CN104630900A - Surface texturing processing method of monocrystalline silicon solar cell - Google Patents
Surface texturing processing method of monocrystalline silicon solar cell Download PDFInfo
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- CN104630900A CN104630900A CN201310562781.9A CN201310562781A CN104630900A CN 104630900 A CN104630900 A CN 104630900A CN 201310562781 A CN201310562781 A CN 201310562781A CN 104630900 A CN104630900 A CN 104630900A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a surface texturing processing method of a monocrystalline silicon solar cell. The processing method comprises the following steps: cleaning oil stains and finger prints on a surface of a monocrystalline silicon wafer by ultrasonic; surface texturing, which comprises putting the ultrasonic cleaned monocrystalline silicon wafer into a texturing tank which contains a sodium hydroxide solution having a mass volume percentage of 2%, performing surface corrosion texturing processing; and adding TS4 as a texturing catalyst into the sodium hydroxide solution to increase a silicon surface corrosion speed and uniformity of surface corrosion; removing an oxide from the surface of the monocrystalline silicon wafer, and cleaning the monocrystalline silicon wafer by using a hydrofluoric acid solution (a concentration of 49%) with a volume percentage of 16%; removing metal ions, and cleaning the monocrystalline silicon wafer by using a hydrochloric acid solution (a concentration of 37%) with a volume percentage of 28%; and drying the final monocrystalline silicon wafer with a pyramid-shaped surface. According to the invention, a surface texturing speed of the monocrystalline silicon wafer is increased; uniformity of surface texturing of the monocrystalline silicon wafer is improved; and then monocrystalline silicon solar cell prepared by the method is higher in photoelectric conversion efficiency of the solar cell and good in stability. The surface texturing processing method is a better choice for application of photovoltaic power generation.
Description
Technical field
The present invention relates to monocrystaline silicon solar cell manufacturing technology field, particularly relate to a kind of monocrystaline silicon solar cell surface wool manufacturing treatment process.
Background technology
The preparation of monocrystalline silicon piece texture used for solar batteries is the anisotropic etch utilizing silicon, forming millions of four sides side's cones at every square centimeter of silicon face is also pyramid structure, due to the multiple reflections of incident light on surface and refraction, add the absorption of light, improve short-circuit current and the efficiency of conversion of battery.
The anisotropic etchant of silicon uses the basic solution of heat usually, available alkali has sodium hydroxide, potassium hydroxide, lithium hydroxide and quadrol etc., most concentration of cheapness that uses is about the dilute solution of sodium hydroxide of 1% to prepare matte silicon, corrosion temperature is 70-85 DEG C, in order to obtain uniform matte, also should consider in the solution and add alcohols if ethanol and Virahol etc. are as complexing agent, to accelerate the corrosion speed of silicon, before preparing matte, silicon chip first must carry out preliminary surface corrosion, with alkalescence or acid etching solution etching off about 20 ~ 25 μm, after corrosion matte, carry out general matting, the silicon chip prepared through surface all should not be stored for a long time in water, with soil resistant, should diffusion as early as possible.
The preparation method of above-mentioned monocrystalline silicon piece makes the matte of monocrystalline silicon piece, when being finally used in solar electrical energy generation, solar panel photoelectric transformation efficiency difference is injected larger under appearing in same solar ray condition, and its photoelectric transformation efficiency is unstable, makes solar cell power generation effect barely satisfactory.
Summary of the invention
In order to overcome above-mentioned the deficiencies in the prior art, the invention provides a kind of monocrystaline silicon solar cell surface wool manufacturing treatment process, shortening the surface wool manufacturing time of monocrystalline solar silicon wafers, and add the stability of the photoelectric transformation efficiency of monocrystaline silicon solar cell.
