CN102435148A - Laser feedback effect-based microscopic three-dimensional profile measurement system - Google Patents
Laser feedback effect-based microscopic three-dimensional profile measurement system Download PDFInfo
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- CN102435148A CN102435148A CN2011102661414A CN201110266141A CN102435148A CN 102435148 A CN102435148 A CN 102435148A CN 2011102661414 A CN2011102661414 A CN 2011102661414A CN 201110266141 A CN201110266141 A CN 201110266141A CN 102435148 A CN102435148 A CN 102435148A
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Abstract
The invention relates to a laser feedback effect-based microscopic three-dimensional profile measurement system. The emergent light of a semiconductor laser is collimated into collimated light, and the collimated light is then focused by a microscopic objective to irradiate the surface of a measured object. The luminous point of the semiconductor laser and the focus of the light beam have conjugate imaging relation. The scattered light generated at the focus can be collected by the objective and fed back into the resonant cavity of the semiconductor laser, however, the feedback light generated by the defocusing plane cannot enter the active region because the conjugate relation is destroyed, the feedback light consumes current carriers in the resonant cavity after entering the laser cavity, so that the emission power of the laser is decreased, the change of the emission power of the laser characterizes the profile of the measured object, a computer 9 utilizes a data acquisition card to acquire the voltage signals outputted by a photoelectric detector, and stores the voltage signals as a data file, and in combination with position data, processing software is used for processing three-dimensional scanning measurement data, so that the three-dimensional structure of the measured object can be reconstructed. The structure of the system is simple, the equipment cost can be remarkably reduced, and the system is highly practical.
Description
Technical field
The present invention relates to a kind of surveying instrument, particularly a kind of three-dimensional appearance micrometering system based on the Laser feedback effect.
Background technology
In the object dimensional topography measurement, a lot of methods such as laser triangulation, structured light method, inductance contourgraph method, confocal laser scanning microscope method are arranged.Wherein, the confocal laser scanning microscope mensuration is a kind of three-dimensional high rate measuring method respectively.Confocal laser scanning microscope adopts the laser point light source to replace the field light source of conventional optical microscope, adopts the double needle hole structure on the structure, forms the unique design of image conjugation.Pointolite, forms images at detector side conjugation pin hole place to sample point by point scanning in focal plane of lens.Because the image conjugate relation of optical system has only the along scattered light could see through the conjugation pin hole, can effectively suppress the scattered light that produces with the non-focal plane of non-measurement point and sample on the focal plane.Through being carried out 3-D scanning, testee can obtain the object dimensional pattern.But confocal laser scanning microscope is a kind of general optical imagery instrument, and light source and detection system are independently, and system architecture is complicated, and is with high costs.
Summary of the invention
The present invention be directed to the problem that present object dimensional topography measurement system architecture is complicated, cost is high; A kind of three-dimensional appearance micrometering system based on the Laser feedback effect has been proposed; Can significantly simplify the confocal imaging system structure, it is low, practical to reduce equipment cost.
Technical scheme of the present invention is: a kind of three-dimensional appearance micrometering system based on the Laser feedback effect; The semiconductor laser emitted laser is transformed to directional light after through collimation lens and incides spectroscope; Through after the beam split, a part of laser arrives catoptron and changes beam direction, reenters to be mapped to the microcobjective convergence; Shine the surface that is placed on the testee on the objective table, the scattered light that is produced by along feeds back to semiconductor laser by the microcobjective collection along original optical path again; Another part laser through after the beam split is received by photodetector; Data collecting card is sent in the computing machine after the photodetector data are gathered; Computing machine outputs a control signal to driving circuit; Driving circuit drives 3-D scanning platform shift position, and objective table is shelved on the 3-D scanning platform.
Beneficial effect of the present invention is: the present invention is based on the three-dimensional appearance micrometering system of Laser feedback effect, have very outstanding three-dimensional appearance micro-imaging ability, simple in structure, it is low, practical significantly to reduce equipment cost.
Description of drawings
Fig. 1 is the three-dimensional appearance micrometering system architecture synoptic diagram that the present invention is based on the Laser feedback effect.
Embodiment
Three-dimensional appearance micrometering system architecture synoptic diagram based on the Laser feedback effect as shown in Figure 1, semiconductor laser 1 emitted laser is transformed to directional light by collimation lens 2, and a part of laser sees through spectroscope 3; Change beam direction by catoptron 4; Reenter and penetrate microcobjective 5 convergences, shine the surface of the testee 6 that is placed on the objective table 7, the scattered light that is produced by along can feed back to laser instrument 1 along original optical path by microcobjective 5 collections; The feedback light that the out of focus face produces can not get into laser instrument; Feedback light consumes the charge carrier in the resonator cavity after getting in the laser cavity, and the laser instrument emissive power is reduced; Another part laser sees through spectroscope 3 and is received by photodetector 11, sends in the computing machine 9 through data collecting card 10; Computing machine 9 outputs a control signal to driving circuit, can drive 3-D scanning platform 8 shift positions, and objective table 7 is shelved on the 3-D scanning platform 8.
