CN104577650A - Method for installing and debugging femtosecond laser oscillator - Google Patents

Method for installing and debugging femtosecond laser oscillator Download PDF

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Publication number
CN104577650A
CN104577650A CN201510028635.7A CN201510028635A CN104577650A CN 104577650 A CN104577650 A CN 104577650A CN 201510028635 A CN201510028635 A CN 201510028635A CN 104577650 A CN104577650 A CN 104577650A
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femtosecond laser
laser
adjustment
welded
ptc
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CN104577650B (en
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张翼
刘蒙
常亮
冯忠磊
杨晓红
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China Daheng Group, Inc.
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DAHENG OPTICS SCIENCE & TECHNOLOGY DEVELOPMENT (BEIJING) Co Ltd
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Abstract

The invention discloses a method for debugging a femtosecond laser oscillator. The femtosecond laser oscillator comprises one 532 nm pumping source, two 532 nm reflectors, one focusing lens and one femtosecond laser resonant cavity, wherein the femtosecond laser resonant cavity comprises two concave mirrors, one Ti sapphire crystal, two prisms, four total reflection mirrors and one output mirror. The method particularly includes the following debugging steps: all lenses except for the one focusing lens and the two concave mirrors are welded to a mirror support, wherein it is guaranteed that all lenses are the same in center height, and the lenses are perpendicular to a horizontal face; the welded lenses are fixed to a base plate of the oscillator according to design, the one focusing lens and the two concave mirrors are clamped to the preset positions through three five-dimensional adjustable tools respectively, and front-and-back adjustment, left-and-right adjustment, up-and-down adjustment, pitching adjustment and deflection adjustment can be carried out through the five-dimensional adjustable tools; the two 532 nm reflectors and the one focusing lens are used for focusing 532 pumping light to a laser crystal; deflection of all lenses in the femtosecond laser resonant cavity is carefully adjusted to enable the femtosecond laser resonant cavity to output continuous lasers.

