CN104485350B - A kind of organic light-emitting display device and preparation method thereof - Google Patents

A kind of organic light-emitting display device and preparation method thereof Download PDF

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CN104485350B
CN104485350B CN201410835416.5A CN201410835416A CN104485350B CN 104485350 B CN104485350 B CN 104485350B CN 201410835416 A CN201410835416 A CN 201410835416A CN 104485350 B CN104485350 B CN 104485350B
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cathode
organic light
emitting display
display device
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CN104485350A (en
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刘嵩
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Bazhou Yungu Electronic Technology Co. Ltd.
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Beijing Visionox Technology Co Ltd
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Abstract

The invention belongs to field of organic electroluminescence, the organic light-emitting display device, by open shade the second cathode layer is formed in non-open areas again after having prepared the first cathode layer, second cathode layer is set to the contact hole bottom, and extends to the organic layer top along the contact hole side wall.The first cathode layer for not only effectively preventing thinner thickness is easy the problem of open circuit in contact hole hole along position, also effectively reduce the first cathode layer and cathode leg contact resistance, while increase flows through Organic Light Emitting Diode electric current, since the open area of the first cathode layer is not thickeied, the light extraction efficiency in the organic light emitting display region is had no effect on.The preparation method of organic light-emitting display device of the present invention, preparation process is simple, is easily applied to large-scale industrial production.

