CN104634437A - Dual-Fano resonant feature array for symmetrical nano-rod tripolymer and sensing application thereof - Google Patents
Dual-Fano resonant feature array for symmetrical nano-rod tripolymer and sensing application thereof Download PDFInfo
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- CN104634437A CN104634437A CN201510040607.7A CN201510040607A CN104634437A CN 104634437 A CN104634437 A CN 104634437A CN 201510040607 A CN201510040607 A CN 201510040607A CN 104634437 A CN104634437 A CN 104634437A
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Abstract
The invention discloses a dual-Fano resonant feature array for a symmetrical nano-rod tripolymer and sensing application thereof. Over two nano-rod tripolymer structural units are uniformly arranged on a glass substrate; the nano-rod tripolymer structural units are provided with three identical nano-rods among which the distances are unequal respectively; the periods Px and Py of each nano-rod tripolymer structural unit in a direction x and a direction y are 280 nanometers; the intervals among the three nano-rods are G1=12 nanometers, and G2=8 nanometers respectively. According to the dual-Fano resonant feature array, different intervals are set between adjacent nano-rods, so that the LSPR (Localized Surface Plasmon Resonance) mode coupling degrees of adjacent nano-rods are different, and an array with a dual-Fano resonant feature is obtained; moreover, the metal nano-rod tripolymer array has dual-Fano resonance, so that the sensing quality factor is increased greatly, and the dual-fano resonant feature array can be applied to a multi-wavelength sensor.
Description
Technical field
The invention belongs to optical sensor field, particularly relate to a kind of array and the Application in Sensing thereof with two Fano resonance characteristics.
Background technology
Based on the large step development of micro-nano structure processing technology in recent years, local surfaces plasmon resonance (Localized Surface Plasmon Resonance, the LSPR) effect of metal Nano structure becomes focus and the emphasis of research.The surperficial free electron of metal Nano structure and the resonance effects of outside light field, make Near-field optical field greatly be strengthened.LSPR effect makes light signal in the enterprising row relax of nanoscale and transmission, thus can be widely used in the research and development of the devices such as biochemical sensitive, waveguide, antenna.
On this basis, the Fano resonance technique based on LSPR effect is also studied and is developed.The Fano line style that resonates is essentially the bright mould of the LSPR with high radiation loss and the interference coupling of the dark mould of LSPR with Low emissivity loss, it is advantageous that the arrowband of its resonance line style, thus substantially increases resonance quality factor.Asymmetric nanostructured is used to Fano resonance the earliest, as asymmetrical donut/cylindrical cavity (F.Hao, Y.Sonnerfraud, P.V.Dorpe, et al., Symmetry breaking in plasmonic nanocavities:Subradiant LSPR sensing and a tunable Fano resonance, Nano Lett., 2008,8,3983-3988.), after this, in nanometer rods polymkeric substance, also can obtain Fano resonance line style (see Chinese invention patent CN104061997A).
Further, the multiple Fano resonance based on LSPR effect is also studied in recent years and is realized.Nanometer rods is embedded in U-shaped metal nano split ring, unequal-interval between split ring and metal bar can cause two Fano resonance line style (J.Q.Wang, C.Z.Fan, J.N.He, et al., Double Fano resonances due to interplay of electric and magnetic plasmon modes in planar plasmonic structure with high sensing sensitivity, Optics Express, 2013,21 (2), 2236-2244.).The haptamer of metal openings nano-rings then can obtain three Fano resonance (S.D.Liu of high light intensity, Z.Yang, R.P.Liu, et al., Multiple Fano resonances in plasmonic heptamer clusters composed of split nanorings, ACS Nano, 2012,6 (7), 6260-6271.).Based on LSPR effect, Fano resonant wavelength is limited by external agency environment, and therefore, multiple Fano resonant wavelength can be used for multi-wavelength sensing, filtering etc., substantially increases the dirigibility of device.
