CN104485290A - Dynamic characteristic self-adapting matching micro structure array precise processing machine tool - Google Patents

Dynamic characteristic self-adapting matching micro structure array precise processing machine tool Download PDF

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Publication number
CN104485290A
CN104485290A CN201410695949.8A CN201410695949A CN104485290A CN 104485290 A CN104485290 A CN 104485290A CN 201410695949 A CN201410695949 A CN 201410695949A CN 104485290 A CN104485290 A CN 104485290A
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China
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motion
micro
platform
fixed
structure array
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Granted
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CN201410695949.8A
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CN104485290B (en
Inventor
陈新
白有盾
杨志军
王梦
高健
李涵雄
李成祥
王江龙
黄宇涵
刘浩文
李振新
钟裕导
刘伟光
杨海东
管贻生
陈新度
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Guangdong University of Technology
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Guangdong University of Technology
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21DWORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D28/00Shaping by press-cutting; Perforating
    • B21D28/02Punching blanks or articles with or without obtaining scrap; Notching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems

Abstract

The invention provides a dynamic characteristic self-adapting matching micro structure array precise processing machine tool, which comprises a Y-direction moving mechanism, an X-direction moving mechanism and a Z-direction precise punching mechanism, wherein the X-direction moving mechanism is fixedly arranged on a base through an X-direction support frame, the Z-direction precise punching mechanism is arranged X-direction guide rails of the X-direction moving mechanism through an X-Z linkage platform and an X-Z composite guide rail slide block, and realizes the X-direction movement under the X-direction driving by the X-direction moving mechanism, and a workpiece is placed on a Y-direction moving platform of the Y-direction moving mechanism and realizes the Y-direction movement through the Y-direction moving mechanism. The Z-direction precise punching mechanism can realize the fine regulation on dynamic characteristics according to different punching frequencies, the consistent dynamic response performance is obtained, in addition, the position force switching composite control can be realized, and the consistency processing of the micro structure array is realized. The invention provides a precise micro punching machine tool with the advantages that the aligning time is shortened, the moving deviation is reduced, and the processing efficiency and the processing precision are improved.