Description

A kind of organic light-emitting display device and preparation method thereof
Technical field
The present invention relates to field of organic electroluminescence, and in particular to a kind of organic light-emitting display device and preparation method thereof.
Background technology
Organic light-emitting display device (full name in English is Organic Light-Emitting Device, referred to as OLED) It is active light-emitting device.Compared to Thin Film Transistor-LCD (full name in English Liquid in existing flat panel display Crystal Display, abbreviation LCD), plasma display panel (full name in English Plasma Display Panel, referred to as PDP), OLED has many advantages, such as that high contrast, wide viewing angle, low-power consumption, volume are thinner, is expected to become next-generation mainstream FPD Technology is most one of technology that attracts attention in current flat panel display.
Organic light-emitting display device can be divided into passive type by type of drive and drive organic light-emitting display device (full name in English Passive matrix organic lighting emitting display, abbreviation PMOLED) and it is active driving it is organic Luminous display unit (full name in English Active Matrix organic lighting emitting display, referred to as AMOLED).Passive type drive organic light-emitting display device processing procedure it is simple, but resolution ratio can not improve, it is in large size have any problem, And it in order to maintain the brightness of entire panel, needs the brightness for improving each pixel and improves operation electric current, not only consume in this way Electricity is high, can also reduce device lifetime, therefore uses on a display screen seldom.So-called active driving organic light emitting display dress It sets, that is, thin film transistor (TFT) (full name in English Thin Film Transistor, abbreviation TFT), collocation capacitance is utilized to store signal, come Control brightness and the grayscale performance of organic light-emitting display device.In order to achieve the purpose that fixed current drives, each pixel is at least Two TFT and storage capacitances are needed to constitute.Each individually pixel i.e. Organic Light Emitting Diode, has complete Cathode, organic function layer and anode, anode cover a thin film transistor (TFT) array, form a matrix.Thin film transistor (TFT) array Circuit is formed, determines the luminous situation of pixel, and then determine the composition of image.Active driving organic light-emitting display device can be big Sizing, compared with power saving, high-res, panel lasts a long time, therefore is paid much attention in display technology field.
Organic light-emitting display device is divided into bottom emitting device (full name in English Bottom Organic according to light extraction mode Light-emitting Device, abbreviation BEOLED) and top emitting device (full name in English TOP Organic Light- Emitting Device, abbreviation TEOLED).Anode used in bottom emitting device is transparent, will generally by way of sputtering Transparent indium tin oxide ITO (or indium-zinc oxide IZO etc.) growths are used as anode on the transparent substrate, are sent out inside device Light passes through transparent anode in succession, transparent substrate projects.The display screen made in this way is due to driving circuit and viewing area Domain will simultaneously make on the transparent substrate, cause display area area is opposite to reduce, and the aperture opening ratio of display screen reduces.With it is common Bottom emitting device is compared, and top emitting device is due to the design feature of itself, and light can be projected from top electrodes, in active drive In dynamic organic light-emitting display device, pixel-driving circuit, bus etc. can be produced on the lower section of display area, so as to avoid drive The problem of dynamic circuit is competed with one another for display area so that the aperture opening ratio of device greatly improves, and then realizes the high score of display screen Resolution.
The active driving organic light-emitting display device of top emitting is the trend of flat panel display, the organic light emission of top emitting Display device cathode mostly uses greatly the metal material of very thin thickness, could realize the function of half-reflection and half-transmission in this way.But due to the moon Pole very thin thickness, this allows for forming open circuit in through-hole recess when cathode is contacted by connecting hole and cathode leg, to lead Cause entire screen body failure.In addition, if cathode thickness is 10~20nm, due to preparation process, deposition is cloudy on the insulating layer The resistance of pole reaches hundreds of Europe or more sometimes, and the electric current flowed out from Organic Light Emitting Diode is seriously reduced, so as to cause screen body Power consumption increases, and uniformity is deteriorated.
Invention content
For this purpose, to be solved by this invention is that cathode passes through through-hole and cathode in existing top emitting organic light-emitting display device Lead is easy to happen open circuit when connecting, and the problem of to influence to shield body yield, provides a kind of cathode and is connected with cathode leg reliably Organic light-emitting display device and preparation method thereof.
In order to solve the above technical problems, the technical solution adopted by the present invention is as follows:
A kind of organic light-emitting display device of the present invention, including the pixel layer that is disposed on the substrate, the pixel layer Include several Organic Light Emitting Diodes by array arrangement, the Organic Light Emitting Diode includes the anode for stacking gradually setting Layer, organic layer and the first cathode layer, the organic light-emitting display device further include cathode leg and are arranged in first cathode Insulating layer between layer and the cathode leg is equipped in the insulating layer for connecing for the first cathode layer and cathode leg to be connected Contact hole, the second cathode layer is provided directly in the first cathode layer non-open areas, and second cathode layer is set to described Contact hole bottom, and extend to the organic layer top along the contact hole side wall.
Second cathode layer the anode layer projection in the plane with the organic layer in the anode layer institute Projection section in the plane overlaps.
The thickness of second cathode layer is 30nm~200nm.
Second cathode layer is one or more layers the stacking knot in silver layer or its alloy-layer, aluminium layer or its alloy-layer Structure.
The thickness of first cathode layer is 10nm~30nm.
First cathode layer be silver layer or its alloy-layer, aluminium layer or its alloy-layer, alkali metal layers, alkaline earth metal layer, One or more layers stacked structure in rare earth metal layer.
The organic layer includes luminescent layer, further includes hole injection layer, electronic barrier layer, hole transmission layer, electron-transport One or more layers combination in layer, hole blocking layer, electron injecting layer.
A kind of preparation method of organic light-emitting display device of the present invention, includes the following steps:
Cathode leg is formed on substrate, insulating layer is formed on cathode leg, while being opened on prepared insulating layer If contact hole;
Several organic light emitting diodes including anode layer, organic layer and the first cathode layer are formed on substrate, form picture Plain layer, the first cathode layer are realized by contact hole with cathode leg and are connected;
The second cathode layer is formed in the first cathode layer non-open areas using open shade, the second cathode layer is formed in The contact hole bottom, and extend to the organic layer top along the contact hole side wall.
The thickness of second cathode layer is 30nm~200nm, the thickness of first cathode layer be 10nm~ 30nm。
Second cathode layer is one or more layers the stacking knot in silver layer or its alloy-layer, aluminium layer or its alloy-layer Structure.
The above technical solution of the present invention has the following advantages over the prior art:
1, a kind of organic light-emitting display device provided by the present invention is preparing the first cathode layer by open shade The second cathode layer is formed in non-open areas again later, second cathode layer is set to the contact hole bottom, and along described Contact hole side wall extends to the organic layer top and not only effectively prevents the first cathode layer of thinner thickness on contact hole hole edge Position is easy the problem of open circuit, also effectively reduces the first cathode layer and cathode leg contact resistance, organic light emission is flowed through in increase While diode current, since the open area of the first cathode layer is not thickeied, it is aobvious to have no effect on the organic light emission Show the light extraction efficiency in region.
