and the 4th target waveguide segment It is parallel to each other, the 6th waveguide segment L1N1In with the second magnetic field MnThe perpendicular part of magnetic direction and the 4th target waveguide segment phase It is parallel, the 7th waveguide segment K2N2In with the second magnetic field MnMagnetic direction it is perpendicular part it is also equal with the 4th target waveguide segment OK.
Can be mutually coupled except clear stipulaties waveguide segment (between the waveguide segment of the first branch of composition coupling, composition the Between the waveguide segment of one directional coupler, between the waveguide segment of the second branch of composition coupling and second directional coupler of composition Between waveguide segment) outside, enough distances (being more than or equal to 10 microns) should be kept between other waveguide segments, to ensure not Coupling effect can occur.
Please refer to fig. 5, when optical signal inputs from first wave guide path 221, optical signal is along first wave guide path 221 are transmitted.When optical signal is transmitted to the first branch coupler 225 along first wave guide path 221, in the case where branch acts on, The optical signal branch of pars intermedia in first branch coupler 225 produces two-way spectroscopic signal, wherein, the first spectroscopic signal produces The first branch in the first branch coupler 225, the second spectroscopic signal produce second point in the first branch coupler 225 Branch, also, the first spectroscopic signal continues on second waveguide path 222 and is transmitted, and the second spectroscopic signal then continues on the Three waveguides 223 are transmitted.
First wave guide section D of first spectroscopic signal along second waveguide path 2221F1Transmit to the first directional coupler 226 First port F1, the second spectroscopic signal is then along the second waveguide section D of the 3rd waveguide 2232G2Transmit to the first orientation coupling The second port G of clutch 2262。
The positive and negative of the nonreciprocal phase shift that optical signal transmits in magnetic field follows left hand rule, i.e. makes four fingers point to optical signal Transmission direction, magnetic field passes through the centre of the palm, then the signified direction of thumb represent optical signal transmit in magnetic field caused by it is non-mutual Easily phase shift is positive and negative.Specifically, if thumb it is signified direction it is upward, optical signal transmitted in magnetic field caused by it is nonreciprocal Phase shift for just, if thumb it is signified direction it is downward, optical signal transmitted in magnetic field caused by nonreciprocal phase shift be negative.
So it can be seen from left hand rule, the second spectroscopic signal is from the second branch of the first branch coupler 225 to first The second port G of directional coupler 2262During transmission, first object waveguide segment is in the first magnetic field MsIn the presence of generate " just " nonreciprocal phase shift.Moreover, it is pre-designed the length of first object waveguide segment so that the second spectroscopic signal is from the first branch Second port G of second branch of coupler 225 to the first directional coupler 2262Produced during transmissionNonreciprocal phase shift.The The length of the projection of the length of one target waveguide segmentWherein, β is that optical signal is in waveguide when not applying magnetic field During middle propagation, the variable quantity of the light phase of unit distance, Δ β are when applying magnetic field, as caused by magnetic field in the propagation direction The variable quantity propagated in the waveguide of optical signal.So the second spectroscopic signal finally produces after first object waveguide segment Phase shift.
