CN104536412B - 基于指标预报和解相似度分析的光刻工序动态调度方法 - Google Patents
基于指标预报和解相似度分析的光刻工序动态调度方法 Download PDFInfo
- Publication number
- CN104536412B CN104536412B CN201410805103.5A CN201410805103A CN104536412B CN 104536412 B CN104536412 B CN 104536412B CN 201410805103 A CN201410805103 A CN 201410805103A CN 104536412 B CN104536412 B CN 104536412B
- Authority
- CN
- China
- Prior art keywords
- scheduling
- workpiece
- subproblem
- interval
- performance index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 84
- 238000001259 photo etching Methods 0.000 title claims abstract description 37
- 238000004458 analytical method Methods 0.000 title claims abstract description 15
- 238000004422 calculation algorithm Methods 0.000 claims abstract description 50
- 238000004519 manufacturing process Methods 0.000 claims abstract description 20
- 239000004065 semiconductor Substances 0.000 claims abstract description 13
- 238000012163 sequencing technique Methods 0.000 claims abstract description 8
- 230000000694 effects Effects 0.000 claims abstract description 4
- 238000011156 evaluation Methods 0.000 claims description 21
- 238000012545 processing Methods 0.000 claims description 21
- 238000001459 lithography Methods 0.000 claims description 18
- 238000005457 optimization Methods 0.000 claims description 16
- 230000006870 function Effects 0.000 claims description 15
- 239000011159 matrix material Substances 0.000 claims description 11
- 239000011651 chromium Substances 0.000 claims description 7
- 238000004364 calculation method Methods 0.000 claims description 6
- 238000003754 machining Methods 0.000 claims description 6
- 238000004540 process dynamic Methods 0.000 claims description 6
- 230000035772 mutation Effects 0.000 claims description 4
- 238000000354 decomposition reaction Methods 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 238000010187 selection method Methods 0.000 claims description 2
- 230000001154 acute effect Effects 0.000 abstract 1
- 238000012549 training Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 3
- 238000013507 mapping Methods 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000013210 evaluation model Methods 0.000 description 2
- 238000012854 evaluation process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000013473 artificial intelligence Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000013178 mathematical model Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Quality & Reliability (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
Abstract
Description
Claims (2)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410805103.5A CN104536412B (zh) | 2014-12-23 | 2014-12-23 | 基于指标预报和解相似度分析的光刻工序动态调度方法 |
PCT/CN2014/094837 WO2016101181A1 (zh) | 2014-12-23 | 2014-12-24 | 基于指标预报和解相似度分析的光刻工序动态调度方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410805103.5A CN104536412B (zh) | 2014-12-23 | 2014-12-23 | 基于指标预报和解相似度分析的光刻工序动态调度方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104536412A CN104536412A (zh) | 2015-04-22 |
CN104536412B true CN104536412B (zh) | 2017-02-22 |
Family
