CN104551387B - Multi-beam synthetic focusing device - Google Patents
Multi-beam synthetic focusing device Download PDFInfo
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- CN104551387B CN104551387B CN201410814855.8A CN201410814855A CN104551387B CN 104551387 B CN104551387 B CN 104551387B CN 201410814855 A CN201410814855 A CN 201410814855A CN 104551387 B CN104551387 B CN 104551387B
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- assembly
- collimator
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- synthesis
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/354—Working by laser beam, e.g. welding, cutting or boring for surface treatment by melting
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The present invention provides a kind of multi-beam synthetic focusing device, synthesizes assembly including focus pack and at least one multi-beam;Multi-beam synthesis assembly is for synthesizing multi beam different directions incident illumination;The optical fiber being equal to number of lasers including at least two-laser and collimator and deflect assembly;Every optical fiber is all connected with a laser instrument, and each collimator is all connected with an optical fiber;Deflection assembly includes at least one for changing the reflecting mirror of the beam direction via collimator outgoing;Focus pack is for converging collimated light beam;Including mirror holder and the condenser lens being located in mirror holder.The photosynthetic of multi beam different directions can be become angle multi beam directional light between 0~30 degree by the present invention, final convergence after a condenser lens, can on roll surface simultaneously or timesharing produces micro-hole group, increase the texturing region in the unit interval, and then laser roughening process velocity can be improved, it is simple to regular and random distributed constant sets;Texturing roll surface is not likely to produce striped.
Description
Technical field
The present invention relates to discrete laser process technology, especially a kind of multi-beam synthetic focusing device, be suitable for
In fields such as cold roll laser texturings.
Background technology
Cold-reduced sheet has that thickness and plate shape precision are high, surface quality is good, mechanical property is good, thickness more
The advantage such as thin, applies the widest.Cold-reduced sheet is divided into optic panel and texturing plate by roughness.Texturing plate uses
Texturing Surface of Roll is smooth, and surface topography is by Texturing Surface of Roll copying surface, and roughness is generally large.Relatively
Optic panel, texturing plate is because having more preferable elongation percentage and coated layer adhesion, in automobile, high ferro, aviation
The industries such as space flight, household electrical appliance and packaging for foodstuff have extensive use, are a kind of indispensable important former
Material.
Roller texturing technology carries out texturing to polishing roll exactly so that it is surface has the skill of special appearance
Art.The roller texturing technology industrially obtaining large-scale promotion application at present is shot-peening texturing, electric spark
Texturing and laser roughening, the most more advanced is electric spark texturing and laser roughening.
Electric spark texturing is by being immersed in roll and electrode in insulated working liquid or in the gap of two electrodes
Spray insulated working liquid, two interelectrode gaps are sufficiently small, and electrode applies the pulse of certain amplitude and frequency
Voltage, produces spark discharge, produces a series of micro-molten micro-hole on roller surface.
Laser roughening is divided into CO by the laser instrument kind used2Laser roughening and YAG laser roughening.CO2
Laser roughening passes through continuous CO2The continuous laser that laser instrument sends, chopped device becomes the arteries and veins that frequency is certain
Impulse light, by the most at the uniform velocity moving focus lamp by pulse laser focusing to the roll at the uniform velocity rotated along roll
Surface, makes roller surface fusing, gasification, produces substantial amounts of molten bath, thus formed necessarily at whole roll surface
The micro-hole of hardening having boss in a large number of pattern.YAG laser roughening is by continuous LD pumped YAG lasers warp
Q-switch particular modulation output high-energy-density, the YAG pulse laser of high repetition frequency, by along rolling
Roller the most at the uniform velocity moves focus lamp by pulse laser focusing to the roller surface at the uniform velocity rotated, and makes roller surface
Fusing, gasification, produce substantial amounts of molten bath;Certain ingredients, certain pressure auxiliary gas along certain angle
Side-blowing bath, makes molten bath boss obvious;Roll self conduction of heat makes molten bath cool down rapidly because of fused mass
And Surface hardened layer;Thus the micro-hole of hardening having boss in a large number of certain pattern is formed at whole roll surface.
