CN104729424B - Confocal dot laser microscope and its scan method based on self-mixed interference - Google Patents
Confocal dot laser microscope and its scan method based on self-mixed interference Download PDFInfo
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Abstract
The invention discloses a kind of confocal dot laser microscope based on self-mixed interference, including He-Ne laser, by concavees lens and convex lens group into beam-expanding collimation lens group, variable neutral-density filter, object lens, two-dimensional motion platform, motion in one dimension platform, precision movement platform controller, photodetector, current/voltage converter circuit, wave filter, amplifier, analog/digital conversion circuit and computer unit；The method for carrying out micro- scanning using laser self-mixing interference and confocal principle, laser is combined from the simple in construction of hybrid technology, the advantage and confocal microscope azimuthal resolution easily collimated is high, the characteristics of strong antijamming capability, the problem of solving the problems, such as the microscopical auto-focusing of confocal dot laser and expand the measurement visual field, simplify the microscopical structure of conventional confocal point, reduce the adjustment difficulty of reflected light path in confocal measuring system, it compensate for the microscopical required optical element of conventional confocal point many, high is required to optical element, the characteristics of light path complexity regulation difficulty is high.
Description
Technical field
The present invention relates to confocal dot laser microscope field, more particularly to a kind of confocal point based on self-mixed interference swashs
Light microscope and its scan method.
Background technology
The research of self-mixed interference technology originates in the 1960s, it refers to that the light for being incident on outer surface is anti-by part
Feedback, and coupled to interior laser cavity.Light mixing in the laser and laser cavity of feedback, changes the output characteristics of laser,
Such as cause the change of spectrum and light intensity, form self-mixing effect.By laser self-mixing interference principle since 1980s
Applied to fields of measurement, later stage nineties domestic scholars begin to focus on the research participated in from application of mixture theory and application.Compared to tradition
Interferometry technology, self-mixed interference has identical sensitivity with conventional interference, and due to its have it is simple and compact for structure easily
The features such as collimation so that it can replace conventional dry interferometer in many application scenarios.Phase of the self-mixed interference independent of light source
Dry length, the surprising feature that this is self-mixed interference is compared with conventional dry interferometer, and self-mixed interference technology can be to mesh
The direction of motion of mark object is identified.Self-mixed interference phenomenon is not single mode or many by optical fiber in the system of fiber coupling
Mould influences, and light path is more easy to collimation.
The principle of confocal microscope is to be proposed by bright this of American scholar Marvin's nineteen fifty-three earliest, thereafter with laser technology
Continuous maturation, confocal dot laser microscopy is widely applied in the eighties.Confocal principle refers to from a point light
The detection light that source is launched is by the way that on lens focus to testee, when object is located exactly in focus, reflection light passes through
It should be converged at after former lens on light source.In actual applications, beam splitter has been used on reflected light path, will have passed through lens
Reflected light is folded to other directions, and pin hole is placed at the focusing of refraction light, and at pin hole rear portion, Photoelectric multiplier tube carries out signal
Collect.
Fig. 1 is reflection-type confocal dot laser microscopes optical path figure, including light source 1-A, object lens 2-A, collecting lens 5-A, beam splitting
Device 3-A, target 4-A, pin hole 7-A and photodetector 6-A.Assuming that measured target 4-A is the beam that is all-trans, along object lens 2-
A axle is scanned to it, and when the object is in focal plane, the reflected beams are focused precisely on photodetector 6-A, now
Photodetector 6-A receives substantial amounts of incident light energy.If speculum leaves from focal plane, reflected light is focused on photoelectricity
On some position of detector 6-A front or behinds, depending on this will be according to scanning direction, now photodetector 6-A is only
It is collected into sub-fraction energy, i.e. defocus signal weaker than the signal in focus.The property means that the position of reverberation can be true
It is fixed, and only when reverberation body is located on focal plane, its effective reflection image just is effectively recorded.For tangible
Thick object records a series of section picture of different longitudinal depth first, recycles these sections as complete to reconstruct thick object
Picture.Therefore the advantage of this confocal system is：(1) resolution capability of longitudinal depth is strong；(2) pinhole mask can greatly reduce and make an uproar
Acoustic jamming.But there is also the big shortcoming of the sensitive adjustment difficulty of light path for this confocal system.Current confocal microscope is extensive
Applied to fields such as biomedical and mechanical measurements, but confocal microscope itself have the shortcomings that it is certain：Optics needed for first
Element is more, higher for the performance requirement of condenser lens and the photomultiplier of signal detection；Second system regulation is complicated,
Particularly reflected light, which focuses on the regulation of pin hole, needs specialized equipment and certain technology could be realized；3rd measurement the visual field compared with
Small, the general confocal microscopical measurement visual field of dot laser is within 10mm, if survey must repeatedly be moved by measuring larger machine components
Measure platform increase time of measuring.