First spectroscopic signal is transmitted to the first port F of the first directional coupler 2261Afterwards, due to the first directional coupler 226 change the characteristic of light transmission path, and the first spectroscopic signal is no longer along second waveguide path 222 and is transmitted, but by coupling Close into the 3rd waveguide 223, and from the 4th port H of the first directional coupler 2262Output.Similarly, the second light splitting letter Number transmit to the second port G of the first directional coupler 2262Afterwards, because the first directional coupler 226 changes light transmission path Characteristic, the second spectroscopic signal is no longer along the 3rd waveguide 223 and is transmitted, and is coupled to second waveguide path 222 In, and export G from the 3rd port of the first directional coupler 2261。
Fourth port H of first spectroscopic signal from the first directional coupler 2262After output, the 3rd waveguide is continued on The 4th waveguide segment H in footpath 2232J2Transmit to the second port J of the second directional coupler 2272.It can be seen from left hand rule, first Fourth port H of the spectroscopic signal from the first directional coupler 2262The mistake transmitted to the second port of the second directional coupler 227 Cheng Zhong, the 3rd target waveguide segment is in the first magnetic field MsIn the presence of generate the nonreciprocal phase shift of " negative ".It is pre-designed the 3rd mesh Mark the length of waveguide segment so that fourth port H of first spectroscopic signal from the first directional coupler 2262Transmit to the second orientation The second port I of coupler 2272When produceNonreciprocal phase shift.The length of the projection of 3rd target waveguide segmentWherein, β is when not applying magnetic field, when optical signal is propagated in the waveguide, unit distance in the propagation direction Light phase variable quantity, Δ β is the variable quantity propagated in the waveguide as the optical signal caused by magnetic field when applying magnetic field. So the first spectroscopic signal finally generates after the 3rd target waveguide segmentPhase shift.
Threeth port G of second spectroscopic signal from the first directional coupler 2261After output, second waveguide road is continued on The 3rd waveguide segment G in footpath 2231I1Transmit to the first port I of the second directional coupler 2271.It is pre-designed the second target waveguide The length of section so that threeth port G of second spectroscopic signal from the first directional coupler 2261Transmit to the second directional coupler 227 first port I1When produceNonreciprocal phase shift.The length of the projection of second target waveguide segmentIts In, β is when not applying magnetic field, when optical signal is propagated in the waveguide, the change of the light phase of unit distance in the propagation direction Amount, Δ β are the variable quantities propagated in the waveguide as the optical signal caused by magnetic field when applying magnetic field.So the second light splitting letter Number after the second target waveguide segment, finally generatePhase shift.
First spectroscopic signal is transmitted to the second port J of the second directional coupler 2272Afterwards, due to the second directional coupler 227 change the characteristic of light transmission path, and the first spectroscopic signal is no longer along the 3rd waveguide 223 and is transmitted, but by coupling Close in second waveguide path 222, and from the 3rd port J of the second directional coupler 2271Output.Similarly, the second light splitting letter Number transmit to the first port I of the second directional coupler 2271Afterwards, because the second directional coupler 227 changes light transmission path Characteristic, the second spectroscopic signal is no longer along second waveguide path 222 and is transmitted, and is coupled to the 3rd waveguide 223 In, and from the 4th port K of the second directional coupler 2272Output.
Threeth port J of first spectroscopic signal from the second directional coupler 2271After output, second waveguide road is continued on The 5th waveguide segment J in footpath 2231K1Transmit to the first port K of reciprocal phase shift device 2281.It can be seen from left hand rule, the first light splitting Threeth port J of the signal from the second directional coupler 2271To the first port K of reciprocal phase shift device 2281During transmission, the Four target waveguide segments are in the second magnetic field MnIn the presence of generate the nonreciprocal phase shift of " negative ".It is pre-designed the 4th target waveguide segment Length so that threeth port J of first spectroscopic signal from the second directional coupler 2271Transmit to the of reciprocal phase shift device 228 Single port K1When produceNonreciprocal phase shift.The length of the projection of 4th target waveguide segmentWherein, β is that do not have When having application magnetic field, when optical signal is propagated in the waveguide, the variable quantity of the light phase of unit distance, Δ β are in the propagation direction It is the variable quantity propagated in the waveguide as the optical signal caused by magnetic field when applying magnetic field.So the first spectroscopic signal is passing through After 4th target waveguide segment, finally generatePhase shift.
Also, it is pre-designed the length of reciprocal phase shift device 228 so that by the first spectroscopic signal of reciprocal phase shift device 228 ProduceReciprocal phase shift.The length of reciprocal phase shift device 228Wherein, β is that optical signal exists when not applying magnetic field When being propagated in waveguide, the variable quantity of the light phase of unit distance in the propagation direction.
