CN104749706A - Silicon optoisolator - Google Patents

Silicon optoisolator Download PDF

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Publication number
CN104749706A
CN104749706A CN201510112986.6A CN201510112986A CN104749706A CN 104749706 A CN104749706 A CN 104749706A CN 201510112986 A CN201510112986 A CN 201510112986A CN 104749706 A CN104749706 A CN 104749706A
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Prior art keywords
waveguide segment
projection
directional coupler
port
length
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CN104749706B (en
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孙敏
朱以胜
赵彦立
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Huawei Technologies Co Ltd
Huazhong University of Science and Technology
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Huawei Technologies Co Ltd
Huazhong University of Science and Technology
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/09—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on magneto-optical elements, e.g. exhibiting Faraday effect
    • G02F1/095—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on magneto-optical elements, e.g. exhibiting Faraday effect in an optical waveguide structure
    • G02F1/0955—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on magneto-optical elements, e.g. exhibiting Faraday effect in an optical waveguide structure used as non-reciprocal devices, e.g. optical isolators, circulators

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

The invention discloses a silicon optoisolator. The silicon optoisolator is that a first target waveguide section is used for performing non-reciprocal phase shifting for a second beam split signal while transmitting from a second branch of a first branch coupler to a second port of a first directional coupler; a second target waveguide section is used for performing non-reciprocal phase shifting for a first beam split signal while transmitting from a fourth port of the first directional coupler to the second port of a second directional coupler; a third target waveguide section is used for performing non-reciprocal phase shifting for the second beam split signal while transmitting from a third port of the first directional coupler to the first port of the second directional coupler; a fourth target waveguide section is used for performing non-reciprocal phase for the first beam split signal while transmitting from the third port of the second directional coupler to a reciprocal phase shifter; the reciprocal phase shifter is used for performing reciprocal phase shifting for the first beam split signal passing through the reciprocal phase shifter. With the adoption of the silicon optoisolator, the magnetic field distribution area can be effectively reduced, and thus the utilization efficiency of a magnetic field can be increased. The expression of phase shifting each time is shown in the specification.

Description

A kind of silicon optoisolator
Technical field
The present invention relates to optical arena, particularly relate to a kind of silicon optoisolator.
Background technology
Silicon optoisolator is that a kind of light that allows transmits from first direction, and forbids the device that light transmits from the opposite direction of first direction.Silicon optoisolator is widely used in optical communications, such as, the light signal produced from semiconductor laser is wanted then to be sent to receiving end (i.e. first direction) by silicon optoisolator, but, the reflected light (i.e. the opposite direction of first direction) reflected from receiving end direction then must be isolated out by silicon optoisolator, to prevent the oscillating characteristic deterioration of the photoconduction induced semiconductor laser instrument reflected.
Consult Fig. 1, prior art provides a kind of silicon optoisolator 100, comprises substrate 110, ducting layer 120 and magnetic field generating layer 130.Wherein, ducting layer 120 grows on substrate 110, and magnetic field generating layer 130 is arranged on ducting layer 120.Magnetic field generating layer 130 comprises the clad be made up of magnetooptic material, and clad is arranged for prescribed direction to magnetooptic material magnetized magnetic field applying mechanism.Magnetic field generating layer 130 makes the magnetization of magnetooptic material orientation by magnetic field applying mechanism, thus produces magnetic field.
Consult Fig. 2, ducting layer 120 by depositing and etching waveguide material, to form 4 mutually non-touching waveguides.Waveguide is the path that optical signal transmission optical signal is propagated.4 Luciola substriata paths are respectively first wave guide path 121, Second Wave guiding path 122, the 3rd waveguide 123 and the 4th waveguide 124.
First wave guide path 121 is made up of waveguide segment mn and waveguide segment no.Second Wave guiding path 122 is made up of waveguide segment a ' b ', waveguide segment b ' c ', waveguide segment c ' d ', waveguide segment d ' e ', waveguide segment e ' f ', waveguide segment f ' g ', waveguide segment g ' h ', waveguide segment h ' i ' and waveguide segment i ' j '.3rd waveguide 123 is made up of waveguide segment ab, waveguide segment bc, waveguide segment cd, waveguide segment de, waveguide segment ef, waveguide segment fg, waveguide segment gh, waveguide segment hi and waveguide segment ij.4th waveguide is made up of waveguide segment o ' n ' and waveguide segment n ' m '.
Magnetic field generating layer 130 makes the magnetization of magnetooptic material orientation by magnetic field applying mechanism, thus the first magnetic field is produced on waveguide segment ef, and in upper generation second magnetic field of waveguide segment e ' f ', and between the first magnetic field with the second magnetic field parallel and direction contrary (as shown by arrows in FIG.).Being understandable that, can there is phase shift effect in light signal under the influence of a magnetic field, and the direction of propagation and the magnetic field of the positive and negative and light signal of the phase place of phase shift are relevant.So light signal is propagated from a direction along waveguide segment ef, with light signal from compared with propagating along waveguide segment ef in the other direction, both magnetic directions are identical, but the direction of propagation of light signal is on the contrary, so, phase shift positive and negative also just contrary.The size of the phase place of phase shift is then directly proportional to the waveguide segment ef length being arranged in the first magnetic field, and larger with the length of the waveguide segment ef being arranged in the first magnetic field, then the size of the phase place of phase shift is larger.Similarly, the second magnetic field is also in the effect that the upper generation of waveguide segment e ' f ' is similar.So waveguide segment ef, waveguide segment e ' f ' and magnetic field generating layer 130 constitute non-reciprocal phase-shifter 126.And the phase shift that light signal is produced by waveguide segment e ' f ' by waveguide segment ef or light signal is called nonreciprocal phase shift.
But, because the waveguide segment length in the size of nonreciprocal phase shift and the waveguide segment of non-reciprocal phase-shifter is directly proportional, under prior art conditions, to the first spectroscopic signal be made to obtain enough nonreciprocal phase shift by waveguide segment ef and make the second spectroscopic signal obtain enough nonreciprocal phase shift by waveguide segment e ' f ', magnetic field must be arranged enough large, the utilization ratio in magnetic field is not high.
Summary of the invention
Technical matters to be solved by this invention is, provides a kind of silicon optoisolator, can improve the utilization factor in magnetic field.
First aspect present invention provides a kind of silicon optoisolator, comprises the substrate of stacked setting from bottom to up, ducting layer and magnetic field generating layer, and described magnetic field generating layer is for generation of contrary the first magnetic field, direction and the second magnetic field;
Described ducting layer comprises the first branch coupler, the first directional coupler, the second directional coupler, reciprocal phase shift device and the second branch coupler,
First output terminal of described first branch coupler is connected by first port of first wave guide section with described first directional coupler, second output terminal of described first branch coupler is connected by second port of the second waveguide segment with described first directional coupler
The light signal that described first branch coupler is used for the input end of described first branch coupler inputs is divided into the first spectroscopic signal and the second spectroscopic signal, described first spectroscopic signal exports from the first output terminal of described first branch coupler, and described second spectroscopic signal exports from the second output terminal of described first branch coupler; Described first directional coupler is used for the 4th port described first spectroscopic signal being coupled to described first directional coupler from the first port of described first directional coupler, and for described second spectroscopic signal to be coupled to the 3rd port of described first directional coupler from the second port of described first directional coupler;
3rd port of described first directional coupler is connected to the first port of described second directional coupler by the 3rd waveguide segment, the 4th port of described first directional coupler is connected to the second port of described second directional coupler by the 4th waveguide segment;
Described second directional coupler is used for the 4th port described second spectroscopic signal being coupled to described second directional coupler from the first port of described second directional coupler, and for described first spectroscopic signal to be coupled to the 3rd port of described second directional coupler from the second port of described first directional coupler;
3rd port of described second directional coupler is connected with described reciprocal phase shift device by the 5th waveguide segment, described reciprocal phase shift device is connected by the first input end of the 6th waveguide segment with described second branch coupler, 4th port of described second directional coupler is connected by second input end of the 7th waveguide segment with described second branch coupler
Described second spectroscopic signal that described second branch coupler is used for the second input end input of described first spectroscopic signal and described second branch coupler inputted by the first input end of described second branch coupler merges into a road light signal, and is exported by the output terminal of a described road light signal from described first branch coupler;
Using at least one section of optical waveguide in described second waveguide segment as first object waveguide segment, described first object waveguide segment is arranged in described first magnetic field, and described first object waveguide segment produces from the second branch of described first branch coupler to during the second port transmission of the first directional coupler for making described second spectroscopic signal nonreciprocal phase shift;
Using at least one section of optical waveguide in described 4th waveguide segment as the second target waveguide segment, described second target waveguide section is arranged in described first magnetic field, and described second target waveguide segment produces from the 4th port of described first directional coupler to during the second port transmission of described second directional coupler for making described first spectroscopic signal nonreciprocal phase shift;
Using at least one section of optical waveguide in described 3rd waveguide segment as the 3rd target waveguide segment, described 3rd target waveguide section is arranged in described second magnetic field, and described 3rd target waveguide segment produces from the 3rd port of described first directional coupler to during the first end port transmission of described second directional coupler for making described second spectroscopic signal nonreciprocal phase shift;
Using at least one section of optical waveguide in described 5th waveguide segment as the 4th target waveguide segment, described 4th target waveguide section is arranged in described second magnetic field, produces when described 4th target waveguide segment is for making described first spectroscopic signal from the 3rd port of described second directional coupler to described reciprocal phase shift device transmission nonreciprocal phase shift;
Described reciprocal phase shift device produces for making described first spectroscopic signal through described reciprocal phase shift device reciprocal phase shift.