YAG laser roughening technology is that Inst. of Mechanics, CAS researchs and develops in the nineties, as
Patent of invention " high frequency modulation multy-pulse YAG laser engraving design system and processing method " (ZL
92113223.9).The each to elongation percentage of cold-reduced sheet is regulated to the uniformity in order to increase each of micro-hole distribution,
The two-dimentional controlled distribution technology of Chinese Academy of Sciences's mechanics developed YAG laser roughening, as patent of invention " has
The surface of roller texturing laser-processing system of controlled distribution texturing point " (ZL 00128273.5).In engineering
There is the random distribution in the micro-hole of considerable texturing plate requirement.In order to improve the presentation quality of laser roughening plate,
Controlled random distribution technique is developed, as sent out on the basis of the two dimension controlled distribution technology of Chinese Academy of Sciences's mechanics place
Bright patent " the surface of roller texturing laser-processing system of circumference random texturing point and method " (ZL
200510117158.8);And for example " the surface of roller texturing laser of random deflection texturing point adds patent of invention
Work system and method " (ZL 200510116750.6).
The laser roughening uniformity in micro-hole and repeatability, service condition, environmental pollution, operating cost etc.
Aspect is all more superior than electric spark texturing.But, in terms of process velocity, laser roughening is compared in electric spark texturing
Advantageously.Same roll, laser roughening needs one hour, and electric spark texturing only may need 20 points
Clock.For laser roughening, micro-pit density of Texturing Surface of Roll is the highest, processes in the case of texturing frequency is constant
Speed is the slowest.Now superior automobile plate, appliance plate micro-pit density more and more higher, highly desirable raising swashs
The process velocity of light texturing.
Electro-discharge Texturing speed is that multi-electrode discharges simultaneously than reason faster.Equally, the most micro-hole is also
Row processing is the inevitable choice improving laser roughening process velocity.
General laser roughening, uses separate unit laser instrument, the scheme of single focus lamp.Use multiple stage laser
Device, the scheme of multiple focus lamp obviously can improve texturing speed.The disadvantage of the program is multiple stage laser
Micro-hole that device produces, relative to the bad control in position, easily produces fatal interference fringe.Its further drawback is
Light channel structure is huger, can the quantity of laser instrument simultaneously can be limited.Also can be by the list of separate unit laser instrument
Shu Guang is divided into multi-beam, focuses on output respectively.Now after beam splitting, the energy of single beam can be limited, and it produces
The position in micro-hole have dependency, the most easily go out striped.
The scheme that after using separate unit laser instrument, beam splitting, single focus lamp focuses on also can improve texturing speed, because of
The multiple micro-hole spacing simultaneously produced is close, is equivalent to one group of micro-hole, is difficult to out striped.The program is
Big shortcoming is the energy constraint in single hole, is only suitable for improving the speed of low roughness texturing.Its further drawback is
Hole spacing in the group of micro-hole is relatively fixed, it is impossible to realize random distribution, have impact on the whole of texturing roll forming looks
Body improves.
Use multi-station laser, close the scheme that after restrainting, single focus lamp focuses on, overcome the energy in single hole not
The problem of foot, should be more satisfactory scheme.It is exclusively used in the quasiconductor of CTP (computer to plate)
Laser module, such as the CTP laser array image-forming module series of Intense, combines the optics device of precision
Part and simple and efficient electronic device interface, it has the arrangement of laser emitters of 64 high reliability,
Each channel interior provides the single-mode laser output of the high reliability of 200mW.The maximum of this device lacks
Point single beam energy is the lowest, it is impossible to texturing.Its further drawback is that each bundle light is fixed relative to position.
Summary of the invention
The present invention provides a kind of multi-beam synthetic focusing device, is used for overcoming defect of the prior art, real
Existing multi-beam synthesis, improves the process velocity of laser roughening, it is achieved the texturing process of high-energy-density.