The content of the invention
In view of the deficienciess of the prior art, the purpose of the present invention is that there is provided a kind of being total to based on self-mixed interference
Focal argon laser microscope and its scan method, carry out micro- scanning using laser self-mixing interference and confocal principle, combine
Laser is from the simple in construction of hybrid technology, the advantage that easily collimates and confocal microscope azimuthal resolution be high, strong antijamming capability
The characteristics of, the problem of solving the problems, such as the microscopical auto-focusing of confocal dot laser and expand the measurement visual field simplifies tradition altogether
The microscopical structure of focus, reduces the adjustment difficulty of reflected light path in confocal measuring system, compensate for conventional confocal point microscope
Required optical element it is many, high is required to optical element, the characteristics of light path complexity regulation difficulty is high.
To achieve these goals, the technical solution adopted by the present invention is such：A kind of being total to based on self-mixed interference
Focal argon laser microscope, including He-Ne laser, by concavees lens and convex lens group into beam-expanding collimation lens group, variable neutrality it is close
Spend optical filter, object lens, two-dimensional motion platform, motion in one dimension platform, precision movement platform controller；
The He-Ne laser is connected with He-Ne laser power supply, is set successively on the forward direction transmission end axis of He-Ne laser
Beam-expanding collimation lens group, variable neutral-density filter, object lens and target to be measured are equipped with, the target to be measured is fixed on bidimensional
On motion platform；
The He-Ne laser forward direction output single longitudinal mode linearly polarized laser, the laser passes through quilt after beam-expanding collimation lens group
Beam-expanding collimation is changed into plane wave, and passes sequentially through and focused on after variable neutral-density filter, object lens in target to be measured, described to treat
Survey target and part light is reflected back He-Ne laser along propagation path when coming, form feedback light；The motion in one dimension platform
The lower section of two-dimensional motion platform is positioned over, its input is connected with the output end of precision movement platform controller, and the essence
Input of the output end of close motion platform controller also with two-dimensional motion platform is connected；
Also including the photodetector being sequentially connected, current/voltage converter circuit, wave filter, amplifier, analog/digital conversion
Circuit and computer unit；
The photodetector is positioned on the transmitting terminal axis of the He-Ne laser；
The input of the current/voltage converter circuit is connected with the output end of photodetector, and by photodetection
The current signal of device detection is converted into voltage signal output；
The input of the wave filter is connected with the output end of current/voltage converter circuit, for filtering interference signals
And the signal output that will be treated；
The input of the amplifier is connected with the output end of wave filter, and will be exported after the signal received amplification；
The input of the analog/digital conversion circuit is connected with the output end of amplifier, and the analog signal that amplifier is exported is changed
Into data signal, the synchronized sampling of signal is realized；
The input of the computer unit is connected with the output end of analog/digital conversion circuit, output end and precise motion are flat
Platform controller is connected, and to the data signal after analog/digital conversion circuit conversion calculate the pattern of processing display target to be measured
Information, is simultaneously emitted by the motion that instruction controls the two-dimensional motion platform and motion in one dimension platform to precision movement platform controller
The whole target to be measured of scanning.