Summary of the invention
The invention provides a kind of edge-to-edge's symmetric form nanometer rods tripolymer array structure, this array can be used for obtaining two Fano resonance spectrum, and has higher sensing quality factor, can be applicable to Multiple-wavelength Sensor.
In order to achieve the above object.The technical solution used in the present invention is:
A kind of symmetric form nanometer rods trimerical pair of Fano resonance characteristics array, it is characterized in that: on the glass substrate, evenly be placed with two or more nanometer rods trimeric structural unit, described nanometer rods trimeric structural unit has three identical nanometer rods respectively, the interval Unequal distance wherein between three nanometer rods.
Further, described nanometer rods trimeric structural unit is edge-to-edge's arrangement.
Further, described nanometer rods trimeric structural unit is four, and nanometer rods trimeric structural unit is 280nm at cycle Px and Py in x and y direction.
Further, between three described nanometer rods every being respectively G1=12nm, G2=8nm.
Further, described nanometer rods material adopts gold, uses electron beam lithography to be prepared in described substrate of glass.
Further, described electron beam lithography comprises the following steps, by clean for substrate of glass ultrasonic cleaning; Even spin coating electron beam lithography glue on the glass cleaned; On etching glue, electron beam etches the mask of nanometer rods tripolymer array pattern; Gold evaporation film on mask; Wash away the mask that etching glue is made, gold nanorods tripolymer array can be obtained.
Further, above-described golden film thickness is 20nm, and length is 140nm, and width is 40nm.
Further, the area of described nanometer rods tripolymer array is 50 μm of X 50 μm.
Further, incident light is by foreign medium vertical irradiation in nanometer rods tripolymer cell array, and direction of an electric field distribution is parallel to the minor axis (y direction: Ey) of nanometer rods.
Symmetric form nanometer rods of the present invention trimerical pair of Fano resonance characteristics array can be used for optical sensor.
The invention has the beneficial effects as follows, the present invention is by arranging different spacing to adjacent nano rod, the degree of coupling that the middle part of adjacent nano rod is occurred is different, obtain the array with two Fano resonance characteristicss, and due to two Fano resonance of metal nano-rod tripolymer array, its sensing quality factor are strengthened greatly, can be applicable to Multiple-wavelength Sensor.
Accompanying drawing explanation
Fig. 1 is the structural representation of gold nanorods tripolymer array of the present invention.
Fig. 2 is the enlarged diagram of gold nanorods trimeric structural unit of the present invention.
Fig. 3 is the Spectral Extinction of gold nanorods tripolymer array of the present invention.
Fig. 4 is the sensing characteristics of gold nanorods tripolymer array of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described.
Fig. 1 shows edge-to-edge's symmetric form nanometer rods tripolymer array, in substrate of glass 1, nanometer rods tripolymer 2,3,4 and 5 is evenly arranged, and (the trimerical number of nanometer rods can be arbitrarily, herein by 4 trimerical periodicity of signal), nanometer rods material is gold, and foreign medium is testing environment (original state is air).Incident light is by foreign medium vertical irradiation on glass surface, and direction of an electric field distribution is parallel to the minor axis (y direction: Ey) of nanometer rods.Each nanometer rods tripolymer is as a unit, and cycle (center to center) Px and Py in itself x and y direction is 280nm.
In each gold nanorods trimeric structural unit, three nanometer rods are identical, its size as shown in Figure 2: the width in the thickness in gold nanorods z direction to be the length in T=20nm, x direction be L=140nm, y direction is W=40nm.The trimerical interval in y direction is respectively G1=12nm, G2=8nm.