Description

A kind of Method of Adjustment of femtosecond laser oscillator
Technical field
The invention belongs to ultrafast laser field, relate to a kind of Method of Adjustment of femtosecond laser oscillator.
Background technology
Femtosecond laser is one of the most strong new tool grown up by laser science between 20 years in the past.Femtosecond pulse is so short, has reached within 4fs at present.1 femtosecond (fs), namely 10 -15s was only 1,000 part per trillion seconds, if 10fs is weighed universe as geometric mean, and its life-span only only 1min; Femtosecond pulse is again so strong, and the maximum impulse peak power adopting multistage chirped pulse amplification (CPA) technology to obtain can reach hundred terawatt (TW)s (TW, namely 10 12w) watt (PW, namely 10 are even clapped 15w) magnitude, its can focus strength more taller than solar radiation is focused into the energy density after size as needle point to tellurian whole light.Femtosecond laser is the miracle that the mankind create completely.
Recent two decades comes, Ti∶Sapphire laser femto-second laser from dye laser to kerr lens mode locking, and all solid state femto-second laser of diode pumping afterwards and femto second optical fiber laser, although pulse width and energy be recorded in continuous refreshing, but maximum progress becomes easy no more than obtaining super femtosecond pulse.The R.Trebino of Sandia National Labs says: " in past 10 years; (ultrafast) technology is significantly improved, titanium sapphire laser device and present fiber laser make the running of this (femtosecond) laser instrument become succinct and stable.The present people of this laser instrument are available, and before 10 years, you but must set up yourself.”
The feature ultrashort and superpower according to femtosecond laser, can be divided into the research of ultrafast transient phenomenon and the research of superpower phenomenon substantially by Applied research fields.They are constantly goed deep into along with the shortening of laser pulse width and the increase of pulse energy and are developed.The most directly application of femtosecond pulse is that people's profit uses it as light source, forms multiple time resolved spectroscopy technology and pumping/Detection Techniques.Its development directly drives the research of physics, chemistry, biology, material and information science to enter microcosmic ultrafast process field, and has started some brand-new research fields, as femtochemistry, Quantum control chemistry, semiconductor coherent swpectrum etc.The combination of femtosecond pulse and nanometer microscopy, makes people can study carrier dynamics in the nanostructured (quantum line, quantum dot and nanocrystal) of semiconductor.In biology, the Molecular dynamics that people are utilizing femtosecond laser technology to provide, pumping/Detection Techniques, the biography energy of research photosynthesis reaction center, turn energy and Process of Charge Separation.Ultra-short pulse laser be also applied to information transmission, process and storage aspect.
The successful running of the desk-top terawatt (TW) laser that First utilizes chirped pulse amplification to realize starts from 1988, and this achievement indicates the beginning of the superpower and superelevation high light physical study of in laboratory femtosecond.In this area research, the effect due to ultra short laser field has been equivalent to or has substantially exceeded the constraint field that electron institute in atom is subject to, and perturbation theory is untenable, and new theoretical treatment awaits development.10 20w/cm 2light intensity under, can realize simulating the research of Astronomical Phenomena.10 19-10 21w/cm 2the thermoelectron (200keV < E < 1MEV) that produces of superelevation light laser can heat a large amount of ion and initiated core fusion.The final realization of this inertial confinement fusion (ICF) fast ignition concept will make immeasurable contribution for national security and energy utilization.
Another important application of femtosecond laser is exactly micro-retrofit.Usually, by laser pulse standard, the laser pulse that the duration is greater than 10 psecs (being equivalent to heat conduction time) belongs to long pulse, carrys out rapidoprint with it, because thermal effect makes adjacent material change, thus affects machining precision.Pulse width only has the femto-second laser pulse of several thousand part per trillion seconds then to have unique materials processing characteristic, and the melting zone as processed aperture is very little or do not have; Multiple material can be realized, as micromachined, the engraving of metal, semiconductor, the inner even biological tissue of transparent material etc.; Machining area can be less than focal dimension, breaks through diffraction limit etc.Some automobile factorys and heavy equipment processing factory at present just research femtosecond laser process better engine nozzle.Use ultra-short pulse laser, the wide aperture of hundreds of nanometer can be got on metal.Be bordering on most in the Optical Society of America's meeting held Orlando, the Hai Te of IBM Corporation says, a kind of fs-laser system is used in the photoetching process of large scale integrated chip by IBM.Cut with femtosecond laser, almost there is no heat trnasfer.U.S. Lao Lunsi? the researchist of livermore national laboratory finds, this laser beam can cut high explosive safely.The Loews gram in this laboratory is said: " femtosecond laser is hopeful as a kind of cold treatment instrument, for removing retired rocket, cannon bomb and other weapons." femtosecond laser can be used for cutting frangible polymkeric substance, and not change its important biochemical characteristic.Biomedical expert using it as ultraprecise surgical knife, for vision correcting surgery, tissue damage can be reduced and can not leave postoperative complication again, even can move delicate surgery to individual cells or for gene therapy.How femtosecond laser is also used for dental treatment in research by current people.There is scientist to find, utilize ultra-short pulse laser can remove a fritter of tooth, and do not affect the material of surrounding.We believe, further developing and having commercial femto-second laser perfect further of high reliability along with ultra-short pulse laser technology, and femtosecond laser is bound to obtain in more areas apply more widely.