In conjunction with first aspect, in the first possible embodiment of first aspect,
Described first magnetic field is between described first branch coupler and described second branch coupler;
Using the straight line at the line place between the geometric center of described first branch coupler and the geometric center of described second branch coupler as the first straight line, then the magnetic direction in described first magnetic field and the direction at described first straight line place parallel.
In conjunction with the first possible embodiment of first aspect or first aspect, in the embodiment that the second of first aspect is possible,
The length of described first wave guide section equals the length of described 7th waveguide segment, and the length sum of described 5th waveguide segment and described 6th waveguide segment equals the length of described second waveguide segment.
In conjunction with any one in the first possible embodiment of first aspect, first aspect or the possible embodiment of the second, in the third possible embodiment of first aspect,
The length of described 3rd waveguide segment equals the length of described 4th waveguide segment.
In conjunction with the first possible embodiment of first aspect or first aspect to any one in the third possible embodiment, in the 4th kind of possible embodiment of first aspect,
Described first object waveguide segment produces from the second output terminal of described first branch coupler to during the second port transmission of described first directional coupler for making described second spectroscopic signal nonreciprocal phase shift, specifically comprise:
The length of the projection of described first object waveguide segment, to be transferred to the process of the second port of described first directional coupler from the second output terminal of described first branch coupler for making described second spectroscopic signal and to produce nonreciprocal phase shift;
Using with the perpendicular face of the magnetic direction in described first magnetic field as the first plane, and using the line of the Plane intersects at described first plane and described ducting layer place as the second straight line, using first projection of the projection of described first object waveguide segment in described first plane as described first object waveguide segment, then the length of the projection of described first object waveguide segment refers to first of described first object waveguide segment the length being projected in the projection on described second direction, straight line place.
In conjunction with the 4th kind of possible embodiment of first aspect, in the 5th kind of possible embodiment of first aspect,
Described first object waveguide segment is perpendicular to the magnetic direction in described first magnetic field, and described first object waveguide segment is parallel to the plane at described ducting layer place.
In conjunction with the first possible embodiment of first aspect or first aspect to any one in the 5th kind of possible embodiment, in the 6th kind of possible embodiment of first aspect,
Described second waveguide segment also comprises the 21 waveguide segment, the input end of described 21 waveguide segment is connected with the second output terminal of described first branch coupler, the output terminal of described 21 waveguide segment is connected with the input end of described first object waveguide segment, and the output terminal of described first object waveguide segment is connected with the second port of described first directional coupler;
When described first wave guide section is inverted L shape, described 21 waveguide segment is L-type, and described first wave guide section and described 21 waveguide segment are about described first branch coupler symmetry.
In conjunction with the 6th kind of possible embodiment of first aspect, in the 7th kind of possible embodiment of first aspect,
The length sum of the length of the projection of the distance between the first output terminal of described first branch coupler and the second output terminal, described first wave guide section and the projection of described 21 waveguide segment is greater than the length of the projection of described first object waveguide segment;
Using first projection of the projection of described first wave guide section in described first plane as described first wave guide section, then the length of the projection of described first wave guide section refers to first of described first wave guide section the length being projected in the projection on described second direction, straight line place;
Using first projection of the projection of described 21 waveguide segment in described first plane as described 21 waveguide segment, then the length of the projection of described 21 waveguide segment refers to first of described 21 waveguide segment the length being projected in the projection on described second direction, straight line place.
In conjunction with the 4th kind of possible embodiment of first aspect to any one in the 7th kind of possible embodiment, in the 8th kind of possible embodiment of first aspect,
Using first projection of the projection of described 6th waveguide segment in described first plane as described 6th waveguide segment, then the length of the projection of described 6th waveguide segment refers to first of described 6th waveguide segment the length being projected in the projection on described second direction, straight line place;
Using first projection of the projection of described 7th waveguide segment in described first plane as described 7th waveguide segment, then the length of the projection of described 7th waveguide segment refers to first of described 7th waveguide segment the length being projected in the projection on described second direction, straight line place;
Using first projection of the projection of described second branch coupler in described first plane as described second branch coupler, then the length of the projection of described second branch coupler refers to first of described second branch coupler the length being projected in the projection on described second direction, straight line place;
Using first projection of the projection of described optoisolator in described first plane as described optoisolator, then the length of the projection of described optoisolator refers to first of described optoisolator the length being projected in the projection on described second direction, straight line place;
Wherein, the length sum of the length of the projection of described 6th waveguide segment, the length of projection of described 7th waveguide segment and the projection of described second branch coupler equals the length of the projection of described optoisolator.
In conjunction with the 6th kind of possible embodiment of first aspect to any one in the 8th kind of possible embodiment, in the 9th kind of possible embodiment of first aspect,
The part that described in described first wave guide Duan Zhongyu, the magnetic direction in the first magnetic field is perpendicular parallels with described first object waveguide segment.
In conjunction with the first possible embodiment of first aspect or first aspect to any one in the 9th kind of possible embodiment, in the tenth kind of possible embodiment of first aspect, the spacing of described first wave guide section and described first object waveguide segment is greater than or equal to 10 microns.
In conjunction with the 4th kind of possible embodiment of first aspect to any one in the 9th kind of possible embodiment, in the tenth kind of possible embodiment of first aspect,
Described second target waveguide segment produces from the 4th port of described first directional coupler to during the second port transmission of described second directional coupler for making described first spectroscopic signal nonreciprocal phase shift, specifically comprise:
The length of the projection of described second target waveguide segment, produces the process of described second spectroscopic signal from the 4th port transmission of described first directional coupler to the second port of described second directional coupler for making nonreciprocal phase shift;
Using first projection of the projection of described second target waveguide segment in described first plane as described second target waveguide segment, then the length of the projection of described second target waveguide segment refers to first of described second target waveguide segment the length being projected in the projection on described second direction, straight line place.
In conjunction with the first possible embodiment of first aspect or first aspect to any one in the tenth kind of possible embodiment, in the 11 kind of possible embodiment of first aspect,
Described first object waveguide segment and described second target waveguide segment are about described first directional coupler symmetry.
In conjunction with the 4th kind of possible embodiment of first aspect to any one in the 11 kind of possible embodiment, in the 12 kind of possible embodiment of first aspect,
Described 3rd target waveguide segment produces from the 3rd port of described first directional coupler to during the first end port transmission of described second directional coupler for making described second spectroscopic signal nonreciprocal phase shift, specifically comprise:
The length of the projection of described 3rd target waveguide segment, produces the process of described second spectroscopic signal from the 3rd port transmission of described first directional coupler to the first port of described second directional coupler for making nonreciprocal phase shift;
Using first projection of the projection of described 3rd target waveguide segment in described first plane as described 3rd target waveguide segment, then the length of the projection of described 3rd target waveguide segment refers to first of described 3rd target waveguide segment the length being projected in the projection on described second direction, straight line place.
In conjunction with the first possible embodiment of first aspect or first aspect to any one in the 12 kind of possible embodiment, in the 13 kind of possible embodiment of first aspect,
Described 3rd target waveguide segment is perpendicular to the magnetic direction in described second magnetic field, and described 3rd target waveguide segment is parallel to described ducting layer.
In conjunction with 13 kinds of first aspect possible embodiments, in the 14 kind of possible embodiment of first aspect,
Described 3rd target waveguide segment is parallel to described second target waveguide segment.
In conjunction with the 4th kind of possible embodiment of first aspect to any one in the 14 kind of possible embodiment, in the 15 kind of possible embodiment of first aspect,
Produce when described 4th target waveguide segment is for making described first spectroscopic signal from the 3rd port of described second directional coupler to described reciprocal phase shift device transmission nonreciprocal phase shift, specifically comprise:
The length of the projection of described 4th target waveguide segment, produces the process of described first spectroscopic signal from the 3rd port transmission of described second directional coupler to described reciprocal phase shift device for making nonreciprocal phase shift;
Using first projection of the projection of described 4th target waveguide segment in described first plane as described 4th target waveguide segment, then the length of the projection of described 4th target waveguide segment refers to first of described 4th target waveguide segment the length being projected in the projection on described second direction, straight line place.
In conjunction with the first possible embodiment of first aspect or first aspect to any one in the 15 kind of possible embodiment, in the 16 kind of possible embodiment of first aspect,
Described 3rd target waveguide segment and described 4th target waveguide segment are about described second directional coupler symmetry.