The present invention provides a kind of multi-beam synthetic focusing device, including:
At least one multi-beam synthesis assembly, synthesizes for restrainting the incident illumination of above different directions by two,
The angle between light beam after synthesis is between 0~30 degree;Including at least two laser instrument and described swash
The collimator of light device quantity equivalent and a deflection assembly;Light is all passed through between described laser instrument and collimator
Fine connection;Described deflection assembly includes that at least one is for changing the light beam side via described collimator outgoing
To reflecting mirror;
Focus pack, for converging the light beam after the synthesis assembly synthesis of described multi-beam;Including mirror
Frame and the condenser lens being arranged in described mirror holder;Light beam can on roll surface simultaneously after described condenser lens Or timesharing produces micro-hole group, and in the group of micro-hole, micro-hole can be along the axis direction linear array of roller。
Wherein, described multi-beam synthesis assembly also includes the motor that quantity is equal to described number of mirrors,
Each described reflecting mirror is installed on a described motor.
Further, described motor is galvanometer motor, motor, piezoelectric motor or servomotor.
Further, all described reflecting mirrors and all described galvanometer motors are arranged in housing, described
One it is provided with guide-lighting between housing and each described collimator and between described housing and described mirror holder
Pipe.
Particularly, described housing is positioned on a support, and described galvanometer motor is installed on described support,
And interlaced arrangement in vertical direction.
Wherein, described mirror holder is additionally provided with protective glass, described protective glass be positioned at described condenser lens away from
The side of described multi-beam synthesis assembly.
Further, described mirror holder is additionally provided with the gas for being blown into air-flow near one end of described protective glass
Mouth, described valve is horn-like, and flared end is connected with described mirror holder, and necking end axially overhangs along it.
Particularly, described multi-beam synthesis assembly is that three-beam synthesizes assembly, and this three-beam synthesis assembly is used
In being synthesized by the incident illumination of three beams different directions, the angle between light beam after synthesis is at 0~30 degree
Between;The most a branch of incident illumination through condenser lens center, centered by incident beam;Other two bundle incidences
Light is the most vertical with described center incident beam, for normal incident light beam;
This three-beam synthesis assembly includes three laser instrument, three optical fiber, three collimators and a deflection
Assembly;Wherein laser instrument described in is positioned at middle is intermediate laser device, is connected with described intermediate laser device
Described collimator is intermediate collimator, and it is side that laser instrument described in other two is positioned at described intermediate laser device both sides
Limit laser instrument, the described collimator being connected with described side laser instrument is side collimator;
Described deflection assembly include two for change via described side collimator outgoing described vertically
The reflecting mirror in incident beam direction.
Wherein, including a first multi-beam synthesis assembly and at least one the second multi-beam synthesis assembly;
Described first multi-beam synthesis assembly is that three-beam synthesizes assembly;Described center incident beam and two hangs down
The hot spot that straight incident beam is formed after described condenser lens on focal plane is located along the same line;
Described second multi-beam synthesis assembly is that two-beam synthesizes assembly, and this two-beam synthesis assembly is used for will
The incident illumination of two bundle different directions synthesizes, and the angle between light beam after synthesis is between 0~30 degree;
Wherein two bundle incident illuminations are the most vertical with described center incident beam, for normal incident light beam;This two-beam closes
Assembly is become to include two laser instrument, two optical fiber, two collimators and a deflection assembly;Wherein two institute
State laser instrument being positioned at both sides is side laser instrument, and the described collimator being connected with described side laser instrument is side
Limit collimator;Described deflection assembly includes two for changing vertical via described side collimator outgoing
The reflecting mirror in incident beam direction;
The dual-side collimator of described two-beam synthesis assembly is positioned at the centre of described three-beam synthesis assembly
Line and described three between the both sides of collimator, and the dual-side collimator of described two-beam synthesis assembly
Line between the dual-side collimator of bundle light compositing assembly is an angle, and this angle is between 0~180 degree;
Intermediate laser device in all of described two-beam synthesis assembly and described three-beam synthesis assembly and
Intermediate collimator all can form two vertically entering in three-beam synthesis assembly, and described two-beam synthesis assembly
After center incident beam line focus lens in irradiating light beam and described three-beam synthesis assembly on focal plane
The hot spot formed is respectively positioned on same straight line.
Further, including two described second multi-beam synthesis assemblies;
Line between the dual-side collimator of two described two-beam synthesis assemblies is photosynthetic with described three beams
The angle becoming the line between the dual-side collimator of assembly is 60 degree.