But, should say that stability and price are two principal elements of restriction femtosecond laser widespread use, on the one hand, the principle produced due to femtosecond laser determines that it is more responsive to ambient environmental factors, be only temperature and humidity change slightly just can and cause output power reduce significantly reduce, say nothing of the impact because the wriggling of adjusting bracket and translation stage in femtosecond laser resonator cavity brings.On the other hand, the debugging of femto-second laser is very difficult, needs professional to carry out the debug time of about three weeks, and this is the main cause that femto-second laser cost is high.The present invention is just for a kind of femtosecond laser oscillator control method that the problems referred to above propose, and object is improve the stability of femtosecond laser oscillator and reduce the assembly cost of femto-second laser.
Summary of the invention
The object of the invention is to the assembling difficult point overcoming femtosecond laser oscillator, a kind of control method is provided, while improving debugging efficiency, improve the stability of femto-second laser.
Femtosecond laser oscillator of the present invention comprises 1 532nm pumping source, 2 532nm catoptrons, 1 condenser lens, 1 femtosecond laser resonator cavity, wherein, femtosecond laser resonator cavity comprises 2 concave mirrors, 1 piece of titanium gem crystal, 2 prisms, 4 completely reflecting mirrors, 1 outgoing mirror, and its concrete debugging step is as follows:
1) pre-assembled is carried out to all reflecting optics and outgoing mirror, reflecting optics and outgoing mirror are welded on mirror holder, and when pre-assembled, ensure that all eyeglasses have same centre-height, and the reflecting surface of eyeglass and horizontal plane;
2) eyeglass welded is fixed on the base plate of oscillator according to design, condenser lens and 2 concave mirrors are accommodated respectively by 3 the five adjustable frocks of dimension, be placed on the reservation position of design, five dimension Adjustable tool can carry out all around, up and down, pitching, beat regulate; Wherein, five dimension Adjustable tool can be made up of 3 translation stages and 1 adjusting bracket, and 3 translation stages are assembled together and realize top to bottom, left and right, front and rear adjustment, and adjusting bracket is fixed on translation stage, realize pitching and beat adjustment, fixed by cantilever between adjusting bracket and mirror holder;
3) utilize 2 532nm catoptrons and 1 condenser lens, 532 pump lights are focused in laser crystal, pumping is carried out to laser crystal, carefully regulate the beat of all eyeglasses in femtosecond laser resonator cavity, make femtosecond laser resonator cavity export continuous laser;
4) utilize 3 five to tie up frock, carefully regulate the distance of lens and two concave mirrors, make to export correct zlasing mode in femtosecond laser chamber, the beat of careful regulation output mirror, makes laser output power maximum;
5) to the disturbance of whole femtosecond laser resonator cavity, starting the self-locking mode effect of Ti∶Sapphire laser, making femtosecond laser oscillator become femtosecond pulse output from exporting continuously.This disturbance can produce by touching prism, also can be produced by the front and back position of flip-flop completely reflecting mirror
6) fix 3 five dimension adjusting tools, 1 focus lamp, 2 concave mirrors are welded on corresponding mirror holder, complete overall debugging.
7), after overall debugging, with an airtight housing, pumping source and femtosecond laser resonator cavity are enclosed in a space.
Wherein, the mirror holder of welding lens comprises lens fixing apparatus, thermistor (PTC), base three parts, and its concrete welding step is: bond on lens fixing apparatus by eyeglass high-temp glue; Base through screws is fixed on optical table, and by high temperature scolding tin, PTC is welded on base; Utilize frock to regulate lens fixing apparatus to correct attitude, and lens fixing apparatus is suspended in above PTC; Full-filling low temperature scolding tin between PTC and lens fixing apparatus, to PTC energising, by melts soldering tin; Remove the voltage on PTC, scolding tin cools naturally, and lens fixing apparatus is welded on base by PTC.
Compared to the prior art the present invention, it is advantageous that:
First, all eyeglasses are all assembled by welding manner, decrease traditional adjustment mirror holder and to wriggle the impact brought to laser stability, greatly improve the stability of whole laser instrument.
Secondly, the combination of adjusting tools and solder technology is tieed up by five, achieve the adjustment of the spacing of 1 focus lamp and 2 concave mirrors, abandon the method directly adopting translation stage or other device for precisely regulating fixed-focus mirror and concave mirror in traditional conditioning techniques, both improve stability, and again reduced and produce liter originally.