In conjunction with the first possible embodiment of first aspect or first aspect to any one in the 16 kind of possible embodiment, in the 17 kind of possible embodiment of first aspect,
First wave guide section the length of the projection of described second rectilinear direction, described first directional coupler the length of the projection of described second rectilinear direction, described 3rd waveguide segment the length of the projection of described second rectilinear direction, described second directional coupler the length of the projection of described second rectilinear direction and described 7th waveguide segment the projection of described second rectilinear direction length and be less than 600 microns.
In conjunction with the 17 kind of possible embodiment of first aspect, in the 18 kind of possible embodiment of first aspect,
Described reciprocal phase shift device the length of the projection perpendicular to described second magnetic direction, described 5th waveguide segment the length of the projection perpendicular to described second magnetic direction and described second directional coupler the projection perpendicular to described second magnetic direction length and be less than 330 microns.
In the present invention, by being provided with the first directional coupler and the second directional coupler, the transmission path of the first spectroscopic signal and the second spectroscopic signal can be changed, thus achieve " folding " effect of the waveguide segment for realizing nonreciprocal phase shift.Realize compared with nonreciprocal phase shift, nonreciprocal phase shift to be realized by four of " a folding " section waveguide segment, effectively reducing the area of Distribution of Magnetic Field, improve the utilization ratio in magnetic field by two sections of waveguide segments with prior art.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of prior art silicon optoisolator one embodiment;
Fig. 2 is the structural representation of ducting layer one embodiment of prior art silicon optoisolator;
Fig. 3 is the structural representation of silicon optoisolator one embodiment of the present invention;
Fig. 4 is the structural representation of ducting layer one embodiment of silicon optoisolator of the present invention;
Fig. 5 is the light signal of silicon optoisolator of the present invention propagates into the second branch coupler direction one embodiment structural representation from the first branch coupler;
Fig. 6 is the light signal of silicon optoisolator of the present invention propagates into the first branch coupler direction one embodiment structural representation from the second branch coupler;
Fig. 7 is the dimensional drawing of each several part of silicon optoisolator one embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
It should be noted that, the term used in embodiments of the present invention is only for the object describing specific embodiment, and not intended to be limiting the present invention." one ", " described " and " being somebody's turn to do " of the singulative used in the embodiment of the present invention and appended claims is also intended to comprise most form, unless context clearly represents other implications.It is also understood that term "and/or" used herein refer to and comprise one or more project of listing be associated any or all may combine.
Consult Fig. 3, Fig. 3 is the structural representation of silicon optoisolator one embodiment of the present invention.Silicon optoisolator of the present invention comprises the substrate 210, ducting layer 220 and the magnetic field generating layer 230 that stack gradually from bottom to up.
Substrate 210 can adopt semiconducting compound substrate, such as InP substrate etc., and the semiconducting compound substrate used is corresponding with the wave band of the operation wavelength of laser instrument.
Ducting layer 220 can adopt semiconductor material.And ducting layer 220 can adopt same operation to complete with the active layer of semiconductor laser, thus make the ducting layer 220 of optoisolator and the active layer crystalline growth simultaneously of semiconductor laser, automatically can realize the optical axis alignment of thickness direction.In a concrete embodiment, when the material of substrate 210 is InP, ducting layer 220 can adopt GaInAsP semiconductor material to be formed, to make the lattice matched well between substrate 210 and ducting layer 220.
Magnetic field generating layer 230 comprises the clad be made up of magnetooptic material, and clad is arranged for prescribed direction to magnetooptic material magnetized magnetic field applying mechanism.Magnetic field generating layer 230 makes the magnetization of magnetooptic material orientation by magnetic field applying mechanism, thus produces the first contrary magnetic field M of direction swith the second magnetic field M n.
Substantially describe the one-piece construction of silicon optoisolator above, below the ducting layer 220 of emphasis to silicon optoisolator is described.
See also Fig. 4, Fig. 4 is the structural representation of ducting layer one embodiment of silicon optoisolator of the present invention.Ducting layer 220 by depositing and etching waveguide material, to form 4 mutually non-touching continuous print waveguides.4 Luciola substriata paths are respectively first wave guide path 221, Second Wave guiding path 222, the 3rd waveguide 223 and the 4th waveguide 224.
Wherein, first wave guide path 221 is by waveguide segment R 1s 1with waveguide segment S 1t 1form.Second Wave guiding path 222 is by waveguide segment A 1b 1, waveguide segment B 1c 1, waveguide segment C 1d 1, waveguide segment D 1e 1, waveguide segment E 1f 1, waveguide segment F 1g 1, waveguide segment G 1h 1, waveguide segment H 1i 1, waveguide segment I 1j 1, waveguide segment J 1k 1, waveguide segment K 1l 1, waveguide segment L 1m 1, waveguide segment M 1n 1, waveguide segment N 1o 1, waveguide segment O 1p 1and waveguide segment P 1q 1form.3rd waveguide 223 is by waveguide segment A 2b 2, waveguide segment B 2c 2, waveguide segment C 2d 2, waveguide segment D 2e 2, waveguide segment E 2f 2, waveguide segment F 2g 2, waveguide segment G 2h 2, waveguide segment H 2i 2, waveguide segment I 2j 2, waveguide segment J 2k 2, waveguide segment K 2l 2, waveguide segment L 2n 2, waveguide segment N 2o 2, waveguide segment O 2p 2and waveguide segment P 2q 2form.4th waveguide 224 is by waveguide segment R 2s 2with waveguide segment S 2t 2form.
Wherein, waveguide segment A 1b 1and waveguide segment A 2b 2parallel and be away from first wave guide path 221, to guarantee waveguide segment A 1b 1and waveguide segment A 2b 2can not and first wave guide path 221 between there is coupling.Waveguide segment R in first wave guide path 221 1s 1can be used as first central authorities' end, for inputing or outputing light signal, waveguide segment A 1b 1and waveguide segment A 2b 2can be used as the first remaining light output terminal, for exporting unnecessary remaining light.
Waveguide segment B 1c 1waveguide segment A 1b 1and waveguide segment C 1d 1between transition section, waveguide segment B 2c 2waveguide segment A 2b 2and waveguide segment C 2d 2between transition section.Transition section can play the effect seamlessly transitted between two waveguide segments.
Waveguide segment C 1d 1and waveguide segment C 2d 2parallel and close to the waveguide segment S in first wave guide path 221 1t 1, usual waveguide segment C 1d 1with waveguide segment S 1t 1between distance be greater than 10 microns, also, for waveguide segment C 1d 1on every bit, all according to below for waveguide segment C 1d 1on the method for point 1 operate, waveguide segment S 1t 1the distance of the point that upper range points 1 is nearest and point 1 is greater than 10 microns.Same, waveguide segment C 2d 2with waveguide segment S 1t 1between distance be also greater than 10 microns, also, for waveguide segment C 2d 2on every bit, all according to below for waveguide segment C 2d 2on the method for point 2 operate, waveguide segment S 1t 1the distance of the point that upper range points 2 is nearest and point 2 is greater than 10 microns.Waveguide segment C 1d 1, waveguide segment S 1t 1and waveguide segment C 2d 2constitute the first branch coupler 225, and, waveguide segment S 1t 1be the pars intermedia of the first branch coupler 225, waveguide segment C 1d 1be the first branch of the first branch coupler 225, waveguide segment C 2d 2it is the second branch of the first branch coupler 225.First branch coupler 225 can make waveguide segment C 1d 1and waveguide segment C 2d 2with waveguide segment S 1t 1between produce branch's coupling.In branch's coupling, branch's effect refers to that the light signal on a road will be branched the spectroscopic signal producing two-way, and coupling refers to that the spectroscopic signal of two-way will be coupled into the light signal on a road.
Waveguide segment F 1g 1and waveguide segment G 2h 2between parallel to each other close to constitute the first directional coupler 226, usual waveguide segment F 1g 1with waveguide segment G 2h 2between distance be greater than 10 microns, also, for waveguide segment F 1g 1on every bit, all according to below for waveguide segment F 1g 1on the method for point 3 operate, waveguide segment G 2h 2the distance of the point that upper range points 3 is nearest and point 3 is greater than 10 microns.Wherein, waveguide segment F 1g 1end points F 1as the first port F of the first directional coupler 226 1, waveguide segment G 2h 2end points G 2as the second port G of the first directional coupler 226 2, waveguide segment F 1g 1end points G 1as the 3rd port G of the first directional coupler 226 1, waveguide segment G 2h 2end points H 2as the 4th port H of the first directional coupler 226 2.First port F of the first directional coupler 226 1with the 4th port H of the first directional coupler 226 2pairing port, the second port G of the first directional coupler 226 2with the 3rd port G of the first directional coupler 226 1it is pairing port.So, from the first port F of the first directional coupler 226 1the light signal of input is by the 4th port H from the first directional coupler 226 2export, from the second port G of the first directional coupler 226 2the light signal of input is by the 3rd port G from the first directional coupler 226 1export.Otherwise, from the 4th port H of the first directional coupler 226 2the light signal of input is by the first port F from the first directional coupler 226 1export, from the 3rd port G of the first directional coupler 226 1the light signal of input is by the second port G from the first directional coupler 226 2export.So the practical function of the first directional coupler 226 is the transmission paths for changing light signal, and in the ordinary course of things, light signal transmits along waveguide, that is, under the intervention not having directional coupler, from the first port F of the first directional coupler 226 1the light signal of input is by the 3rd port G from the first directional coupler 226 1export, from the second port G of the first directional coupler 226 2the light signal of input is by the 4th port H from the first directional coupler 226 2export.Otherwise, from the 3rd port G of the first directional coupler 226 1the light signal of input is by the first port F from the first directional coupler 226 1export, from the 4th port H of the first directional coupler 226 2the light signal of input is by the first port F from the first directional coupler 226 1export.But under the intervention of the first directional couple 226, the transmission path of light signal there occurs change.