Further, including three described second multi-beam synthesis assemblies;
Line between the dual-side collimator of one of them described two-beam synthesis assembly and described three beams
The angle of the line between the dual-side collimator of light compositing assembly is 90 degree;
Line between the dual-side collimator of two other described two-beam synthesis assembly and described three beams
The angle of the line between the dual-side collimator of light compositing assembly is 45 degree.
The multi-beam synthetic focusing device that the present invention provides, laser instrument excites connected fibre optical transmission light
Bundle, enters reflecting mirror after these light beam collimators collimation, changes direction, formed after being reflected mirror reflection
Multi beam collimated light beam, collimated light beam converges after a condenser lens, and the light beam after utilization is assembled can be at roll surface
The while of upper or timesharing generation micro-hole group, by controlling the spacing in internal micro-hole in real time, increases in the unit interval
Texturing region, and then the process velocity of laser roughening can be improved, and be easy to regular and random distribution ginseng
The setting of number;Monofocal mirror exports, and texturing roll surface is not likely to produce striped;In the group of micro-hole, micro-hole can be along roller
Axis direction linear array, improves the process velocity of laser roughening in the case of spindle speed is limited.
Accompanying drawing explanation
The front view of the multi-beam synthetic focusing device that Fig. 1 provides for the embodiment of the present invention;
Fig. 2 is the top view of Fig. 1;
Fig. 3 shows for the hot spot of the three-beam synthetic focusing device synchronism output that the embodiment of the present invention provides
It is intended to;
The top view of the multi-beam synthetic focusing device that Fig. 4 provides for the preferred embodiment of the present invention one;
Fig. 5 is the hot spot schematic diagram of the multi-beam synthetic focusing device synchronism output in Fig. 4;
The top view of the multi-beam synthetic focusing device that Fig. 6 provides for the preferred embodiment of the present invention two;
Fig. 7 is the hot spot schematic diagram of the multi-beam synthetic focusing device synchronism output in Fig. 6;
The top view of the multi-beam synthetic focusing device that Fig. 8 provides for the preferred embodiment of the present invention three;
Fig. 9 is the hot spot schematic diagram of the multi-beam synthetic focusing device synchronism output in Fig. 8.
Detailed description of the invention
As shown in Figure 1 and Figure 2, the embodiment of the present invention provides a kind of multi-beam synthetic focusing device, including
Focus pack and at least one multi-beam synthesize assembly, and multi-beam synthesis here refers to more than by two bundles
Light compositing;
Multi-beam synthesis assembly synthesizes, after synthesis for the incident illumination restrainting above different directions by two
Angle between light beam is between 0~30 degree;Including at least two laser instrument 18a and laser instrument 18a number
Measure collimator 18c and a deflection assembly 20 that the optical fiber 18b being equal to is equal to laser instrument 18a quantity;
Each optical fiber is all connected with a laser instrument and a collimator, for the light beam launched by laser instrument 18a
Carrying out flexible transfer, collimator 18c is for the light beam of collimating optical fibre 18b transmission;Deflection assembly 20 wraps
Include at least one for the reflecting mirror 29 changing the beam direction via collimator 18 outgoing;
Focus pack, the light beam after multi-beam synthesizes assembly synthesis converges;Including mirror holder 23
With the condenser lens 24 being arranged in mirror holder 23.
