CN104677953A - 一种快速检测黑心片的方法 - Google Patents
一种快速检测黑心片的方法 Download PDFInfo
- Publication number
- CN104677953A CN104677953A CN201510089111.9A CN201510089111A CN104677953A CN 104677953 A CN104677953 A CN 104677953A CN 201510089111 A CN201510089111 A CN 201510089111A CN 104677953 A CN104677953 A CN 104677953A
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- Prior art keywords
- silicon rod
- probe
- rod slicing
- sheet
- slicing
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- 238000000034 method Methods 0.000 title claims abstract description 23
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 60
- 239000010703 silicon Substances 0.000 claims abstract description 60
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 51
- 239000000523 sample Substances 0.000 claims description 38
- 239000002184 metal Substances 0.000 claims description 27
- 238000001514 detection method Methods 0.000 claims description 12
- 150000003376 silicon Chemical class 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 5
- 239000012141 concentrate Substances 0.000 claims description 3
- 238000012360 testing method Methods 0.000 abstract description 6
- 230000007613 environmental effect Effects 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000010998 test method Methods 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
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Claims (4)
Priority Applications (1)
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CN201510089111.9A CN104677953B (zh) | 2015-02-27 | 2015-02-27 | 一种快速检测黑心片的方法 |
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CN201510089111.9A CN104677953B (zh) | 2015-02-27 | 2015-02-27 | 一种快速检测黑心片的方法 |
Publications (2)
Publication Number | Publication Date |
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CN104677953A true CN104677953A (zh) | 2015-06-03 |
CN104677953B CN104677953B (zh) | 2018-01-30 |
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CN201510089111.9A Expired - Fee Related CN104677953B (zh) | 2015-02-27 | 2015-02-27 | 一种快速检测黑心片的方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108417479A (zh) * | 2018-03-16 | 2018-08-17 | 邢台晶龙电子材料有限公司 | 一种激光打码判别硅片分类的方法 |
Citations (9)
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US3287637A (en) * | 1962-07-17 | 1966-11-22 | Siemens Ag | High frequency current means including capacitive probe members for determining the electrical resistance of a semiconductor layer |
US3676775A (en) * | 1971-05-07 | 1972-07-11 | Ibm | Method for measuring resistivity |
US4266186A (en) * | 1978-03-02 | 1981-05-05 | Mahle Gmbh | Method of testing silicon content in aluminium alloys |
JPS61294347A (ja) * | 1985-06-24 | 1986-12-25 | Mitsubishi Heavy Ind Ltd | 被膜診断装置 |
JP2001274211A (ja) * | 2000-03-27 | 2001-10-05 | Shin Etsu Handotai Co Ltd | 抵抗率測定方法 |
CN101894776A (zh) * | 2009-05-21 | 2010-11-24 | 中芯国际集成电路制造(上海)有限公司 | 测量电阻变化检测氮掺杂浓度的方法 |
CN102313865A (zh) * | 2011-07-20 | 2012-01-11 | 浙江尖山光电股份有限公司 | 一种黑心硅片的快速检测方法 |
CN102809586A (zh) * | 2012-08-21 | 2012-12-05 | 安阳市凤凰光伏科技有限公司 | 多晶硅锭的质量检验方法 |
CN203055872U (zh) * | 2012-12-13 | 2013-07-10 | 苏州中导光电设备有限公司 | 太阳能硅片及电池片缺陷检测系统 |
-
2015
- 2015-02-27 CN CN201510089111.9A patent/CN104677953B/zh not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3287637A (en) * | 1962-07-17 | 1966-11-22 | Siemens Ag | High frequency current means including capacitive probe members for determining the electrical resistance of a semiconductor layer |
US3676775A (en) * | 1971-05-07 | 1972-07-11 | Ibm | Method for measuring resistivity |
US4266186A (en) * | 1978-03-02 | 1981-05-05 | Mahle Gmbh | Method of testing silicon content in aluminium alloys |
JPS61294347A (ja) * | 1985-06-24 | 1986-12-25 | Mitsubishi Heavy Ind Ltd | 被膜診断装置 |
JP2001274211A (ja) * | 2000-03-27 | 2001-10-05 | Shin Etsu Handotai Co Ltd | 抵抗率測定方法 |
CN101894776A (zh) * | 2009-05-21 | 2010-11-24 | 中芯国际集成电路制造(上海)有限公司 | 测量电阻变化检测氮掺杂浓度的方法 |
CN102313865A (zh) * | 2011-07-20 | 2012-01-11 | 浙江尖山光电股份有限公司 | 一种黑心硅片的快速检测方法 |
CN102809586A (zh) * | 2012-08-21 | 2012-12-05 | 安阳市凤凰光伏科技有限公司 | 多晶硅锭的质量检验方法 |
CN203055872U (zh) * | 2012-12-13 | 2013-07-10 | 苏州中导光电设备有限公司 | 太阳能硅片及电池片缺陷检测系统 |
Non-Patent Citations (6)
Title |
---|
孙以材 等: "《电阻率测试理论与实践》", 31 March 2011, 冶金工业出版社 * |
张厥宗: "《硅单晶抛光片的加工技术》", 31 August 2005, 化学工业出版社 * |
扩展电阻技术;陆逢涛;《半导体技术》;19871031(第5期);47-54 * |
接触电阻和扩展电阻测量方法的研究;茅保华;《固体电子学研究与进展》;19840531;第4卷(第2期);65-67 * |
茅保华: "接触电阻和扩展电阻测量方法的研究", 《固体电子学研究与进展》 * |
陆逢涛: "扩展电阻技术", 《半导体技术》 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108417479A (zh) * | 2018-03-16 | 2018-08-17 | 邢台晶龙电子材料有限公司 | 一种激光打码判别硅片分类的方法 |
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Publication number | Publication date |
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CN104677953B (zh) | 2018-01-30 |
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CB03 | Change of inventor or designer information |
Inventor after: Liang Ling Inventor after: Zhao Kewei Inventor after: Luo Xiaobin Inventor after: Dong Hao Inventor after: Zhang Zhidong Inventor after: Wang Ying Inventor before: Liu Jin Inventor before: Dong Jianming Inventor before: Luo Xiaobin Inventor before: Dong Hao Inventor before: Zhang Zhidong |
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Granted publication date: 20180130 |