Finally, whole debugging step no longer adopts the technological process of eyeglass assemble welding one by one, Preinstallation Steps and meticulous regulating step two parts can be divided into, pre-installation part comprises the welding of eyeglass, the fixing of eyeglass, meticulous adjustment portion comprises Laser output and locked mode regulates, two steps are separated completely, can realize streamlined operation and reduce personnel's debugging cost, thus reduce the holistic cost of femto-second laser.
In a word, adopt the femto-second laser of this method debugging, while raising stability, reduce production cost again, have very important meaning for promoting of femto-second laser on a large scale.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the mirror holder of a welding lens;
11-eyeglass, 12-lens fixing apparatus, 13-thermistor (PTC), 14-base,
Fig. 2 is the assembling schematic diagram of femtosecond laser oscillator;
201-five times regualting frame, 202-five times regualting frame, 203-five times regualting frame, 204-532nm catoptron,
205-532nm catoptron, 206-condenser lens, 207-concave mirror, 208-laser crystal,
209-concave mirror, 210-800nm completely reflecting mirror, 211-800nm completely reflecting mirror, 212-outgoing mirror,
213-800nm completely reflecting mirror, 214-800nm completely reflecting mirror, 215-prism, 216-prism
Fig. 3 is the schematic diagram of five dimension adjusting tools
301-one dimension translation stage, 302-one dimension translation stage, 303-one dimension translation stage, 304-adjusting bracket, 305-cantilever
Embodiment
Below in conjunction with embodiment and accompanying drawing, the invention will be further described.
Embodiment 1:
Adopt the mirror holder of the welding lens shown in Fig. 1 welded together all reflecting optics and outgoing mirror, its step is as follows: eyeglass 101 and lens fixing apparatus 102 are bonded together by high-temp glue, by welded together with high temperature scolding tin to thermistor 103 and base 104, the base 104 welding thermistor 103 is fixed on optical table by screw, lens fixing apparatus 102 frock gluing eyeglass 101 is suspended in the top of base 104, by level, fixed high laser, sustained height is all adjusted in the center of eyeglass, and ensure reflective surface and the horizontal plane of eyeglass.Low temperature scolding tin is filled between eyeglass welder 102 and thermistor 103, by being energized low temperature scolding tin to thermistor 103 fully melted, remove voltage again and make solder cools, thus to be welded to by lens fixing apparatus 102 on parts that thermistor 103 and base 104 form, and can ensure that the reflecting surface of welded eyeglass has identical centre-height with horizontal plane.
The eyeglass welded and prism are fixed to the position shown in Fig. 2 according to design, utilize five dimension adjusting tools 201, 202, 203 by lens 206, concave mirror 207, concave mirror 209 is fixed to assigned address according to design, by catoptron 204, 532nm pump light scioptics 206 focus on laser crystal 208 by 205, under the excitation of pump light, laser crystal 208 can produce the autoluminescence of both direction, utilize the autoluminescence to concave mirror 207, adjust concave mirror 207 respectively, level crossing 213, allow autoluminescence through concave mirror 207, after level crossing 213, reflex on outgoing mirror 211, the attitude of careful adjustment 211, allow the reflecting surface of outgoing mirror 211 perpendicular to autoluminescence, utilize the autoluminescence to concave mirror 209, adjust the attitude of concave mirror 209, prism 216, catoptron 210, catoptron 214, prism 215 respectively, allow light respectively through said elements, according to the light path described in Fig. 2, be irradiated on completely reflecting mirror 212.The attitude of careful adjustment catoptron 212 and outgoing mirror 211, allows in resonator cavity and export continuous laser, and it is maximum to adjust to output power, so far completes the adjustment of continuous part, fixing all eyeglasses except outgoing mirror 211.The position of adjustment five dimension adjusting tool 201,202,203, and observe continuous Output of laser shape and hot spot distribution, when laser facula reaches mode-lock status, touch and insert prism 215, to laserresonator disturbance, form self-excitation locked mode, thus realize the output from continuous light to femtosecond laser.By five dimension adjusting tools fix locked, adopt technology recited above by described lens 206, concave mirror 207, concave mirror 209 when keep attitude, be welded to position shown in Fig. 2, remove the installation that frock completes whole laser instrument.
In order to ensure the stability of whole laser instrument, can pumping source, resonator cavity be fixed in a cavity, the seal operation of line correlation of going forward side by side.
Embodiment 2:
Fig. 3 is the schematic diagram of one five dimension adjusting tool, whole five dimension frocks are made up of three translation stages, 301,302,303, adjusting bracket 304 and cantilever 305, translation stage 301,302 is for the adjustment of position, all around, 303 for the adjustment of upper-lower position, and adjusting bracket 304 can realize the adjustment of pitching and beat by two adjusting knobs.Cantilever 305 is for coupling together between adjusting bracket and mirror holder.
Although make specific descriptions to the present invention with reference to the above embodiments, but for the person of ordinary skill of the art, should be appreciated that and can modify based on content disclosed by the invention or improve, and these amendments and improvement be all within spirit of the present invention and scope.