Second port L of first spectroscopic signal from reciprocal phase shift device 2281After output, pass through the 6th waveguide segment L1N1Transmit to First branch of the second branch coupler 229.Fourth port K of second spectroscopic signal from the second directional coupler 2272Output Afterwards, the 7th waveguide segment K of the 3rd waveguide 223 is continued on2N2Transmit to the second branch of the second branch coupler 229.
Finally, total phase shift is caused by the first spectroscopic signalTotal phase shift caused by second spectroscopic signal ForSo when the first spectroscopic signal and the second spectroscopic signal are transmitted to the second branch coupler 229, both Phase difference is zero, i.e., both phase it is identical, so, according to mutually long dry between the first spectroscopic signal and the second spectroscopic signal Relate to.Moreover, under the coupling of the second branch coupler 229, first of the first branch in the second branch coupler 229 Second spectroscopic signal of the second branch is in the second branch coupler 229 in spectroscopic signal and the second branch coupler 229 Pars intermedia recombines optical signal all the way, and is exported from the first central end of the 4th waveguide 224.
Also referring to Fig. 6, the reflected light of optical signal from the 4th waveguide 224 input when, optical signal is along the 4th ripple Guiding path 224 is transmitted.When optical signal is transmitted to the second branch coupler 229 along the 4th waveguide 224, make in branch Under, the optical signal branch of the pars intermedia in the second branch coupler 229 produces the 3rd spectroscopic signal and the 4th spectroscopic signal two Road spectroscopic signal, wherein, the 3rd spectroscopic signal produces the first branch in the second branch coupler 229, the second spectroscopic signal The second branch in the second branch coupler 229 is produced, also, the 3rd spectroscopic signal continues on second waveguide path 222 The 6th waveguide segment L1N1Transmit to the second port L of reciprocal phase shift device 2281, the 4th spectroscopic signal then continues on the 3rd waveguide The 7th waveguide segment K in path 2232N2Transmit to the 4th port K of the second directional coupler 2272。
3rd spectroscopic signal is transmitted to the second port L of reciprocal phase shift device 2281Afterwards, due to the reciprocity of reciprocal phase shift device 228 Property, the 3rd spectroscopic signal generates after reciprocal phase shift device 228Reciprocal phase shift, and from reciprocal phase shift device 228 First port K1Output.The 5th waveguide segment J that 3rd spectroscopic signal passes through second waveguide path 2221K1Transmit to the second orientation coupling 3rd port J of clutch 2271.It can be seen from left hand rule, first port K of the 3rd spectroscopic signal from reciprocal phase shift device 2281To 3rd port J of the second directional coupler 2271During transmission, the 4th target waveguide segment is in the second magnetic field MnIn the presence of produce The nonreciprocal phase shift of " just " has been given birth to, and the length of the 4th target waveguide segment is constant, the size of phase shift is also constant, so, final production It is rawPhase shift.
3rd spectroscopic signal is transmitted to the 3rd port J of the second directional coupler 2271Afterwards, due to the second directional coupler 227 change the characteristic of light transmission path, and the 3rd spectroscopic signal is no longer along second waveguide path 222 and is transmitted, but by coupling Close into the 3rd waveguide 223, and from the second port J of the second directional coupler 2272Output.Similarly, the 4th light splitting letter Number transmit to the 4th port K of the second directional coupler 2272Afterwards, because the second directional coupler 227 changes light transmission path Characteristic, the 4th spectroscopic signal is no longer along the 3rd waveguide 223 and is transmitted, and is coupled to second waveguide path 222 In, and from the first port I of the second directional coupler 2271Output.
