CN104502193A - Structure for testing micro-beam breaking strength based on longitudinal comb-tooth-type capacitor - Google Patents
Structure for testing micro-beam breaking strength based on longitudinal comb-tooth-type capacitor Download PDFInfo
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- CN104502193A CN104502193A CN201410765597.9A CN201410765597A CN104502193A CN 104502193 A CN104502193 A CN 104502193A CN 201410765597 A CN201410765597 A CN 201410765597A CN 104502193 A CN104502193 A CN 104502193A
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Abstract
The invention discloses a structure for testing the micro-beam breaking strength based on a longitudinal comb-tooth-type capacitor. A bidirectional comb-tooth structure is composed of a bar-shaped anchor region and comb teeth connected to two side surfaces of the anchor region, wherein one row of comb teeth is connected to outer side surfaces of vertical edges of self-seal type rectangular structures, tail ends of two transverse edges vertical to the vertical edges are connected to side surfaces of respective anchor regions; the two self-seal type rectangular structures with the comb teeth are symmetrically distributed at the left side and the right side of the bidirectional comb-tooth structure, comb-tooth ends are alternatively opposite to comb teeth of the bidirectional comb-tooth structure, wherein the comb teeth of the self-seal type rectangular structures are movable teeth, the comb teeth of the bidirectional comb-tooth structure are fixed teeth; one end of a to-be-tested micro beam is connected to the middle of the inner side surface of the vertical edge of one self-seal type rectangular structure, the other end of the to-be-tested micro beam is fixed on the side surface of one anchor region, and the other self-seal type rectangular structure without the to-be-tested micro beam is of a reference structure; the self-seal type rectangular structures, the to-be-tested micro beam and the comb teeth are all positioned on the same plane, and are suspended above a substrate in parallel. The structure is high in sensitivity and convenient and feasible.
Description
Technical field
The present invention relates to the field tests of the micro-beam fracture strength of a kind of MEMS (micro electro mechanical system) (MEMS), the test structure of the micro-beam fracture strength of especially a kind of longitudinal comb-tooth-type capacitance detecting.
Background technology
The manufacturing process that MEMS utilizes microelectric technique, micro-processing technology combines manufactures microsensor, microactrator, microdrive and micro-system.By different process technologies, as silicon bulk micromachining, silicon face micro Process, LIGA technology, bonding techniques etc., its mechanical property of MEMS microstructure processed has very big difference, even constructed, but the product of different production line processing also can there are differences.Therefore, for the reliability designing for MEMES, process and apply, design test structure, it is very important for extracting forces associated mathematic(al) parameter.Fracture strength is one of important mechanical property, and conventional measuring method is loaded and the sample that stretches test sample by the mode of electricity, heat or Magnetic driving, and power when being pulled off by directly measuring sample is to determine the fracture strength of sample.Catching driving force corresponding to tested beam fracture time instant and improving measurement sensistivity is the problem that structure design of test must be considered.For this reason, devise a kind of test structure of the micro-beam fracture strength based on Longitudinal comb electric capacity, solve a test difficult problem well, and convenient test, simple.
Summary of the invention
Technical matters: the test structure that the object of this invention is to provide a kind of micro-beam fracture strength based on longitudinal comb-tooth-type electric capacity, utilizes capacitance method to catch the driving force ruptured corresponding to moment by micrometer beam, intuitively, is easy to realize.But the capacitance change in detecting determines validity and the sensitivity of the method.The present invention utilizes longitudinal comb-tooth-type electric capacity to reflect the amount of tension of tested beam, according to measurement requirement, can improve the detection limit of capacitance variations by increasing comb number, therefore higher relative to general capacitance method detection sensitivity.
