CN104614850B - Large-focus static photoelectric microscope - Google Patents
Large-focus static photoelectric microscope Download PDFInfo
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- CN104614850B CN104614850B CN201510100855.6A CN201510100855A CN104614850B CN 104614850 B CN104614850 B CN 104614850B CN 201510100855 A CN201510100855 A CN 201510100855A CN 104614850 B CN104614850 B CN 104614850B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/02—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors
- G02B23/10—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors reflecting into the field of view additional indications, e.g. from collimator
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/361—Optical details, e.g. image relay to the camera or image sensor
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/364—Projection microscopes
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Abstract
The invention relates to a large-focus static photoelectric microscope, particularly to a micron order optical system capable of being used for targeting measurement, and belongs to the field of photology. The photoelectric microscope comprises a lighting source (1), an objective divided plate (2), a projection objective group (3), an imaging objective group (4), a prism (5), a first plane mirror (6), a second plane mirror (7), a steering objective group (8), a central light-penetrating plane mirror (9), an image sensor (10) and a photoelectric conversion device (11). Compared with the prior art, the large-focus static photoelectric microscope provided by the invention has the advantages of long working distance, strong disturbance resistance and low production cost, and can realize non-contact targeting; besides, because the optical parameters of the projection objective group (3) and the imaging objective group (4), for the photoelectric microscope are exactly the same, and a symmetrical structure is adopted, the purpose is easy to realize.
Description
Technical field
The present invention relates to a kind of big focal length static state photoelectric microscope is and in particular to a kind of micron order can be used for aiming at measurement
Optical system, belongs to optical field.
Background technology
The development of industrial technology aims at location technology to non-contact optical and proposes urgent needss.Application Optics are surveyed at present
Head, Optics sensitive lever, double, oblique beam lighting interfere aiming and reflective sight microscope directly to carry out aiming at all
Belong to located lateral to aim at.When they are used for longitudinal register aiming, the overwhelming majority in said system or instrument will become
Cannot work.And although general optical microscope system still carries out longitudinal register aiming, due to by the microscope depth of field
Impact, thus lead to its positioning collimating fault very big, be millimeter magnitude.This problem limits optical microscope system always and exists
Application in high accuracy measurement.
Content of the invention
The invention aims to overcoming existing point technique to there is a problem of that precision is low, a kind of big focal length is proposed static
Photoelectric microscope.This device makes pointing accuracy double using optical meanss, and operating distance is in more than 70mm.
The purpose of the present invention is achieved through the following technical solutions.
A kind of big focal length static state photoelectric microscope proposed by the present invention it is characterised in that: comprising: lighting source (1), mesh
Mark graticle (2), projection objective group (3), image-forming objective lens group (4), prism (5), the first plane mirror (6), the second plane mirror (7),
Turn to objective lens (8), center thang-kng plane mirror (9), imageing sensor (10) and photoelectric conversion device (11).
Lighting source (1) sends directional light and is irradiated on target graticle (2)；Target graticle (2) is transparent material, its
On have target pattern；The emergent ray of target graticle (2) incides on the first plane mirror (6)；The reflection of the first plane mirror (6)
Light becomes 90 degree of deflections with its incident ray；The reflection light of the first plane mirror (6) incides projection objective group (3)；Projection thing
The effect of microscope group (3) is to reduce n times to the target pattern on target graticle (2), n >=5；Projection objective group (3) is incident to it
Light enters line convergence；The emergent ray of projection objective group (3) is assembled after being imaged as picture point (12), and light enters image-forming objective lens group
(4).Described image-forming objective lens group (4) is identical with each assembly Optic structure parameter in projection objective group (3), using specular
Structure, picture point (12) is located at the optical axis center of projection objective group (3) and image-forming objective lens group (4).The work of described image-forming objective lens group (4)
With being that n times is amplified to picture point (12).