One kind is based on the confocal microscopical scan method of dot laser, comprises the following steps：
(1) He-Ne laser sends single longitudinal mode linearly polarized laser, and the laser is by beam-expanding collimation lens group beam-expanding collimation, so
The attenuation degree of outgoing beam is controlled by variable neutral-density filter afterwards, then is transmitted to object lens；
(2) object lens are focused of the light beam into target to be measured, and light beam is returned by target to be measured reflection along original optical path again, again coupling
He-Ne laser is incorporated into, occurs self-mixing interference effect, self-mixing interference is received by photodetector；
(3) signal that photodetector is received passes through current/voltage converter circuit, wave filter, amplifier, analog again
Change-over circuit becomes digital data transmission to computer unit；
(4) computer unit issues instructions to the control motion in one dimension platform motion of precision movement platform controller, by seeing
The light intensity for examining the interference signal that computer unit is obtained changes to find the focal position of object lens, and is used as target to be measured using the point
The datum mark of topography scan；
(5) topography scan of target to be measured：Computer unit issues instructions to precision movement platform controller control bidimensional
The self-mixing interference for each point that motion platform moves to obtain target to be measured, and obtained signal is passed through into computer list
Member processing, so as to obtain the complete pattern of target to be measured.
Compared with prior art, beneficial effects of the present invention：
1. the present invention uses laser self-mixing interference principle, it is not necessary to the microscopical beam splitter of conventional confocal dot laser and sight
The auxiliary optical components such as light path are examined, simple in construction, compact, easy collimation, light path adjustment is easy；
2. the present invention is using He-Ne laser as system source, frequency stabilization, beam divergence angle is minimum again by expanding
The features such as collimation lens set beam-expanding collimation has extremely strong stability and versatility；
3. the present invention controls two-dimensional motion platform to obtain mesh to be measured using computer by precision movement platform controller
Pattern is marked, therefore the multiplication factor of micro- scanning is determined by the resolution ratio for moving the platform, now universal precise motion is put down
Platform is attained by 2nm resolution ratio, is mm for an area2Target to be measured for the present invention obtain pixel for 5 × 105
Shape appearance figure.With technology development precision movement platform resolution ratio will more and more higher, it is flat that the present invention need to only change motion
Platform can just obtain the micro-image of higher resolution, therefore the present invention has good application prospect.
Brief description of the drawings
Fig. 1 is reflection-type confocal dot laser microscopes optical path figure；
Fig. 2 is the confocal dot laser microscopes optical path figure based on self-mixed interference pair；
System simplifies equivalent mathematical model when Fig. 3 is laser forward-propagating；
Fig. 4 is that system simplifies equivalent mathematical model when laser reflection is propagated；
Fig. 5 is the confocal dot laser microscopic structure schematic diagram based on self-mixed interference pair；
Fig. 6 is the confocal dot laser microscopy work flow chart based on self-mixed interference pair.
Embodiment
The technical scheme provided below with reference to specific embodiment the present invention is described in detail, it should be understood that following specific
Embodiment is only illustrative of the invention and is not intended to limit the scope of the invention.
