CN104501776B - Measurement system and measurement method of polar coordinate-type non-contact horizontal mirror-surface inclination angle - Google Patents
Measurement system and measurement method of polar coordinate-type non-contact horizontal mirror-surface inclination angle Download PDFInfo
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- CN104501776B CN104501776B CN201410787142.7A CN201410787142A CN104501776B CN 104501776 B CN104501776 B CN 104501776B CN 201410787142 A CN201410787142 A CN 201410787142A CN 104501776 B CN104501776 B CN 104501776B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
Abstract
The invention discloses a measurement system and a measurement method of a polar coordinate-type non-contact horizontal mirror-surface inclination angle. The measurement system is composed of a vertical column, a thrust bearing, a rotary arm, an adjustment device, a loading platform, an optical measurement system, a servo motor, an arc guide rail, an air-floatation guide rail and a linear motor, wherein the thrust bearing is installed at the top end of the vertical column; one end of the rotary arm is fixed on the vertical column through the thrust bearing, and the other end of the rotary arm is erected on the arc guide rail through guide rail pair; the rotary arm is driven by the servo motor to rotate in the horizontal plane around the thrust bearing at the top end of the vertical column; the air-floatation guide rail, the loading platform and the stator of the linear motor are installed on the rotary arm; the loading platform is driven by the linear motor to slide along the air-floatation guide rail; the optical measurement system is composed of a laser device I, a laser device II, a light splitter I, a light splitter II, a CCD I, a CCD II, a light filter and lens group I, a light filter and lens group II, a reference reflector and a measured reflector. The measurement system is compact in structure, large in working area coverage surface, and capable of finishing dynamic real-time measurement.
Description
Technical field
The present invention relates to a kind of horizontal minute surface dip measuring device and method and in particular to one kind can measure be in certain
The inclination angle of horizontal minute surface or the contactless horizontal minute surface inclination measuring system of the polar coordinates type of the depth of parallelism and method in region.
Background technology
In some optical laboratories with particular/special requirement, using multiple reflecting mirror forming arrays, each reflecting mirror is pacified
Dress is highly different, and angle itself can change as needed, but requires reflecting mirror normal to be parallel to each other or and local gravity
Vertical line is parallel, as shown in Figure 1.This is accomplished by a kind of measuring system that can quickly measure each position reflecting mirror normal direction.
Further, since the development of aerospace flight technology, need in ground simulation space low gravitation or zero gravity environment, so that those can only be low
Mechanical hand, rover or the space station model working under gravity working environment also can work on the ground and test.For reality
This purpose existing, a kind of common method is using hoist cable, measured workpiece gravity to be compensated.And how to ensure hoist cable all the time with again
Power vertical line is parallel or how accurately to measure the drift angle to gravimetric plumb line for the hoist cable, then be one of this systems face and important ask
Topic.A kind of measuring method is right angle setting reflecting mirror on cable wire, as shown in Fig. 2 and can be in measured workpiece in certain area
During interior motion, mirror normal direction deflection is measured in real time and is controlled so as to all the time vertically upward.The method relies on
The mode of this horizontal direct reflection ensures that hoist cable is parallel with gravimetric plumb line.But whether minute surface is in all the time in dynamic process placement
Level but cannot measure, and this will lead to the drift angle that hoist cable cannot eliminate, the measurement of therefore horizontal minute surface with gravimetric plumb line generation
There is important value in actual applications.
Content of the invention
In order to overcome the shortcomings of prior art presence, effectively improve certainty of measurement, the invention provides a kind of polar coordinates type
Contactless horizontal minute surface inclination measuring system and the method for measurement mirror tilt angle or the depth of parallelism.Present invention is mainly applied to minute surface battle array
The hoist cable of the measurement of angle of the row measurement of paralleism, mirror normal and gravimetric plumb line and gravity Load Relief System deviates the side of gravimetric plumb line
Parallactic angle measures, and is important feedback method and the initial calibration method of mirror array control system and suspension cable type gravity Load Relief System,
Entirely controlling and playing an important role during debuging, due to the characteristic of its noiseless and real-time measurement, for guarantee
System performance index plays vital effect.