Waveguide segment D 1e 1and waveguide segment E 1f 1form first wave guide section D 1f 1.Wherein, first wave guide section D 1f 1for the first port F of the first output terminal and the first directional coupler 226 that are communicated with the first branch coupler 225 1.Waveguide segment D 2e 2, waveguide segment E 2f 2and waveguide segment F 2g 2form the second waveguide segment D 2g 2.Wherein, the second waveguide segment D 2g 2for the second port G of the second output terminal and the first directional coupler 226 that are communicated with the first branch coupler 225 2.Second waveguide segment D 2g 2in at least one section of optical waveguide as first object waveguide segment (in figure dash area), first object waveguide segment is positioned at the first magnetic field M sin (in figure, the direction of left arrow indication is the first magnetic field M sdirection), first object waveguide segment is for making the second output terminal D from the first branch coupler 225 2to the second port G of the first directional coupler 226 2the light signal of transmission produces nonreciprocal phase shift, from the second port G of the first directional coupler 226 2light signal to the second multi-branch transport of the first branch coupler 225 produces nonreciprocal phase shift.In the present embodiment, first object waveguide segment is perpendicular to the first magnetic field M smagnetic direction, and first object waveguide segment is parallel to the plane at ducting layer 220 place.In the embodiment that another is concrete, can by with the first magnetic field M sthe perpendicular face of magnetic direction as the first plane, and using the line of the Plane intersects at the first plane and ducting layer 220 place as the second straight line, using first projection of first object waveguide segment projection on the first plane as first object waveguide segment, then the length of the projection of first object waveguide segment refers to first of first object waveguide segment the length being projected in the projection on the second direction, straight line place.Make the second port G that the length of the projection of first object waveguide segment makes from the second branch of the first branch coupler 225 to the first directional coupler 226 2the light signal of transmission produces nonreciprocal phase shift, from the second port G of the first directional coupler 226 2light signal to the second multi-branch transport of the first branch coupler 225 produces nonreciprocal phase shift.
Waveguide segment I 1j 1and waveguide segment J 2k 2between be parallel to each other close to constituting the second directional coupler 227, usual waveguide segment I 1j 1with waveguide segment J 2k 2between distance be greater than 10 microns, also, for waveguide segment I 1j 1on every bit, all according to below for waveguide segment I 1j 1on the method for point 4 operate, waveguide segment J 2k 2the distance of the point that upper range points 4 is nearest and point 4 is greater than 10 microns.Wherein, waveguide segment I 1j 1end points I 1as the first port I of the second directional coupler 227 1, waveguide segment J 2k 2end points J 2as the second port J of the second directional coupler 227 2, waveguide segment I 1j 1end points J 1as the 3rd port J of the second directional coupler 227 1, waveguide segment J 2k 2end points K 2as the 4th port K of the second directional coupler 227 2.First port I of the second directional coupler 227 1with the 4th port K of the second directional coupler 227 2pairing port, the second port J of the second directional coupler 227 2with the 3rd port J of the second directional coupler 227 1it is pairing port.So, from the first port I of the second directional coupler 227 1the light signal of input is by the 4th port K from the second directional coupler 227 2export, from the second port J of the second directional coupler 227 2the light signal of input is by the 3rd port J from the second directional coupler 227 1export.Otherwise, from the 4th port K of the second directional coupler 227 2the light signal of input is by the first port I from the second directional coupler 227 1export, from the 3rd port J of the second directional coupler 227 1the light signal of input is by the second port J from the second directional coupler 227 2export.So the practical function of the second directional coupler 227 is the transmission paths for changing light signal, and in the ordinary course of things, light signal transmits along waveguide, that is, under the intervention not having directional coupler, from the first port I of the second directional coupler 227 1the light signal of input is by the 3rd port J from the second directional coupler 227 1export, from the second port J of the second directional coupler 227 2the light signal of input is by the 4th port K from the second directional coupler 227 2export.Otherwise, from the 3rd port J of the second directional coupler 227 1the light signal of input is by the first port I from the second directional coupler 227 1export, from the 4th port K of the second directional coupler 227 2the light signal of input is by the first port I from the second directional coupler 227 1export.But under the intervention of the second directional couple 227, the transmission path of light signal there occurs change.
Waveguide segment G 1h 1and waveguide segment H 1i 1form the 3rd waveguide segment G 1i 1, wherein, the 3rd waveguide segment G 1i 1for being communicated with the 3rd port G of the first directional coupler 226 1and the second first port I of directional coupler 227 1.3rd waveguide segment G 1i 1in at least one section of optical waveguide as the 3rd target waveguide segment (in figure dash area), the 3rd target waveguide section is positioned at the second magnetic field M n(in figure, the direction of right arrow indication is the second magnetic field M ndirection) in, the 3rd target waveguide segment is for making the 3rd port G from the first directional coupler 226 1to the first port I of the second directional coupler 227 1the light signal of transmission produces nonreciprocal phase shift, from the first port I of the second directional coupler 227 1to the 3rd port G of the first directional coupler 226 1the light signal of transmission produces nonreciprocal phase shift.In the present embodiment, the 3rd target waveguide segment is perpendicular to the second magnetic field M nmagnetic direction, and the 3rd target waveguide segment is parallel to ducting layer 220.In the embodiment that another is concrete, using first projection of the 3rd target waveguide segment projection on the first plane as the 3rd target waveguide segment, then the length of the projection of the 3rd target waveguide segment refers to first of the 3rd target waveguide segment the length being projected in the projection on the second direction, straight line place.The length of the projection of the 3rd target waveguide segment makes the 3rd port G from the first directional coupler 226 1to the first port I of the second directional coupler 227 1the light signal of transmission produces nonreciprocal phase shift, from the first port I of the second directional coupler 227 1to the 3rd port G of the first directional coupler 226 1the light signal of transmission produces nonreciprocal phase shift.
Waveguide segment H 2i 2and waveguide segment I 2j 2form the 4th waveguide segment H 2j 2, wherein, the 4th waveguide segment H 2j 2for being communicated with the 4th port H of the first directional coupler 226 2and the second second port J of directional coupler 227 2.4th waveguide segment H 2j 2in at least one section of optical waveguide as the second target waveguide segment (in figure dash area), the second target waveguide section is positioned at the first magnetic field M sin, the second target waveguide segment is for making the 4th port H from the first directional coupler 226 2to the second port J of the second directional coupler 227 2the light signal of transmission produces nonreciprocal phase shift, from the second port J of the second directional coupler 227 2to the 4th port H of the first directional coupler 226 2the light signal of transmission produces nonreciprocal phase shift.In the present embodiment, the second target waveguide segment is perpendicular to the first magnetic field M smagnetic direction, and the second target waveguide segment is parallel to ducting layer 220.In the embodiment that another is concrete, using first projection of the second target waveguide segment projection on the first plane as the second target waveguide segment, then the length of the projection of the second target waveguide segment refers to first of the second target waveguide segment the length being projected in the projection on the second direction, straight line place.The length of the projection of the second target waveguide segment makes the 4th port H from the first directional coupler 226 2to the second port J of the second directional coupler 227 2the light signal of transmission produces nonreciprocal phase shift, from the second port J of the second directional coupler 227 2to the 4th port H of the first directional coupler 226 2the light signal of transmission produces nonreciprocal phase shift.
Waveguide segment K 1l 1constitute reciprocal phase shift device 228.Port K 1the first port K of reciprocal phase shift device 228 1, port L 1the second port L of reciprocal phase shift device 228 1.When light is propagated in the waveguide, phase shift effect can occur, and the waveguide that light passes through is longer, then phase shift effect is larger.Be understandable that, because length is scalar, light signal is from a direction along waveguide segment K 1l 1propagate, with light signal from the other direction along waveguide segment K 1l 1propagation is compared, and the length that both pass through is the same, and the effect of phase shift is also the same, so the transmission direction of light can " reciprocity ".The phase shift that light signal is produced by reciprocal phase shift device 228 can be called reciprocal phase shift.