The technical solution adopted in the present invention is: a kind of monocrystaline silicon solar cell surface wool manufacturing treatment process, comprises the following steps: the first step: cleaning, with greasy dirt and the finger-marks on ultrasonic cleaning monocrystalline silicon piece surface, improves the quality after fine-hair maring using monocrystalline silicon slice; Second step: surface wool manufacturing, monocrystalline silicon piece after ultrasonic cleaning is put into system and subtracts groove, carry out surface corrosion making herbs into wool process, the sodium hydroxide solution that quality volume percent is 2% is configured with in texturing slot, also be configured with TS4 making herbs into wool catalyzer in sodium hydroxide solution, use TS4 making herbs into wool catalyzer to increase the speed of silicon chip surface corrosion and the homogeneity of surface corrosion; 3rd step: remove monocrystalline silicon sheet surface oxide compound, the monocrystalline silicon piece that surface wool manufacturing is terminated put into volume percent be 16% hydrofluoric acid (concentration 49%) solution clean, clean rear clear water and cleaned one time again, the hydrofluoric acid solution of cleaning monocrystalline silicon sheet surface remnants; 4th step: remove metal ion, it is that 28% hydrochloric acid (concentration 37%) solution cleans that the monocrystalline silicon piece after being cleaned by hydrofluoric acid solution puts into volume percent, has cleaned rear clear water and has cleaned one time again, the hydrochloric acid soln of cleaning monocrystalline silicon sheet surface remnants; 5th step: dry surface and formed pyramidal monocrystalline silicon piece, making herbs into wool terminates.
Further improvement of the present invention is: its volume percent of TS4 catalyzer that second step uses is 1%, and optimum velocity and the surface corrosion that can obtain silicon chip surface corrosion have good homogeneity.
Further improvement of the present invention is: the 5th step adopts centrifugal drier to dry monocrystalline silicon piece, and making herbs into wool terminates, because the monocrystalline silicon piece prepared through surface all should not be stored for a long time in water, in case tarnish, and should diffusion as early as possible.
Compared with prior art, the invention has the beneficial effects as follows: 1. adopt quality volume percent to be the sodium hydroxide solution of 2%, and configure volume percent be 1% TS4 replace before Virahol as catalyzer, add the speed of monocrystalline silicon sheet surface making herbs into wool, and improve the homogeneity of monocrystalline silicon sheet surface making herbs into wool;
2. the monocrystalline silicon piece after terminating by sodium-hydroxide treatment, put into volume percent be 16% hydrofluoric acid (concentration 49%) solution clean, remove the oxide compound of monocrystalline silicon sheet surface well;
3. after the oxide removal of monocrystalline silicon sheet surface, monocrystalline silicon piece being inserted volume percent is clean in 28% hydrochloric acid (concentration 37%) solution to dry again, the good monocrystalline silicon piece of homogeneity can be obtained, the monocrystalline silicon piece solar cell photoelectric efficiency of conversion that this method makes is higher, and its good stability, for photovoltaic generation, it is good selection.
Method of the present invention, adds the speed of monocrystalline silicon sheet surface making herbs into wool, and improves the homogeneity of monocrystalline silicon sheet surface making herbs into wool, the monocrystalline silicon piece solar cell photoelectric efficiency of conversion that application the method makes is higher, good stability, for photovoltaic generation, is good selection.
Embodiment
In order to deepen the understanding of the present invention, below in conjunction with embodiment, the present invention is further described, and this embodiment, only for explaining the present invention, not forming protection scope of the present invention and limiting.
A kind of monocrystaline silicon solar cell surface wool manufacturing treatment process, comprises the following steps: the first step: cleaning, with greasy dirt and the finger-marks on ultrasonic cleaning monocrystalline silicon piece surface, improves the quality after fine-hair maring using monocrystalline silicon slice; Second step: surface wool manufacturing, monocrystalline silicon piece after ultrasonic cleaning is put into system and subtracts groove, carry out surface corrosion making herbs into wool process, the sodium hydroxide solution that quality volume percent is 2% is configured with in texturing slot, also be configured with TS4 making herbs into wool catalyzer in sodium hydroxide solution, use TS4 making herbs into wool catalyzer to increase the speed of silicon chip surface corrosion and the homogeneity of surface corrosion; 3rd step: remove monocrystalline silicon sheet surface oxide compound, the monocrystalline silicon piece that surface wool manufacturing is terminated put into volume percent be 16% hydrofluoric acid (concentration 49%) solution clean, clean rear clear water and cleaned one time again, the hydrofluoric acid solution of cleaning monocrystalline silicon sheet surface remnants; 4th step: remove metal ion, it is that 28% hydrochloric acid (concentration 37%) solution cleans that the monocrystalline silicon piece after being cleaned by hydrofluoric acid solution puts into volume percent, has cleaned rear clear water and has cleaned one time again, the hydrochloric acid soln of cleaning monocrystalline silicon sheet surface remnants; 5th step: dry surface and formed pyramidal monocrystalline silicon piece, making herbs into wool terminates.
A kind of monocrystaline silicon solar cell surface wool manufacturing treatment process, second step adopts quality volume percent to be the sodium hydroxide solution of 2%, and configure volume percent be 1% TS4 replace before Virahol as catalyzer, add the speed of monocrystalline silicon sheet surface making herbs into wool, and improve the homogeneity of monocrystalline silicon sheet surface making herbs into wool.
