CN104701228A - Improved UVW working platform - Google Patents
Improved UVW working platform Download PDFInfo
- Publication number
- CN104701228A CN104701228A CN201310644381.2A CN201310644381A CN104701228A CN 104701228 A CN104701228 A CN 104701228A CN 201310644381 A CN201310644381 A CN 201310644381A CN 104701228 A CN104701228 A CN 104701228A
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- CN
- China
- Prior art keywords
- module
- electromagnet
- uvw
- motor module
- motor
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Abstract
The invention discloses an improved UVW working platform comprising a bottom plate, a motor module U, a motor module V, a motor module W, a support module, a working plane plate, and an electromagnet module. The improved UVW working platform is characterized in that the motor module U and the motor module V are symmetrically installed on the X axis of the bottom plate, the motor module W and the support module are symmetrically installed on the Y axis of the bottom plate, the electromagnet module is installed and fixed to the center of the bottom plate, and the working plane plate is installed on four support bearings of the motor modules (U, V and W) and the support module. According to the improved UVW working platform, the electromagnet module is cleverly adopted to lock a working plane in a desired position, so that the situation in which the working platform is moved under external force during work piece machining to cause machining accuracy decrease and even unqualified machining accuracy is avoided, the weight which can be borne by the working platform is increased greatly, and the rigidity of the whole structure is increased.
Description
Technical field
The present invention relates to a kind of machine work platform being applied to high-precision vision alignment system, be specially a kind of modified model UVW workbench.
Background technology
At present, high-precision vision alignment system, at LCD manufacturing equipment, OGS touch screen manufacturing equipment, touch-screen glass cover-plate manufacturing equipment, PCB or FPC manufacturing equipment, semiconductor equipment etc., is applied very extensive.The quality of machine work Platform Designing, the quality of precision will directly affect the alignment result of whole system, so exploitation has stronger specific aim, high-resolution fine-limit work platform plays vital effect in the entire system, make X, Y, three-shaft linkage through software accurate operational, and precision can meet various designing requirement.
There is a shortcoming in existing UVW workbench, after control system completes X, Y, three-axis moving location, workbench does not have locking device, when carrying out work pieces process, outer active force just makes workbench move or shake, and causes machining accuracy to fall sharply, and even causes work piece to scrap.Another workbench is quadricorn support point only, and the weight that can bear can not show a candle to the UVW workbench being provided with locking device.
Summary of the invention
For the shortcoming of above-mentioned UVW workbench, the technical problem to be solved in the present invention is to provide a kind of modified model UVW workbench.
For solving the problem, the technical solution used in the present invention is:
A kind of modified model UVW workbench, comprise base plate, motor module U, motor module V, motor module W, support module, working face plate and electromagnet module, is characterized in that: described motor module U and motor module V symmetry is installed in the X-axis of base plate, and motor module W and support module symmetry are installed in base plate Y-axis, described electromagnet module is mounted on base plate middle position, and working face plate is installed on motor module (U, V, W) and supports on four radial journal bearings of module.
Further, described motor module is servomotor module or stepping motor module.
Further, described working face plate comprises bracing frame and working plate, and bracing frame is provided with symmetrical screw hole, and described working plate is scheduled on bracing frame by screwed lock.
Further, described electromagnet module comprises electromagnet, electromagnet suction disc and electromagnet firm banking, and described electromagnet suction disc surface is provided with groove, for depositing lubricating oil.
Further, described electromagnet comprises coil, magnetic core and control circuit, and control circuit is electrically connected with coil.When starting adhesive lock function, control circuit controls flowing through coil circuit and slowly linearly increases, until electromagnet firmly holds working face plate, but can not produce vibration.
The beneficial effect adopting technique scheme to produce is: described a kind of modified model UVW workbench, working face is locked in desired location by the ingenious electromagnet module that have employed, thus overcome when carrying out work pieces process, outer active force makes workbench move or shakes, the problem that machining accuracy falls sharply, thus the qualification rate improving work piece; Meanwhile, considerably increase the weight that workbench can bear, add overall structure rigidity.
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of a kind of modified model UVW workbench of the present invention;
Fig. 2 is the structural representation of a kind of modified model UVW workbench of the present invention under non-installment work platform status;
Fig. 3 is the internal structure schematic diagram of a kind of modified model UVW workbench of the present invention;
Fig. 4 is the electromagnet modular structure schematic diagram of a kind of modified model UVW workbench of the present invention;
Fig. 5 is the operation principle schematic diagram of a kind of modified model UVW workbench of the present invention.
Wherein, 1 is base plate, and 2 is motor module U, and 3 is motor module V, and 4 is motor module W, and 5 for supporting module, and 6 is working face plate, and 7 is electromagnet module, and 61 is screw hole, and 71 is electromagnet, and 72 is electromagnet suction disc, and 73 is electromagnet firm banking, and 721 is groove.
Embodiment
Below in conjunction with accompanying drawing; a kind of modified model UVW workbench of the present invention is described; object is in order to the public better understands technology contents of the present invention; instead of the restriction to described technology contents; in fact; in initiative spirit essence of the present invention, to the improvement of described structure, comprise the increase and decrease of corresponding assembly and replace all within the present invention's technical scheme required for protection.