Technical scheme: the test structure of a kind of micro-beam fracture strength based on longitudinal comb-tooth-type electric capacity of the present invention comprise substrate, identical half seal type rectangular configuration with comb of two-way comb structure, two sizes and structure, by micrometer fine strain of millet structure;
Described two-way comb structure is made up of a bar shaped anchor district and the left comb and right comb being connected to anchor district left and right sides;
The semiclosed frame of the described half seal type rectangular configuration with comb is made up of with two left horizontal edges be vertically connected a left vertical edge, wherein, left vertical edge lateral surface is connected with a dynamic comb in a row left side, and the end of two left horizontal edges is connected to the side in respective Zuo Mao district
Described tested micro girder construction is positioned at the semiclosed frame of half seal type rectangular configuration, is connected with the inside middle portion face of the vertical edge of semiclosed frame by one end of micrometer beam, and the other end is fixed on one by the side of micrometer Liang Maoqu;
Described two half seal type rectangular configuration with comb are symmetrically distributed in the left and right sides of two-way comb structure, half seal type rectangular configuration move comb and the right side with a left side to move comb staggered relative with right comb with the left comb of two-way comb structure respectively, wherein, comb moves with a left side in half seal type rectangular configuration institute or right dynamic comb is dynamic tooth, and the left comb of two-way comb structure or right comb are for determine tooth;
Except anchor district and bar shaped anchor district, described parts are all positioned at same plane, and are parallelly suspended at types of flexure.
That the half seal type rectangular configuration being connected with tested micro girder construction is main test structure, and opposite side is without being reference configuration by half seal type rectangular configuration of micrometer beam.
When left and right two and half seal type rectangular configuration energising expanded by heating, nose of comb move toward one another, all shifts to two-way comb structure, separately with two-way comb structure in determine tooth overlapping area all can increase, corresponding electric capacity also becomes large., also constantly stretch by micrometer beam when being connected with that the half seal type rectangular configuration expanded by heating by micrometer beam, until fracture meanwhile.By contrasting the size of longitudinal comb electric capacity that the two-way comb structure left and right sides is formed, the stretching action suffered by micrometer beam can be obtained, and then determine by the fracture strength of micrometer beam.
Beneficial effect: the present invention utilizes two half seal type rectangular configuration with comb to match with simple two-way comb structure, also can detect the change of tensile elongation, and then determine the fracture strength of micro-beam while realizing stretching to micro-beam.Test structure simple, highly sensitive and be easy to operation.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Wherein have: bar shaped anchor district 201, left comb 202, right comb 203, left dynamic comb 301, left vertical edge 302, left horizontal edge 303, Zuo Mao district 304, right dynamic comb 401, right vertical edge 402, right horizontal edge 403, You Mao district 404, by micrometer beam 501, by micrometer Liang Mao district 502.
Embodiment
The test structure of a kind of micro-beam fracture strength based on longitudinal comb-tooth-type electric capacity of the present invention, comprises substrate, two-way comb structure, two identical half seal type rectangular configuration with single comb and a tested micro girder construction.Described two-way comb structure is made up of a bar shaped anchor district and the comb being connected to two sides, anchor district; The vertical edge lateral surface of described half seal type rectangular configuration is connected with YIPAISHU tooth, and the end of two horizontal edges vertical with this limit is connected to the side in respective anchor district; Described two half seal type rectangular configuration with comb are symmetrically distributed in the left and right sides of two-way comb structure, nose of comb is staggered relative with the comb of two-way comb structure, wherein half seal type rectangular configuration with comb be dynamic tooth, the comb of two-way comb structure is for determine tooth; Described one end by micrometer beam is connected to the center of the vertical edge medial surface of one of them half seal type rectangular configuration, and the other end is fixed on the side in a Ge Mao district, and another is without being reference configuration by half seal type rectangular configuration of micrometer beam; Described half seal type rectangle, be all positioned at same plane by micrometer fine strain of millet and comb, and be parallelly suspended at types of flexure.
Below in conjunction with accompanying drawing the present invention done and further explain.
