CN104552638A - Automatic starting/stopping mechanism for cooling spray - Google Patents
Automatic starting/stopping mechanism for cooling spray Download PDFInfo
- Publication number
- CN104552638A CN104552638A CN201510021387.3A CN201510021387A CN104552638A CN 104552638 A CN104552638 A CN 104552638A CN 201510021387 A CN201510021387 A CN 201510021387A CN 104552638 A CN104552638 A CN 104552638A
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- CN
- China
- Prior art keywords
- baffle plate
- equalization frame
- trigger
- damper
- shut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention discloses an automatic starting/stopping mechanism for cooling spray. The automatic starting/stopping mechanism for the cooling spray comprises a balance framework arranged above two main rollers, two trigger baffle plates respectively arranged at the outer sides of two main rollers, and an intercepting baffle plate arranged before a cooling liquid spray pipe; the balance framework is provided with a pivot shaft in the axial direction of the main rollers, and the balance framework is capable of swinging horizontally around the pivot shaft; one end of the trigger baffle plate is connected with one side of the balance framework for feeling the impact of cooling liquid and driving the balance framework to incline around the pivot shaft; the intercepting baffle plate is fixed at one side of the balance framework, when the balance framework inclines towards one side, the intercepting baffle plate at the same side seals the lower edge of the cooling liquid spray pipe, and the cooling liquid is guided to a non-work region. The automatic starting/stopping mechanism for the cooling spray is simple and reliable in structure; the automatic starting/stopping mechanism for the cooling spray can be used through simply improving original equipment, electronic and power equipment of the original equipment are not disturbed, and meanwhile, the spluttering of the cooling liquid at the unused side is eliminated, the cooling liquid foam is weakened, and the cutting processing is stable.
Description
Technical field
The invention belongs to silicon chip cutting technique field, particularly relate to a kind of chilling spray automatic start-stop mechanism.
Background technology
When using diamond wire equipment to carry out silicon chip slice processing, spraying cooling liquid is needed to carry out Cooling and Lubricator, because cooling fluid contains the composition such as emulsifying agent, surfactant, in high-speed cutting process, a large amount of foam can be produced due to percussion, affect coolant rate stability.
During for avoiding Double Directional Cutting, having neither part nor lot in cooling side cooling fluid and directly being thrown away, needing to carry out left and right hydrojet automatic start-stop.
Possible solution party is to having Mechanical course and Electronic Control two kinds.
The former adopts frame for movement to control, and designs with the thinking of damming, and does not form impact, only carry out at use side switching of damming and let pass to pipeline pressure and curtain, simple and reliable.
The latter adopts three-way magnetic valve door to realize, make not use side to close down instantaneously, use side fast and stable spray, because left and right switching frequency is high, the problem of pipeline pressure change is there is at handoff procedure, transfer pump may be caused because resistance fluctuation life time decay greatly, and the spray curtain of open side also cannot form stable state fast simultaneously.
Summary of the invention
The object of the invention is in diamond wire Double Directional Cutting process, does not use the cooling fluid of side to be thrown away by gauze and forms a large amount of foam, affect coolant rate, finally affect the problem of cutting processing quality, provide a kind of mechanical type chilling spray automatic start-stop mechanism.
The present invention for achieving the above object, adopts following technical scheme:
A kind of chilling spray automatic start-stop mechanism, for silicon wafer cutting equipment, is characterized in that: it comprises the equalization frame be arranged on above two home rolls, and two pieces of being separately positioned on outside two home rolls trigger baffle plate, are arranged on coolant nozzle front shut-off damper; Described equalization frame is axially provided with pivot at home roll, can pivotally swing; Described triggering baffle plate one end is connected with the side of equalization frame, for experiencing the impact of cooling fluid, and drives equalization frame pivotally to tilt; Described shut-off damper is fixed on the side of equalization frame, and when equalization frame is to lopsidedness, the shut-off damper of homonymy seals the lower edge of coolant nozzle, nonclient area of cooling fluid being led.
It is further characterized in that: described equalization frame is rectangle, and described pivot is arranged on the center perpendicular to home roll axis two limits, and described two pieces of triggering baffle plates and two pieces of shut-off damper are separately positioned on equalization frame and are parallel on two limits of home roll axis.