As shown in Figure 3, the Spectral Extinction of edge-to-edge's symmetric form gold nanorods tripolymer array reaches peak value in 770,890 and 1160nm place, and its respective extinction value (relative to trough) reaches 45%, 30% and 50% respectively.The outstanding advantage of the resonance peak at 770nm and 890nm place is that its full width at half maximum (Full Width at Half Maximum, FWHM) is little, is only about 50nm.770 and 890nm place, electric field is strong middle part and the summit that must be gathered in two adjacent nanometer rods respectively, and in nanometer rods, form the cyclic currents that both direction is contrary, in the both sides of adjacent nano rod, inner at cyclic currents, two magnetic dipoles oppositely distribute.So 770 and the resonance peak at 890nm place be the magnetic resonance of LSP level Four resonance peak excitation nano rod, the i.e. dark mould of LSP.At 1160nm place, the bright mould of LSPR can directly be excited by incident field, and direction of current is basically parallel to extra electric field direction.Be coupled at the middle part of adjacent nano rod, and due to interrod spacing G1=12nm, G2=8nm, its degree of coupling is different, therefore, two Fano resonance may be interpreted as the interference coupling of the bright mould of LSP electric resonance and two dark moulds of magnetic resonance.
Fig. 4 gives the sensing characteristics of gold nanorods tripolymer array.Along with the increase of foreign medium refractive index n, all there is red shift in all resonance peaks.The dark mould of LSPR magnetic oscillation (770 and 890nm place resonance peak) and the refractive index sensitivity (RIS) of the bright mould of electric oscillation (1160nm resonance peak) are respectively 434,722 and 4228RIU/nm.And due to Fano resonance, full width at half maximum (FWHM) the only 50nm of the dark mould of array structure LSPR magnetic resonance.If the quality factor of metal Nano structure (Q) are: RIS/FWHM, then the Q value that the Q value of the bright mould of LSPR electric resonance is about the dark mould of 6, LSPR magnetic resonance then can reach 9 and 14 respectively.Therefore, due to two Fano resonance of metal nano-rod tripolymer array, its sensing quality factor are strengthened greatly.
The present invention uses electron beam lithography (EBL) method to obtain structure shown in Fig. 1; And in the wavelength coverage of 600-1800nm, the Spectral Extinction of the gold nano principal column array utilizing spectrophotometer measurement to prepare on the glass substrate.Illustrate with 4 nanometer rods tripolymers 2,3,4,5 in Fig. 1, in actual fabrication, consider cost of manufacture and spectral detection complexity, in substrate of glass, the area of nanometer rods tripolymer array can be chosen for 50 μm of X 50 μm, four only for representing the periodicity of structure in figure mono-, in fact, in the substrate of glass of area 50 μm X50 μm, trimeric structural unit number is far longer than 4.
Nanometer rods material of the present invention adopts gold, and the flow process of the standby edge-to-edge's nanometer rods tripolymer array on the glass substrate of utilization electron beam lithography (EBL) legal system is: by clean for substrate of glass 1 ultrasonic cleaning; Even spin coating electron beam lithography glue in the substrate of glass 1 cleaned; On etching glue, electron beam etches the mask of the nanometer rods tripolymer array pattern shown in Fig. 1; The golden film that evaporation 20nm is thick on mask; Wash away the mask that etching glue is made, gold nanorods tripolymer array can be obtained.
Claims (10)
1. symmetric form nanometer rods trimerical pair of Fano resonance characteristics array, it is characterized in that: on the glass substrate, evenly be placed with two or more nanometer rods trimeric structural unit, described nanometer rods trimeric structural unit has three identical nanometer rods respectively, the interval Unequal distance wherein between three nanometer rods.
2. symmetric form nanometer rods trimerical pair of Fano resonance characteristics array as claimed in claim 1, is characterized in that: described nanometer rods trimeric structural unit is edge-to-edge's arrangement.
3. symmetric form nanometer rods trimerical pair of Fano resonance characteristics array as claimed in claim 1 or 2, it is characterized in that: described nanometer rods trimeric structural unit is four, nanometer rods trimeric structural unit is 280nm at cycle Px and Py in x and y direction.
4. symmetric form nanometer rods trimerical pair of Fano resonance characteristics array as claimed in claim 1, is characterized in that: between three described nanometer rods every being respectively G1=12nm, G2=8nm.