Second port J of 3rd spectroscopic signal from the second directional coupler 2272After output, pass through the 3rd waveguide 223 The 4th waveguide segment H2J2Transmit to the 4th port H of the first directional coupler 2262.It can be seen from left hand rule, the 3rd light splitting Second port J of the signal from the second directional coupler 2272To the 4th port H of the first directional coupler 2262The process of transmission In, the second target waveguide segment is in the first magnetic field MsIn the presence of generate the nonreciprocal phase shift of " just ", and the second target waveguide segment Length it is constant, the size of phase shift is also constant, so, finally generatePhase shift.
First port I of 4th spectroscopic signal from the second directional coupler 2271After output, pass through second waveguide path 222 The 3rd waveguide segment G1I1Transmit to the 3rd port G of the first directional coupler 2261.It can be seen from left hand rule, the 4th light splitting First port I of the signal from the second directional coupler 2271To the 3rd port G of the first directional coupler 2261The process of transmission In, the 3rd target waveguide segment is in the second magnetic field MnIn the presence of generate the nonreciprocal phase shift of " negative ", and the 3rd target waveguide segment Length it is constant, the size of phase shift is also constant, so, finally generatePhase shift.
3rd spectroscopic signal is transmitted to the 4th port H of the first directional coupler 2262Afterwards, due to the first directional coupler 226 change the characteristic of light transmission path, and the 3rd spectroscopic signal is no longer along the 3rd waveguide 223 and is transmitted, but by coupling Close in second waveguide path 222, and from the first port F of the first directional coupler 2261Output.Similarly, the 4th light splitting letter Number transmit to the 3rd port G of the first directional coupler 2261Afterwards, because the first directional coupler 226 changes light transmission path Characteristic, the 4th spectroscopic signal is no longer along second waveguide path 222 and is transmitted, and is coupled to the 3rd waveguide 223 In, and from the second port G of the first directional coupler 2262Output.
First port F of 3rd spectroscopic signal from the first directional coupler 2261After output, pass through second waveguide path 222 First wave guide section D1F1Transmit to the first branch of the first branch coupler 225.
Second port G of 4th spectroscopic signal from the first directional coupler 2262After output, pass through the 3rd waveguide 223 Second waveguide section D2G2Transmit to the second branch of the first branch coupler 225.It can be seen from left hand rule, the 4th light splitting letter Number from the second port G of the first directional coupler 2262To the first branch coupler 225 the second multi-branch transport during, One target waveguide segment is in the first magnetic field MsIn the presence of generate the nonreciprocal phase shift of " negative ", and the length of first object waveguide segment Constant, the size of phase shift is also constant, so, finally generatePhase shift.
Finally, total phase shift is caused by the 3rd spectroscopic signalTotal phase shift caused by 4th spectroscopic signal ForSo the 3rd spectroscopic signal and the 4th spectroscopic signal are transmitted to the first branch coupler 225 When, both phase differences areDestructive interference between 3rd spectroscopic signal and the 4th spectroscopic signal.Wherein, Most 3rd spectroscopic signal and the 4th spectroscopic signal are fallen by cancellation, still, also the 3rd spectroscopic signal of part and The remaining light of 4th spectroscopic signal can export along the waveguide 223 of second waveguide path 222 and the 3rd to the first remaining light output end.
It is understood that optoisolator can use first wave guide path 221 as input, the 4th waveguide 224 , can also in turn as output, using the 4th waveguide 224 as inputting, first wave guide path 221 is as output.
In the present invention, by the way that there is provided the first directional coupler and the second directional coupler, the first light splitting can be changed The transmission path of signal and the second spectroscopic signal, it is achieved thereby that " folding " effect of the waveguide segment for realizing nonreciprocal phase shift Fruit.Compared with prior art realizes nonreciprocal phase shift by two sections of waveguide segments, it can be realized by four sections of waveguide segments of " folding " Nonreciprocal phase shift, the area of Distribution of Magnetic Field is efficiently reduced, improve the utilization ratio in magnetic field.
