CN104697973B - 一种外延片拉曼散射光谱数据生成方法 - Google Patents
一种外延片拉曼散射光谱数据生成方法 Download PDFInfo
- Publication number
- CN104697973B CN104697973B CN201310648303.XA CN201310648303A CN104697973B CN 104697973 B CN104697973 B CN 104697973B CN 201310648303 A CN201310648303 A CN 201310648303A CN 104697973 B CN104697973 B CN 104697973B
- Authority
- CN
- China
- Prior art keywords
- epitaxial wafer
- graphite plate
- data
- laid
- spectrum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001228 spectrum Methods 0.000 title claims abstract description 51
- 238000001069 Raman spectroscopy Methods 0.000 title claims abstract description 43
- 238000000034 method Methods 0.000 title claims abstract description 16
- 235000012431 wafers Nutrition 0.000 claims abstract description 75
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 63
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 63
- 239000010439 graphite Substances 0.000 claims abstract description 63
- 238000013480 data collection Methods 0.000 claims abstract description 15
- 241001269238 Data Species 0.000 claims abstract description 3
- 239000004575 stone Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 6
- 238000001237 Raman spectrum Methods 0.000 description 4
- 238000004616 Pyrometry Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000103 photoluminescence spectrum Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310648303.XA CN104697973B (zh) | 2013-12-04 | 2013-12-04 | 一种外延片拉曼散射光谱数据生成方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310648303.XA CN104697973B (zh) | 2013-12-04 | 2013-12-04 | 一种外延片拉曼散射光谱数据生成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104697973A CN104697973A (zh) | 2015-06-10 |
CN104697973B true CN104697973B (zh) | 2017-11-21 |
Family
ID=53345324
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310648303.XA Active CN104697973B (zh) | 2013-12-04 | 2013-12-04 | 一种外延片拉曼散射光谱数据生成方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN104697973B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI717302B (zh) * | 2020-07-30 | 2021-01-21 | 頂極科技股份有限公司 | 半導體製程零配件的質變檢測系統及方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101471271A (zh) * | 2007-12-27 | 2009-07-01 | 深圳市方大国科光电技术有限公司 | 氮化镓外延片的快速检测方法 |
CN101339092B (zh) * | 2008-08-13 | 2010-11-10 | 重庆大学 | Led芯片/晶圆/外延片的非接触式检测方法及检测装置 |
CN101514964B (zh) * | 2009-03-27 | 2011-11-16 | 福州高意光学有限公司 | 一种基于拉曼光谱技术的物质检测仪 |
CN101906622B (zh) * | 2010-08-20 | 2013-03-20 | 江苏中晟半导体设备有限公司 | 用于mocvd系统中控制外延片温度及均匀性的装置与方法 |
CN102403248B (zh) * | 2011-11-23 | 2013-09-18 | 河北普兴电子科技股份有限公司 | 硅抛光片或外延片层错及位错缺陷的无损检测方法 |
CN103364386B (zh) * | 2012-03-27 | 2016-04-06 | 武汉鹰飞拓光电子有限公司 | 深紫外激光拉曼光谱仪 |
JP6108588B2 (ja) * | 2012-04-27 | 2017-04-05 | 国立研究開発法人産業技術総合研究所 | 炭化珪素半導体素子の製造方法 |
-
2013
- 2013-12-04 CN CN201310648303.XA patent/CN104697973B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN104697973A (zh) | 2015-06-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104762607B (zh) | 一种单颗粒层纳米金刚石薄膜及其制备方法 | |
Koffman et al. | Centennial-scale variability of the Southern Hemisphere westerly wind belt in the eastern Pacific over the past two millennia | |
CN104655097B (zh) | 激光测距传感器及其测距方法 | |
CN105980628B (zh) | 用于精磨纤维素材料的精磨机设备以及方法 | |
Wang et al. | Study on the double-sided grinding of sapphire substrates with the trajectory method | |
Huo et al. | Origin, modeling and suppression of grinding marks in ultra precision grinding of silicon wafers | |
CN104697973B (zh) | 一种外延片拉曼散射光谱数据生成方法 | |
DE112013003275T5 (de) | Temperatursteuerung für auf GaN basierende Materialien | |
CN109670400A (zh) | 一种水电机组开机过程稳定性状态评价方法 | |
MY170172A (en) | Method for evaluating degree of crystalline orientation of polycrystalline silicon, method for selecting polycrystalline silicon rod, polycrystalline silicon rod, polycrystalline silicon ingot, and method for manufacturing monocrystalline silicon | |
CN204945048U (zh) | 拉曼原位监控装置 | |
WO2013109429A3 (en) | Slot machining | |
Lu et al. | Structural evolution and bonding properties of BSin−/(n= 4–12) clusters: Size-selected anion photoelectron spectroscopy and theoretical calculations | |
CN101958242B (zh) | 制作栅氧化层和栅极多晶硅层的方法 | |
CN105603383B (zh) | 托盘晶圆定位系统、方法及mocvd设备 | |
CN105470155B (zh) | 外延装置和外延过程中外延层的测量方法 | |
Lai et al. | Study on the wear characteristics of a lapping wheel in double-sided lapping based on the trajectory distribution | |
CN104200389A (zh) | 基于生产工艺时间和设备工作时间的产品耗电量分配方法 | |
CN104498880A (zh) | 采用多次间断共蒸发制备大面积高质量较厚铝膜的方法 | |
CN1186600C (zh) | 高速旋转机械半速涡动在线稳定性特征提取与监测方法 | |
CN102608348A (zh) | 针对不规则脉冲信号测量转速的方法 | |
CN107539964B (zh) | 一种六方片状二硒化钼粉体材料及其制备方法 | |
Ke et al. | Secondary growth mechanism of SiGe islands deposited on a mixed-phase microcrystalline Si by ion beam co-sputtering | |
JP6090994B2 (ja) | 炭化物の製造方法、及び炭化物の品質検査方法 | |
CN105345605A (zh) | 一种晶片磨边方法和磨边机吸盘 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information |
Address after: 102206 Beijing City, Changping District Changping Road No. 97 Xinyuan Science Park B building room 503 Applicant after: BEI OPTICS TECHNOLOGY Co.,Ltd. Address before: 100191, Beijing, Zhichun Road, Haidian District No. 27 quantum core 402 room Applicant before: BEI OPTICS TECHNOLOGY Co.,Ltd. |
|
CB03 | Change of inventor or designer information |
Inventor after: Yan Dong Inventor after: Ma Tiezhong Inventor after: Wang Linzi Inventor after: Liu Jianpeng Inventor before: Yan Dong Inventor before: Li Chengmin Inventor before: Ye Longmao Inventor before: Wang Linzi Inventor before: Liu Jianpeng Inventor before: Liu Tao |
|
COR | Change of bibliographic data | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190710 Address after: Room 503, Block B, Xinyuan Science Park, 97 Changping Road, Changping District, Beijing 102206 Patentee after: Ongkun Vision (Beijing) Technology Co.,Ltd. Address before: Room 503, Block B, Xinyuan Science Park, 97 Changping Road, Changping District, Beijing 102206 Patentee before: BEI OPTICS TECHNOLOGY Co.,Ltd. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20230627 Address after: B701, Building 8, No. 97, Changping Road, Shahe Town, Changping District, Beijing 102200 (Changping Demonstration Park) Patentee after: Beijing Airui Haotai Information Technology Co.,Ltd. Address before: Room 503, Block B, Xinyuan Science Park, 97 Changping Road, Changping District, Beijing 102206 Patentee before: Ongkun Vision (Beijing) Technology Co.,Ltd. |
|
TR01 | Transfer of patent right |