As shown in Figure 1, Figure 2, Figure 3 and Figure 4, a kind of modified model UVW workbench, comprise base plate 1, motor module U 2, motor module V 3, motor module W 4, support module 5, working face plate 6 and electromagnet module 7, wherein, described motor module U 2 and motor module V 3 symmetry are installed in the X-axis of base plate, and motor module W 4 and support module 5 symmetry are installed in base plate Y-axis, described electromagnet module 7 is mounted on base plate 1 middle position, and working face plate 6 is installed on servomotor module (U, V, W) and supports on four radial journal bearings of module.
Described motor module is servomotor module or stepping motor module.
Described working face plate is provided with symmetrical screw hole 61, for fixation workpiece at working face plate 6.
Described electromagnet module comprises electromagnet 71, electromagnet suction disc 72 and electromagnet firm banking 73, and described electromagnet suction disc 72 surface is provided with groove 721, for depositing lubricating oil.
Described electromagnet 71 comprises coil, magnetic core and control circuit, and control circuit is electrically connected with coil.When starting adhesive lock function, control circuit controls flowing through coil circuit and slowly linearly increases, until electromagnet firmly holds working face plate, but can not produce vibration.
Described working face plate comprises bracing frame and working plate, and described working plate is scheduled on bracing frame by screwed lock.
As shown in Figure 5, described a kind of modified model UVW workbench is work like this:
As shown in fig. 5-1, W motor movement, U, V motor is static, and workbench moves to X-direction;
As shown in Fig. 5-2, U, V motor is synchronized to move in the same way, and W motor is static, and workbench moves to Y-direction;
As shown in Fig. 5-3, U, V, W motor moves simultaneously, and U, V motor is in the same way synchronized, and workbench moves to X, Y-direction simultaneously;
As shown in Fig. 5-4, U, V, W motor moves simultaneously, and U, V motor is oppositely synchronized, and workbench centrally puts rotational angle;
As illustrated in fig. 5-5, U, V, W motor moves simultaneously, and U, V motor is oppositely not synchronized, and workbench is along the plane any point anglec of rotation.
As can be seen from the above, control the different operating state of UVW tri-motors in same plane, workbench can in X-direction, and Y-direction is moved and rotated centered by working face any point, meets the motion of workbench at X, Y, three axles.After control workbench to required position, start electromagnet locking workbench, then can carry out next step manufacturing procedure.
Claims (5)
1. a modified model UVW workbench, comprise base plate, motor module U, motor module V, motor module W, support module, working face plate and electromagnet module, is characterized in that: described motor module U and motor module V symmetry is installed in the X-axis of base plate, and motor module W and support module symmetry are installed in base plate Y-axis, described electromagnet module is mounted on base plate middle position, and working face plate is installed on servomotor module (U, V, W) and supports on four radial journal bearings of module.
2. a kind of modified model UVW workbench according to claim 1, is characterized in that: described motor module is servomotor module or stepping motor module.
3. a kind of modified model UVW workbench according to claim 1, is characterized in that: described working face plate comprises bracing frame and working plate, and bracing frame is provided with symmetrical screw hole, and described working plate is scheduled on bracing frame by screwed lock.
4. a kind of modified model UVW workbench according to claim 1, is characterized in that: described electromagnet module comprises electromagnet, electromagnet suction disc and electromagnet firm banking, and described electromagnet suction disc surface is provided with groove, for depositing lubricating oil.
5. a kind of modified model UVW workbench according to claim 1, is characterized in that: described electromagnet comprises coil, magnetic core and control circuit, and control circuit is electrically connected with coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310644381.2A CN104701228A (en) | 2013-12-05 | 2013-12-05 | Improved UVW working platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310644381.2A CN104701228A (en) | 2013-12-05 | 2013-12-05 | Improved UVW working platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104701228A true CN104701228A (en) | 2015-06-10 |
Family
ID=53348206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310644381.2A Pending CN104701228A (en) | 2013-12-05 | 2013-12-05 | Improved UVW working platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104701228A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105159032A (en) * | 2015-08-18 | 2015-12-16 | 浙江欧视达科技有限公司 | Semiautomatic solder-resist exposure machine |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010034480A (en) * | 2008-07-31 | 2010-02-12 | Nikon Corp | Stage device, exposure device, and device manufacturing method |
| CN102248746A (en) * | 2010-05-21 | 2011-11-23 | 鸿富锦精密工业（深圳）有限公司 | Position holding device |
| CN203209997U (en) * | 2013-04-10 | 2013-09-25 | 高明铁企业股份有限公司 | Precise alignment platform |
-
2013
- 2013-12-05 CN CN201310644381.2A patent/CN104701228A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010034480A (en) * | 2008-07-31 | 2010-02-12 | Nikon Corp | Stage device, exposure device, and device manufacturing method |
| CN102248746A (en) * | 2010-05-21 | 2011-11-23 | 鸿富锦精密工业（深圳）有限公司 | Position holding device |
| CN203209997U (en) * | 2013-04-10 | 2013-09-25 | 高明铁企业股份有限公司 | Precise alignment platform |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105159032A (en) * | 2015-08-18 | 2015-12-16 | 浙江欧视达科技有限公司 | Semiautomatic solder-resist exposure machine |
| CN105159032B (en) * | 2015-08-18 | 2018-10-30 | 浙江欧视达科技有限公司 | Semi-automatic welding resistance exposure machine |
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| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150610 |