CN104577650B - A kind of Method of Adjustment of femtosecond laser oscillator - Google Patents
A kind of Method of Adjustment of femtosecond laser oscillator Download PDFInfo
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Abstract
The invention discloses a kind of adjustment methods of femtosecond laser oscillator, femtosecond oscillator includes 1 532nm pumping source, 2 532nm speculums, 1 condenser lens, 1 femtosecond laser resonator, wherein, femtosecond laser resonator includes 2 concave mirrors, 1 piece of titanium gem crystal, 2 prisms, 4 total reflection mirrors, 1 outgoing mirror, and specific debugging step is as follows：All eyeglasses in addition to 1 condenser lens, 2 concave mirrors are welded on mirror holder, and ensure that all eyeglasses have same centre-height, and eyeglass and horizontal plane；By the eyeglass being welded according on bottom plate of the design fixed to oscillator, accommodate 1 condenser lens and 2 concave mirrors respectively to subscribing position with the 3 five adjustable toolings of dimension, five dimension Adjustable tools can carry out around, up and down, pitching, beat adjusting；Using 2 532nm speculums and 1 condenser lens, 532 pump lights are focused in laser crystal；Carefully adjust the beat of all eyeglasses in femtosecond laser resonator so that femtosecond laser resonator exports continuous laser.
Description
Technical field
The invention belongs to ultrafast laser fields, are related to a kind of Method of Adjustment of femtosecond laser oscillator.
Background technology
Femtosecond laser is one of the most powerful new tool to be grown up between 20 years by laser science in the past.Femtosecond pulse
It is so short, has had reached within 4fs at present.1 femtosecond (fs), i.e., 10-15S, only 1,000 part per trillion second, if
Universe, service life only only 1min are weighed using 10fs as geometric average；Femtosecond pulse is so strong again, using more
The maximum impulse peak power that grade chirped pulse amplification (CPA) technology obtains can reach hundred terawatt (TW)s (TW, i.e., 1012W) in addition clap watt
(PW, i.e., 1015W) magnitude, can focus strength than solar radiation is focused into size as needle point to tellurian whole light after
Energy density is taller.Femtosecond laser is entirely the miracle that the mankind create.
In the latest 20 years, the ti∶sapphire laser femto-second laser from dye laser to kerr lens mode locking and later two
The all solid state femto-second laser and femto second optical fiber laser of pole pipe pumping, although pulse width and energy are recorded in continuous brush
Newly, but maximum progress becomes easy no more than obtaining super femtosecond pulse.The R.Trebino of Sandia National Labs
It says：" in past 10 years, (ultrafast) technology has been significantly improved, and titanium sapphire laser device and present optical fiber laser make
The operating of this (femtosecond) laser becomes succinct and stablizes.This present people of laser are available, and before 10 years, you are but
It oneself must establish.”
According to femtosecond laser it is ultrashort and superpower the characteristics of, Applied research fields can be generally divided into ultrafast transient phenomenon
Research and superpower phenomenon research.They are all continuous with the shortening of laser pulse width and the increase of pulse energy
It is able to deeply and develops.The most direct application of femtosecond pulse is that people use it as light source, forms a variety of time resolutions
Spectral technique and pumping/Detection Techniques.Its development directly drive physics, chemistry, biology, material and information science research into
Enter microcosmic ultrafast process field, and started some completely new research fields, such as femtochemistry, Quantum control chemistry, semiconductor
Coherent swpectrum etc..The combination of femtosecond pulse and nanometer microscopy allows people to study the nanostructured (quantum of semiconductor
Line, quantum dot and nanocrystal) in carrier dynamics.In terms of biology, people are utilizing femtosecond laser technology institute
The Molecular dynamics of offer, pumping/Detection Techniques, study photosynthesis reaction center biography energy, turn can be with separation of charge mistake
Journey.In terms of ultra-short pulse laser is also applied to the transmission, processing and storage of information.
First is started from 1988 using the successful operating of desk-top terawatt (TW) laser that chirped pulse amplification is realized, this
Achievement indicates that femtosecond is superpower and the beginning of the strong optical physics research of superelevation in laboratory.In this area research, due to super
The effect of short laser field has been equivalent to or has substantially exceeded the constraint field that electron institute in atom is subject to, and perturbation theory is untenable,
New theoretical treatment is up for development.1020W/cm2Light intensity under, can realize simulation Astronomical Phenomena research.1019-
1021W/cm2Superelevation light laser generate thermoelectron (200keV ＜ E ＜ 1MEV) a large amount of ions can be heated and cause core and gather
Become.This inertial confinement fusion (ICF) fast ignition concept it is final realize will be national security and using energy source make can not
The contribution of appraisal.