In order that silicon optoisolator realizes miniaturization, first wave guide section D can be made1F1Projection in second straight line direction Length in the projection in second straight line direction of length, the first directional coupler 226, the 3rd waveguide segment G1I1In second straight line direction The length of projection, the second directional coupler 227 the projection in second straight line direction length and the 7th waveguide segment K2N2 The projection of two rectilinear directions length and less than 600 microns.Reciprocal phase shift device 228 is perpendicular to the second magnetic direction MnThrowing The length of shadow, the 5th waveguide segment J1K1Perpendicular to the second magnetic direction MnProjection length and the second directional coupler 227 exist Perpendicular to the second magnetic direction MnProjection length and less than 330 microns.
In a specific embodiment, refering to Fig. 7, in the design of whole silicon optoisolator, the length of silicon optoisolator Spend for W2+(W3+W4+W5)+W6=30um+500um+30um=560um, it is noted that W1And W7In the size for not counting isolator. The width of silicon optoisolator is U1+U2+LNR+U3=10um+20um+250um+20um=300um.So whole silicon optoisolator Big I accomplish below 1*1 millimeters, much smaller than the millimeter of prior art silicon optoisolator.
One of ordinary skill in the art will appreciate that realize all or part of flow in above-described embodiment method, being can be with The hardware of correlation is instructed to complete by computer program, described program can be stored in a computer read/write memory medium In, the program is upon execution, it may include such as the flow of the embodiment of above-mentioned each method.Wherein, described storage medium can be magnetic Dish, CD, read-only memory (Read-Only Memory, ROM) or random access memory (Random Access Memory, RAM) etc..
The above disclosed power for being only a kind of preferred embodiment of the present invention, the present invention can not being limited with this certainly Sharp scope, one of ordinary skill in the art will appreciate that realizing all or part of flow of above-described embodiment, and weighed according to the present invention Profit requires made equivalent variations, still falls within and invents covered scope.

Claims (19)

1. a kind of silicon optoisolator, it is characterised in that substrate, ducting layer and magnetic field including being stacked from bottom to up produce Layer, the magnetic field produce layer and are used to produce the first magnetic field and the second magnetic field in opposite direction；
The ducting layer include the first branch coupler, the first directional coupler, the second directional coupler, reciprocal phase shift device and Second branch coupler,
First output end of first branch coupler passes through first wave guide section and the first end of first directional coupler Mouthful be connected, the second output end of first branch coupler pass through second waveguide section and first directional coupler the Two-port netwerk is connected,
First branch coupler is used to the optical signal that the input of first branch coupler inputs being divided into first Spectroscopic signal and the second spectroscopic signal, first spectroscopic signal export from the first output end of first branch coupler, Second spectroscopic signal exports from the second output end of first branch coupler；First directional coupler is used for will The first port of first spectroscopic signal from first directional coupler is coupled to the 4th of first directional coupler Port, and determine for second port of second spectroscopic signal from first directional coupler to be coupled into described first To the 3rd port of coupler；
3rd port of first directional coupler is connected to the first of second directional coupler by the 3rd waveguide segment Port, the 4th port of first directional coupler are connected to the second of second directional coupler by the 4th waveguide segment Port；
Second directional coupler is used for the first port coupling by second spectroscopic signal from second directional coupler Close the 4th port of second directional coupler, and for by first spectroscopic signal from first directional couple The second port of device is coupled to the 3rd port of second directional coupler；
3rd port of second directional coupler is connected by the 5th waveguide segment with the reciprocal phase shift device, the reciprocity Phase-shifter is connected by the 6th waveguide segment with the first input end of second branch coupler, second directional coupler The 4th port be connected by the 7th waveguide segment with the second input of second branch coupler,