Embodiment 1：
As shown in figure 5, a kind of confocal dot laser microscope based on self-mixed interference, including He-Ne laser 1, by recessed
Beam-expanding collimation lens group 4-1, variable neutral-density filter 5, object lens 4-2, the bidimensional of mirror 4-1-1 and convex lens 4-1-2 compositions
Motion platform 7, motion in one dimension platform 8, precision movement platform controller 9；
The He-Ne laser 1 is connected with He-Ne laser power supply 2, on the forward direction transmission end axis of He-Ne laser 1 according to
It is secondary to be provided with beam-expanding collimation lens group 4-1, variable neutral-density filter 5, object lens 4-2 and target to be measured 6, the mesh to be measured
Mark 6 is fixed on two-dimensional motion platform；
The positive output single longitudinal mode linearly polarized laser of He-Ne laser 1, the laser passes through beam-expanding collimation lens group 4-1
Plane wave is changed into by beam-expanding collimation afterwards, and passes sequentially through target 6 to be measured is focused on after variable neutral-density filter 5, object lens 4-2
On, part light is reflected back He-Ne laser 1 by the target 6 to be measured along propagation path when coming, and forms feedback light；
The motion in one dimension platform 8 is positioned over the lower section of two-dimensional motion platform 7, and its input is controlled with precision movement platform
The output end of device 9 is connected, and input of the output end also with two-dimensional motion platform 7 of the precision movement platform controller 9
It is connected；
Also include be sequentially connected photodetector 3, current/voltage converter circuit 10, wave filter 11, amplifier 12, mould/
Number change-over circuit 13 and computer unit 14；
The photodetector 3 is positioned on the transmitting terminal axis of the He-Ne laser 1；
The input of the current/voltage converter circuit 10 is connected with the output end of photodetector 3, and photoelectricity is visited
The current signal for surveying the detection of device 3 is converted into voltage signal output；
The input of the wave filter 11 is connected with the output end of current/voltage converter circuit 10, for filtering out interference
Signal and the signal output that will be treated；
The input of the amplifier 12 is connected with the output end of wave filter 11, and will be defeated after the signal received amplification
Go out；
The input of the analog/digital conversion circuit 13 is connected with the output end of amplifier 12, and amplifier 12 is exported
Analog signal be converted into data signal, realize the synchronized sampling of signal；
The input of the computer unit 14 is connected with the output end of analog/digital conversion circuit 13, output end is transported with accurate
Moving platform controller 9 is connected, and carrying out calculating processing to the data signal after the conversion of analog/digital conversion circuit 13 shows target to be measured
6 topographical information, is simultaneously emitted by instruction and controls the two-dimensional motion platform 7 and motion in one dimension to precision movement platform controller 9
The whole target 6 to be measured of the moving sweep of platform 8.
The peak power for the He-Ne laser 1 that the present embodiment is used is 2mw, and beam-expanding collimation lens group 4-1's expands multiple
For 20 times, the OD range of variable neutral-density filter 5 is 0.04~4.0, and object lens 4-2 numerical aperture is 0.5.
A kind of microscopical confocal self-mixed interference principle of confocal dot laser based on self-mixed interference of the present invention is such as
Under：
System light path figure as shown in Figure 2, including photodetector 1-B, laser 2-B, the first lens group 3-B, second
Lens 4-B and measurement target 5-B, the first lens group 3-B are laser beam-expanding collimation lens group, first lens group 3-B
The phase of light is changed, in the case of continuous illumination is bright, the phase factor does not influence result of detection, i.e., against the first lens group 3-
The result that B back-facet light electric explorers 1-B is detected is similar with laser 2-B rears photodetector 1-B testing results, therefore can
The system equivalent mathematical model is obtained as shown in figure 3, wherein U with simplification0(x0, y0) it is the plane after beam-expanding collimation lens group
Optical field distribution, the laser that laser 2-B is sent is changed into plane wave after beam-expanding collimation lens group, therefore we can assume that tight
It is Z axis zero point, U by plane after beam-expanding collimation lens group0(x0, y0) be Z=0 planes light field complex amplitude.U1(x, y), U2(x, y)
Respectively abut the light field COMPLEX AMPLITUDE of lens L anterior-posterior planes, Uf(xf, yf) shaken again for the light field in defocused reflector plane
Width.L be lens away from zero distance, f is the focal length of lens, and d is defocus distance.
Assuming that the light field U of Z axis null plane0(x0, y0) be：
U0(x0,y0)=A
Consider from simple geometric optics, the laser propagation of Z axis null plane to lens frontal plane passes for plane wave along Z axis
Broadcast, it can thus be concluded that arriving U1The expression formula of (x, y), the U of the plane after lens is can be calculated by the multiple transmitance formula of lens2(x,y)
For：
T in formulal(x, y) is the complex amplitude transmitance of lens.According to fresnel diffraction, the light for obtaining focal plane can be calculated
Field Uf(xf,yf) be：
Z=f-d in formula, f are the focal length of lens, and d is defocus distance.Rewriting arrangement is carried out to it to be obtained：
Each variable implication is in formula：J0For zero Bessel function,For radial optical coordinate,For axial optical coordinate, r=(x2+y2)1/2For lens back-facet light radius, a is lens
Radius,For Fresnel number, ρ=r/a.