Multi-beam synthesis assembly includes following several:
Transmitting light beam after collimator collimation is if two bundles, and the most a branch of mirror 29 that is reflected changes
Change direction;Comprise two kinds of situations:
The first situation: light beam is reflected mirror 29 and changes direction, and another light beam reflection mirror is direct
Through condenser lens 24 center, it is only necessary to a reflecting mirror 29;Be reflected mirror 29 reflection light beam with enter
Penetrate the angle between the light beam at condenser lens 24 center between 0~30 degree;
The second situation: two-beam is all reflected mirror 29 and changes direction, needs two reflecting mirrors 29;Warp
Angle between the light beam of reflecting mirror 29 reflection is between 0~30 degree;
Collimator collimation after transmitting light beam if three beams more than, the most at least two bundle be reflected mirror 29
Change direction;Comprise two kinds of situations:
The first situation: light beam reflection mirror is directly over condenser lens 24 center, more than two bundles
Light be reflected mirror 29 and change direction, need plural reflecting mirror 29;It is reflected mirror 29 reflection
Angle between light beam is between 0~30 degree;
The second situation: all light beams are all reflected mirror 29 and change direction, needs three with upper reflector
29;It is reflected the angle between the light beam of mirror 29 reflection between 0~30 degree;
The multi-beam synthetic focusing device that the present invention provides, laser instrument excitation source sends laser beam, with it
This laser beam is carried out flexible transfer by the optical fiber connected, the most a branch of collimator in these laser beams
Enter reflecting mirror 29 after 18a collimation, after being reflected mirror 29 reflection, change direction, the light after all reflections
Bundle or all reflection light beams form synthesis light beam, synthesis with the light beam being directly over condenser lens 24 center
Angle between light beam is between 0~30 degree, and synthesis light beam converges after a condenser lens 24, utilizes and converges
Light beam after Ju can the most simultaneously or timesharing be produced at roll surface (roll surface may be provided on the focal plane of condenser lens 24)
Raw micro-hole group, by controlling the spacing in internal micro-hole in real time, increases the texturing region in the unit interval, enters
And the process velocity of laser roughening can be improved, and it is easy to the setting of regular and random distributed constant;Dan Ju
Burnt mirror output, texturing roll surface is not likely to produce striped;In the group of micro-hole, micro-hole can be arranged along the axis direction straight line of roller
Row, improve the process velocity of laser roughening in the case of machine tool chief axis limited speed.
As it is shown in figure 1, multi-beam synthesis assembly also includes the motor that quantity is equal to reflecting mirror 29 quantity
28, each reflecting mirror 29 is installed on a motor 28.Pass through between motor 28 and reflecting mirror 29
Shaft coupling 27 connects.Motor 28 can make according to the angle of the angle adjustment reflecting mirror 29 of incident illumination
Obtain the angle between the reflection light beam after all reflecting mirrors 29 reflect to be maintained between 0~30 degree.Motor
28 is galvanometer motor, motor, piezoelectric motor or servomotor.
In order to prevent light beam deep fades in transmitting procedure, all reflecting mirrors 29 and all motors 28
It is arranged in housing, is all provided with between housing and each collimator 18a and between housing and mirror holder 23
It is equipped with a light pipe.Wherein the light pipe between intermediate collimator 181 and housing is rear light pipe 19,
Light pipe between side collimator 182 and housing is side light pipe 21, is positioned at mirror holder 23 and shell
Light pipe between body is front light pipe 22.
When the light beam of synthesis is more, reflecting mirror 29 and the motor 28 of needs are the most more, in order to
Avoiding interfering with each other in limited space, housing may be provided on a support 30, and motor 28 is installed in
On support 30, and motor 28 interlaced arrangement in vertical direction.So be conducive to saving space.
In order to protect condenser lens 24, mirror holder 23 is additionally provided with protective glass 25, protective glass 25
The side of assembly is synthesized away from multi-beam in condenser lens 24.
Mirror holder 23 is additionally provided with the valve 26 for being blown into air-flow, valve near one end of protective glass 25
26 in horn-like, and valve 26 flared end is connected with mirror holder 23, and valve 26 necking end axially hangs along it
Stretch.Valve 26 side has pore 26a, and air-flow can blow on roll surface after entering valve 26 by pore,
The bell-mouthed above-mentioned position relationship of valve 26 is conducive to strengthening air velocity, when line focus lens 24 converge
After light beam be radiated on roll surface formation molten bath after, through valve 26 blowout air-flow can be in time by molten bath
Solution blowout, roll surface is carried out texturing.
Air-flow introduced before protective glass 25, and gas circuit is coaxial with convergence laser beam, from valve 26 injection
Air-flow makes protective glass 25 not be contaminated for the dust and the splash that intercept laser and metal function.Laser
Focus lamp (referring here to condenser lens 24) is one group of compound lens, except by laser beam focus in work
Outside the effect on part surface (roll surface), moreover it is possible to eliminate optical aberration, reduce the dispersivity of laser beam.