The purpose of the present invention is achieved through the following technical solutions：
A kind of contactless horizontal minute surface inclination measuring system of polar coordinates type, its frame structure is polar coordinate forms of motion, by
Column, thrust bearing, turning arm, adjusting apparatus, load platform, optical measuring system, servomotor, arc guide rail, air supporting are led
Rail and linear electric motors composition, wherein：By upright supports at polar origin, column top is provided with thrust bearing, turning arm one
End is fixed on column by thrust bearing, and the other end passes through guide rail subframe on arc guide rail, and turning arm can be by servomotor
Drive the thrust bearing around column top to rotate in the horizontal plane, turning arm is provided with air-float guide rail, load platform and straight line
Motor stator, load platform is slided by linear electric motors drives edge air-float guide rail, and described optical measuring system is by laser instrument I, laser
Device II, spectroscope I, spectroscope II, CCDI, CCDII, filter lenss and lens group I, filter lenss and lens group II, reference mirror
With tested illuminator composition, laser instrument I, laser instrument II, spectroscope I, spectroscope II, CCDI and CCDII are arranged on load platform
On, reference mirror be located at thrust bearing above, the axle of reference mirror is co-axially mounted with the axle of turning arm, and with elasticity shaft coupling
Device connects firmly, and adjusting apparatus are located at reference mirror top；The light beam that laser instrument I projects is divided into two bundles, a branch of measurement through spectroscope I
Reference beam is directly entered CCDI through filter lenss and lens group I, and another bundle incides on tested minute surface, through tested direct reflection
After return to spectroscope I, be directly entered CCDI through filter lenss and lens group I after the mirror I that is split again reflection；Laser instrument II projects
Light beam is divided into two bundles through spectroscope II, and a branch of measuring basiss light beam is directly entered CCDII through filter lenss and lens group II, another
Bundle incides on reference mirror.
In said apparatus, the axle of described reference mirror is co-axially mounted with the axle of turning arm and is connected firmly with yielding coupling,
So that adjustment is feasible；Reference mirror axle lower end is fixed using self-aligning bearing, and upper end is adjusting apparatus, and reference mirror can pass through
Adjusting apparatus adjust so as to normal is in horizontal plane all the time in rotary course；Rotation arm axle upper end is fixed using bearing, lower end
Fixed using thrust bearing.
The method measuring horizontal mirror tilt angle using said apparatus, comprises the following steps：
First, ensure that turning arm axis is parallel with local gravity vertical line, concrete operations are as follows：
1）At an arbitrary position in adjustment optical measuring system the leveling bolt of each optical module so as to level；
2）Linear electric motors are in position servo state, and holding position is constant, control servomotor to drive turning arm by
Left end A point rotates to low order end B point；The CCDII reading producing in A point, B point record reference light, adjusts adjusting apparatus in B point,
B point reading is made to reach the meansigma methodss of A point B point reading before adjustment；
3）Repeat 2）, until 2 points of readings of A, B are identical；
4）Make turning arm rotate to the midpoint of A, B, adjust adjusting apparatus, until this reading is identical with A point；
5）Repeat 2）~4）, until 3 points of readings are identical.
2nd, after turning arm axis is parallel with local gravity vertical line, start the inclination angle of the horizontal minute surface of measurement, concrete operations are such as
Under：
1）Read the measuring basiss light beam in CCDI and the reflection measurement entering CCDI after tested direct reflection respectively
Light beam.
2）If reflected measuring beam is misaligned with measuring basiss light beam, it is measured by CCDI and is imaged with measuring basiss light beam
The distance and bearing of point, you can measure tested illuminator drift angle and skew direction.
3）Comprehensive CCDI and this two measurement results of CCDII are it can be deduced that the inclination with respect to the horizontal plane of tested illuminator
Angle and well azimuth.
The minute surface depth of parallelism refers to measure the relatively parallel state between multiple minute surfaces, puts down hence with said apparatus measurement minute surface
When row is spent, need to choose a benchmark minute surface for measurement of paralleism offer reference, using other minute surfaces as minute surface to be measured, by right
Ratio obtains the depth of parallelism that each minute surface is with respect to benchmark minute surface, comprises the following steps that：
1）The adjustment of benchmark minute surface：Carried out the measurement of dip angle of benchmark minute surface and adjusted by the inclination angle measurement method of above-mentioned minute surface
It is to required angle.