The emergent ray of image-forming objective lens group (4) enters the second plane mirror (7)；The reflection light of the second plane mirror (7) and its
Incident ray becomes 90 degree of deflections；The reflection light of the second plane mirror (7) incides prism (5)；The emergent ray of prism (5) enters
Center thang-kng plane mirror (9)；There is thang-kng pattern on center thang-kng plane mirror (9)；The emergent ray at center thang-kng plane mirror (9) enters
Enter photoelectric conversion device (11)；Photoelectric conversion device (11) converts optical signals to the signal of telecommunication, and judges the light of picture point (12)
After imaged objective lens (4), the second plane mirror (7) and prism (5), its imaging on center thang-kng plane mirror (9) and center
Whether the thang-kng pattern on thang-kng plane mirror (9) overlaps；If overlapped, export aiming symbol；If misaligned, export not
Aiming symbol；Meanwhile, the reflection light of center thang-kng plane mirror (9) returns to prism (5), and the reflection light of prism (5) enters
Turn to objective lens (8)；The effect turning to objective lens (8) is to carry out 180 degree deflection and convergence to its incident ray；Turn to objective lens
(8) emergent ray enters imageing sensor (10)；Imageing sensor (10) carries out display output to the optical signal receiving.
Described prism (5) is corner cube prism or block prism or Dove prism or means of reflecting prism.
The Optic structure parameter of described projection objective group (3) and image-forming objective lens group (4) includes: the curvature of lens element half
Footpath, lens center thickness and lens material species.
The numerical aperture of described projection objective group (3) and image-forming objective lens group (4) is between 0.2～0.3.
Described projection objective group (3) and image-forming objective lens group (4) are the flat achromatism class lens of image planes or apochromatism class
Object lens.
The focal length of described projection objective group (3) and image-forming objective lens group (4) is more than 35mm, and operating distance is more than 70mm.
Using the operating procedure that described big focal length static state photoelectric microscope carries out aiming at positioning it is:
Step 1: open lighting source (1)；Open imageing sensor (10) and photoelectric conversion device (11).
Step 2: measured object be aimed the optical axis parallel to projection objective group (3) or image-forming objective lens group (4) for the face (13)；
Step 3: make measured object is aimed face (13) perpendicular to the optical axis of projection objective group (3) and cross picture point (12)
Draw near on straight line and approach picture point (12)；In motor process, keep measured object is aimed face (13) all the time parallel to projection
Objective lens (3) or the optical axis of image-forming objective lens group (4).
When measured object is when being aimed face (13) and not reaching picture point (12) position, measured object be aimed face (13) to picture
The reflection light of point (12) sequentially pass through image-forming objective lens group (4), the second plane mirror (7), after prism (5), in center thang-kng plane
Mirror (9) is upper to be imaged；The emergent ray at center thang-kng plane mirror (9) enters photoelectric conversion device (11)；Photoelectric conversion device (11)
Convert optical signals to the signal of telecommunication, photoelectric conversion device (11) judge to draw the imaged objective lens of the light (4) of picture point (12), the
After two plane mirrors (7) and prism (5), it is logical in the imaging on center thang-kng plane mirror (9) with center thang-kng plane mirror (9)
Light pattern is misaligned, and therefore photoelectric conversion device (11) exports non-aiming symbol；The reflection light warp at center thang-kng plane mirror (9)
Prism (5) and steering objective lens (8) enter imageing sensor (10), and imageing sensor (10) shows that the light of picture point (12) passes through
After image-forming objective lens group (4), the second plane mirror (7), prism (5), its imaging on center thang-kng plane mirror (9) and center thang-kng
Thang-kng pattern on plane mirror (9) is misaligned.