2, a kind of organic light-emitting display device provided by the present invention, since clamping is cloudy with described first in the anode layer The organic layer thickness including organic layer between the layer of pole is much larger than the thickness of first cathode layer, therefore, in organic layer Edge described in the first cathode layer be easy to happen open circuit;Second cathode layer described in organic light-emitting display device of the present invention The anode layer projection in the plane and the luminescent layer the anode layer projection section in the plane overlap, Not only effectively prevent the first cathode layer open circuit;Moreover, the boundary that second cathode layer is covered in organic layer can get Smaller metallic film surface resistance.
3, the preparation method of a kind of organic light-emitting display device provided by the present invention, preparation process is simple, is easily applied to Large-scale industrial production.
Description of the drawings
In order to make the content of the present invention more clearly understood, it below according to specific embodiments of the present invention and combines Attached drawing, the present invention is described in further detail, wherein
Fig. 1 is the structural schematic diagram of organic light-emitting display device described in embodiment;
Reference numeral is expressed as in figure:1- substrates, 2- anode layers, 3- luminescent layers, the first cathode layers of 41-, the second cathodes of 42- Layer, 5- insulating layers, 6- cathode legs, 7- contact holes.
Specific implementation mode
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing to the reality of the present invention The mode of applying is described in further detail.
The present invention can be embodied in many different forms, and should not be construed as limited to embodiment set forth herein. On the contrary, providing these embodiments so that the disclosure will be thorough and complete, and the design of the present invention will be fully conveyed to Those skilled in the art, the present invention will only be defined by the appended claims.In the accompanying drawings, for clarity, the areas Ceng He can be exaggerated The size and relative size in domain.It should be understood that when element such as layer is referred to as " being formed in " or " setting exists " another element When "upper", which can be arranged directly on another element, or there may also be intermediary elements.On the contrary, working as element When referred to as on " being formed directly into " or " being set up directly on " another element, intermediary element is not present.
Embodiment
Organic light-emitting display device provided in this embodiment includes the pixel layer of setting on substrate 1 as shown in Fig. 1, The pixel layer include by array arrangement several Organic Light Emitting Diodes (for clarity, only shown in figure one it is organic Light emitting diode), the Organic Light Emitting Diode includes the anode layer 2, organic layer 3 and the first cathode layer for stacking gradually setting 41。
The organic light-emitting display device further includes cathode leg 6 and is arranged in first cathode layer 41 and described the moon Insulating layer 5 between pole lead 6 is equipped with the contact hole for the first cathode layer 41 and cathode leg 6 to be connected in the insulating layer 5 7。
The second cathode layer 42 is provided directly in first cathode layer, 41 non-open areas, second cathode layer 42 exists The anode layer 2 projection in the plane and the organic layer 3 the anode layer 2 projection section weight in the plane It closes;Second cathode layer 42 is set to 7 bottom of the contact hole, and extends to the organic layer 3 along 7 side wall of the contact hole Top.
For the substrate 1 selected from but not limited to glass substrate, polymeric substrate, the present embodiment is preferably glass substrate.
In the present embodiment, the anode layer 2 is ITO/Ag/ITO layers, thickness 10nm/150nm/20nm, as the present invention Convertible embodiment, the anode layer 2 can also be Ag/ITO layers, Al/ITO layers, ITO/Al/ITO, the existing anode such as ITO layer Layer structure, may be implemented the purpose of the present invention, belongs to the scope of protection of the present invention.
In the present embodiment, the organic layer 3 includes luminescent layer, further includes hole injection layer, electronic barrier layer, hole transport One or more layers combination in layer, electron transfer layer, hole blocking layer, electron injecting layer, selected materials and thickness compared with The purpose of the present invention may be implemented in technology, belongs to the scope of protection of the present invention.
The thickness of first cathode layer 41 is 10nm~30nm, and first cathode layer 41 is selected from but not limited to silver One or more layers heap in layer or its alloy-layer, aluminium layer or its alloy-layer, alkali metal layers, alkaline earth metal layer, rare earth metal layer Stack structure.In the present embodiment, the thickness of first cathode layer 41 is preferably 20nm, and first cathode layer 41 is preferably silver Layer.
The thickness of second cathode layer 42 is 30nm~200nm, and second cathode layer 42 is selected from but not limited to silver One or more layers stacked structure in layer or its alloy-layer, aluminium layer or its alloy-layer.In the present embodiment, second cathode layer 42 thickness is preferably 50nm, and second cathode layer 42 is preferably silver layer.
The thickness and line width of the cathode leg 6 are compared with technology, and the material of the cathode leg 6 is also compared with skill Art.In the present embodiment, the thickness of the cathode leg 6 is preferably 150nm, and line width is preferably 50 microns, the cathode leg 6 Preferably stack gradually setting Mo layers, Al layers and Mo layers.
The insulating layer 5 is selected from but not limited to organic insulating materials such as polyimides.In the present embodiment, the insulating layer 5 Thickness be preferably 1.5 microns, ranging from 15 °~85 ° of the inclination angle between the insulating layer 5 and substrate 1, in the present embodiment preferably It is 45 °.
The preparation method of the organic light-emitting display device, includes the following steps:
S1, it forms cathode leg 6 on substrate 1 by sputtering technology, and phase is formed by wet method or dry method etch technology The figure answered forms insulating layer 5 on cathode leg 6, while opening up contact on the insulating layer 5 by wet etching process Hole 7, with the subregion of the exposure cathode leg 6.
S2, several organic light emission two levels including anode layer 2, organic layer 3 and the first cathode layer 41 are formed on substrate 1 Pipe forms pixel layer, and the first cathode layer 41, which is realized with cathode leg 6 by contact hole 7, to be connected;In the Organic Light Emitting Diode The preparation process of each layer is compared with technology.
S3, it uses open shade in 41 non-open areas of the first cathode layer by evaporation process, that is, corresponds to contact hole Region on form the second cathode layer 42, the second cathode layer 42 is formed in 7 bottom of the contact hole, and along 7 side of the contact hole Wall extends to 5 top of the insulating layer.
Anode layer 2 described in the present embodiment, the organic layer 3, first cathode layer 41, second cathode layer 42, The thickness of each functional layers such as the insulating layer 5, the cathode leg 6 can be changed according to the application for being particularly shown device, this In there is no need to be exhaustive to all embodiments, and obvious changes or variations extended from this are still located Among protection scope of the present invention.
Comparative example
The organic light-emitting display device that this comparative example provides and preparation method thereof same embodiment, it is unique the difference is that being not provided with Second cathode layer.
The cathode leg of the organic light-emitting display device in above-described embodiment and comparative example is tested using multimeter, Test result is as follows shown in table:
It can be seen that from above-mentioned test result:In the case where being not provided with the second cathode layer, the part area of the first cathode layer Open circuit easily occurs for domain, and the contact resistance with cathode leg is infinity, and then no current flows through Organic Light Emitting Diode, to Influence the yield of the organic light-emitting display device.And the organic light-emitting display device described in embodiment then effectively prevents thickness The problem that the first relatively thin cathode layer is easy open circuit in contact hole hole along position is spent, the first cathode layer is also effectively reduced and draws with cathode Line contact resistance flows through Organic Light Emitting Diode electric current in increase.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or Variation is still in the protection scope of this invention.