2）The minute surface measurement of paralleism to be measured：Read after direct reflection to be measured, in minute surface CCDI to be measured, enter the anti-of CCDI
Penetrate measuring beam, record its inclination angle.
3）The inclination angle of minute surface to be measured is contrasted with benchmark mirror tilt angle, be can get minute surface to be measured with respect to benchmark minute surface
The depth of parallelism.
Compared to prior art, the invention has the advantages that：
1st, the contactless horizontal minute surface inclination measuring system compact conformation of polar coordinates type that the present invention provides, working region covers
Face ratio is larger, can complete dynamic real-time measurement.
2nd, due to introducing reference beam, load platform itself angle of inclination is measured, can be by due to turning arm peace
The measurement Error Compensation that dress horizontal error item, swing boom configuration elastic deformation item cause is fallen, thus substantially increasing certainty of measurement.
3rd, turning arm rotation and load platform along during slide it is ensured that reference beam points to polar coordinate all the time
Initial point；With reference to illuminator and turning arm synchronous rotary, need not the motion compensation of additional other and extra drive in the case of,
Can be so that reference light can enter spectroscope from returning with reference to illuminator all the time.
4th, due to using yielding coupling, on the premise of ensureing synchronous rotary, will not be due to negative with reference to illuminator normal
Carrying platform motion cause turning arm elastic deformation, end warped and impacted.
5th, the angle of reflecting mirror normal and horizontal plane is adjusted by adjustment link, and due to yielding coupling and self-aligning bearing
Presence, this regulation do not interfere with the normal rotation of axle.
6th, the use of self-aligning bearing can make fine adjustment shaft to when will not to reference to illuminator axle apply extra-stress, will not lead
Cause its deformation effect performance.
7th, adopt polar coordinate mode to work, and reference mirror is co-axially mounted with rotation arm axle, enables reference beam all the time
Almost vertical irradiation reference mirror and need not be extra motion compensation link.
8th, two sets of optical measuring devices are used, real-time measuring table is with respect to reference mirror drift angle and tested minute surface phase simultaneously
For platform drift angle, and compensate, so that the deflection of load platform itself does not affect to tested minute surface with respect to the horizontal plane
The measurement result at inclination angle.
9th, join air-float guide rail driving load platform using linear electric motors, reduce vibration effect；
10th, observed using spectroscope, one of light beam being produced with itself, as reference, suppresses the interference that translation causes；
11st, adopt filter lenss filtering environmental stray light, only laser place specific wavelength is imaged, improves anti-interference
Ability, reduces complexity and the computation burden of power image processing algorithm；
12nd, ccd image can be automatically processed in real time, thus completing automatic measurement；
13rd, pass through motor control load position of platform, arbitrfary point in working region can be measured in real time；
14th, the present invention can be greatly improved certainty of measurement and the concordance of each positional accuracy measurement.
Brief description
Fig. 1 is tested mirror array schematic diagram；
Fig. 2 is measurement cable wire drift angle schematic diagram；
Fig. 3 is the contactless horizontal minute surface inclination measuring system overall structure diagram of polar coordinates type of the present invention；
Fig. 4 is reference mirror installing mechanism schematic diagram；
Fig. 5 is adjusting apparatus top view；
Fig. 6 is optical system works principle schematic；
The implication of each reference of in figure is shown in Table 1.
Table 1
Specific embodiment
Below in conjunction with the accompanying drawings technical scheme is further described, but is not limited thereto, every to this
Inventive technique scheme is modified or equivalent, without deviating from the spirit and scope of technical solution of the present invention, all should cover
In protection scope of the present invention.