Shown in composition graphs 1, a kind of test structure of the micro-beam fracture strength based on longitudinal comb-tooth-type electric capacity, comprises substrate 1, two-way comb structure, two half seal type rectangular configuration with comb and by micrometer fine strain of millet structure;
Two-way comb structure arranges left comb 202 by a bar shaped anchor district 201 and be connected to bar shaped anchor district 201 left and right sides two, right comb 203 is formed;
Semiclosed frame with half seal type rectangular configuration of comb is made up of with two left horizontal edges 303 be vertically connected a left vertical edge 302.Wherein, the end that left vertical edge 302 lateral surface is connected with the left comb of a row 301, two left horizontal edges 303 is connected to the side in respective Zuo Mao district 304.
Tested micro girder construction 5 is positioned at the semiclosed frame of half seal type rectangular configuration, is connected by the inside middle portion face of one end of micrometer beam 501 with the left vertical edge 302 of semiclosed frame, and the other end is fixed on one by the side in micrometer Liang Mao district 502;
Two half seal type rectangular configuration with comb are symmetrically distributed in the left and right sides of two-way comb structure, nose of comb 301 interlocks relative with the left comb 202 of two-way comb structure, right comb 203 with 401 respectively, wherein half seal type rectangular configuration with left comb 301 or right comb 401 be dynamic tooth, the left comb 202 of two-way comb structure, right comb 203 are for determine tooth.That the half seal type rectangular configuration being connected with tested micro girder construction is main test structure, and another is without being reference configuration by half seal type rectangular configuration of micrometer beam;
The left vertical edge in each limit 302 of half seal type rectangular configuration, left horizontal edge 303 and right vertical edge 402, right horizontal edge 403, moved tooth 401 by micrometer fine strain of millet 501, left comb 202, right comb 203, left dynamic tooth 301 and the right side and be all positioned at same plane, and be parallelly suspended at types of flexure.
The preparation of this measurement structure can adopt the body process technology based on SOI (abbreviation of Silion-on-Insulator).As optional upper strata doped monocrystalline silicon thickness is about 100 μm, underlying monocrystalline Si-Substrate Thickness about 400 μm, intermediate insulation oxidation meeting payzone is the SOI sheet of 4 μm.In processing, expose section top monocrystalline silicon by means of photoresist and mask plate, then use deep layer plasma reaction method (DRIE) to erode the monocrystalline silicon of exposure until oxide layer.Recycling hydrogen fluoride solution erodes the oxide layer under structure graph, and form movable part, and those can not be eroded completely by the oxide layer that monocrystalline silicon area coverage is large, these monocrystalline silicon are still fixed on substrate, forms anchor district.It is pointed out that the selection of above technique is not limited only to the selection process mentioned, also can select Surface-Micromachining, substrate is monocrystalline silicon, and structural sheet is doped polycrystalline silicon or metal.
The method of testing of tested semi-girder fracture strength is as follows:
1) between the Liang Zuomao district 304 of half seal type rectangular configuration, apply DC voltage, electric current flows through left horizontal edge 303 and left vertical edge 302; Meanwhile, between the Liang Youmao district 404 of half seal type rectangular configuration, also synchronously apply DC voltage, electric current flows through right horizontal edge 403 and right vertical edge 402;
2) two of half seal type rectangular configuration left horizontal edge 303 energisings are heated and are expanded, and left dynamic comb 301 is moved to right front, and stretches by micrometer beam 501.Meanwhile, each relative area determined between tooth in each dynamic tooth of left dynamic comb 301 and the left comb of two-way comb structure 202 increases, correspondingly longitudinal comb electric capacity C
lbecome large, measure and record C
lchange;
3) two of half seal type rectangular configuration right horizontal edge 403 energisings are heated and are expanded, right dynamic comb 401 is moved to left front, the right dynamic each dynamic tooth of comb 401 and each relative area determined between tooth of the left vertical edge of two-way comb structure 302 increase, correspondingly longitudinal comb electric capacity C
rbecome large, measure and record C
rchange;
4) strengthen the extraneous DC voltage be applied on the anchor district end of half seal type rectangular configuration gradually, until ruptured by micrometer beam 501, tension load disappears, now, and longitudinal comb electric capacity C
lchange obviously;
5) when observe measure electric capacity change suddenly time, the voltage that Zuo Mao district 304 and You Mao district 40 apply stops.