Claims (6)

1. the adjustment method of a femtosecond laser oscillator, this oscillator comprises 1 532nm pumping source, 2 532nm catoptrons, 1 condenser lens, 1 femtosecond laser resonator cavity, wherein, femtosecond laser resonator cavity comprises 2 concave mirrors, 1 piece of titanium gem crystal, 2 prisms, 4 completely reflecting mirrors, 1 outgoing mirror, it is characterized in that comprising following debugging step:
1. all eyeglasses except 1 condenser lens, 2 concave mirrors are welded on mirror holder, and ensure that all eyeglasses have same centre-height, and eyeglass and horizontal plane;
2. the eyeglass welded is fixed on the base plate of oscillator according to design, accommodate 1 condenser lens and 2 concave mirrors respectively to subscribing position by 3 the five adjustable frocks of dimension, five dimension Adjustable tool can carry out all around, up and down, pitching, beat adjustment;
3. utilize 2 532nm catoptrons and 1 condenser lens, 532 pump lights are focused in laser crystal; The beat of all eyeglasses in careful adjustment femtosecond laser resonator cavity, makes femtosecond laser resonator cavity export continuous laser.
4. utilize 3 five to tie up frock, carefully regulate the distance of lens and two concave mirrors, make to export correct zlasing mode in femtosecond laser chamber, the beat of careful regulation output mirror, makes laser output power maximum;
5. giving the disturbance of whole femtosecond laser resonator cavity, start the self-locking mode effect of Ti∶Sapphire laser, making femtosecond laser oscillator become femtosecond pulse output from exporting continuously.
6. fix 3 five dimension adjusting tools, 1 focus lamp, 2 concave mirrors are welded on corresponding mirror holder, complete overall debugging.
2. the method for claim 1, is characterized in that the eyeglass welding method that it adopts comprises following steps,
1) mirror holder of welding comprises lens fixing apparatus, thermistor (PTC), base three parts;
2) eyeglass high-temp glue is bonded on lens fixing apparatus;
3) base through screws is fixed on optical table, and by high temperature scolding tin, PTC is welded on base;
4) utilize frock to regulate lens fixing apparatus to correct attitude, and lens fixing apparatus is suspended in above PTC;
5) at PTC and lens fixing apparatus direct full-filling low temperature scolding tin, to PTC energising, by melts soldering tin;
6) remove the voltage on PTC, scolding tin cools naturally, and lens fixing apparatus is welded on base by PTC.
3. the method for claim 1, be is characterized in that its five dimensions Adjustable tool is made up of 3 translation stages and 1 adjusting bracket, is fixed between adjusting bracket and mirror holder by cantilever.
4. the method for claim 1, is characterized in that the disturbance described in it is produced by prism, by touching prism, realizes the locked mode of femtosecond laser oscillator
5. the method for claim 1, is characterized in that the disturbance described in it is produced by completely reflecting mirror, by the front and back position of flip-flop completely reflecting mirror, realizes the locked mode of femtosecond laser oscillator.
6. the method as described in claim 1-5, is characterized in that described 532nm pumping source and femtosecond laser resonator cavity integral hermetic are in a cavity.
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Cited By (8)