As in Figure 3-5, the contactless horizontal minute surface inclination measuring system of polar coordinates type that the present invention provides by column 1, only
Thrust bearing 11, turning arm 2, adjusting apparatus 14, load platform 5, optical measuring system 6, servomotor 7, arc guide rail 10, air supporting
Guide rail 12 and linear electric motors 13 form.Thrust bearing 11 is installed on column 1 top and the bearing 18 of fixing rotation arm axle is anti-with reference
Penetrate the self-aligning bearing 20 of mirror axle 25.Turning arm 2 one end is fixed on column 1 by thrust bearing 11, and the other end passes through guideway
Frame is on arc guide rail 10.Turning arm 2 can be driven by servomotor 7 and rotate in the horizontal plane around axle, be provided with air supporting thereon and lead
Rail 12, load platform 5 and linear motor stator electric.Load platform 5 is driven by linear electric motors 13, can slide along air-float guide rail 12.Negative
Optical measuring system 6 is installed on carrying platform 5.Optical measuring system 6 is fixed on load platform 5 by levelling device, is using
Front available level indicator leveling.As shown in fig. 6, comprising laser angular measurement device in optical measuring system 6, wherein a set of for measuring
Relative drift angle between reference mirror 3, another set of for measurement and tested illuminator 26 between drift angle, two covering devices survey
Amount principle is identical, and measures only sensitive to relative rotation, and insensitive to relative translational movement.The wherein outgoing of 1 set of laser instrument II32
Light can be irradiated to the center of reference mirror 3 in Fig. 3.The axle of reference mirror 3 is co-axially mounted with the axle of turning arm 2, and
Connected firmly with yielding coupling 19, as illustrated in figures 4-5.Axle for ensureing reference mirror 3 can be finely tuned, and its lower end adopts regulation of mental activities axle
Hold 20 to fix, upper end is adjusting apparatus 14.The top view of adjusting apparatus 14 is as shown in figure 5, can be by jackscrew 21 and phase therewith
To or 3 jackscrews adjustment reference mirror axles 25 of vertical other point to.
The internal structure of optical measuring system 6 is as shown in Figure 6.The light beam that laser instrument I28 projects is divided into 2 through spectroscope I29
Bundle, a branch of measuring basiss light beam 36 is directly entered CCDI31 through filter lenss and lens group I30, and another bundle incides tested minute surface
On 26, return to spectroscope I29 after reflection, then be directly entered CCDI31 through filter lenss and lens group I30 after secondary reflection.When tested
When 45 degree of minute surface 26 and spectroscope I29 reflecting surface angle（Now tested minute surface 26 is in horizontal plane）, this reflected light and measurement
Reference beam 36 overlaps, and when tested minute surface 26 has inclination angle, this light is misaligned with measuring basiss light beam 36, is measured using CCDI31
Its distance and bearing with measuring basiss light beam 36 imaging point, you can measure drift angle and the skew direction of tested illuminator 26.With
Similar, laser instrument II32 also measures, using same principle, the deflection that its reference for installation is with respect to reference mirror 3 normal, that is, bear
Carrying platform 5 is with respect to the inclination of reflecting mirror normal place horizontal plane.2 CCD gather respective signal respectively, and are transferred to calculating
Machine, calculates tested illuminator normal drift angle by computer；Operator controls turning arm motor by control computer
With the motion of load platform motor, enable optical system that each position is measured.This two measurement results comprehensive, can
To measure tested illuminator 26 inclination angle with respect to the horizontal plane and well azimuth.Concrete measuring process is as follows：
During horizontal minute surface measurement of dip angle, ensure that turning arm axis is parallel with local gravity vertical line first, concrete behaviour
Make as follows：
1）The leveling bolt of adjustment optical module is so as to level at an arbitrary position；
2）Linear electric motors are in position servo state, and holding position is constant, control servomotor to drive turning arm by
Left end A point rotates to low order end B point；The CCDII34 reading producing in A point, B point record reference light, adjusts jackscrew 23 He in B point
Jackscrew on the other side, makes B point reading reach the meansigma methodss of A point B point reading before adjustment；
3）Repeat 2）, until 2 points of readings of A, B are identical；
4）Make turning arm rotate to the midpoint of A, B, another vertical with jackscrew 23 of adjustment to jackscrew, until this reading and
A point is identical；
5）Repeat 2）~4）, until 3 points of readings are identical.