Second branch coupler is used for first light splitting for inputting the first input end of second branch coupler Second spectroscopic signal of second input of signal and second branch coupler input merges into optical signal all the way, and The optical signal all the way is exported from the output end of first branch coupler；
Using at least one section of fiber waveguide in the second waveguide section as first object waveguide segment, the first object waveguide section In first magnetic field, the first object waveguide segment is used to make second spectroscopic signal from first branch coupler Second port from the second branch to the first directional coupler transmit when produceNonreciprocal phase shift；
Using at least one section of fiber waveguide in the 4th waveguide segment as the second target waveguide segment, the second target waveguide section In first magnetic field, the second target waveguide segment is used to make first spectroscopic signal from first directional coupler Second port from the 4th port to second directional coupler transmit when produceNonreciprocal phase shift；
Using at least one section of fiber waveguide in the 3rd waveguide segment as the 3rd target waveguide segment, the 3rd target waveguide section In second magnetic field, the 3rd target waveguide segment is used to make second spectroscopic signal from first directional coupler First port from the 3rd port to second directional coupler transmit when produceNonreciprocal phase shift；
Using at least one section of fiber waveguide in the 5th waveguide segment as the 4th target waveguide segment, the 4th target waveguide section In second magnetic field, the 4th target waveguide segment is used to make first spectroscopic signal from second directional coupler The 3rd port produce when being transmitted to the reciprocal phase shift deviceNonreciprocal phase shift；
The reciprocal phase shift device is used to make first spectroscopic signal generation by the reciprocal phase shift deviceReciprocal phase shift.
2. silicon optoisolator according to claim 1, it is characterised in that
First magnetic field is between first branch coupler and second branch coupler；
By the line institute between the geometric center of first branch coupler and the geometric center of second branch coupler Straight line as first straight line, then the magnetic direction in first magnetic field and direction where the first straight line are parallel.
3. silicon optoisolator according to claim 1, it is characterised in that
The length of the first wave guide section is equal to the length of the 7th waveguide segment, and the 5th waveguide segment and the 6th ripple The length sum for leading section is equal to the length of the second waveguide section.
4. silicon optoisolator according to claim 1, it is characterised in that
The length of 3rd waveguide segment is equal to the length of the 4th waveguide segment.
5. silicon optoisolator according to claim 1, it is characterised in that
The first object waveguide segment is used to make second spectroscopic signal from the second output end of first branch coupler Produced when being transmitted to the second port of first directional couplerNonreciprocal phase shift, specifically include：
The length of the projection of the first object waveguide segment, for making second spectroscopic signal from first branch coupler The second output end be transferred to the second port of first directional coupler during produceNonreciprocal phase shift；
Using the face perpendicular with the magnetic direction in first magnetic field as the first plane, and by first plane and the ripple The line that plane where conducting shell intersects is as second straight line, by projection of the first object waveguide segment in first plane As the first projection of the first object waveguide segment, then the length of the projection of the first object waveguide segment refers to described first The length of projection where the first of target waveguide segment is projected in the second straight line on direction.
6. silicon optoisolator according to claim 5, it is characterised in that
The first object waveguide segment perpendicular to first magnetic field magnetic direction, and the first object waveguide segment parallel to Plane where the ducting layer.
7. silicon optoisolator according to claim 1, it is characterised in that
The second waveguide section also includes the 2nd 1 waveguide segment, input and first branch coupling of the 2nd 1 waveguide segment Second output end of clutch is connected, the output end and the input phase of the first object waveguide segment of the 2nd 1 waveguide segment Connection, the output end of the first object waveguide segment are connected with the second port of first directional coupler；
In the case where the first wave guide section is inverted L shape, the 2nd 1 waveguide segment is L-type, the first wave guide section and institute It is symmetrical on first branch coupler to state the 2nd 1 waveguide segment.