Another important application of femtosecond laser is exactly micro- retrofit.In general, by for laser pulse standard, continue
The laser pulse that time is more than 10 picoseconds (being equivalent to heat conduction time) belongs to long pulse, with it come rapidoprint, due to thermal effect
Adjacent material should be made to change, so as to influence machining accuracy.And the femtosecond that pulse width only has thousands of part per trillion seconds swashs
Light pulse then possesses unique material processing characteristics, such as processes the melting zone very little in aperture or does not have；It can realize a variety of materials
Material, such as metal, semiconductor, transparent material the inside even micromachined of biological tissue, engraving；Machining area can be less than
Focal dimension breaks through diffraction limit etc..Some automobile factorys and jumbo processing factory just study use femtosecond laser at present
Process better engine nozzle.Using ultra-short pulse laser, hundreds of nanometers of wide apertures can be got on metal.Nearest
In the Optical Society of America's meeting held in Orlando, the Hai Te of IBM Corporation is said, a kind of fs-laser system is used for by IBM
In the photoetching process of large scale integrated chip.It is cut with femtosecond laser, is transmitted almost without heat.U.S. Lao Lunsi
Livermore national laboratory it was discovered by researchers that this laser beam can safely cut high explosive.The Lip river in the laboratory
Si Ke is said：" femtosecond laser holds promise as a kind of cold treatment tool, for removing retired rocket, cannon bomb and other forces
Device." femtosecond laser can be used to cut frangible polymer, without changing its important biochemical characteristic.Biomedical expert
Using it as ultraprecise surgical knife, for vision correcting surgery, can reduce after tissue damage will not leave behind operation again
It loses disease or even can individual cells be moved with delicate surgery or for gene therapy.How people also swash femtosecond in research at present
Light is used for dental treatment.There is scientist's discovery, a fritter of tooth can be removed using ultra-short pulse laser, without the object around influencing
Matter.It is believed that with the further development of ultra-short pulse laser technology and the commercial femto-second laser with high reliability
It is further perfect, femtosecond laser is bound to more be widely applied in more areas.
However, it should say that stability and price are limitation widely applied two principal elements of femtosecond laser, on the one hand, by
Determine that it is more sensitive to ambient environmental factors in the principle that femtosecond laser generates, the only slightly variation of temperature and humidity
Will and output power reduction is caused to be greatly reduced, needless to say compacted due to adjusting bracket in femtosecond laser resonator and translation stage
It is influenced caused by dynamic.On the other hand, the debugging of femto-second laser is very difficult, and professional is needed to carry out the tune of approximately three weeks
The time is tried, this is a femto-second laser main cause of high cost.One kind that the present invention exactly proposes regarding to the issue above flies
Second laser oscillator adjusting method, it is therefore intended that improve the stability of femtosecond laser oscillator and reduce the assembling of femto-second laser
Cost.
Invention content
It is an object of the invention to overcome the assembling difficult point of femtosecond laser oscillator, a kind of adjusting method is provided, is being improved
The stability of femto-second laser is improved while debugging efficiency.
The femtosecond laser oscillator of the present invention includes 1 532nm pumping source, 2 532nm speculums, 1 condenser lens, 1
A femtosecond laser resonator, wherein, femtosecond laser resonator include 2 concave mirrors, 1 piece of titanium gem crystal, 2 prisms, 4 it is complete
Speculum, 1 outgoing mirror, specific debugging step are as follows：
1) pre-assembled is carried out to all reflecting optics and outgoing mirror, reflecting optics and outgoing mirror is welded on mirror holder,
And in pre-assembled, ensure that all eyeglasses have same centre-height, and the reflecting surface and horizontal plane of eyeglass；
2) eyeglass being welded is divided according on bottom plate of the design fixed to oscillator with the 3 five adjustable toolings of dimension
Not Jia Chi condenser lens and 2 concave mirrors, be placed on the reservation position of design, five dimension Adjustable tools can carry out front and rear, left
Right, upper and lower, pitching, beat are adjusted；Wherein, five dimension Adjustable tools can be made of 3 translation stages and 1 adjusting bracket, and 3 flat
Moving stage, which is assembled together, realizes that top to bottom, left and right, front and rear are adjusted, and adjusting bracket is fixed on translation stage, realizes that pitching and beat are adjusted,
It is fixed between adjusting bracket and mirror holder by cantilever；
3) using 2 532nm speculums and 1 condenser lens, 532 pump lights are focused in laser crystal, to laser
Crystal is pumped, and carefully adjusts the beat of all eyeglasses in femtosecond laser resonator so that the output of femtosecond laser resonator connects
Continuous laser；
4) using 3 five dimension toolings, the distance of lens and two concave mirrors is carefully adjusted so that femtosecond laser intracavitary exports
Correct zlasing mode carefully adjusts the beat of outgoing mirror so that laser output power is maximum；
5) to entire one disturbance of femtosecond laser resonator, start the self-locking mode effect of Ti∶Sapphire laser so that femtosecond laser shakes
It swings device and becomes femtosecond pulse output from continuously exporting.This disturbance can be generated by touching prism, can also be by changing suddenly
The front and back position for becoming total reflection mirror generates
6) 3 five dimensions are fixed and adjust tooling, 1 focus lamp, 2 concave mirrors are welded on corresponding mirror holder, are completed whole
Body is debugged.