The detector used in the present invention is point probe, and detecting location is Z axis zero point in equivalent mathematical model, therefore
Assume that reflection laser is point (x on focal planef=0, yf=the laser 0) reflected back along optical axis, reflected light path is equivalent
Mathematical modeling is as shown in Figure 4.The influence that simply defocus is brought to be studied of the present embodiment, makes ν=0 to obtain light vertically simultaneously
Field COMPLEX AMPLITUDE：
It is R to make reflectance of reflector, then has Uf(u)=Uf(u) R, can be calculated zero point reflection light field in Z=0 planes
U0' (u) be
Detecting location synthesis complex amplitude is U (u)=U0(u)+U′0(u), substituting into calculating arrangement can obtain：
Substituted into and can be calculated confocal interference light intensity and be：
Wherein, only when motion platform is moved, measuring system is just recorded exactly, and the change for passing through interference light intensity
Change, calculate the real-time topographical information for recording target to be measured.
With reference to Fig. 5, Fig. 6, one kind is based on the confocal microscopical scan method of dot laser, comprised the following steps：
(1) He-Ne laser 1 exports single longitudinal mode linearly polarized laser, the laser under the driving of He-Ne laser power supply 2
By beam-expanding collimation lens group 4-1 beam-expanding collimations, the decay journey of outgoing beam is then controlled by variable neutral-density filter 5
Degree, then it is transmitted to object lens 4-2；
(2) object lens 4-2 focuses on transmitted light the target to be measured 6 being fixed on two-dimensional motion platform 7, and target 6 to be measured will
Part light is reflected back along propagation path when coming, and forms feedback light, and feedback light is coupled into He-Ne laser 1, causes helium again
The modulated generation self-mixing interference effect of power output of neon laser 1；
(3) optical power signals are converted into luminous power electricity by the photodetector 3 for being placed on the inverse output terminal of He-Ne laser 1
Signal is flowed, then current signal is converted into voltage signal by current/voltage converter circuit 10, then passes through this voltage signal
Wave filter 11 removes low frequency and high-frequency interferencing signal, and the signal after filtering is defeated by 200 times of signal amplification by amplifier 12 again
Go out to analog/digital conversion circuit 13；The analog/digital conversion circuit 13 is sampled using 16 bit synchronizations, sets data collecting system to work
In maximum sample rate pattern, sample frequency is 500KHz, and transfers to computer unit 14 to handle aobvious the data signal collected
Show；
(4) computer unit 14 issues instructions to the control motion in one dimension of precision movement platform controller 9 platform 8 and moved, and sees
The interference signal that computer unit 14 is obtained is examined, judges whether the datum mark of target 6 to be measured is located at by the Strength Changes of signal
Focus, adjusting the datum mark of target 6 to be measured makes it in object lens 4-2 focal points；
(5) topography scan of target 6 to be measured：Computer unit 14 issues instructions to precision movement platform controller 9 and controlled
The horizontal and vertical motion of two-dimensional motion platform 7, with the whole plane to be measured of 2nm interval scans, each scanning element in plane to be measured
Interference signal collects computer unit 14 by step (1) to step (3), analyzes calculating by computer unit 14 and is treated
Survey the microstructure information of target 6.
It is last it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention and non-limiting technical side
Case, it will be understood by those within the art that, those modify or equivalent substitution to technical scheme, and
The objective and scope of the technical program are not departed from, all should be covered among scope of the presently claimed invention.