ID=52851955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410805103.5A Active CN104536412B (zh) | 2014-12-23 | 2014-12-23 | 基于指标预报和解相似度分析的光刻工序动态调度方法 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN104536412B (zh) |
WO (1) | WO2016101181A1 (zh) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104881688A (zh) * | 2015-06-11 | 2015-09-02 | 电子科技大学 | 一种两阶段的基于差分进化和模糊c-均值的聚类算法 |
EP3316193B1 (en) * | 2016-11-01 | 2023-04-12 | Hitachi, Ltd. | Production support system |
CN107590603B (zh) * | 2017-09-11 | 2018-11-13 | 合肥工业大学 | 基于改进变邻域搜索和差分进化算法的调度方法及系统 |
CN109523136A (zh) * | 2018-10-29 | 2019-03-26 | 同济大学 | 一种面向智能制造的调度知识管理系统 |
CN111190393B (zh) * | 2018-11-14 | 2021-07-23 | 长鑫存储技术有限公司 | 半导体制程自动化控制方法及装置 |
CN109885563B (zh) * | 2019-02-01 | 2023-10-20 | 沈阳航空航天大学 | 一种基于动态规则约束的数据清洗算法 |
CN110991732B (zh) * | 2019-11-28 | 2023-06-16 | 武汉理工大学 | 一种基于能耗聚类的建材装备制造过程优化调度方法 |
CN111784058B (zh) * | 2020-07-06 | 2022-09-30 | 兰州理工大学 | 一种生产线递阶分解建模并行寻优技术 |
CN112149987B (zh) * | 2020-09-17 | 2024-09-06 | 清华大学 | 基于深度强化学习的多目标柔性作业车间调度方法和装置 |
CN112232578A (zh) * | 2020-10-26 | 2021-01-15 | 上海华力集成电路制造有限公司 | 基于关键指标算法的光刻机台效能评价系统及其应用方法 |
CN112836359B (zh) * | 2021-01-21 | 2024-05-07 | 红塔烟草(集团)有限责任公司 | 一种卷烟生产企业供配电设备的安全性评估方法 |
CN113031542A (zh) * | 2021-02-22 | 2021-06-25 | 同济大学 | 一种基于负载均衡的半导体生产线动态调度方法 |
CN112947345B (zh) * | 2021-03-09 | 2022-04-01 | 河海大学 | 面向确定性可重入传感器车间动态批调度智能优化方法 |
CN113157995A (zh) * | 2021-03-17 | 2021-07-23 | 惠州市汇流实业有限公司 | 一种数据归类方法、门窗参数归尺方法、处理装置以及存储介质 |
CN113011785B (zh) * | 2021-04-21 | 2023-06-13 | 广东机电职业技术学院 | 基于自适应调整参数的多订单混合调度优化方法、介质 |
CN113341896B (zh) * | 2021-06-07 | 2022-08-05 | 电子科技大学 | 面向离散制造的动态集成车间调度与装配序列规划方法 |
CN113240353B (zh) * | 2021-07-12 | 2021-11-02 | 南京擎天全税通信息科技有限公司 | 一种面向跨境电商的出口工厂分类方法及装置 |
CN113780883A (zh) * | 2021-09-26 | 2021-12-10 | 无锡唯因特数据技术有限公司 | 生产车间调度方法、装置和存储介质 |
CN116149263A (zh) * | 2021-11-18 | 2023-05-23 | 中国科学院沈阳自动化研究所 | 基于多工件并行生产的离散型柔性机加生产线控制方法 |
CN116165892B (zh) * | 2023-02-16 | 2023-10-27 | 广东工业大学 | 模型预测控制的半自动化产线节能策略制定方法和系统 |
CN117707096B (zh) * | 2024-02-01 | 2024-06-14 | 张家港广大特材股份有限公司 | 基于性能需求的特种钢材加工工艺动态优化方法及系统 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100311077B1 (ko) * | 1999-10-23 | 2001-11-02 | 윤종용 | 선행공정의 결과에 따라 최적의 후행공정장비 및/또는 후행공정조건을 가변적으로 적용하는 로트 디스패칭방법 및 이를 위한 시스템 |
US6845280B1 (en) * | 2002-11-26 | 2005-01-18 | Advanced Micro Devices, Inc. | Work in progress management program interface |
JP2005267371A (ja) * | 2004-03-19 | 2005-09-29 | Trecenti Technologies Inc | ロットディスパッチ方法および半導体装置の製造方法 |
CN100580594C (zh) * | 2008-06-11 | 2010-01-13 | 清华大学 | 基于加工能力特征模型的机器组调度方法 |
CN101782769B (zh) * | 2010-03-08 | 2011-10-26 | 清华大学 | 一种基于指标补偿的平均流经时间快速预测方法 |
CN101788819B (zh) * | 2010-03-08 | 2011-09-14 | 清华大学 | 大规模生产过程一种基于迭代式分解和流松弛的调度方法 |
CN103106331B (zh) * | 2012-12-17 | 2015-08-05 | 清华大学 | 基于降维和增量式极限学习机的光刻线宽智能预测方法 |
CN103116324B (zh) * | 2012-12-17 | 2014-06-04 | 清华大学 | 基于指标预测和在线学习的微电子生产线调度方法 |
CN103217960B (zh) * | 2013-04-08 | 2015-04-29 | 同济大学 | 一种半导体生产线动态调度策略自动选择方法 |
CN103310285A (zh) * | 2013-06-17 | 2013-09-18 | 同济大学 | 可用于半导体生产线动态调度的性能预测方法 |
CN103439886B (zh) * | 2013-07-26 | 2016-01-20 | 同济大学 | 一种半导体生产线自适应动态调度装置 |
-
2014
- 2014-12-23 CN CN201410805103.5A patent/CN104536412B/zh active Active