According to measurement and record, analyze two comb electric capacity C
land C
rchange shape and relative size, consider comb electric capacity C
land C
rchange be directly proportional to by the elongation of micrometer beam 501, therefore by measuring the variable quantity of differential capacitance, and tensile elongation corresponding when can be determined to be ruptured by micrometer beam 501 by capacitance variations catastrophe point, and then determine by the fracture strength of micro-beam.
The above is only the preferred embodiment of the present invention; be noted that for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (2)
1., based on a test structure for micro-beam fracture strength of longitudinal comb-tooth-type electric capacity, it is characterized in that: comprise substrate (1), identical half seal type rectangular configuration with comb of two-way comb structure, two sizes and structure, by micrometer fine strain of millet structure;
Described two-way comb structure is by a bar shaped anchor district (201) and be connected to the left comb (202) of anchor district (201) left and right sides and right comb (203) is formed;
The semiclosed frame of the described half seal type rectangular configuration with comb is made up of with two left horizontal edges (303) be vertically connected a left vertical edge (302), wherein, left vertical edge (302) lateral surface is connected with a dynamic comb (301) in a row left side, article two, the end of left horizontal edge (303) is connected to the side in respective Zuo Mao district (304)
Described tested micro girder construction is positioned at the semiclosed frame of half seal type rectangular configuration, and be connected by the inside middle portion face of one end of micrometer beam (501) with the vertical edge (302) of semiclosed frame, the other end is fixed on one by the side of micrometer Liang Maoqu (502);
Described two half seal type rectangular configuration with comb are symmetrically distributed in the left and right sides of two-way comb structure (2), half seal type rectangular configuration move comb (301) and the right side with a left side to move comb (401) staggered relative with right comb (203) with the left comb (202) of two-way comb structure respectively, wherein, comb (301) moves with a left side in half seal type rectangular configuration institute or right dynamic comb (401) is dynamic tooth, and the left comb (202) of two-way comb structure or right comb (203) are for determine tooth;
Except anchor district and bar shaped anchor district (201), described parts are all positioned at same plane, and are parallelly suspended at types of flexure.
2. the test structure of a kind of micro-beam fracture strength based on longitudinal comb-tooth-type electric capacity as claimed in claim 1, it is characterized in that: that the half seal type rectangular configuration being connected with tested micro girder construction is main test structure, opposite side is without being reference configuration by half seal type rectangular configuration of micrometer beam.
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| CN201410765597.9A CN104502193B (en) | 2014-12-12 | 2014-12-12 | Structure for testing micro-beam breaking strength based on longitudinal comb-tooth-type capacitor |
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Cited By (2)
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| CN105547558A (en) * | 2016-01-15 | 2016-05-04 | 东南大学 | Anisotropic testing structure and measurement method for MEMS micro-beam stress gradient based on horizontal T-shaped beams |
| CN105606283A (en) * | 2016-01-15 | 2016-05-25 | 东南大学 | Multi-beam-comparison-structure-based MEMS micro beam stress gradient testing structure and measurement method thereof |
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| CN105547558A (en) * | 2016-01-15 | 2016-05-04 | 东南大学 | Anisotropic testing structure and measurement method for MEMS micro-beam stress gradient based on horizontal T-shaped beams |
| CN105606283A (en) * | 2016-01-15 | 2016-05-25 | 东南大学 | Multi-beam-comparison-structure-based MEMS micro beam stress gradient testing structure and measurement method thereof |
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| CN105606283B (en) * | 2016-01-15 | 2018-05-15 | 东南大学 | A kind of test structure and measuring method of the micro- stress beam gradients of MEMS that structure is compared based on more beams |
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