Claims (9)

1. a kind of organic light-emitting display device, including the pixel layer that is disposed on the substrate, the pixel layer includes pressing array arrangement Several Organic Light Emitting Diodes, the Organic Light Emitting Diode includes the anode layer for stacking gradually setting, organic layer and first Cathode layer, the organic light-emitting display device further include that cathode leg and setting are drawn in first cathode layer and the cathode Insulating layer between line, the contact hole for the first cathode layer and cathode leg to be connected is equipped in the insulating layer, and feature exists In being provided directly with the second cathode layer in the first cathode layer non-open areas;Second cathode layer is set to described connect Contact hole bottom, and the organic layer top is extended to along the contact hole side wall, second cathode layer is in the anode layer institute Projection in the plane and the organic layer the anode layer projection section in the plane overlap.
2. organic light-emitting display device according to claim 1, which is characterized in that the thickness of second cathode layer is 30nm~200nm.
3. according to any organic light-emitting display devices of claim 1-2, which is characterized in that second cathode layer is silver One or more layers stacked structure in layer or its alloy-layer, aluminium layer or its alloy-layer.
4. organic light-emitting display device according to claim 3, which is characterized in that the thickness of first cathode layer is 10nm~30nm.
5. organic light-emitting display device according to claim 4, which is characterized in that first cathode layer be silver layer or One or more layers stacking knot in its alloy-layer, aluminium layer or its alloy-layer, alkali metal layers, alkaline earth metal layer, rare earth metal layer Structure.
6. organic light-emitting display device according to claim 5, which is characterized in that the organic layer includes luminescent layer, also Including one layer in hole injection layer, electronic barrier layer, hole transmission layer, electron transfer layer, hole blocking layer, electron injecting layer Or the combination of multilayer.
7. a kind of preparation method of organic light-emitting display device, which is characterized in that include the following steps:
Cathode leg is formed on substrate, insulating layer is formed on cathode leg, while opening up and connecing on prepared insulating layer Contact hole;
Several organic light emitting diodes including anode layer, organic layer and the first cathode layer are formed on substrate, form pixel layer, First cathode layer is realized by contact hole with cathode leg and is connected;
The second cathode layer is formed in the first cathode layer non-open areas using open shade, the second cathode layer is formed in described Contact hole bottom, and extend to the organic layer top along the contact hole side wall;
By second cathode layer the anode layer projection in the plane with the organic layer where the anode layer Projection section in plane overlaps.
8. the preparation method of organic light-emitting display device according to claim 7, which is characterized in that second cathode The thickness of layer is 30nm~200nm, and the thickness of first cathode layer is 10nm~30nm.
9. the preparation method of organic light-emitting display device according to claim 8, which is characterized in that second cathode layer is One or more layers stacked structure in silver layer or its alloy-layer, aluminium layer or its alloy-layer.
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CN109728031B (en) * 2017-10-31 2020-03-24 昆山国显光电有限公司 Organic electroluminescent device, display and mobile communication equipment
CN107978691B (en) * 2017-11-21 2020-09-22 武汉天马微电子有限公司 Organic light-emitting display panel, display device and manufacturing method of display panel
CN108231673B (en) * 2018-01-19 2020-07-03 京东方科技集团股份有限公司 Display panel, manufacturing method thereof and display device
CN108062185B (en) * 2018-01-31 2022-02-01 京东方科技集团股份有限公司 Touch control assembly, manufacturing method thereof and display device
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