When measured object be aimed face (13) reach picture point (12) position when, measured object be aimed face (13) to picture point
(12) reflection light sequentially pass through image-forming objective lens group (4), the second plane mirror (7), after prism (5), in center thang-kng plane mirror
(9) upper imaging；The emergent ray at center thang-kng plane mirror (9) enters photoelectric conversion device (11)；Photoelectric conversion device (11) will
Optical signal is converted to the signal of telecommunication, photoelectric conversion device (11) judge to draw the imaged objective lens of the light (4) of picture point (12), second
After plane mirror (7) and prism (5), its thang-kng in the imaging on center thang-kng plane mirror (9) with center thang-kng plane mirror (9)
Pattern registration, therefore photoelectric conversion device (11) export aiming symbol；The reflection light at center thang-kng plane mirror (9) is through prism
(5) and turn to objective lens (8) enter imageing sensor (10), imageing sensor (10) show picture point (12) light through imaging
After objective lens (4), the second plane mirror (7), prism (5), its imaging on center thang-kng plane mirror (9) and center thang-kng plane
Thang-kng pattern registration on mirror (9).
Operation through above-mentioned steps, you can complete the aiming positioning action being aimed face (13) to measured object.
Beneficial effect
Compared with the prior art a kind of big focal length static state photoelectric microscope proposed by the present invention relatively has the advantage that
1. this big focal length static state photoelectric microscope has long reach, strong antijamming capability, can achieve that noncontact aims at
Advantage with low production cost；
2. the projection objective group (3) of this device is identical with image-forming objective lens group (4) optical parametric and is tied using symmetrical expression
Structure, has the advantages that easy realization；
3. the arrangement increases pointing accuracy, can be used for high accuracy noncontact and aim at positioning, measure in micro structure, geometry
The aspects such as amount have important practical value.
Brief description
Fig. 1 is big focal length static state photoelectricity microscopical composition structural representation described in the specific embodiment of the invention；
Fig. 2 is to be shown using the principle that described big focal length static state photoelectric microscope is aimed in the specific embodiment of the invention
It is intended to；
Wherein, 1- lighting source, 2- target graticle, 3- projection objective group, 4- image-forming objective lens group, 5- prism, 6- first
Plane mirror, 7- second plane mirror, 8- turn to objective lens, 9- center thang-kng plane mirror, 10- imageing sensor, 11- opto-electronic conversion dress
Put, 12- picture point, 13- are aimed face.
Specific embodiment
With specific embodiment, the present invention is described in further detail below in conjunction with the accompanying drawings, but the invention is not limited in tool
Body embodiment.
Big focal length static state photoelectric microscope in the present embodiment, its structural representation is as shown in figure 1, comprising: illumination light
Source 1, target graticle 2, projection objective group 3, image-forming objective lens group 4, prism 5, the first plane mirror 6, the second plane mirror 7, steering thing
Microscope group 8, center thang-kng plane mirror 9, imageing sensor 10, photoelectric conversion device 11.
Lighting source 1 is gci direct current voltage reulation optical fiber source；Prism 5 is corner cube prism；Projection objective group 3 and image-forming objective lens
The numerical aperture of group 4 is 0.2；Projection objective group 3 and image-forming objective lens group 4 are the flat achromatism class lens of image planes, and focal length is
The object lens of 50mm, operating distance is 80mm.
Target pattern on target graticle 2 is identical with the thang-kng pattern form on center thang-kng plane mirror 9 and size phase
Deng.
Lighting source 1 sends directional light and is irradiated on target graticle 2；Target graticle 2 is transparent material；Target graduation
The emergent ray of plate 2 incides on the first plane mirror 6；The reflection light of the first plane mirror 6 becomes 90 degree of deflections with its incident ray；
The reflection light of the first plane mirror 6 incides projection objective group 3；The effect of projection objective group 3 is to the mesh on target graticle 2
Case of marking on a map reduces 10 times；Projection objective group 3 enters line convergence to its incident ray；The emergent ray of projection objective group 3 is converged to picture
After picture point 12, light enters image-forming objective lens group 4.Image-forming objective lens group 4 is complete with assembly Optic structure parameter each in projection objective group 3
Exactly the same, using mirror image, picture point 12 is located at the optical axis center of projection objective group 3 and image-forming objective lens group 4.Image-forming objective lens
The effect of group 4 is to amplify 10 times to picture point 12.