A kind of monocrystaline silicon solar cell surface wool manufacturing treatment process, the 5th step adopts centrifugal drier to dry monocrystalline silicon piece, and making herbs into wool terminates, because the monocrystalline silicon piece prepared through surface all should not be stored for a long time in water, in case tarnish, should diffusion as early as possible.
Method of the present invention, adds the speed of monocrystalline silicon sheet surface making herbs into wool, and improves the homogeneity of monocrystalline silicon sheet surface making herbs into wool, the monocrystalline silicon piece solar cell photoelectric efficiency of conversion that application the method makes is higher, good stability, for photovoltaic generation, is good selection.
What embodiments of the invention were announced is preferred embodiment, but is not limited thereto, those of ordinary skill in the art; very easily according to above-described embodiment, understand spirit of the present invention, and make different amplifications and change; but only otherwise depart from spirit of the present invention, all in protection scope of the present invention.
Claims (5)
1. a monocrystaline silicon solar cell surface wool manufacturing treatment process, comprises the following steps: the first step: cleaning, with greasy dirt and the finger-marks on ultrasonic cleaning monocrystalline silicon piece surface;
Second step: surface wool manufacturing, monocrystalline silicon piece after ultrasonic cleaning is put into system and subtracts groove, make to subtract in groove and be configured with the sodium hydroxide solution that quality volume percent is 2%, also be configured with TS4 making herbs into wool catalyzer in described sodium hydroxide solution, described TS4 increases the speed of silicon chip surface corrosion and the homogeneity of surface corrosion;
3rd step: remove monocrystalline silicon sheet surface oxide compound, the monocrystalline silicon piece that surface wool manufacturing is terminated put into volume percent be 16% hydrofluoric acid (concentration 49%) solution clean, cleaned rear clear water and cleaned one time again;
4th step: remove metal ion, it is that 28% hydrochloric acid (concentration 37%) solution cleans that the monocrystalline silicon piece after being cleaned by hydrofluoric acid solution puts into volume percent, has cleaned rear clear water and has cleaned one time again;
5th step: dry surface and formed pyramidal monocrystalline silicon piece, making herbs into wool terminates.
2. a kind of monocrystaline silicon solar cell surface wool manufacturing treatment process according to claim 1, is characterized in that: its volume percent of TS4 catalyzer that second step uses is 1%.
3. a kind of monocrystaline silicon solar cell surface wool manufacturing treatment process according to claim 1, is characterized in that: the volume percent of the hydrofluoric acid solution that the 3rd step uses is 16%, and wherein the concentration of hydrofluoric acid solution is 49%, pickling time 5min.
4. a kind of monocrystaline silicon solar cell surface wool manufacturing treatment process according to claim 1, is characterized in that: the volume percent of the hydrochloric acid soln that the 4th step uses is 28%, and wherein the concentration of hydrochloric acid soln is 37%, pickling time 5min.
5. a kind of monocrystaline silicon solar cell surface wool manufacturing treatment process according to claim 1, is characterized in that: the monocrystalline silicon piece that the 5th step adopts centrifugal drier drying making herbs into wool to terminate.
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| CN105914259A (en) * | 2016-05-31 | 2016-08-31 | 宁夏银星能源光伏发电设备制造有限公司 | Fast cleaning and texturing process for diamond wire cut mono-crystalline silicon pieces |
| CN106087070A (en) * | 2016-07-11 | 2016-11-09 | 吕铁铮 | A kind of method of diamond wire silicon chip recrystallization wet-method etching |
| CN106319636A (en) * | 2016-09-23 | 2017-01-11 | 西安黄河光伏科技股份有限公司 | Preparation method for improving fabric surface of single crystalline silicon solar cell and preparation tool |
| WO2017063265A1 (en) * | 2015-10-12 | 2017-04-20 | 常州捷佳创精密机械有限公司 | Monocrystal and polycrystal texturing method |
| CN108247233A (en) * | 2017-12-13 | 2018-07-06 | 上海华峰新材料研发科技有限公司 | Preparation method of the alkali cleaning without brazing flux or vacuum brazing plate |
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| CN106319636A (en) * | 2016-09-23 | 2017-01-11 | 西安黄河光伏科技股份有限公司 | Preparation method for improving fabric surface of single crystalline silicon solar cell and preparation tool |
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Application publication date: 20150520 |