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Publication number Priority date Publication date Assignee Title
CN105449496A (en) * 2015-12-29 2016-03-30 中国电子科技集团公司第十一研究所 Optical element fixing method and adjustment device
CN105470806A (en) * 2016-01-20 2016-04-06 福建中科晶创光电科技有限公司 Assembling method for improving stability of miniature all-solid-state laser
CN108512018A (en) * 2018-05-30 2018-09-07 武汉华日精密激光股份有限公司 A kind of adjustable mirror holder for solid-state laser
CN110631807A (en) * 2019-09-18 2019-12-31 中国科学院国家授时中心 Mode-locked laser state detection device and method based on optical resonant cavity
CN110702614A (en) * 2019-11-05 2020-01-17 北京环境特性研究所 Ellipsometer device and detection method thereof
CN113075780A (en) * 2021-04-13 2021-07-06 中国科学院重庆绿色智能技术研究院 Off-axis parabolic mirror assembly and using method thereof
CN113437622A (en) * 2021-06-24 2021-09-24 何苗 Device and method for adjusting laser light path
CN114289872A (en) * 2022-03-07 2022-04-08 西安中科华芯测控有限公司 Method for assembling ultrafast laser mirror for miniature laser gyroscope

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CN202133615U (en) * 2011-07-13 2012-02-01 维林光电(苏州)有限公司 Twin laser
CN202231295U (en) * 2011-08-05 2012-05-23 广州市普东光电科技有限公司 Sealed double-channel holmium laser
CN102922076A (en) * 2012-11-05 2013-02-13 大恒新纪元科技股份有限公司 Lens welding device and welding method for using same

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Publication number Priority date Publication date Assignee Title
CN2490740Y (en) * 2001-04-09 2002-05-08 中国科学院物理研究所 Miniaturized solid flying-second laser oscillator
CN202133615U (en) * 2011-07-13 2012-02-01 维林光电(苏州)有限公司 Twin laser
CN202231295U (en) * 2011-08-05 2012-05-23 广州市普东光电科技有限公司 Sealed double-channel holmium laser
CN102922076A (en) * 2012-11-05 2013-02-13 大恒新纪元科技股份有限公司 Lens welding device and welding method for using same

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105449496A (en) * 2015-12-29 2016-03-30 中国电子科技集团公司第十一研究所 Optical element fixing method and adjustment device
CN105470806A (en) * 2016-01-20 2016-04-06 福建中科晶创光电科技有限公司 Assembling method for improving stability of miniature all-solid-state laser
CN105470806B (en) * 2016-01-20 2018-06-08 福建中科晶创光电科技有限公司 A kind of assembly method for improving miniature all solid state laser stability
CN108512018A (en) * 2018-05-30 2018-09-07 武汉华日精密激光股份有限公司 A kind of adjustable mirror holder for solid-state laser
CN110631807A (en) * 2019-09-18 2019-12-31 中国科学院国家授时中心 Mode-locked laser state detection device and method based on optical resonant cavity
CN110702614A (en) * 2019-11-05 2020-01-17 北京环境特性研究所 Ellipsometer device and detection method thereof
CN110702614B (en) * 2019-11-05 2022-04-12 北京环境特性研究所 Ellipsometer device and detection method thereof
CN113075780A (en) * 2021-04-13 2021-07-06 中国科学院重庆绿色智能技术研究院 Off-axis parabolic mirror assembly and using method thereof
CN113075780B (en) * 2021-04-13 2022-09-16 中国科学院重庆绿色智能技术研究院 Off-axis parabolic mirror assembly and using method thereof
CN113437622A (en) * 2021-06-24 2021-09-24 何苗 Device and method for adjusting laser light path
CN114289872A (en) * 2022-03-07 2022-04-08 西安中科华芯测控有限公司 Method for assembling ultrafast laser mirror for miniature laser gyroscope

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