The emergent ray of image-forming objective lens group 4 enters the second plane mirror 7；The reflection light of the second plane mirror 7 and its incident illumination
Line becomes 90 degree of deflections；The reflection light of the second plane mirror 7 incides prism 5；The emergent ray of prism 5 enters center thang-kng plane
Mirror 9；The emergent ray of center thang-kng plane mirror 9 enters photoelectric conversion device 11；Photoelectric conversion device 11 converts optical signals to
The signal of telecommunication, and after judging light imaged objective lens 4, the second plane mirror 7 and the prism 5 of picture point 12, it is in center thang-kng plane
Whether the imaging on mirror 9 is overlapped with the thang-kng pattern on center thang-kng plane mirror 9；If overlapped, export aiming symbol；If
Misaligned, then export non-aiming symbol；Meanwhile, the reflection light of center thang-kng plane mirror 9 returns to prism 5, the reflection of prism 5
Light enters and turns to objective lens 8；The effect turning to objective lens 8 is to carry out 180 degree deflection and convergence to its incident ray；Turn to thing
The emergent ray of microscope group 8 enters imageing sensor 10；Imageing sensor 10 carries out display output to the optical signal receiving.
Using the operating procedure that described big focal length static state photoelectric microscope carries out aiming at positioning it is:
Step 1: open lighting source 1；Open imageing sensor 10 and photoelectric conversion device 11.
Step 2: measured object be aimed the optical axis parallel to projection objective group 3 or image-forming objective lens group 4 for the face 13；
Step 3: make measured object is aimed face 13 on the optical axis of projection objective group 3 straight line of mistake picture point 12
Draw near and approach picture point 12, as shown in Figure 2；In motor process, keep measured object is aimed face 13 all the time parallel to projection
Objective lens 3 or the optical axis of image-forming objective lens group 4.
When measured object is when being aimed face 13 and not reaching picture point 12 position, measured object be aimed face 13 to picture point 12
Reflection light sequentially passes through image-forming objective lens group 4, the second plane mirror 7, after prism 5, is imaged on center thang-kng plane mirror 9；Center
The emergent ray of thang-kng plane mirror 9 enters photoelectric conversion device 11；Photoelectric conversion device 11 converts optical signals to the signal of telecommunication, light
After electrical switching device 11 judges the light of picture point 12 imaged objective lens 4, the second plane mirror 7 and prism 5, it is put down in center thang-kng
Imaging on face mirror 9 is misaligned with the thang-kng pattern on center thang-kng plane mirror 9, and therefore photoelectric conversion device 11 exports and do not aim at
Signal；The reflection light of center thang-kng plane mirror 9 through prism 5 and turns to objective lens 8 entrance imageing sensor 10, imageing sensor
, after image-forming objective lens group (4), the second plane mirror (7), prism (5), it is in center thang-kng plane for the light of 10 display picture points 12
Imaging on mirror (9) is misaligned with the thang-kng pattern on center thang-kng plane mirror 9.
When measured object be aimed face 13 reach picture point 12 position when, measured object be aimed the reflection to picture point 12 for the face 13
Light sequentially passes through image-forming objective lens group 4, the second plane mirror 7, after prism 5, is imaged on center thang-kng plane mirror 9；Center thang-kng
The emergent ray of plane mirror 9 enters photoelectric conversion device 11；Photoelectric conversion device 11 converts optical signals to the signal of telecommunication, and photoelectricity turns
After changing device 11 judges the light of picture point 12 imaged objective lens 4, the second plane mirror 7 and prism 5, it is in center thang-kng plane mirror
Imaging on 9 and the thang-kng pattern registration on center thang-kng plane mirror 9, therefore photoelectric conversion device 11 output aiming symbol；In
The reflection light of heart thang-kng plane mirror 9 through prism 5 and turns to objective lens 8 entrance imageing sensor 10, and imageing sensor 10 shows
The light of picture point 12 after image-forming objective lens group 4, the second plane mirror 7, prism 5, its imaging on center thang-kng plane mirror 9 with
Thang-kng pattern registration on center thang-kng plane mirror 9.