As in figure 2 it is shown, as the optimal way of above-described embodiment, above-mentioned multi-beam synthesis assembly is three beams
Light compositing assembly, this three-beam synthesis assembly, for being synthesized by the incident illumination of three beams different directions, closes
The angle between light beam after one-tenth is between 0~30 degree;The most a branch of incident illumination through condenser lens center,
Centered by incident beam A;Other two bundle incident illuminations are the most vertical with center incident beam A, for vertical incidence
Light beam B;This three-beam synthesis assembly includes three laser instrument 18a, three optical fiber 18b, three collimators
18c and a deflection assembly 20;Wherein a laser instrument is positioned at middle is intermediate laser device, with intermediate laser
The collimator that device connects is intermediate collimator 181, and additionally two-laser is positioned at intermediate laser device both sides is side
Limit laser instrument, the collimator being connected with side laser instrument is side collimator 182;Wherein intermediate laser device
Laser is sent, through connected optical fiber flexible transfer, finally through intermediate collimator 181 for excitation source
Center incident beam A is sent after collimation;Side laser instrument 182 sends laser for excitation source, through with
The optical fiber flexible transfer that it each connects, finally sends vertical incidence light after side collimator 182 collimates
Bundle B;Deflection assembly includes two for changing the normal incident light beam via side collimator 182 outgoing
The reflecting mirror 29 in B direction.
Three-beam synthesis assembly facilitates implementation the synthesis of more multiple beam;The housing of deflection assembly can be at certain model
In enclosing, the axis around front light pipe 22 and rear light pipe 19 rotates, and is used for adjusting incident angle of light, adjusts
Screw lock can be used after completing.Every corresponding collimator 18c of laser instrument 18a, each other by light
Fine 18b connects.Incident illumination exports directional light, collimator 18c and deflection assembly after collimator 18c
It is threaded connection, uses screw lock.
By the angle of rotating mirror, the hot spot formed after center incident beam A line focus lens can be made
The hot spot 100b formed after 100a and two normal incident light beam B line focus lens is located along the same line,
The multiple micro-hole spacing that simultaneously can produce on roll surface is close, is equivalent to one group of micro-hole, is difficult to out interference bar
Stricture of vagina, sees Fig. 3, it is also possible to make three hot spots overlap, to realize the texturing process of high-energy-density.
As the presently preferred embodiments, seeing Fig. 4-9, multi-beam synthetic focusing device includes first multi beam
Light compositing assembly and at least one the second multi-beam synthesis assembly;First multi-beam synthesis assembly and at least
The transmitting light beam of one the second multi-beam synthesis assembly is all assembled by a condenser lens 24, and at it
Focal beam spot is formed on focal plane;
First multi-beam synthesis assembly is that three-beam synthesizes assembly 100;Center incident beam and two vertically enters
The hot spot 100a formed on focal plane after irradiating light beam line focus lens 24 is located along the same line;
Second multi-beam synthesis assembly is that two-beam synthesizes assembly 200, and this two-beam synthesis assembly is used for will
The incident illumination of two bundle different directions synthesizes, and the angle between light beam after synthesis is between 0~30 degree;
Wherein two bundle incident illuminations are the most vertical with center incident beam, for normal incident light beam;This two-beam synthesis group
Part includes two laser instrument, two optical fiber, two collimators and a deflection assembly;Wherein two-laser
Being positioned at both sides is side laser instrument, and the collimator being connected with side laser instrument is side collimator 201;Partially
Turn assembly 202 and include two for changing the anti-of the normal incident light beam direction via side collimator outgoing
Penetrate mirror;
The dual-side collimator 201 of two-beam synthesis assembly is positioned at the intermediate collimator of three-beam synthesis assembly
Line between the both sides of 181, and the dual-side collimator 201 of two-beam synthesis assembly is photosynthetic with three beams
Becoming the line between the dual-side collimator 182 of assembly is an angle, and this angle is between 0~180 degree;
All of two-beam synthesis assembly 200 and the intermediate laser device 181 in three-beam synthesis assembly 100
And intermediate collimator 182 all can be formed in three-beam synthesis assembly, and two-beam synthesis assembly two vertical
The hot spot 200a that incident beam is formed and the center incident beam line focus lens in three-beam synthesis assembly
After on focal plane formed hot spot 200a be respectively positioned on same straight line.Therefore could also say that multiple three
Restraint the cascade of light compositing focusing arrangement, and multiple three-beam synthetic focusing device shares an intermediate laser device
And intermediate collimator.