Further: described triggering baffle plate comprises trigger and connecting rod, described connecting rod connects equalization frame and trigger, and described trigger is for experiencing the impact of cooling fluid.
Preferred: described trigger is L tee section baffle plate, and its width is less than home roll length.
Described shut-off damper is the groove in U-shaped cross section.
The present invention is simple and reliable for structure, existing equipment basis is carried out simple transformation install additional and can use, and any interference can not be produced to the electronics of existing equipment, power-equipment, reach elimination does not use side cooling fluid to throw away the situation of splashing simultaneously, reduce the defect of the rich alveolation of cooling fluid, cutting processing is stablized.
Accompanying drawing explanation
Fig. 1 is front elevational schematic of the present invention.
Fig. 2 is schematic top plan view of the present invention.
Fig. 3 is a kind of working state schematic representation of the present invention.
Fig. 4 is that under a kind of duty of the present invention, cooling fluid flows to schematic diagram.
Fig. 5 is the another kind of working state schematic representation of the present invention.
Fig. 6 is that under the another kind of duty of the present invention, cooling fluid flows to schematic diagram.
Detailed description of the invention
As shown in Figure 1, 2; a kind of chilling spray automatic start-stop mechanism, for silicon wafer cutting equipment, it comprises the rectangle equalization frame 1 be arranged on above two home rolls 4; two pieces of being separately positioned on outside two home rolls 4 trigger baffle plate 2, are arranged on coolant nozzle 5 front shut-off damper 3.Described equalization frame 1 is provided with pivot 11 in the center perpendicular to home roll 4 axis two limits, can pivotally 11 swing.Described two pieces of triggering baffle plates 2 and two pieces of shut-off damper 3 are separately positioned on equalization frame 1 and are parallel on two limits of home roll 4 axis.Described triggering baffle plate 2 one end is connected with the side of equalization frame 1, for experiencing the impact of cooling fluid, and drives equalization frame 1 pivotally 11 inclinations; Described shut-off damper 3 is fixed on the side of equalization frame 1, and when equalization frame 1 is to lopsidedness, the shut-off damper 3 of homonymy seals the lower edge of coolant nozzle 5, nonclient area of cooling fluid being led.
Described triggering baffle plate 2 comprises trigger 22 and connecting rod 21, and described connecting rod 21 connects equalization frame 1 and trigger 22, and described trigger 22 is for experiencing the impact of cooling fluid.Described trigger 22 is L tee section baffle plate, and its width is less than home roll length.Described shut-off damper 3 is the groove in U-shaped cross section.
As shown in Figure 1, 2, at unused state, equalization frame 1 is tending towards left-right balance.As shown in Figure 3,4, after cutting starts, the non-use side of cooling fluid can cause cooling fluid to throw away because gauze runs up, impact this side and trigger baffle plate 2, make general frame 1 oblique to this inclination, shut-off damper 3 catches the cooling fluid of coolant nozzle 5, triggers baffle plate 2 and is no longer impacted, because the liquid gravity effect in shut-off damper 3 is maintained the heeling condition of whole mechanism.As shown in Figure 5,6, until after cutting commutation, opposite side cooling fluid throws away, equalization frame 1 is triggered baffle plate 2 triggering by another and is tilted to opposite side, the shut-off damper 3 of opposite side catches the cooling fluid of opposite side coolant nozzle 5, opposite side triggers baffle plate 2 and is no longer impacted, and whole mechanism enters the heeling condition in another direction.So move in circles.
Claims (5)
1. a chilling spray automatic start-stop mechanism, for silicon wafer cutting equipment, is characterized in that: it comprises the equalization frame be arranged on above two home rolls, and two pieces of being separately positioned on outside two home rolls trigger baffle plate, are arranged on coolant nozzle front shut-off damper; Described equalization frame is axially provided with pivot at home roll, can pivotally swing; Described triggering baffle plate one end is connected with the side of equalization frame, for experiencing the impact of cooling fluid, and drives equalization frame pivotally to tilt; Described shut-off damper is fixed on the side of equalization frame, and when equalization frame is to lopsidedness, the shut-off damper of homonymy seals the lower edge of coolant nozzle, nonclient area of cooling fluid being led.