Big focal length static state photoelectric microscope in the present embodiment can be used as individually aiming at positioner and aimed at；Also may be used
As a part for Other Instruments, such as three coordinate machine, realize aiming at positioning function.
Claims (7)
1. a kind of big focal length static state photoelectric microscope it is characterised in that: comprising: lighting source (1), target graticle (2), throwing
Shadow objective lens (3), image-forming objective lens group (4), prism (5), the first plane mirror (6), the second plane mirror (7), turn to objective lens (8),
Center thang-kng plane mirror (9), imageing sensor (10) and photoelectric conversion device (11)；
Lighting source (1) sends directional light and is irradiated on target graticle (2)；Target graticle (2) is transparent material, has thereon
Target pattern；The emergent ray of target graticle (2) incides on the first plane mirror (6)；The reflection light of the first plane mirror (6)
Become 90 degree of deflections with its incident ray；The reflection light of the first plane mirror (6) incides projection objective group (3)；Projection objective group
(3) effect is to reduce n times to the target pattern on target graticle (2), n >=5；Projection objective group (3) is to its incident ray
Enter line convergence；The emergent ray of projection objective group (3) is assembled after being imaged as picture point (12), and light enters image-forming objective lens group (4)；Institute
State image-forming objective lens group (4) identical with each assembly Optic structure parameter in projection objective group (3), using mirror image,
Picture point (12) is located at the optical axis center of projection objective group (3) and image-forming objective lens group (4)；The effect of described image-forming objective lens group (4) is
N times is amplified to picture point (12)；
The emergent ray of image-forming objective lens group (4) enters the second plane mirror (7)；The reflection light of the second plane mirror (7) is incident with it
Light becomes 90 degree of deflections；The reflection light of the second plane mirror (7) incides prism (5)；The emergent ray of prism (5) enters center
Thang-kng plane mirror (9)；There is thang-kng pattern on center thang-kng plane mirror (9)；The emergent ray at center thang-kng plane mirror (9) enters light
Electrical switching device (11)；Photoelectric conversion device (11) converts optical signals to the signal of telecommunication, and judges the light of picture point (12) through becoming
After objective lens (4), the second plane mirror (7) and prism (5), its imaging on center thang-kng plane mirror (9) and center thang-kng
Whether the thang-kng pattern on plane mirror (9) overlaps；If overlapped, export aiming symbol；If misaligned, export and do not aim at
Signal；Meanwhile, the reflection light of center thang-kng plane mirror (9) returns to prism (5), and the reflection light of prism (5) enters and turns to
Objective lens (8)；The effect turning to objective lens (8) is to carry out 180 degree deflection and convergence to its incident ray；Turn to objective lens (8)
Emergent ray enter imageing sensor (10)；Imageing sensor (10) carries out display output to the optical signal receiving；
Target pattern on target graticle (2) is identical with the thang-kng pattern form on center thang-kng plane mirror (9) and size phase
Deng.
2. as claimed in claim 1 a kind of big focal length static state photoelectric microscope it is characterised in that: described prism (5) is right angle
Prism or block prism or Dove prism or means of reflecting prism.
3. as claimed in claim 1 or 2 a kind of big focal length static state photoelectric microscope it is characterised in that: described projection objective group
(3) include with the Optic structure parameter of image-forming objective lens group (4): the radius of curvature of lens element, lens center thickness and lens material
Material species.
4. as claimed in claim 1 or 2 a kind of big focal length static state photoelectric microscope it is characterised in that: described projection objective group
(3) and image-forming objective lens group (4) numerical aperture between 0.2～0.3.