As the presently preferred embodiments one, see Fig. 4, Fig. 5, the dual-side of two-beam synthesis assembly 200 is accurate
The line between line and the dual-side collimator 182 of three-beam synthesis assembly 100 between straight device 201
Between angle be 90 degree, three-beam synthesis assembly normal incident light beam formed hot spot 100b and two bundle
The hot spot 200a that light compositing assembly normal incident light beam is formed is positioned on foursquare four angles, three-beam
The hot spot 100a that synthesis assembly center incident beam is formed is positioned at foursquare center;Divide in regular shape
Cloth, considerably increases the density of hot spot relative to the hot spot of the single beam formation of existing laser instrument, thus
The velocity of rotation of roll surface can be improved to improve texturing process speed.
As the presently preferred embodiments two, see Fig. 6, Fig. 7, including two two-beams synthesis assemblies 200;Two
Line between the dual-side collimator 201 of individual two-beam synthesis assembly 200 synthesizes assembly with three-beam
The angle of the line between the dual-side collimator 182 of 100 is 60 degree.Two-beam synthesis assembly 200
The hot spot that the hot spot 200a that normal incident light beam is formed is formed with three-beam synthesis assembly normal incident light beam
100a is positioned on orthohexagonal six angles, the hot spot that three-beam synthesis assembly center incident beam is formed
100a is positioned at hexagonal center;Effect is with preferred embodiment one.
As the presently preferred embodiments three, see Fig. 8, Fig. 9, including three two-beams synthesis assemblies 200;Its
In two-beam synthesis assembly dual-side collimator 201 between line and three-beam synthesis assembly
The angle of the line between dual-side collimator 182 is 90 degree;Two other two-beam synthesis assembly
Between line and the dual-side collimator 182 of three-beam synthesis assembly between dual-side collimator 201
The angle of line is 45 degree.The hot spot 200a and three that two-beam synthesis assembly normal incident light beam is formed
The hot spot 100b that bundle light compositing assembly normal incident light beam is formed is positioned on foursquare four angles and just
The midpoint on square four limits, the hot spot 100a that three-beam synthesis assembly center incident beam is formed is positioned at pros
The center of shape;Effect is with preferred embodiment one.
Claims (8)
1. a multi-beam synthetic focusing device, it is characterised in that including:
Multi-beam synthesis assembly, synthesizes, after synthesis for restrainting the incident illumination of above different directions by two
Light beam between angle between 0~30 degree;
Focus pack, for converging the light beam after the synthesis assembly synthesis of described multi-beam;Described poly-
Burnt assembly includes mirror holder and the condenser lens being arranged in described mirror holder;
Described multi-beam synthesis assembly include one first multi-beam synthesis assembly and at least one more than second
Bundle light compositing assembly;
Described first multi-beam synthesis assembly is that three-beam synthesizes assembly, and this three-beam synthesis assembly is used for will
The incident illumination of three beams different directions synthesizes, the most a branch of incident illumination through condenser lens center, in
Heart incident beam, other two bundle incident illuminations are the most vertical with described center incident beam, are two first vertically to enter
Irradiating light beam;This three-beam synthesis assembly include three the first laser instrument, three first optical fiber, three first
Collimator and one first deflection assembly;All by first between described first laser instrument and first collimator
Optical fiber connects;Wherein the first laser instrument described in is positioned at middle is intermediate laser device, with described intermediate laser
Device connect described first collimator be intermediate collimator, the first laser instrument described in other two be positioned at described in
Between laser instrument both sides be first side laser instrument, be connected with described first side laser instrument is described first accurate
Straight device is first side collimator;Described first deflection assembly includes two for changing via described first
First reflecting mirror in the normal incident light beam direction of side collimator outgoing;Described center incident beam and institute
State two first normal incident light beam after described condenser lens on focal plane formed hot spot be positioned at same
On straight line;
Described second multi-beam synthesis assembly is that two-beam synthesizes assembly, and this two-beam synthesis assembly is used for will
The incident illumination of two bundle different directions synthesizes, and wherein two bundle incident illuminations are the most vertical with described center incident beam