7) after whole debugging, with a closed housing, pumping source and femtosecond laser resonator are enclosed in one
In space.
Wherein, the mirror holder of welding lens includes three lens fixing apparatus, thermistor (PTC), pedestal parts, specific
Welding step be：Eyeglass is adhered to high-temp glue on lens fixing apparatus；Pedestal is fixed to optical table by screw
On, and pass through high temperature scolding tin and PTC is welded on pedestal；Using tooling lens fixing apparatus is adjusted to correct posture, and by mirror
Piece fixing device is suspended in above PTC；The full-filling low temperature scolding tin between PTC and lens fixing apparatus is powered to PTC, by scolding tin
Fusing；The voltage on PTC, scolding tin natural cooling are removed, lens fixing apparatus is welded to by PTC on pedestal.
The present invention compared to the prior art, it is advantageous that：
First, all eyeglasses are assembled by welding manner, reduce traditional adjusting mirror holder wriggle it is steady to laser
The qualitative influence brought greatly improves the stability of entire laser.
Secondly, the combination of tooling and welding technique is adjusted by five dimensions, is realized between 1 focus lamp and 2 concave mirrors
The adjusting of distance has been abandoned in traditional conditioning techniques directly using translation stage or other device for precisely regulating fixed-focus mirrors and recessed
The method of face mirror not only improves stability, but also reduces production and rise this.
Finally, entire debugging step can be divided into pre-installation step no longer using the technological process of eyeglass assemble welding one by one
Suddenly and step two parts are fine-tuned, pre-installation part includes the welding of eyeglass, the fixation of eyeglass, fine-tunes and partly includes swashing
Light output and locked mode are adjusted, and two steps are completely separable, can realize that streamlined operation reduces personnel's debugging cost, so as to reduce
The holistic cost of femto-second laser.
In short, the femto-second laser debugged using this method, while stability is improved, and reduces production cost, it is right
It is of great significance in a wide range of promote of femto-second laser.
Description of the drawings
Fig. 1 is the schematic diagram of the mirror holder of a welding lens；
11- eyeglasses, 12- lens fixing apparatus, 13- thermistors (PTC), 14- pedestals,
Fig. 2 is the assembling schematic diagram of femtosecond laser oscillator；
201- five times regualting frames, 202- five times regualting frames, 203- five times regualting frames, 204-532nm speculums,
205-532nm speculums, 206- condenser lenses, 207- concave mirrors, 208- laser crystals,
209- concave mirrors, 210-800nm total reflection mirrors, 211-800nm total reflection mirrors, 212- outgoing mirrors,
213-800nm total reflection mirrors, 214-800nm total reflection mirrors, 215- prisms, 216- prisms
Fig. 3 is the schematic diagram that five dimensions adjust tooling
The one-dimensional translation stages of 301-, the one-dimensional translation stages of 302-, the one-dimensional translation stages of 303-, 304- adjusting brackets, 305- cantilevers
Specific embodiment
With reference to embodiment and attached drawing, the invention will be further described.