8. silicon optoisolator according to claim 7, it is characterised in that
The projection of the distance between first output end and the second output end of first branch coupler, the first wave guide section Length and the 2nd 1 waveguide segment projection length sum be more than the first object waveguide segment projection length；
The first projection using projection of the first wave guide section in first plane as the first wave guide section, then it is described The length of the projection of first wave guide section refers to that the first of the first wave guide section is projected on the direction of the second straight line place The length of projection；
The first projection using projection of the 2nd 1 waveguide segment in first plane as the 2nd 1 waveguide segment, then The length of the projection of 2nd 1 waveguide segment refers to that the first of the 2nd 1 waveguide segment is projected in where the second straight line The length of projection on direction.
9. silicon optoisolator according to claim 5, it is characterised in that
The first projection using projection of the 6th waveguide segment in first plane as the 6th waveguide segment, then it is described The length of the projection of 6th waveguide segment refers to that the first of the 6th waveguide segment is projected on the direction of the second straight line place The length of projection；
The first projection using projection of the 7th waveguide segment in first plane as the 7th waveguide segment, then it is described The length of the projection of 7th waveguide segment refers to that the first of the 7th waveguide segment is projected on the direction of the second straight line place The length of projection；
Thrown using projection of second branch coupler in first plane as the first of second branch coupler Shadow, then the length of the projection of second branch coupler refer to that the first of second branch coupler is projected in described second The length of projection where straight line on direction；
Using the optoisolator in first plane projection as the optoisolator first project, then the light every Length from the projection of device refers to the length of the first of the optoisolator projection being projected on the direction of the second straight line place Degree；
Wherein, the length of the projection of the 6th waveguide segment, the 7th waveguide segment projection length and second branch The length sum of the projection of coupler is equal to the length of the projection of the optoisolator.
10. silicon optoisolator according to claim 7, it is characterised in that
The perpendicular part of the magnetic direction in the first magnetic field described in the first wave guide Duan Zhongyu and the first object waveguide segment It is parallel.
11. silicon optoisolator according to claim 5, it is characterised in that
The second target waveguide segment be used for make first spectroscopic signal from the 4th port of first directional coupler to Produced during the second port transmission of second directional couplerNonreciprocal phase shift, specifically include：
The length of the projection of the second target waveguide segment, for making second spectroscopic signal from first directional coupler The 4th port transmission to second directional coupler second port during produceNonreciprocal phase shift；
Thrown using projection of the second target waveguide segment in first plane as the first of the second target waveguide segment Shadow, then the length of the projection of the second target waveguide segment refer to that the first of the second target waveguide segment is projected in described second The length of projection where straight line on direction.
12. silicon optoisolator according to claim 1, it is characterised in that
The first object waveguide segment and the second target waveguide segment are symmetrical on first directional coupler.
13. silicon optoisolator according to claim 5, it is characterised in that
The 3rd target waveguide segment be used for make second spectroscopic signal from the 3rd port of first directional coupler to Produced during the first port transmission of second directional couplerNonreciprocal phase shift, specifically include：
The length of the projection of the 3rd target waveguide segment, for making second spectroscopic signal from first directional coupler The 3rd port transmission to second directional coupler first port during produceNonreciprocal phase shift；
Thrown using projection of the 3rd target waveguide segment in first plane as the first of the 3rd target waveguide segment Shadow, then the length of the projection of the 3rd target waveguide segment refer to that the first of the 3rd target waveguide segment is projected in described second The length of projection where straight line on direction.
14. silicon optoisolator according to claim 1, it is characterised in that
The 3rd target waveguide segment perpendicular to second magnetic field magnetic direction, and the 3rd target waveguide segment parallel to The ducting layer.
15. silicon optoisolator according to claim 14, it is characterised in that
The 3rd target waveguide segment is parallel to the second target waveguide segment.