Waveguide segment J 1k 1constitute the 5th waveguide segment J 1k 1, wherein, the 5th waveguide segment J 1k 1for being communicated with the 3rd port J of the second directional coupler 227 1and the first port K of reciprocal phase shift device 228 1.5th waveguide segment J 1k 1in at least one section of optical waveguide as the 4th target waveguide segment (in figure dash area), the 4th target waveguide section is positioned at the second magnetic field M nin, the 4th target waveguide segment is for making the 3rd port J from the second directional coupler 227 1the light signal transmitted to reciprocal phase shift device 228 produces nonreciprocal phase shift, from reciprocal phase shift device 228 to the 3rd port J of the second directional coupler 227 1the light signal of transmission produces nonreciprocal phase shift.In the present embodiment, the 4th target waveguide segment is perpendicular to the second magnetic field M nmagnetic direction, and the second target waveguide segment is parallel to ducting layer 220.In the embodiment that another is concrete, using first projection of the 4th target waveguide segment projection on the first plane as the 4th target waveguide segment, then the length of the projection of the 4th target waveguide segment refers to first of the 4th target waveguide segment the length being projected in the projection on the second direction, straight line place.Make the 3rd port J that the length of the projection of the 4th target waveguide segment makes from the second directional coupler 227 1the light signal transmitted to reciprocal phase shift device 228 produces nonreciprocal phase shift, from reciprocal phase shift device 228 to the 3rd port J of the second directional coupler 227 1the light signal of transmission produces nonreciprocal phase shift.
Waveguide segment N 1o 1and waveguide segment N 2o 2parallel and close to the waveguide segment R in the 4th waveguide 224 2s 2, usual waveguide segment N 1o 1with waveguide segment R 2s 2between distance be greater than 10 microns, also, for waveguide segment N 1o 1on every bit, all according to below for waveguide segment N 1o 1on the method for point 5 operate, waveguide segment R 2s 2the distance of the point that upper range points 5 is nearest and point 5 is greater than 10 microns.N 2o 2with waveguide segment R 2s 2between distance be also greater than 10 microns, also, for waveguide segment N 2o 2on every bit, all according to below for waveguide segment N 2o 2on the method for point 6 operate, waveguide segment R 2s 2the distance of the point that upper range points 6 is nearest and point 6 is greater than 10 microns.Waveguide segment N 1o 1, waveguide segment R 2s 2and waveguide segment N 2o 2constitute the second branch coupler 229, and, waveguide segment R 2s 2be the pars intermedia of the second branch coupler 229, waveguide segment N 1o 1be the first branch of the second branch coupler 229, waveguide segment N 2o 2it is the second branch of the second branch coupler 229.First branch coupler 229 can make waveguide segment N 1o 1and waveguide segment N 2o 2with waveguide segment R 2s 2between produce branch's coupling.
Waveguide segment L 1m 1and waveguide segment M 1n 1constitute the 6th waveguide segment L 1n 1, wherein, the 6th waveguide segment L 1n 1for being communicated with the second port L of reciprocal phase shift device 228 1and second first branch of branch coupler 229.Waveguide segment K 2l 2and L 2n 2constitute the 7th waveguide segment K 2n 2, wherein, the 7th waveguide segment K 2n 2for being communicated with the 4th port K of the second directional coupler 227 2and second second branch of branch coupler 229.
Waveguide segment P 1q 1and waveguide segment P 2q 2parallel and be away from the 4th waveguide 224, to guarantee waveguide segment P 1q 1and waveguide segment P 2q 2can not and the 4th waveguide 224 between there is coupling.Waveguide segment S in 4th waveguide 224 2t 2can be used as first central authorities' end, for inputing or outputing light signal, waveguide segment P 1q 1and waveguide segment P 2q 2can be used as the first remaining light output terminal, for exporting unnecessary remaining light.
Waveguide segment O 1p 1waveguide segment N 1o 1and waveguide segment P 1q 1between transition section, waveguide segment O 2p 2waveguide segment N 2o 2and waveguide segment P 2q 2between transition section.
Wherein, first wave guide section D in present embodiment 1f 1in level and smooth inverted L shape, the second waveguide segment D 2g 2also comprise the 21 waveguide segment D 2f 2, the 21 waveguide segment D 2f 2input end be connected with the second output terminal of the first branch coupler 225, the 21 waveguide segment D 2f 2output terminal be connected with the input end of first object waveguide segment, the output terminal of first object waveguide segment and the second port G of the first directional coupler 226 2be connected.21 waveguide segment is L-type, first wave guide section D 1f 1with the 21 waveguide segment D 2f 2symmetrical about the first branch coupler 225.
By first wave guide section D 1f 1projection is on the first plane as first wave guide section D 1f 1first projection, then first wave guide section D 1f 1the length of projection refer to first wave guide section D 1f 1the first length being projected in the projection on the second direction, straight line place; By the 21 waveguide segment D 2f 2projection is on the first plane as the 21 waveguide segment D 2f 2first projection, then the 21 waveguide segment D 2f 2the length of projection refer to the 21 waveguide segment D 2f 2the first length being projected in the projection on the second direction, straight line place.Distance between first output terminal of the first branch coupler 225 and the second output terminal, first wave guide section D 1f 1the length of projection and the 21 waveguide segment D 2f 2the length sum of projection be greater than the length of the projection of first object waveguide segment, to ensure that the length of the projection of first object waveguide segment can produce enough nonreciprocal phase shift.
By the 6th waveguide segment L 1n 1projection is on the first plane as the 6th waveguide segment L 1n 1first projection, then the 6th waveguide segment L 1n 1the length of projection refer to the 6th waveguide segment L 1n 1the first length being projected in the projection on the second direction, straight line place; By the 7th waveguide segment K 2n 2projection is on the first plane as the 7th waveguide segment K 2n 2first projection, then the 7th waveguide segment K 2n 2the length of projection refer to the 7th waveguide segment K 2n 2the first length being projected in the projection on the second direction, straight line place; Using first projection of the second branch coupler 229 projection on the first plane as the second branch coupler 229, then the length of the projection of the second branch coupler 229 refers to first of the second branch coupler 229 the length being projected in the projection on the second direction, straight line place.Using first projection of optoisolator projection on the first plane as optoisolator, then the length of the projection of optoisolator refers to first of optoisolator the length being projected in the projection on the second direction, straight line place; Wherein, the 6th waveguide segment L 1n 1length, the 7th waveguide segment K of projection 2n 2the length of projection and the length sum of the projection of the second branch coupler 229 equal the length of the projection of optoisolator.
In order to improve the utilization ratio in magnetic field, the first magnetic field M can be made in the present embodiment sand the second magnetic field M nbetween the first branch coupler 225 and the second branch coupler 229, using the straight line at the line place between the geometric center of the first branch coupler 225 and the geometric center of the second branch coupler 229 as the first straight line, then the first magnetic field M smagnetic direction and the direction at the first straight line place parallel, the second magnetic field M nthe direction at magnetic direction also with the first straight line place parallel.Be appreciated that in other embodiments, the first magnetic field M swith the second magnetic field M nalso can be at a certain angle with the first straight line, the present invention does not do concrete restriction.
In the present embodiment, first wave guide section D 1f 1length equal the 7th waveguide segment K 2n 2length, the 3rd waveguide segment G 1i 1length equal the 4th waveguide segment H 2j 2length, the 5th waveguide segment J 1k 1with the 6th waveguide segment L 1n 1length sum equal the second waveguide segment D 2g 2length.And in other embodiments, only first wave guide section D need be ensured 1f 1, the 4th waveguide segment H 2j 2, the 5th waveguide segment J 1k 1and the 6th waveguide segment L 1n 1sum equals the second waveguide segment D 2g 2, the 3rd waveguide segment G 1i 1and the 7th waveguide segment K 2n 2sum, the present invention does not do concrete restriction.
In order to make the design of ducting layer more attractive in appearance, also in order to reduce the unnecessary loss in optical signal transmission process, in the present embodiment, make first wave guide section D 1f 1in with the first magnetic field M sthe perpendicular part of magnetic direction parallel with first object waveguide segment, first object waveguide segment and the second target waveguide segment about the first directional coupler 226 symmetrical and first object waveguide segment and the second target waveguide segment parallel to each other, the parallel 3rd target waveguide segment of second target waveguide segment, 3rd target waveguide segment and the 4th target waveguide segment about the second directional coupler 227 symmetrical and the 3rd target waveguide segment and the 4th target waveguide segment parallel to each other, the 6th waveguide segment L 1n 1in with the second magnetic field M nthe perpendicular part of magnetic direction parallel with the 4th target waveguide segment, the 7th waveguide segment K 2n 2in with the second magnetic field M nthe perpendicular part of magnetic direction also parallel with the 4th target waveguide segment.
Except the waveguide segment that can be coupled mutually except clear stipulaties (between the waveguide segment forming the coupling of the first branch, between the waveguide segment that forms the first directional coupler, between the waveguide segment that forms the coupling of the second branch and between the waveguide segment of composition the second directional coupler), enough distances (being more than or equal to 10 microns) should be kept, to guarantee coupling effect to occur between other waveguide segment.