5. as claimed in claim 1 or 2 a kind of big focal length static state photoelectric microscope it is characterised in that: described projection objective group
And image-forming objective lens group (4) is the flat achromatism class lens of image planes or apochromatism class object lens (3).
6. as claimed in claim 1 or 2 a kind of big focal length static state photoelectric microscope it is characterised in that: described projection objective group
(3) and image-forming objective lens group (4) focal length be more than 35mm, operating distance be more than 70mm.
7. carry out aiming at the operating procedure of positioning using a kind of big focal length static state photoelectric microscope as claimed in claim 1 or 2
For:
Step 1: open lighting source (1)；Open imageing sensor (10) and photoelectric conversion device (11)；
Step 2: measured object be aimed the optical axis parallel to projection objective group (3) or image-forming objective lens group (4) for the face (13)；
Step 3: make measured object be aimed face (13) perpendicular to projection objective group (3) optical axis and cross picture point (12) straight line
On draw near and approach picture point (12)；In motor process, keep measured object is aimed face (13) all the time parallel to projection objective
Group (3) or the optical axis of image-forming objective lens group (4)；
When measured object is when being aimed face (13) and not reaching picture point (12) position, measured object be aimed face (13) to picture point
(12) reflection light sequentially pass through image-forming objective lens group (4), the second plane mirror (7), after prism (5), in center thang-kng plane mirror
(9) upper imaging；The emergent ray at center thang-kng plane mirror (9) enters photoelectric conversion device (11)；Photoelectric conversion device (11) will
Optical signal is converted to the signal of telecommunication, photoelectric conversion device (11) judge to draw the imaged objective lens of the light (4) of picture point (12), second
After plane mirror (7) and prism (5), its thang-kng in the imaging on center thang-kng plane mirror (9) with center thang-kng plane mirror (9)
Pattern is misaligned, and therefore photoelectric conversion device (11) exports non-aiming symbol；The reflection light at center thang-kng plane mirror (9) is through rib
Mirror (5) and steering objective lens (8) enter imageing sensor (10), and imageing sensor (10) shows that the light of picture point (12) passes through into
After objective lens (4), the second plane mirror (7), prism (5), its imaging on center thang-kng plane mirror (9) is put down with center thang-kng
Thang-kng pattern on face mirror (9) is misaligned；
When measured object be aimed face (13) reach picture point (12) position when, measured object be aimed face (13) to picture point (12)
Reflection light sequentially passes through image-forming objective lens group (4), the second plane mirror (7), after prism (5), becomes on center thang-kng plane mirror (9)
Picture；The emergent ray at center thang-kng plane mirror (9) enters photoelectric conversion device (11)；Optical signal is turned by photoelectric conversion device (11)
It is changed to the signal of telecommunication, photoelectric conversion device (11) judges to draw the imaged objective lens of light (4), second plane mirror of picture point (12)
(7) and after prism (5), its thang-kng pattern weight in the imaging on center thang-kng plane mirror (9) with center thang-kng plane mirror (9)
Close, therefore photoelectric conversion device (11) output aiming symbol；The reflection light at center thang-kng plane mirror (9) through prism (5) and turns
Enter imageing sensor (10) to objective lens (8), imageing sensor (10) shows the light of picture point (12) through image-forming objective lens group
(4), the second plane mirror (7), after prism (5), its imaging on center thang-kng plane mirror (9) and center thang-kng plane mirror (9)
On thang-kng pattern registration；
Operation through above-mentioned steps, you can complete the aiming positioning action being aimed face (13) to measured object.
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| CN201510100855.6A CN104614850B (en) | 2014-12-12 | 2015-03-08 | Large-focus static photoelectric microscope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410769045 | 2014-12-12 | ||
| CN2014107690455 | 2014-12-12 | ||
| CN201510100855.6A CN104614850B (en) | 2014-12-12 | 2015-03-08 | Large-focus static photoelectric microscope |
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