CN104697666A - 一种mocvd反应腔测温方法 - Google Patents
一种mocvd反应腔测温方法 Download PDFInfo
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- CN104697666A CN104697666A CN201310655549.XA CN201310655549A CN104697666A CN 104697666 A CN104697666 A CN 104697666A CN 201310655549 A CN201310655549 A CN 201310655549A CN 104697666 A CN104697666 A CN 104697666A
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- 238000002488 metal-organic chemical vapour deposition Methods 0.000 title claims abstract description 47
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000009529 body temperature measurement Methods 0.000 title abstract description 12
- 230000005855 radiation Effects 0.000 claims description 64
- 230000003287 optical effect Effects 0.000 claims description 44
- 238000005316 response function Methods 0.000 claims description 18
- 238000002310 reflectometry Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 6
- 239000010439 graphite Substances 0.000 claims description 6
- 238000001228 spectrum Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000003595 spectral effect Effects 0.000 claims description 3
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- 229910052594 sapphire Inorganic materials 0.000 claims description 2
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- 230000009977 dual effect Effects 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 description 5
- 230000007704 transition Effects 0.000 description 4
- 238000009499 grossing Methods 0.000 description 3
- 241000208340 Araliaceae Species 0.000 description 2
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 2
- 235000003140 Panax quinquefolius Nutrition 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 235000008434 ginseng Nutrition 0.000 description 2
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- 238000004861 thermometry Methods 0.000 description 2
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CN201310655549.XA CN104697666B (zh) | 2013-12-06 | 2013-12-06 | 一种mocvd反应腔测温方法 |
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CN104697666A true CN104697666A (zh) | 2015-06-10 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104697637A (zh) * | 2013-12-06 | 2015-06-10 | 北京智朗芯光科技有限公司 | 一种薄膜生长的实时测温方法 |
CN106128978A (zh) * | 2016-07-21 | 2016-11-16 | 无锡宏纳科技有限公司 | 可查看集成电路制造过程的装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5772323A (en) * | 1994-10-26 | 1998-06-30 | Felice; Ralph A. | Temperature determining device and process |
US6183130B1 (en) * | 1998-02-20 | 2001-02-06 | Applied Materials, Inc. | Apparatus for substrate temperature measurement using a reflecting cavity and detector |
CN102455222A (zh) * | 2010-10-21 | 2012-05-16 | 甘志银 | 金属有机物化学气相沉积设备中实时测量薄膜温度的方法及测量装置 |
CN102889934A (zh) * | 2011-07-18 | 2013-01-23 | 甘志银 | 实时测量温度的方法 |
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2013
- 2013-12-06 CN CN201310655549.XA patent/CN104697666B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5772323A (en) * | 1994-10-26 | 1998-06-30 | Felice; Ralph A. | Temperature determining device and process |
US6183130B1 (en) * | 1998-02-20 | 2001-02-06 | Applied Materials, Inc. | Apparatus for substrate temperature measurement using a reflecting cavity and detector |
CN102455222A (zh) * | 2010-10-21 | 2012-05-16 | 甘志银 | 金属有机物化学气相沉积设备中实时测量薄膜温度的方法及测量装置 |
CN102889934A (zh) * | 2011-07-18 | 2013-01-23 | 甘志银 | 实时测量温度的方法 |
Non-Patent Citations (2)
Title |
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孙元等: "基于彩色CCD的比色测温校正方法", 《仪器仪表学报》 * |
朱剑华等: "基于比色测温的瞬态高温测试方法及系统实现", 《自动化与仪表》 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104697637A (zh) * | 2013-12-06 | 2015-06-10 | 北京智朗芯光科技有限公司 | 一种薄膜生长的实时测温方法 |
CN104697637B (zh) * | 2013-12-06 | 2018-12-07 | 北京智朗芯光科技有限公司 | 一种薄膜生长的实时测温方法 |
CN106128978A (zh) * | 2016-07-21 | 2016-11-16 | 无锡宏纳科技有限公司 | 可查看集成电路制造过程的装置 |
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Inventor after: Yan Dong Inventor after: Ma Tiezhong Inventor after: Wang Linzi Inventor after: Liu Jianpeng Inventor after: Jiao Hongda Inventor before: Yan Dong Inventor before: Li Chengmin Inventor before: Wang Linzi Inventor before: Liu Jianpeng Inventor before: Jiao Hongda Inventor before: Zhang Tang Inventor before: Ma Xiaochao |
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