See also Fig. 5, when light signal inputs from first wave guide path 221, light signal transmits along first wave guide path 221.When light signal transfers to the first branch coupler 225 along first wave guide path 221, under branch's effect, the light signal branch of the pars intermedia in the first branch coupler 225 produces two-way spectroscopic signal, wherein, first spectroscopic signal produces the first branch in the first branch coupler 225, second spectroscopic signal produces the second branch in the first branch coupler 225, and, first spectroscopic signal continues to transmit along Second Wave guiding path 222, and the second spectroscopic signal then continues to transmit along the 3rd waveguide 223.
First spectroscopic signal is along the first wave guide section D of Second Wave guiding path 222 1f 1transfer to the first port F of the first directional coupler 226 1, the second spectroscopic signal is then along the second waveguide segment D of the 3rd waveguide 223 2g 2transfer to the second port G of the first directional coupler 226 2.
The positive and negative of the nonreciprocal phase shift that light signal transmits in magnetic field follows left-hand rule, that is, make four fingers point to the transmission direction of light signals, and magnetic field is through the centre of the palm, then the direction of thumb indication represents light signal in magnetic field, transmits the positive and negative of produced nonreciprocal phase shift.Particularly, if the direction of thumb indication upwards, then light signal transmits produced nonreciprocal phase shift in magnetic field is just, if the direction of thumb indication is downward, then light signal transmits produced nonreciprocal phase shift in magnetic field is negative.
So according to left-hand rule, the second spectroscopic signal is from the second branch of the first branch coupler 225 to the second port G of the first directional coupler 226 2in the process of transmission, first object waveguide segment is at the first magnetic field M seffect under create the nonreciprocal phase shift of " just ".And, design the length of first object waveguide segment in advance, make the second spectroscopic signal from the second branch of the first branch coupler 225 to the second port G of the first directional coupler 226 2produce during transmission nonreciprocal phase shift.The length of the projection of the length of first object waveguide segment wherein, β is when not applying magnetic field, and when light signal is propagated in the waveguide, the variable quantity of the light phase of unit distance in the propagation direction, Δ β is when applying magnetic field, the variable quantity that the light signal caused by magnetic field is propagated in the waveguide.So the second spectroscopic signal, after first object waveguide segment, finally creates phase shift.
First spectroscopic signal transfers to the first port F of the first directional coupler 226 1after, because the first directional coupler 226 changes the characteristic of light transmission path, the first spectroscopic signal no longer transmits along Second Wave guiding path 222, but is coupled in the 3rd waveguide 223, and from the 4th port H of the first directional coupler 226 2export.Similarly, the second spectroscopic signal transfers to the second port G of the first directional coupler 226 2after, because the first directional coupler 226 changes the characteristic of light transmission path, the second spectroscopic signal no longer transmits along the 3rd waveguide 223, but is coupled in Second Wave guiding path 222, and exports G from the 3rd port of the first directional coupler 226 1.
First spectroscopic signal is from the 4th port H of the first directional coupler 226 2after output, continue the 4th waveguide segment H along the 3rd waveguide 223 2j 2transfer to the second port J of the second directional coupler 227 2.According to left-hand rule, the first spectroscopic signal is from the 4th port H of the first directional coupler 226 2to in the process of the second port transmission of the second directional coupler 227, the 3rd target waveguide segment is at the first magnetic field M seffect under create the nonreciprocal phase shift of " bearing ".Design the length of the 3rd target waveguide segment in advance, make the first spectroscopic signal from the 4th port H of the first directional coupler 226 2transfer to the second port I of the second directional coupler 227 2in time, produces nonreciprocal phase shift.The length of the projection of the 3rd target waveguide segment wherein, β is when not applying magnetic field, and when light signal is propagated in the waveguide, the variable quantity of the light phase of unit distance in the propagation direction, Δ β is when applying magnetic field, the variable quantity that the light signal caused by magnetic field is propagated in the waveguide.So the first spectroscopic signal, after the 3rd target waveguide segment, finally creates phase shift.
Second spectroscopic signal is from the 3rd port G of the first directional coupler 226 1after output, continue the 3rd waveguide segment G along Second Wave guiding path 223 1i 1transfer to the first port I of the second directional coupler 227 1.Design the length of the second target waveguide segment in advance, make the second spectroscopic signal from the 3rd port G of the first directional coupler 226 1transfer to the first port I of the second directional coupler 227 1in time, produces nonreciprocal phase shift.The length of the projection of the second target waveguide segment wherein, β is when not applying magnetic field, and when light signal is propagated in the waveguide, the variable quantity of the light phase of unit distance in the propagation direction, Δ β is when applying magnetic field, the variable quantity that the light signal caused by magnetic field is propagated in the waveguide.So the second spectroscopic signal, after the second target waveguide segment, finally creates phase shift.
First spectroscopic signal transfers to the second port J of the second directional coupler 227 2after, because the second directional coupler 227 changes the characteristic of light transmission path, the first spectroscopic signal no longer transmits along the 3rd waveguide 223, but is coupled in Second Wave guiding path 222, and from the 3rd port J of the second directional coupler 227 1export.Similarly, the second spectroscopic signal transfers to the first port I of the second directional coupler 227 1after, because the second directional coupler 227 changes the characteristic of light transmission path, the second spectroscopic signal no longer transmits along Second Wave guiding path 222, but is coupled in the 3rd waveguide 223, and from the 4th port K of the second directional coupler 227 2export.
First spectroscopic signal is from the 3rd port J of the second directional coupler 227 1after output, continue the 5th waveguide segment J along Second Wave guiding path 223 1k 1transfer to the first port K of reciprocal phase shift device 228 1.According to left-hand rule, the first spectroscopic signal is from the 3rd port J of the second directional coupler 227 1to the first port K of reciprocal phase shift device 228 1in the process of transmission, the 4th target waveguide segment is at the second magnetic field M neffect under create the nonreciprocal phase shift of " bearing ".Design the length of the 4th target waveguide segment in advance, make the first spectroscopic signal from the 3rd port J of the second directional coupler 227 1transfer to the first port K of reciprocal phase shift device 228 1in time, produces nonreciprocal phase shift.The length of the projection of the 4th target waveguide segment wherein, β is when not applying magnetic field, and when light signal is propagated in the waveguide, the variable quantity of the light phase of unit distance in the propagation direction, Δ β is when applying magnetic field, the variable quantity that the light signal caused by magnetic field is propagated in the waveguide.So the first spectroscopic signal, after the 4th target waveguide segment, finally creates phase shift.
Further, design the length of reciprocal phase shift device 228 in advance, the first spectroscopic signal through reciprocal phase shift device 228 is produced reciprocal phase shift.The length of reciprocal phase shift device 228 wherein, β is when not applying magnetic field, when light signal is propagated in the waveguide, and the variable quantity of the light phase of unit distance in the propagation direction.
First spectroscopic signal is from the second port L of reciprocal phase shift device 228 1after output, by the 6th waveguide segment L 1n 1transfer to the first branch of the second branch coupler 229.Second spectroscopic signal is from the 4th port K of the second directional coupler 227 2after output, continue the 7th waveguide segment K along the 3rd waveguide 223 2n 2transfer to the second branch of the second branch coupler 229.
Finally, total phase shift that the first spectroscopic signal produces is total phase shift that second spectroscopic signal produces is so when the first spectroscopic signal and the second spectroscopic signal transfer to the second branch coupler 229, both phase differential are zero, and namely both phase places are identical, so, according to constructive interference between the first spectroscopic signal and the second spectroscopic signal.And, under the coupling of the second branch coupler 229, in first spectroscopic signal of the first branch in the second branch coupler 229 and the second branch coupler 229, the pars intermedia of the second spectroscopic signal in the second branch coupler 229 of the second branch synthesizes a road light signal again, and exports from first central authorities' end of the 4th waveguide 224.
See also Fig. 6, when the reflected light of light signal inputs from the 4th waveguide 224, light signal transmits along the 4th waveguide 224.When light signal transfers to the second branch coupler 229 along the 4th waveguide 224, under branch's effect, the light signal branch of the pars intermedia in the second branch coupler 229 produces the 3rd spectroscopic signal and the 4th spectroscopic signal two-way spectroscopic signal, wherein, 3rd spectroscopic signal produces the first branch in the second branch coupler 229, second spectroscopic signal produces the second branch in the second branch coupler 229, further, the 3rd spectroscopic signal continues the 6th waveguide segment L along Second Wave guiding path 222 1n 1transfer to the second port L of reciprocal phase shift device 228 1, the 4th spectroscopic signal then continues the 7th waveguide segment K along the 3rd waveguide 223 2n 2transfer to the 4th port K of the second directional coupler 227 2.
3rd spectroscopic signal transfers to the second port L of reciprocal phase shift device 228 1after, due to the reciprocity of reciprocal phase shift device 228, the 3rd spectroscopic signal, after reciprocal phase shift device 228, creates reciprocal phase shift, and from the first port K of reciprocal phase shift device 228 1export.3rd spectroscopic signal is by the 5th waveguide segment J of Second Wave guiding path 222 1k 1transfer to the 3rd port J of the second directional coupler 227 1.According to left-hand rule, the 3rd spectroscopic signal is from the first port K of reciprocal phase shift device 228 1to the 3rd port J of the second directional coupler 227 1in the process of transmission, the 4th target waveguide segment is at the second magnetic field M neffect under create the nonreciprocal phase shift of " just ", and the length of the 4th target waveguide segment is constant, and the size of phase shift is also constant, so, finally create phase shift.