- 2014-12-24 WO PCT/CN2014/094837 patent/WO2016101181A1/zh active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2016101181A1 (zh) | 2016-06-30 |
CN104536412A (zh) | 2015-04-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104536412B (zh) | 基于指标预报和解相似度分析的光刻工序动态调度方法 | |
Fernandez-Viagas et al. | Exploring the benefits of scheduling with advanced and real-time information integration in Industry 4.0: A computational study | |
Kayhan et al. | PSOLVER: A new hybrid particle swarm optimization algorithm for solving continuous optimization problems | |
CN103136337A (zh) | 用于复杂网络的分布式知识数据挖掘装置和挖掘方法 | |
CN102819772B (zh) | 电力配网建设物资需求预测方法及装置 | |
CN102831489B (zh) | 电力配网建设物资需求预测方法及装置 | |
CN103116324B (zh) | 基于指标预测和在线学习的微电子生产线调度方法 | |
CN112818484A (zh) | 一种物理实体数字孪生综合实施能力评估方法及评估系统 | |
Lee et al. | Optimisation of multipass turning operations using PSO and GA-AIS algorithms | |
CN104698838B (zh) | 基于论域动态划分和学习的模糊调度规则挖掘方法 | |
Soltanifar | Improved Kemeny median indicator ranks accordance method | |
CN110750572A (zh) | 一种科技成果启发式评价的自适应方法和装置 | |
Robinson et al. | MADM Problems with Correlation Coefficient of Trapezoidal Fuzzy Intuitionistic Fuzzy Sets. | |
Veeramani et al. | Solving fuzzy linear programming problem using symmetric fuzzy number approximation | |
Pokushko et al. | Application of data envelopment analysis method for assessment of performance of enterprises in fuel and energy complex | |
Chen et al. | Macro-level accident fatality prediction using a combined model based on ARIMA and multivariable linear regression | |
CN116049733A (zh) | 基于神经网络的效能评估方法、系统、设备与存储介质 | |
Rychener et al. | Integration of Multiple Knowledge Sources in ALADIN: An Alloy Design System | |
Szafranko | Evaluation of data obtained from expert opinions in multi-criteria analyses of construction investment variants | |
Lee et al. | A sequential search framework for selecting weights of dispatching rules in manufacturing systems | |
Tanjung et al. | Implementation of C5. 0 Algorithm for Prediction of Student Learning Graduation in Computer System Architecture Subjects | |
Tanwar et al. | Explainable AI; Are we there yet? | |
CN103473269B (zh) | 用于构建企业创新方法库的数据挖掘方法 | |
Jiang et al. | Attribute reduction method of power big data based on rough set | |
Wang et al. | A fuzzy-neural approach for optimizing the performance of job dispatching in a wafer fabrication factory |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20181031 Address after: 200120 Shanghai free trade pilot area 707 Zhang Yang road two floor West 205 room Patentee after: Zhengda Industrial Biotechnology (Shanghai) Co., Ltd. Address before: 100084 Tsinghua Yuan, Beijing, Haidian District Patentee before: Tsinghua University |
|
DD01 | Delivery of document by public notice |
Addressee: Zhengda Industrial Biotechnology (Shanghai) Co., Ltd. Document name: Notification to Pay the Fees |
|
DD01 | Delivery of document by public notice | ||
DD01 | Delivery of document by public notice |
Addressee: Zhang Wei Document name: payment instructions |
|
DD01 | Delivery of document by public notice | ||
DD01 | Delivery of document by public notice |
Addressee: Zhang Wei Document name: payment instructions |
|
DD01 | Delivery of document by public notice |