5. symmetric form nanometer rods trimerical pair of Fano resonance characteristics array as claimed in claim 1, is characterized in that: described nanometer rods material adopts gold, uses electron beam lithography to be prepared in described substrate of glass.
6. symmetric form nanometer rods trimerical pair of Fano resonance characteristics array as claimed in claim 5, is characterized in that: described electron beam lithography comprises the following steps, by clean for substrate of glass ultrasonic cleaning; Even spin coating electron beam lithography glue on the glass cleaned; On etching glue, electron beam etches the mask of nanometer rods tripolymer array pattern; Gold evaporation film on mask; Wash away the mask that etching glue is made, gold nanorods tripolymer array can be obtained.
7. symmetric form nanometer rods trimerical pair of Fano resonance characteristics array as claimed in claim 6, it is characterized in that: above-described golden film thickness is 20nm, length is 140nm, and width is 40nm.
8. symmetric form nanometer rods trimerical pair of Fano resonance characteristics array as claimed in claim 6, is characterized in that: the area of described nanometer rods tripolymer array is 50 μm of X50 μm.
9. the Application in Sensing of symmetric form nanometer rods trimerical pair of Fano resonance characteristics array, is characterized in that: have as arbitrary in claim 1-8 as described in array structure, this array structure can be used for optical sensor.
10. the Application in Sensing of symmetric form nanometer rods trimerical pair of Fano resonance characteristics array as claimed in claim 9, it is characterized in that: incident light by foreign medium vertical irradiation in symmetric form nanometer rods tripolymer array surface, direction of an electric field distribution is parallel to the minor axis of nanometer rods, obtains two Fano resonance line; Two Fano resonance is along with the increase of foreign medium refractive index, and all resonance peaks all red shift occur.
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| CN105651400A (en) * | 2016-02-02 | 2016-06-08 | 浙江大学 | Ultrahigh-precision wavelength resolver based on Fano resonance |
| CN105973846A (en) * | 2016-05-03 | 2016-09-28 | 天津理工大学 | MIM type nanorod dimer capable of realizing triple Fano resonance |
| CN107229087A (en) * | 2017-05-05 | 2017-10-03 | 天津理工大学 | A kind of achievable broadband phasmon induces the nanometer rods paradigmatic structure of transparent window |
| CN107478249A (en) * | 2017-08-01 | 2017-12-15 | 深圳大学 | The fan-shaped nano-sensor of Fano resonance can be achieved |
| CN108872151A (en) * | 2017-09-29 | 2018-11-23 | 郑州大学 | It is a kind of based on T shape to and nano wire pair optical sensor |
| CN109239013A (en) * | 2018-10-16 | 2019-01-18 | 深圳大学 | Fano resonance MHM super-surface high-sensitivity background refractive index sensor |
| CN109669242A (en) * | 2019-01-04 | 2019-04-23 | 深圳大学 | A kind of diagonal Mode interference FANO resonant structure of photonic crystal waveguide |
| CN113030026A (en) * | 2021-03-07 | 2021-06-25 | 天津理工大学 | LSPR multi-wavelength narrow-band tunable sensor |
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| CN109239013A (en) * | 2018-10-16 | 2019-01-18 | 深圳大学 | Fano resonance MHM super-surface high-sensitivity background refractive index sensor |
| CN109239013B (en) * | 2018-10-16 | 2022-05-13 | 深圳大学 | Fano resonance MHM super-surface high-sensitivity background refractive index sensor |
| CN109669242A (en) * | 2019-01-04 | 2019-04-23 | 深圳大学 | A kind of diagonal Mode interference FANO resonant structure of photonic crystal waveguide |
| CN109669242B (en) * | 2019-01-04 | 2021-01-01 | 深圳大学 | FANO resonance structure for photonic crystal waveguide diagonal mode interference |
| CN113030026A (en) * | 2021-03-07 | 2021-06-25 | 天津理工大学 | LSPR multi-wavelength narrow-band tunable sensor |
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