Computing machine 9 control adjustment 3-D scanning platforms 8 are to initial position; 3-D scanning platform 8 drive testee 6 under computing machine 9 controls moves then; Testee 6 is carried out two-dimensional scan, in the two-dimensional scan process, each analyzing spot is carried out depth direction scanning again; Search out the minimum value of photodetector 11 outputs, this moment, this depth location was in the focal position of microcobjective 5.The part laser of laser instrument 1 emission of being told by spectroscope 3 is received by photodetector 11, converts voltage signal output into; Computing machine 9 is gathered this voltage signal through data collecting card 10; And save as data file, handle reconstruct testee three-dimensional appearance then with process software.
Semiconductor laser emergent light collimation is a directional light, is assembled by microcobjective again, shines on the testee surface.The luminous point of semiconductor laser and the focus of light beam have the conjugate imaging relation.The scattered light that is produced by along can be collected by object lens and feed back to semiconductor laser resonator, however the feedback light that the out of focus face produces, and because conjugate relation is destroyed and can not gets into the active region, thereby this mode has depth resolution.Feedback light consumes the charge carrier in the resonator cavity after getting in the laser cavity, and the laser instrument emissive power is reduced; The laser instrument transmit power variation has characterized the pattern of testee; Computing machine 9 is gathered the voltage signal of photodetector 11 outputs through data collecting card, and saves as data file, again the binding site data; With process software the three-dimensional scanning measurement data are handled, can reconstruct testee three-dimensional structure.The semiconductor laser emissive power has the high sensitivity response to feedback light, therefore is suitable for the detection of faint scattered light signal; Simultaneously, the semiconductor laser feedback system is again a natural confocal imaging system, and its active region is equivalent to the conjugation pin hole of confocal laser microscopic system, and its size is very little, so native system has very outstanding three-dimensional appearance micro-imaging ability.
Claims (1)
1. three-dimensional appearance micrometering system based on the Laser feedback effect; It is characterized in that the semiconductor laser emitted laser is transformed to directional light after through collimation lens and incides spectroscope, through after the beam split; Part laser arrives catoptron and changes beam direction; Reenter and be mapped to the microcobjective convergence, shine the surface that is placed on the testee on the objective table, the scattered light that is produced by along feeds back to semiconductor laser by the microcobjective collection along original optical path again; Another part laser through after the beam split is received by photodetector; Data collecting card is sent in the computing machine after the photodetector data are gathered; Computing machine outputs a control signal to driving circuit; Driving circuit drives 3-D scanning platform shift position, and objective table is shelved on the 3-D scanning platform.
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| CN2011102661414A CN102435148A (en) | 2011-09-09 | 2011-09-09 | Laser feedback effect-based microscopic three-dimensional profile measurement system |
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| CN2011102661414A CN102435148A (en) | 2011-09-09 | 2011-09-09 | Laser feedback effect-based microscopic three-dimensional profile measurement system |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103486972A (en) * | 2013-09-11 | 2014-01-01 | 北京航空航天大学 | Laser feedback interference integrated micro-displacement measuring system with phase modulation function |
| CN104215178A (en) * | 2014-09-28 | 2014-12-17 | 福建师范大学 | Object volume non-contact measuring method and device based on reflection mirror secondary imaging |
| CN104729424A (en) * | 2015-03-09 | 2015-06-24 | 南京信息工程大学 | Confocal laser microscope based on self-mixing interference and scanning method of confocal laser microscope |
| CN109387496A (en) * | 2018-10-10 | 2019-02-26 | 深圳大学 | High-resolution micro imaging system |
| CN109916307A (en) * | 2018-12-27 | 2019-06-21 | 河南中原光电测控技术有限公司 | Variable power laser measurement method and device |
| CN114797696A (en) * | 2022-03-02 | 2022-07-29 | 西安电子科技大学 | Extreme manufacturing equipment of micro-droplet three-dimensional sphere structure and using method |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103486972A (en) * | 2013-09-11 | 2014-01-01 | 北京航空航天大学 | Laser feedback interference integrated micro-displacement measuring system with phase modulation function |
| CN104215178A (en) * | 2014-09-28 | 2014-12-17 | 福建师范大学 | Object volume non-contact measuring method and device based on reflection mirror secondary imaging |
| CN104215178B (en) * | 2014-09-28 | 2016-08-31 | 福建师范大学 | Object volume non-contact measurement method based on reflecting mirror secondary imaging and device |
| CN104729424A (en) * | 2015-03-09 | 2015-06-24 | 南京信息工程大学 | Confocal laser microscope based on self-mixing interference and scanning method of confocal laser microscope |
| CN104729424B (en) * | 2015-03-09 | 2017-10-20 | 南京信息工程大学 | Confocal dot laser microscope and its scan method based on self-mixed interference |
| CN109387496A (en) * | 2018-10-10 | 2019-02-26 | 深圳大学 | High-resolution micro imaging system |
| CN109387496B (en) * | 2018-10-10 | 2021-07-09 | 深圳大学 | High resolution microscopic imaging system |
| CN109916307A (en) * | 2018-12-27 | 2019-06-21 | 河南中原光电测控技术有限公司 | Variable power laser measurement method and device |
| CN114797696A (en) * | 2022-03-02 | 2022-07-29 | 西安电子科技大学 | Extreme manufacturing equipment of micro-droplet three-dimensional sphere structure and using method |
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Application publication date: 20120502 |