Embodiment 1：
All reflecting optics and outgoing mirror are welded together using the mirror holder of welding lens shown in FIG. 1, step
It is as follows：Eyeglass 101 and lens fixing apparatus 102 are bonded together with high-temp glue, by thermistor 103 and the height of pedestal 104
Warm scolding tin is welded together, and the pedestal 104 for welding thermistor 103 is fixed to by screw on optical table, will glue mirror
The lens fixing apparatus 102 of piece 101 is suspended in the top of pedestal 104 with tooling, by horizontal, fixed high laser, by eyeglass
Center is adjusted to sustained height, and ensures the reflective surface and horizontal plane of eyeglass.In eyeglass welder 102 and temperature-sensitive electricity
Low temperature scolding tin is filled between resistance 103, is fully melted low temperature scolding tin by the way that thermistor 103 is given to be powered, then remove voltage to make weldering
Tin cools down, so as to be welded to lens fixing apparatus 102 on the component that thermistor 103 and pedestal 104 form, and can protect
The reflecting surface of the welded eyeglass of card is with horizontal plane and with identical centre-height.
The eyeglass being welded and prism are fixed to position shown in Fig. 2 according to design, using five dimensions adjust toolings 201,
202nd, 203 lens 206, concave mirror 207, concave mirror 209 are fixed to designated position according to design, pass through speculum
204th, 205 532nm pump lights are focused on by lens 206 on laser crystal 208, under the excitation of pump light, laser crystal
208 can generate the self-luminous of both direction, using the self-luminous to concave mirror 207, adjust concave mirror 207, plane mirror respectively
213, self-luminous is allowed to be reflected on outgoing mirror 211 after concave mirror 207, plane mirror 213, carefully the posture of adjustment 211,
The reflecting surface of outgoing mirror 211 is allowed perpendicular to self-luminous；Using the self-luminous to concave mirror 209, concave mirror 209, rib are adjusted respectively
Mirror 216, speculum 210, speculum 214, prism 215 posture, allow light respectively by said elements, according to the light described in Fig. 2
Road is irradiated on total reflection mirror 212.The carefully posture of adjustment speculum 212 and outgoing mirror 211 makes the interior output of resonator continuous
Laser, and output power maximum is adjusted to, so far complete the adjusting of continuous part, fixed all mirrors in addition to outgoing mirror 211
Piece.Five dimension of adjustment adjusts the position of tooling 201,202,203, and observes continuous output laser shape and hot spot distribution, works as laser
It when hot spot reaches mode-lock status, touches and is inserted into prism 215, give laserresonator one disturbance, form self-excitation locked mode, so as to fulfill
From continuous light to the output of femtosecond laser.By five dimensions adjust toolings fix it is locked, will be described saturating using techniques as described above
Mirror 206, concave mirror 207, concave mirror 209 are welded to position shown in Fig. 2, remove work in the case where keeping posture
Install into the installation of entire laser.
In order to ensure the stability of entire laser, can pumping source, resonator be fixed in a cavity, and carry out phase
The seal operation of pass.
Embodiment 2：
Fig. 3 is the schematic diagram that one five dimension adjusts tooling, and entire five dimensions tooling is by three translation stages 301,302,303, one
A adjusting bracket 304 and cantilever 305 form, and for translation stage 301,302 for the adjusting of position around, 303 are used for upper-lower position
Adjusting, adjusting bracket 304 can realize pitching and the adjusting of beat by two adjusting knobs.Cantilever 305 is used for adjusting bracket
It is connected between mirror holder.
Although making specific descriptions to the present invention with reference to the above embodiments, for the ordinary skill people of this field
For member, it should be appreciated that and can modify or improve based on present disclosure, and these modification and improvement are all
Within the spirit and scope of the present invention.
Claims (6)
1. a kind of adjustment method of femtosecond laser oscillator, which includes 1 532nm pumping source, 2 532nm speculums,
1 condenser lens, 1 femtosecond laser resonator, wherein, femtosecond laser resonator include 2 concave mirrors, 1 piece of titanium gem crystal,
2 prisms, 4 total reflection mirrors, 1 outgoing mirror, it is characterised in that include following debugging step：
1. all eyeglasses in addition to 1 condenser lens, 2 concave mirrors are welded on mirror holder, and ensure all eyeglasses all
There are same centre-height, and eyeglass and horizontal plane；
2. the eyeglass being welded is added respectively according on bottom plate of the design fixed to oscillator with the 3 five adjustable toolings of dimension
1 condenser lens and 2 concave mirrors are held to precalculated position, five dimension Adjustable tools can carry out around, up and down, pitching, partially
Pendulum is adjusted；
3. using 2 532nm speculums and 1 condenser lens, 532 pump lights are focused in laser crystal；It carefully adjusts and flies
The beat of second all eyeglasses of laser resonance intracavitary so that femtosecond laser resonator exports continuous laser；
4. using 3 five dimension Adjustable tools, the distance of condenser lens and two concave mirrors is carefully adjusted so that femtosecond laser is humorous
Intracavitary of shaking exports correct zlasing mode, carefully adjusts the beat of outgoing mirror so that laser output power is maximum；
5. to entire one disturbance of femtosecond laser resonator, start the self-locking mode effect of Ti∶Sapphire laser so that femtosecond laser oscillator
Become femtosecond pulse output from continuously exporting；
6. fixing 3 five dimension Adjustable tools, 1 condenser lens, 2 concave mirrors are welded on corresponding mirror holder, are completed whole
Body is debugged.