3rd spectroscopic signal transfers to the 3rd port J of the second directional coupler 227 1after, because the second directional coupler 227 changes the characteristic of light transmission path, the 3rd spectroscopic signal no longer transmits along Second Wave guiding path 222, but is coupled in the 3rd waveguide 223, and from the second port J of the second directional coupler 227 2export.Similarly, the 4th spectroscopic signal transfers to the 4th port K of the second directional coupler 227 2after, because the second directional coupler 227 changes the characteristic of light transmission path, the 4th spectroscopic signal no longer transmits along the 3rd waveguide 223, but is coupled in Second Wave guiding path 222, and from the first port I of the second directional coupler 227 1export.
3rd spectroscopic signal is from the second port J of the second directional coupler 227 2after output, by the 4th waveguide segment H of the 3rd waveguide 223 2j 2transfer to the 4th port H of the first directional coupler 226 2.According to left-hand rule, the 3rd spectroscopic signal is from the second port J of the second directional coupler 227 2to the 4th port H of the first directional coupler 226 2in the process of transmission, the second target waveguide segment is at the first magnetic field M seffect under create the nonreciprocal phase shift of " just ", and the length of the second target waveguide segment is constant, and the size of phase shift is also constant, so, finally create phase shift.
4th spectroscopic signal is from the first port I of the second directional coupler 227 1after output, by the 3rd waveguide segment G of Second Wave guiding path 222 1i 1transfer to the 3rd port G of the first directional coupler 226 1.According to left-hand rule, the 4th spectroscopic signal is from the first port I of the second directional coupler 227 1to the 3rd port G of the first directional coupler 226 1in the process of transmission, the 3rd target waveguide segment is at the second magnetic field M neffect under create the nonreciprocal phase shift of " bearing ", and the length of the 3rd target waveguide segment is constant, and the size of phase shift is also constant, so, finally create phase shift.
3rd spectroscopic signal transfers to the 4th port H of the first directional coupler 226 2after, because the first directional coupler 226 changes the characteristic of light transmission path, the 3rd spectroscopic signal no longer transmits along the 3rd waveguide 223, but is coupled in Second Wave guiding path 222, and from the first port F of the first directional coupler 226 1export.Similarly, the 4th spectroscopic signal transfers to the 3rd port G of the first directional coupler 226 1after, because the first directional coupler 226 changes the characteristic of light transmission path, the 4th spectroscopic signal no longer transmits along Second Wave guiding path 222, but is coupled in the 3rd waveguide 223, and from the second port G of the first directional coupler 226 2export.
3rd spectroscopic signal is from the first port F of the first directional coupler 226 1after output, by the first wave guide section D of Second Wave guiding path 222 1f 1transfer to the first branch of the first branch coupler 225.
4th spectroscopic signal is from the second port G of the first directional coupler 226 2after output, by the second waveguide segment D of the 3rd waveguide 223 2g 2transfer to the second branch of the first branch coupler 225.According to left-hand rule, the 4th spectroscopic signal is from the second port G of the first directional coupler 226 2to in the process of the second multi-branch transport of the first branch coupler 225, first object waveguide segment is at the first magnetic field M seffect under create the nonreciprocal phase shift of " bearing ", and the length of first object waveguide segment is constant, and the size of phase shift is also constant, so, finally create phase shift.
Finally, total phase shift that the 3rd spectroscopic signal produces is total phase shift that 4th spectroscopic signal produces is so when the 3rd spectroscopic signal and the 4th spectroscopic signal transfer to the first branch coupler 225, both phase differential are destructive interference between 3rd spectroscopic signal and the 4th spectroscopic signal.Wherein, most 3rd spectroscopic signal and the 4th spectroscopic signal are disappeared mutually, but, also have the 3rd spectroscopic signal of part and the remaining light of the 4th spectroscopic signal can export along Second Wave guiding path 222 and the 3rd waveguide 223 to the first remaining light output terminal.
Be understandable that, optoisolator can adopt first wave guide path 221 as input, and the 4th waveguide 224, also can conversely as output, and adopt the 4th waveguide 224 as input, first wave guide path 221 is as output.
In the present invention, by being provided with the first directional coupler and the second directional coupler, the transmission path of the first spectroscopic signal and the second spectroscopic signal can be changed, thus achieve " folding " effect of the waveguide segment for realizing nonreciprocal phase shift.Realize compared with nonreciprocal phase shift, nonreciprocal phase shift to be realized by four of " a folding " section waveguide segment, effectively reducing the area of Distribution of Magnetic Field, improve the utilization ratio in magnetic field by two sections of waveguide segments with prior art.
In order to make silicon optoisolator realize miniaturization, first wave guide section D can be made 1f 1at the length of the projection of the second rectilinear direction, the first directional coupler 226 at length, the 3rd waveguide segment G of the projection of the second rectilinear direction 1i 1at the length of the projection of the second rectilinear direction, the second directional coupler 227 at the length of the projection of the second rectilinear direction and the 7th waveguide segment K 2n 2the projection of the second rectilinear direction length and be less than 600 microns.Reciprocal phase shift device 228 is perpendicular to the second magnetic direction M nlength, the 5th waveguide segment J of projection 1k 1perpendicular to the second magnetic direction M nthe length of projection and the second directional coupler 227 perpendicular to the second magnetic direction M nprojection length and be less than 330 microns.
In a concrete embodiment, consult Fig. 7, in the design of whole silicon optoisolator, the length of silicon optoisolator is W 2+ (W 3+ W 4+ W 5)+W 6=30um+500um+30um=560um, notes, W 1and W 7do not count in the size of isolator.The width of silicon optoisolator is U 1+ U 2+ L nR+ U 3=10um+20um+250um+20um=300um.So the large I of whole silicon optoisolator accomplishes below 1*1 millimeter, much smaller than the millimeter of prior art silicon optoisolator.
One of ordinary skill in the art will appreciate that all or part of flow process realized in above-described embodiment method, that the hardware that can carry out instruction relevant by computer program has come, described program can be stored in a computer read/write memory medium, this program, when performing, can comprise the flow process of the embodiment as above-mentioned each side method.Wherein, described storage medium can be magnetic disc, CD, read-only store-memory body (Read-Only Memory, ROM) or random store-memory body (Random Access Memory, RAM) etc.
Above disclosedly be only a kind of preferred embodiment of the present invention, certainly the interest field of the present invention can not be limited with this, one of ordinary skill in the art will appreciate that all or part of flow process realizing above-described embodiment, and according to the equivalent variations that the claims in the present invention are done, still belong to the scope that invention is contained.

Claims (19)

1. a silicon optoisolator, is characterized in that, comprises the substrate of stacked setting from bottom to up, ducting layer and magnetic field generating layer, and described magnetic field generating layer is for generation of contrary the first magnetic field, direction and the second magnetic field;
Described ducting layer comprises the first branch coupler, the first directional coupler, the second directional coupler, reciprocal phase shift device and the second branch coupler,
First output terminal of described first branch coupler is connected by first port of first wave guide section with described first directional coupler, second output terminal of described first branch coupler is connected by second port of the second waveguide segment with described first directional coupler
The light signal that described first branch coupler is used for the input end of described first branch coupler inputs is divided into the first spectroscopic signal and the second spectroscopic signal, described first spectroscopic signal exports from the first output terminal of described first branch coupler, and described second spectroscopic signal exports from the second output terminal of described first branch coupler; Described first directional coupler is used for the 4th port described first spectroscopic signal being coupled to described first directional coupler from the first port of described first directional coupler, and for described second spectroscopic signal to be coupled to the 3rd port of described first directional coupler from the second port of described first directional coupler;
3rd port of described first directional coupler is connected to the first port of described second directional coupler by the 3rd waveguide segment, the 4th port of described first directional coupler is connected to the second port of described second directional coupler by the 4th waveguide segment;
Described second directional coupler is used for the 4th port described second spectroscopic signal being coupled to described second directional coupler from the first port of described second directional coupler, and for described first spectroscopic signal to be coupled to the 3rd port of described second directional coupler from the second port of described first directional coupler;
3rd port of described second directional coupler is connected with described reciprocal phase shift device by the 5th waveguide segment, described reciprocal phase shift device is connected by the first input end of the 6th waveguide segment with described second branch coupler, 4th port of described second directional coupler is connected by second input end of the 7th waveguide segment with described second branch coupler
Described second spectroscopic signal that described second branch coupler is used for the second input end input of described first spectroscopic signal and described second branch coupler inputted by the first input end of described second branch coupler merges into a road light signal, and is exported by the output terminal of a described road light signal from described first branch coupler;
Using at least one section of optical waveguide in described second waveguide segment as first object waveguide segment, described first object waveguide segment is arranged in described first magnetic field, and described first object waveguide segment is for making described second spectroscopic signal from the second branch of described first branch coupler to the nonreciprocal phase shift producing π 8 during the second port transmission of the first directional coupler;
Using at least one section of optical waveguide in described 4th waveguide segment as the second target waveguide segment, described second target waveguide section is arranged in described first magnetic field, and described second target waveguide segment produces from the 4th port of described first directional coupler to during the second port transmission of described second directional coupler for making described first spectroscopic signal nonreciprocal phase shift;
Using at least one section of optical waveguide in described 3rd waveguide segment as the 3rd target waveguide segment, described 3rd target waveguide section is arranged in described second magnetic field, and described 3rd target waveguide segment produces from the 3rd port of described first directional coupler to during the first end port transmission of described second directional coupler for making described second spectroscopic signal nonreciprocal phase shift;
Using at least one section of optical waveguide in described 5th waveguide segment as the 4th target waveguide segment, described 4th target waveguide section is arranged in described second magnetic field, produces when described 4th target waveguide segment is for making described first spectroscopic signal from the 3rd port of described second directional coupler to described reciprocal phase shift device transmission nonreciprocal phase shift;
Described reciprocal phase shift device produces for making described first spectroscopic signal through described reciprocal phase shift device reciprocal phase shift.