2. chilling spray automatic start-stop mechanism according to claim 1; it is characterized in that: described equalization frame is rectangle; described pivot is arranged on the center perpendicular to home roll axis two limits, and described two pieces of triggering baffle plates and two pieces of shut-off damper are separately positioned on equalization frame and are parallel on two limits of home roll axis.
3. chilling spray automatic start-stop mechanism according to claim 1 and 2, is characterized in that: described triggering baffle plate comprises trigger and connecting rod, and described connecting rod connects equalization frame and trigger, and described trigger is for experiencing the impact of cooling fluid.
4. chilling spray automatic start-stop mechanism according to claim 3, is characterized in that: described trigger is L tee section baffle plate, and its width is less than home roll length.
5. chilling spray automatic start-stop mechanism according to claim 1 and 2, is characterized in that: described shut-off damper is the groove in U-shaped cross section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510021387.3A CN104552638B (en) | 2015-01-15 | 2015-01-15 | A kind of chilling spray automatic start-stop mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510021387.3A CN104552638B (en) | 2015-01-15 | 2015-01-15 | A kind of chilling spray automatic start-stop mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104552638A true CN104552638A (en) | 2015-04-29 |
| CN104552638B CN104552638B (en) | 2016-01-20 |
Family
ID=53070216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510021387.3A Active CN104552638B (en) | 2015-01-15 | 2015-01-15 | A kind of chilling spray automatic start-stop mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104552638B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110561631A (en) * | 2018-06-06 | 2019-12-13 | 隆基绿能科技股份有限公司 | Cutting fluid supply device and method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030221868A1 (en) * | 2002-06-04 | 2003-12-04 | Martin Wilfred R. | Core drilling method and apparatus |
| CN2811834Y (en) * | 2005-08-09 | 2006-08-30 | 黄秋林 | Water drainer starting switch induction device |
| CN102626955A (en) * | 2012-02-14 | 2012-08-08 | 上海五同机械制造有限公司 | Double-guide roll linear silicon wafer cutting system |
| JP2012232442A (en) * | 2011-04-28 | 2012-11-29 | Hitachi Koki Co Ltd | Portable cutter |
| CN203293392U (en) * | 2013-06-22 | 2013-11-20 | 宇骏(潍坊)新能源科技有限公司 | Water discharging and blowing device for demounting guide wheel of silicon wafer cutting machine |
| CN204414396U (en) * | 2015-01-15 | 2015-06-24 | 无锡隆基硅材料有限公司 | A kind of chilling spray automatic start-stop mechanism |
-
2015
- 2015-01-15 CN CN201510021387.3A patent/CN104552638B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030221868A1 (en) * | 2002-06-04 | 2003-12-04 | Martin Wilfred R. | Core drilling method and apparatus |
| CN2811834Y (en) * | 2005-08-09 | 2006-08-30 | 黄秋林 | Water drainer starting switch induction device |
| JP2012232442A (en) * | 2011-04-28 | 2012-11-29 | Hitachi Koki Co Ltd | Portable cutter |
| CN102626955A (en) * | 2012-02-14 | 2012-08-08 | 上海五同机械制造有限公司 | Double-guide roll linear silicon wafer cutting system |
| CN203293392U (en) * | 2013-06-22 | 2013-11-20 | 宇骏(潍坊)新能源科技有限公司 | Water discharging and blowing device for demounting guide wheel of silicon wafer cutting machine |
| CN204414396U (en) * | 2015-01-15 | 2015-06-24 | 无锡隆基硅材料有限公司 | A kind of chilling spray automatic start-stop mechanism |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110561631A (en) * | 2018-06-06 | 2019-12-13 | 隆基绿能科技股份有限公司 | Cutting fluid supply device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104552638B (en) | 2016-01-20 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
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| TR01 | Transfer of patent right |
Effective date of registration: 20210928 Address after: 710199 no.388 Hangtian Middle Road, Chang'an District, Xi'an City, Shaanxi Province Patentee after: LONGI GREEN ENERGY TECHNOLOGY Co.,Ltd. Address before: No. 111-1, Ximei Road, New District, Wuxi City, Jiangsu Province, 214000 Patentee before: WUXI LONGI SILICON MATERIALS Corp. |