16. silicon optoisolator according to claim 5, it is characterised in that
The 4th target waveguide segment be used for make first spectroscopic signal from the 3rd port of second directional coupler to Produced during the reciprocal phase shift device transmissionNonreciprocal phase shift, specifically include：
The length of the projection of the 4th target waveguide segment, for making first spectroscopic signal from second directional coupler The 3rd port transmission to producing during the reciprocal phase shift deviceNonreciprocal phase shift；
Thrown using projection of the 4th target waveguide segment in first plane as the first of the 4th target waveguide segment Shadow, then the length of the projection of the 4th target waveguide segment refer to that the first of the 4th target waveguide segment is projected in described second The length of projection where straight line on direction.
17. silicon optoisolator according to claim 1, it is characterised in that
The 3rd target waveguide segment and the 4th target waveguide segment are symmetrical on second directional coupler.
18. the silicon optoisolator according to any one of claim 1 to 17, it is characterised in that
First wave guide section is in the length of the projection in the second straight line direction, first directional coupler in the second straight line The length of the projection of the length of the projection in direction, the 3rd waveguide segment in the second straight line direction, the second orientation coupling Clutch the projection in the second straight line direction length and the 7th waveguide segment the second straight line direction projection It is length and less than 600 microns.
19. silicon optoisolator according to claim 18, it is characterised in that
The reciprocal phase shift device the length of the projection perpendicular to second magnetic direction, the 5th waveguide segment perpendicular to The length of the projection of second magnetic direction and second directional coupler are in the throwing perpendicular to second magnetic direction Shadow length and less than 330 microns.
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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5977408A (en) * 1982-10-27 1984-05-02 Hitachi Ltd Optical isolator
US4978189A (en) * 1989-11-14 1990-12-18 At&T Bell Laboratories Hybrid optical isolator, circulator or switch, and systems utilizing same
JP2001350039A (en) * 2000-06-06 2001-12-21 Tokyo Inst Of Technol Optical isolator and optical electronic device
JP3407046B1 (en) * 2002-04-11 2003-05-19 東京工業大学長 Interferometer type optical isolator and optical circulator
CN1841134A (en) * 2005-03-30 2006-10-04 英特尔公司 Integratable optical waveguide isolator
CN1869748A (en) * 2005-03-30 2006-11-29 英特尔公司 Integratable optical isolator having mach-zehnder interferometer configuration
US7228023B1 (en) * 2005-12-30 2007-06-05 Intel Corporation Planar non-magnetic optical isolator
CN101261372A (en) * 2008-04-16 2008-09-10 浙江大学 Polarization irrelevant magneto- optic waveguide light isolator
CN101361017A (en) * 2006-01-19 2009-02-04 三美电机株式会社 Waveguide type wideband optical isolator
CN104090375A (en) * 2014-07-30 2014-10-08 华为技术有限公司 Optical isolating device and method

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5977408A (en) * 1982-10-27 1984-05-02 Hitachi Ltd Optical isolator
US4978189A (en) * 1989-11-14 1990-12-18 At&T Bell Laboratories Hybrid optical isolator, circulator or switch, and systems utilizing same
JP2001350039A (en) * 2000-06-06 2001-12-21 Tokyo Inst Of Technol Optical isolator and optical electronic device
JP3407046B1 (en) * 2002-04-11 2003-05-19 東京工業大学長 Interferometer type optical isolator and optical circulator
CN1841134A (en) * 2005-03-30 2006-10-04 英特尔公司 Integratable optical waveguide isolator
CN1869748A (en) * 2005-03-30 2006-11-29 英特尔公司 Integratable optical isolator having mach-zehnder interferometer configuration
US7228023B1 (en) * 2005-12-30 2007-06-05 Intel Corporation Planar non-magnetic optical isolator
CN101361017A (en) * 2006-01-19 2009-02-04 三美电机株式会社 Waveguide type wideband optical isolator
CN101261372A (en) * 2008-04-16 2008-09-10 浙江大学 Polarization irrelevant magneto- optic waveguide light isolator
CN104090375A (en) * 2014-07-30 2014-10-08 华为技术有限公司 Optical isolating device and method

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