2. silicon optoisolator according to claim 1, is characterized in that,
Described first magnetic field is between described first branch coupler and described second branch coupler;
Using the straight line at the line place between the geometric center of described first branch coupler and the geometric center of described second branch coupler as the first straight line, then the magnetic direction in described first magnetic field and the direction at described first straight line place parallel.
3. silicon optoisolator according to claim 1 and 2, is characterized in that,
The length of described first wave guide section equals the length of described 7th waveguide segment, and the length sum of described 5th waveguide segment and described 6th waveguide segment equals the length of described second waveguide segment.
4. to remove the silicon optoisolator described in 1 to 3 any one according to right, it is characterized in that,
The length of described 3rd waveguide segment equals the length of described 4th waveguide segment.
5. the silicon optoisolator according to any one of Claims 1-4, is characterized in that,
Described first object waveguide segment produces from the second output terminal of described first branch coupler to during the second port transmission of described first directional coupler for making described second spectroscopic signal nonreciprocal phase shift, specifically comprise:
The length of the projection of described first object waveguide segment, to be transferred to the process of the second port of described first directional coupler from the second output terminal of described first branch coupler for making described second spectroscopic signal and to produce nonreciprocal phase shift;
Using with the perpendicular face of the magnetic direction in described first magnetic field as the first plane, and using the line of the Plane intersects at described first plane and described ducting layer place as the second straight line, using first projection of the projection of described first object waveguide segment in described first plane as described first object waveguide segment, then the length of the projection of described first object waveguide segment refers to first of described first object waveguide segment the length being projected in the projection on described second direction, straight line place.
6. silicon optoisolator according to claim 5, is characterized in that,
Described first object waveguide segment is perpendicular to the magnetic direction in described first magnetic field, and described first object waveguide segment is parallel to the plane at described ducting layer place.
7. the silicon optoisolator according to any one of claim 1 to 6, is characterized in that,
Described second waveguide segment also comprises the 21 waveguide segment, the input end of described 21 waveguide segment is connected with the second output terminal of described first branch coupler, the output terminal of described 21 waveguide segment is connected with the input end of described first object waveguide segment, and the output terminal of described first object waveguide segment is connected with the second port of described first directional coupler;
When described first wave guide section is inverted L shape, described 21 waveguide segment is L-type, and described first wave guide section and described 21 waveguide segment are about described first branch coupler symmetry.
8. silicon optoisolator according to claim 7, is characterized in that,
The length sum of the length of the projection of the distance between the first output terminal of described first branch coupler and the second output terminal, described first wave guide section and the projection of described 21 waveguide segment is greater than the length of the projection of described first object waveguide segment;
Using first projection of the projection of described first wave guide section in described first plane as described first wave guide section, then the length of the projection of described first wave guide section refers to first of described first wave guide section the length being projected in the projection on described second direction, straight line place;
Using first projection of the projection of described 21 waveguide segment in described first plane as described 21 waveguide segment, then the length of the projection of described 21 waveguide segment refers to first of described 21 waveguide segment the length being projected in the projection on described second direction, straight line place.
9. the silicon optoisolator according to any one of claim 5 to 8, is characterized in that,
Using first projection of the projection of described 6th waveguide segment in described first plane as described 6th waveguide segment, then the length of the projection of described 6th waveguide segment refers to first of described 6th waveguide segment the length being projected in the projection on described second direction, straight line place;
Using first projection of the projection of described 7th waveguide segment in described first plane as described 7th waveguide segment, then the length of the projection of described 7th waveguide segment refers to first of described 7th waveguide segment the length being projected in the projection on described second direction, straight line place;
Using first projection of the projection of described second branch coupler in described first plane as described second branch coupler, then the length of the projection of described second branch coupler refers to first of described second branch coupler the length being projected in the projection on described second direction, straight line place;
Using first projection of the projection of described optoisolator in described first plane as described optoisolator, then the length of the projection of described optoisolator refers to first of described optoisolator the length being projected in the projection on described second direction, straight line place;
Wherein, the length sum of the length of the projection of described 6th waveguide segment, the length of projection of described 7th waveguide segment and the projection of described second branch coupler equals the length of the projection of described optoisolator.
10. the silicon optoisolator according to any one of claim 7 to 9, is characterized in that,
The part that described in described first wave guide Duan Zhongyu, the magnetic direction in the first magnetic field is perpendicular parallels with described first object waveguide segment.
11. silicon optoisolators according to any one of claim 5 to 10, is characterized in that,
Described second target waveguide segment produces from the 4th port of described first directional coupler to during the second port transmission of described second directional coupler for making described first spectroscopic signal nonreciprocal phase shift, specifically comprise:
The length of the projection of described second target waveguide segment, produces the process of described second spectroscopic signal from the 4th port transmission of described first directional coupler to the second port of described second directional coupler for making nonreciprocal phase shift;
Using first projection of the projection of described second target waveguide segment in described first plane as described second target waveguide segment, then the length of the projection of described second target waveguide segment refers to first of described second target waveguide segment the length being projected in the projection on described second direction, straight line place.
12., according to the silicon optoisolator described in claim 1 to 11, is characterized in that,
Described first object waveguide segment and described second target waveguide segment are about described first directional coupler symmetry.
13. silicon optoisolators according to any one of claim 5 to 12, is characterized in that,
Described 3rd target waveguide segment produces from the 3rd port of described first directional coupler to during the first end port transmission of described second directional coupler for making described second spectroscopic signal nonreciprocal phase shift, specifically comprise:
The length of the projection of described 3rd target waveguide segment, produces the process of described second spectroscopic signal from the 3rd port transmission of described first directional coupler to the first port of described second directional coupler for making nonreciprocal phase shift;
Using first projection of the projection of described 3rd target waveguide segment in described first plane as described 3rd target waveguide segment, then the length of the projection of described 3rd target waveguide segment refers to first of described 3rd target waveguide segment the length being projected in the projection on described second direction, straight line place.
14. silicon optoisolators according to any one of claim 1 to 13, is characterized in that,
Described 3rd target waveguide segment is perpendicular to the magnetic direction in described second magnetic field, and described 3rd target waveguide segment is parallel to described ducting layer.
15. silicon optoisolators according to claim 14, is characterized in that,
Described 3rd target waveguide segment is parallel to described second target waveguide segment.
16. silicon optoisolators according to any one of claim 5 to 15, is characterized in that,
Produce when described 4th target waveguide segment is for making described first spectroscopic signal from the 3rd port of described second directional coupler to described reciprocal phase shift device transmission nonreciprocal phase shift, specifically comprise:
The length of the projection of described 4th target waveguide segment, produces the process of described first spectroscopic signal from the 3rd port transmission of described second directional coupler to described reciprocal phase shift device for making nonreciprocal phase shift;
Using first projection of the projection of described 4th target waveguide segment in described first plane as described 4th target waveguide segment, then the length of the projection of described 4th target waveguide segment refers to first of described 4th target waveguide segment the length being projected in the projection on described second direction, straight line place.
17. silicon optoisolators according to any one of claim 1 to 16, is characterized in that,
Described 3rd target waveguide segment and described 4th target waveguide segment are about described second directional coupler symmetry.
18. silicon optoisolators according to any one of claim 1 to 17, is characterized in that,
First wave guide section the length of the projection of described second rectilinear direction, described first directional coupler the length of the projection of described second rectilinear direction, described 3rd waveguide segment the length of the projection of described second rectilinear direction, described second directional coupler the length of the projection of described second rectilinear direction and described 7th waveguide segment the projection of described second rectilinear direction length and be less than 600 microns.
19. silicon optoisolators according to claim 18, is characterized in that,
Described reciprocal phase shift device the length of the projection perpendicular to described second magnetic direction, described 5th waveguide segment the length of the projection perpendicular to described second magnetic direction and described second directional coupler the projection perpendicular to described second magnetic direction length and be less than 330 microns.
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