Claims (2)
1. a kind of confocal dot laser microscope based on self-mixed interference, it is characterised in that：
Including He-Ne laser, by concavees lens and convex lens group into beam-expanding collimation lens group, variable neutral-density filter, thing
Mirror, two-dimensional motion platform, motion in one dimension platform, precision movement platform controller；
The He-Ne laser is connected with He-Ne laser power supply, is disposed with the forward direction transmission end axis of He-Ne laser
Beam-expanding collimation lens group, variable neutral-density filter, object lens and target to be measured, the target to be measured are fixed on two-dimensional motion
On platform；
The He-Ne laser forward direction output single longitudinal mode linearly polarized laser, the laser after beam-expanding collimation lens group by being expanded
Collimation is changed into plane wave, and passes sequentially through and focused on after variable neutral-density filter, object lens in target to be measured, the mesh to be measured
Part light is reflected back He-Ne laser by mark along propagation path when coming, and forms feedback light；
The motion in one dimension platform is positioned over the lower section of two-dimensional motion platform, and its input is defeated with precision movement platform controller
Go out end to be connected, and input of the output end also with two-dimensional motion platform of the precision movement platform controller is connected；
Also include photodetector, current/voltage converter circuit, wave filter, amplifier, the analog/digital conversion electricity being sequentially connected
Road and computer unit；
The photodetector is positioned on the transmitting terminal axis of the He-Ne laser；
The input of the current/voltage converter circuit is connected with the output end of photodetector, and photodetector is examined
The current signal of survey is converted into voltage signal output；
The input of the wave filter is connected with the output end of current/voltage converter circuit, for filtering interference signals and general
Treated signal output；
The input of the amplifier is connected with the output end of wave filter, and will be exported after the signal received amplification；
The input of the analog/digital conversion circuit is connected with the output end of amplifier, and the analog signal that amplifier is exported
Data signal is converted into, the synchronized sampling of signal is realized；
The input of the computer unit is connected with the output end of analog/digital conversion circuit, output end and precision movement platform control
Device processed is connected, and the pattern that the data signal after analog/digital conversion circuit conversion calculate processing display target to be measured is believed
Breath, is simultaneously emitted by instruction and controls the motion of the two-dimensional motion platform and motion in one dimension platform to sweep to precision movement platform controller
Retouch whole target to be measured；
Wherein detector is point probe, by setting up the equivalent mathematical model of paths, if against beam-expanding collimation lens group
The central point of rear lenses is Z axis zero point, and the confocal interference light intensity I (u) that detector is obtained is：
；
Wherein A is Z axis zero point light field, and L is distance of the object lens away from zero point, and z=f-d, f is objective focal length, and d is defocus distance, and R is
The reflectivity of target to be measured,For axial optical coordinate, a is object lens radius,For Fresnel
Number, λ is optical maser wavelength, and computer calculates the real-time topographical information of target to be measured by the change of interference light intensity.
2. one kind is based on the confocal microscopical scan method of dot laser described in claim 1, it is characterised in that including following step
Suddenly：
（1）He-Ne laser sends single longitudinal mode linearly polarized laser, and the laser is by beam-expanding collimation lens group beam-expanding collimation, Ran Houjing
Cross variable neutral-density filter and control the attenuation degree of outgoing beam, then be transmitted to object lens；
（2）Object lens are focused of the light beam into target to be measured, and light beam is returned by target to be measured reflection along original optical path again, is coupled into again
He-Ne laser, occurs self-mixing interference effect, and self-mixing interference is received by photodetector；
（3）The signal that photodetector is received turns by current/voltage converter circuit, wave filter, amplifier, analog again
Change circuit and become digital data transmission to computer unit；
（4）Computer unit issues instructions to the control motion in one dimension platform motion of precision movement platform controller, is counted by observing
The light intensity for the interference signal that calculation machine unit is obtained changes to find the focal position of object lens, and is used as feature of interest to be measured using the point
The datum mark of scanning；
（5）The topography scan of target to be measured：Computer unit issues instructions to precision movement platform controller control two-dimensional motion
Platform motion come the self-mixing interference of each point for obtaining target to be measured, and by obtained signal by computer unit at
Reason, so as to obtain the complete pattern of target to be measured.
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| CN201110835Y (en) * | 2007-09-11 | 2008-09-03 | 中国科学院上海光学精密机械研究所 | Laser scattering detection device for large-caliber neodymium glass surface defects |
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