After rotation axiss are parallel with local gravity vertical line, start the measurement horizontal minute surface depth of parallelism, concrete operations are as follows：
1）Read the measuring basiss light beam 36 in CCDI31 and entrance CCDI31 after tested minute surface 26 reflects respectively
Reflected measuring beam.
2）If reflected measuring beam is misaligned with measuring basiss light beam 36, it and measuring basiss light beam are measured by CCDI31
The distance and bearing of 36 imaging points, you can measure tested illuminator 26 drift angle and skew direction.
3）Comprehensive CCDI31 and this two measurement results of CCDII34 it can be deduced that tested illuminator 26 with respect to the horizontal plane
Inclination angle and well azimuth.
The method of the measurement minute surface depth of parallelism, comprises the following steps：
1）The adjustment of benchmark minute surface.Carried out the measurement of dip angle of benchmark minute surface and adjusted by the inclination angle measurement method of above-mentioned minute surface
It is to required angle.
2）The minute surface measurement of paralleism to be measured.Read the reflection entering CCDI31 in CCDI31 after minute surface 26 to be measured reflects
Measuring beam, records its inclination angle.
3）The inclination angle of minute surface to be measured is contrasted with benchmark mirror tilt angle, be can get minute surface to be measured with respect to benchmark minute surface
The depth of parallelism.
In sum, the contactless horizontal minute surface inclination measuring system of polar coordinates type that the present invention provides, using with reference to reflective
Mirror compensates load platform and tilts the impact producing, and can improve certainty of measurement, observe using CCD and use computer disposal to believe
Number it is provided that real-time measurements, for the feedback of dynamical system, the control performance of related system can be effectively improved, value
Obtain wide popularization and application.
Claims (7)
1. the contactless horizontal minute surface inclination measuring system of polar coordinates type is it is characterised in that described measuring system is polar coordinate motion shape
The frame structure of formula, by column, thrust bearing, turning arm, adjusting apparatus, load platform, optical measuring system, servomotor,
Arc guide rail, air-float guide rail and linear electric motors composition, wherein：By upright supports at polar origin, column top is only provided with
Thrust bearing, turning arm one end is fixed on column by thrust bearing, and the other end passes through guide rail subframe on arc guide rail, rotation
Arm drives the thrust bearing around column top to rotate in the horizontal plane by servomotor, turning arm is provided with air-float guide rail, bears
Carrying platform and linear motor stator electric, load platform by linear electric motors drives edge air-float guide rail slide, described optical measuring system by
Laser instrument I, laser instrument II, spectroscope I, spectroscope II, CCDI, CCDII, filter lenss and lens group I, filter lenss and lens group
II, reference mirror and tested illuminator composition, laser instrument I, laser instrument II, spectroscope I, spectroscope II, CCDI and CCDII peace
It is contained on load platform, reference mirror is located above thrust bearing, and the axle of reference mirror is co-axially mounted with the axle of turning arm,
And connected firmly with yielding coupling, adjusting apparatus are located at reference mirror top；The light beam that laser instrument I projects is divided into through spectroscope I
Two bundles, a branch of measuring basiss light beam is directly entered CCDI through filter lenss and lens group I, and another bundle incides on tested minute surface,
Return to spectroscope I after tested direct reflection, after the mirror I that is split again reflection, be directly entered CCDI through filter lenss and lens group I；
The light beam that laser instrument II projects is divided into two bundles through spectroscope II, and a branch of measuring basiss light beam is direct with lens group II through filter lenss
Enter CCDII, another bundle incides on reference mirror.
2. the contactless horizontal minute surface inclination measuring system of polar coordinates type according to claim 1 is it is characterised in that described ginseng
The axle of the axle and turning arm of examining reflecting mirror is co-axially mounted and is connected firmly with yielding coupling.
3. the contactless horizontal minute surface inclination measuring system of polar coordinates type according to claim 1 is it is characterised in that described ginseng
Examine reflecting mirror axle lower end to fix using self-aligning bearing, upper end is adjusting apparatus, rotation arm axle upper end is fixed using bearing, and lower end is adopted
Fixed with thrust bearing.