2. the method as described in claim 1, it is characterised in that its eyeglass welding method used comprises the steps of,
1) mirror holder of welding includes three lens fixing apparatus, thermistor (PTC), pedestal parts；
2) eyeglass is adhered to high-temp glue on lens fixing apparatus；
3) pedestal is fixed on optical table, and pass through high temperature scolding tin and thermistor is welded on pedestal by screw；
4) using tooling lens fixing apparatus is adjusted to correct posture, and lens fixing apparatus is suspended in above thermistor；
5) the full-filling low temperature scolding tin between thermistor and lens fixing apparatus is powered to thermistor, by melts soldering tin；
6) voltage on thermistor, scolding tin natural cooling are removed, lens fixing apparatus is welded to by thermistor on pedestal.
3. the method as described in claim 1, it is characterised in that its five dimensions Adjustable tool is by 3 translation stages and 1 adjusting bracket
Composition, is fixed between adjusting bracket and mirror holder by cantilever.
4. the method as described in claim 1, it is characterised in that the disturbance described in it is generated by prism, real by touching prism
The locked mode of existing femtosecond laser oscillator.
5. the method as described in claim 1, it is characterised in that the disturbance described in it is generated by total reflection mirror, passes through suddenly change
The front and back position of total reflection mirror realizes the locked mode of femtosecond laser oscillator.
6. the method as described in claim 1-5 any one, it is characterised in that the 532nm pumping sources and femtosecond laser are humorous
Chamber integral hermetic shake in a cavity.
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| CN104577650B true CN104577650B (en) | 2018-07-06 |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105449496A (en) * | 2015-12-29 | 2016-03-30 | 中国电子科技集团公司第十一研究所 | Optical element fixing method and adjustment device |
| CN105470806B (en) * | 2016-01-20 | 2018-06-08 | 福建中科晶创光电科技有限公司 | A kind of assembly method for improving miniature all solid state laser stability |
| CN108512018A (en) * | 2018-05-30 | 2018-09-07 | 武汉华日精密激光股份有限公司 | A kind of adjustable mirror holder for solid-state laser |
| CN110631807B (en) * | 2019-09-18 | 2021-03-02 | 中国科学院国家授时中心 | Mode-locked laser state detection device and method based on optical resonant cavity |
| CN110702614B (en) * | 2019-11-05 | 2022-04-12 | 北京环境特性研究所 | Ellipsometer device and detection method thereof |
| CN113075780B (en) * | 2021-04-13 | 2022-09-16 | 中国科学院重庆绿色智能技术研究院 | Off-axis parabolic mirror assembly and using method thereof |
| CN113437622A (en) * | 2021-06-24 | 2021-09-24 | 何苗 | Device and method for adjusting laser light path |
| CN114289872B (en) * | 2022-03-07 | 2022-08-23 | 西安中科华芯测控有限公司 | Method for assembling ultrafast laser mirror for miniature laser gyroscope |
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| CN2490740Y (en) * | 2001-04-09 | 2002-05-08 | 中国科学院物理研究所 | Miniaturized solid femtosecond laser oscillator |
| CN202133615U (en) * | 2011-07-13 | 2012-02-01 | 维林光电(苏州)有限公司 | Twin laser |
| CN202231295U (en) * | 2011-08-05 | 2012-05-23 | 广州市普东光电科技有限公司 | Sealed double-channel holmium laser |
| CN102922076A (en) * | 2012-11-05 | 2013-02-13 | 大恒新纪元科技股份有限公司 | Lens welding device and welding method for using same |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2490740Y (en) * | 2001-04-09 | 2002-05-08 | 中国科学院物理研究所 | Miniaturized solid femtosecond laser oscillator |
| CN202133615U (en) * | 2011-07-13 | 2012-02-01 | 维林光电(苏州)有限公司 | Twin laser |
| CN202231295U (en) * | 2011-08-05 | 2012-05-23 | 广州市普东光电科技有限公司 | Sealed double-channel holmium laser |
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