Directly, it is two second normal incident light beam;This two-beam synthesis assembly include two second lasers, two
Second optical fiber, two the second collimators and one second deflection assembly;Described second laser and the second standard
All connected by the second optical fiber between straight device;Wherein second laser described in two is positioned at both sides is second side
Laser instrument, described second collimator being connected with described second side laser instrument is second side collimator;
Described second deflection assembly includes two for changing vertical via the collimator outgoing of described second side
Second reflecting mirror in incident beam direction;Two second side collimators of described two-beam synthesis assembly are positioned at
The both sides of the intermediate collimator of described three-beam synthesis assembly, and the two second of described two-beam synthesis assembly
Between line and two first side collimators of described three-beam synthesis assembly between side collimator
Line is an angle, and this angle is between 0~180 degree;All of described two-beam synthesis assembly is with described
Intermediate laser device and intermediate collimator in three-beam synthesis assembly all can form three-beam synthesis assembly, and
Two second normal incident light beam in described two-beam synthesis assembly synthesize in assembly with described three-beam
The hot spot formed on focal plane after center incident beam line focus lens is respectively positioned on same straight line.
Multi-beam synthetic focusing device the most according to claim 1, it is characterised in that:
Described multi-beam synthesis assembly also includes the motor that quantity is equal to, Mei Gesuo with described number of mirrors
State reflecting mirror to be installed on a described motor.
Multi-beam synthetic focusing device the most according to claim 2, it is characterised in that: described electricity
Machine is galvanometer motor, motor, piezoelectric motor or servomotor;
All described reflecting mirrors and all described motors are arranged in housing, and described housing is described with each
A light pipe it is provided with between collimator and between described housing and described mirror holder.
Multi-beam synthetic focusing device the most according to claim 3, it is characterised in that:
Described housing is positioned on a support, and described motor is installed on described support, and in vertical direction
Upper interlaced arrangement.
Multi-beam synthetic focusing device the most according to claim 4, it is characterised in that:
Being additionally provided with protective glass on described mirror holder, described protective glass is positioned at described condenser lens away from described many
The side of bundle light compositing assembly.
Multi-beam synthetic focusing device the most according to claim 5, it is characterised in that:
Described mirror holder is additionally provided with the valve for being blown into air-flow, described gas near one end of described protective glass
Mouth is horn-like, and flared end is connected with described mirror holder, and necking end axially overhangs along valve.
Multi-beam synthetic focusing device the most according to claim 1, it is characterised in that:
Including two described second multi-beam synthesis assemblies;
Line between two second side collimators of two described two-beam synthesis assemblies and described three beams
The angle of the line between two first side collimators of light compositing assembly is 60 degree.
Multi-beam synthetic focusing device the most according to claim 1, it is characterised in that:
Including three described second multi-beam synthesis assemblies;
Line between two second side collimators of one of them described two-beam synthesis assembly is with described
The angle of the line between two first side collimators of three-beam synthesis assembly is 90 degree;
Line between two second side collimators of two other described two-beam synthesis assembly is with described
The angle of the line between two first side collimators of three-beam synthesis assembly is 45 degree.
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GB201807830D0 (en) * | 2018-05-15 | 2018-06-27 | Renishaw Plc | Laser beam scanner |
CN108788450B (en) * | 2018-06-26 | 2020-12-01 | 大族激光科技产业集团股份有限公司 | Laser processing equipment and laser processing head thereof |
CN109365993B (en) * | 2018-11-27 | 2020-11-20 | 江苏大学 | Roller laser texturing processing equipment and processing method thereof |
CN111545919B (en) * | 2020-04-30 | 2021-07-16 | 北京航空航天大学 | Laser shock peening device and method for multi-beam coupling light spots |
CN113092075B (en) * | 2021-04-09 | 2022-08-23 | 中国科学院光电技术研究所 | Variable-angle high-precision calibration light source system |
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