4. the contactless horizontal minute surface inclination measuring system of the polar coordinates type described in a kind of utilization claim 1-3 any claim
Measure the method for horizontal mirror tilt angle it is characterised in that methods described step is as follows：
First, adjustment turning arm axis is parallel with local gravity vertical line；
2nd, the measuring basiss light beam in CCDI and the reflection measurement light entering CCDI after tested direct reflection are read respectively
Bundle；
If three reflected measuring beam are misaligned with measuring basiss light beam, it and measuring basiss light beam imaging point are measured by CCDI
Distance and bearing, you can measure tested illuminator drift angle and skew direction；
4th, comprehensive CCDI and CCDII measurement result, draws tested illuminator inclination angle with respect to the horizontal plane and well azimuth.
5. according to claim 4 inclined using the horizontal minute surface of the contactless horizontal minute surface inclination measuring system measurement of polar coordinates type
The method at angle is it is characterised in that the described adjustment turning arm axis method parallel with local gravity vertical line is as follows：
1）At an arbitrary position in adjustment optical measuring system the leveling bolt of each optical module so as to level；
2）Linear electric motors are in position servo state, and holding position is constant, control servomotor to drive turning arm by high order end A
Point rotation is to low order end B point；The CCDII reading producing in A point, B point record reference light, adjusts adjusting apparatus in B point, makes B point
Reading reaches the meansigma methodss of A point B point reading before adjustment；
3）Repeat 2）, until 2 points of readings of A, B are identical；
4）Make turning arm rotate to the midpoint of A, B, adjust adjusting apparatus, until this reading is identical with A point；
5）Repeat 2）~4）, until 3 points of readings are identical.
6. the contactless horizontal minute surface inclination measuring system of the polar coordinates type described in a kind of utilization claim 1-3 any claim
The method of the measurement minute surface depth of parallelism is it is characterised in that methods described step is as follows：
First, adjustment turning arm axis is parallel with local gravity vertical line；
2nd, the measuring basiss light beam in CCDI and the reflection measurement light entering CCDI after tested direct reflection are read respectively
Bundle；
If three reflected measuring beam are misaligned with measuring basiss light beam, it and measuring basiss light beam imaging point are measured by CCDI
Distance and bearing, you can measure tested illuminator drift angle and skew direction；
4th, comprehensive CCDI and CCDII measurement result, draws tested illuminator inclination angle with respect to the horizontal plane and well azimuth；
5th, the measurement result adjustment benchmark mirror tilt angle according to step 4 is to required angle；
6th, read the reflected measuring beam entering CCDI in minute surface CCDI to be measured after direct reflection to be measured, record its inclination
Angle；
7th, the inclination angle of minute surface to be measured and benchmark mirror tilt angle are contrasted, obtained minute surface to be measured flat with respect to benchmark minute surface
Row degree.
7. the contactless horizontal minute surface inclination measuring system of utilization polar coordinates type according to claim 6 measures the minute surface depth of parallelism
Method it is characterised in that the described adjustment turning arm axis method parallel with local gravity vertical line is as follows：
1）At an arbitrary position in adjustment optical measuring system the leveling bolt of each optical module so as to level；
2）Linear electric motors are in position servo state, and holding position is constant, control servomotor to drive turning arm by high order end A
Point rotation is to low order end B point；The CCDII reading producing in A point, B point record reference light, adjusts adjusting apparatus in B point, makes B point
Reading reaches the meansigma methodss of A point B point reading before adjustment；
3）Repeat 2）, until 2 points of readings of A, B are identical；
4）Make turning arm rotate to the midpoint of A, B, adjust adjusting apparatus, until this reading is identical with A point；
5）Repeat 2）~4）, until 3 points of readings are identical.
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| CN114111447B (en) * | 2021-11-15 | 2023-04-28 | 中国人民解放军32286部队50分队 | Multi-path aiming axis parallelism adjusting device for rotary arm type platform |
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Inventor after: Lu Hongqian Inventor after: Yin Hang Inventor after: Ban Xiaojun Inventor after: Liu Guoping Inventor after: Chen Liheng Inventor after: Huang Xianlin Inventor before: Lu Hongqian Inventor before: Liu Guoping Inventor before: Yin Hang Inventor before: Ban Xiaojun Inventor before: Chen Liheng Inventor before: Huang Xianlin |
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