Description

A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching
Technical field
The present invention relates to precision movement platform, particularly relate to a kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching.
Background technology
In field of semiconductor package, often need some accurate micro-structurals of processing and manufacturing on workpiece.Precision stamping lathe is a kind of process equipment completing above-mentioned operation.Current pressing equipment Problems existing has: the punching precision of (1) stamping machine is limited; (2) working (machining) efficiency of stamping machine is not high; (3) process adjustments of pressing equipment is comparatively complicated.In micro-press machine of prior art, a GeZXiang precision stamping mechanism is set on conventional XY platform, in Z-direction precision stamping mechanism, adopts piezoelectric ceramic actuator and elastic device etc. to drive micro-staking punch on workpiece, process micro-shape structure.Wherein, Z-direction punching course adopts position control system.Prior art is owing to being set up Z-direction precision stamping mechanism on the XY platform of routine, comparatively heavy in overall structure.In addition, in prior art, Z-direction motion adopts position control system, and staking punch is changing greatly with stamping press in the contact punching stroke of workpiece, and displacement-control mode can cause actual punching precision limited.And be reach high punching precision, often need to carry out comparatively complicated technique adjustment process in prior art, and usually can sacrifice working (machining) efficiency.
Summary of the invention
The object of the invention is to propose a kind of shortening position aligning time, reduce movement warp, improve the micro structure array precision finishing machine of the dynamic characteristic Adaptive matching of working (machining) efficiency and machining accuracy.
For reaching this object, the present invention by the following technical solutions:
A kind of accurate micro-press machine, comprise Y-direction motion, X to motion and Z-direction precision stamping mechanism, described X is fixed on base on by X to support to motion, described Z-direction precision stamping mechanism is installed on the X direction guiding rail of described X to motion by X & Z linkage platform and X & Z composite guide rails slide block, and realizes X to motion under described X drives to the X of motion to driving;
Workpiece is placed on the Y-direction motion platform of described Y-direction motion, and realizes Y-direction motion by described Y-direction motion 1.
Preferably, described Z-direction precision stamping mechanism comprises Z-direction motion platform, Z-direction governor motion and micro-punching mechanism, and described Z-direction governor motion and described micro-punching mechanism are installed on described Z-direction motion platform;
Described Z-direction governor motion comprises driving, Z-direction guide rail, ball screw, feed screw nut and nut seat, described driving and described Z-direction guide rail are fixed on described Z-direction motion platform, and described ball screw to be installed on described Z-direction motion platform and to be fixedly connected with described X & Z linkage platform with described nut seat by described feed screw nut;
Described micro-punching mechanism drives described Z-direction motion platform and described X & Z linkage platform to realize the adjustment in Z-direction position in the relative motion of Z-direction by the rotation of ball-screw described in described drived control.
Preferably, described micro-punching mechanism comprises film group, knife rest, drive motors and micro-staking punch, described drive motors is fixed on described Z-direction motion platform, the mover of described drive motors is connected with described knife rest and drives described knife rest in micro-translation of Z-direction, and described micro-staking punch is fixed on described knife rest.
Preferably, described micro-punching mechanism also comprises film pretightning force adjusting bolt, and matrix and the described film group junction of described Z-direction motion platform are provided with strip hole slot, and described film pretightning force adjusting bolt is in described hole slot.
Preferably, described micro-punching mechanism is also provided with capacitive displacement transducer.
Preferably, described film group and described knife rest adopt one processing mode to be embedded in described Z-direction motion platform.
Preferably, described driving is servomotor or hand power screw adjusting device.
Preferably, described Y-direction motion comprises base, Y-direction guide rail, Y-direction motion platform, Y-direction driving, Y-direction guide rail slide block, described Y-direction guide rail is fixed on described base, described Y-direction motion platform is installed on the mover of described Y-direction driving by connecting plate, the stator that described Y-direction drives is fixed on described base, described Y-direction motion platform by described Y-direction guide rail slide block and Y-direction guide rail by its motion in Y-direction of described Y-direction drived control.
Preferably, described X direction guiding rail is fixed on described X to support, and described X is fixed on described X to support to the stator driven, and described X is fixed in described X & Z linkage platform to the mover driven.
Preferably, described Y-direction motion also comprises the Y-direction grating scale be fixed on described base, and described X also comprises to motion and is fixed on the X of described X to support to grating scale.
Beneficial effect of the present invention:
1, the setting of X & Z interlock, drives Z-direction precision stamping mechanism to complete X to motion, and Y-direction motion drives workpiece to complete Y-direction motion, shortens position aligning time, and minimizing movement warp, improves working (machining) efficiency and machining accuracy;
2, the Z-direction governor motion in Z-direction precision stamping mechanism makes Z-direction motion platform and X & Z linkage platform produce Z-direction relative motion by servomotor and ball-screw mode, and then drives micro-punching mechanism to complete the adjustment of Z-direction position, realizes punching press;
3, the prestressing force in film group can be changed by the film pretightning force adjusting bolt in the micro-punching mechanism of adjustment, and then change the dynamics of micro-punching mechanism, mate different operating modes and technological requirement.
Accompanying drawing explanation
Fig. 1 is the structural representation of one embodiment of the present of invention;
Fig. 2 is that the structure of one embodiment of the present of invention splits schematic diagram;
Fig. 3 is the Z-direction precision stamping mechanism structural representation of one embodiment of the present of invention;
Fig. 4 is micro-punching mechanism structural representation of one embodiment of the present of invention.
Wherein: Y-direction motion 1, X is to motion 2, Z-direction precision stamping mechanism 3, base 101, Y-direction guide rail 102, the stator 103 that Y-direction drives, Y-direction guide rail slide block 104, Y-direction motion platform 105, the mover 106 that Y-direction drives, connecting plate 107, X is to support 201, X is to the stator 202 driven, X direction guiding rail 203, X is to the mover 204 driven, X & Z linkage platform 205, X & Z composite guide rails slide block 206, Z-direction motion platform 301, drive 303, Z-direction guide rail 304, film pretightning force adjusting bolt 307, micro-staking punch 308, ball screw 311, feed screw nut 312, nut seat 313, film group 321, knife rest 322, drive motors 323, hole slot 325.
Embodiment
Technical scheme of the present invention is further illustrated by embodiment below in conjunction with accompanying drawing.
A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching, comprise Y-direction motion 1, X to motion 2 and Z-direction precision stamping mechanism 3, described X is fixed on base 101 on by X to support 201 to motion 2, described Z-direction precision stamping mechanism 3 is installed on the X direction guiding rail 203 of described X to motion 2 by X & Z linkage platform 205 and X & Z composite guide rails slide block 206, and realizes X to motion under described X drives to the X of motion 2 to driving;
Workpiece is placed on the Y-direction motion platform 105 of described Y-direction motion 1, and realizes Y-direction motion by described Y-direction motion 1.
Prior art sets up Z-direction precision stamping mechanism on the XY platform of routine, workpiece need be done exercises below Z-direction precision stamping mechanism to motion and Y-direction by the X of XY platform, by Z-direction precision stamping, mechanism completes stamping procedure, overall structure is comparatively heavy, required run duration is longer, reduces working (machining) efficiency, in addition, the conversion of XY direction motion causes motion platform easily to occur deviation when mobile, and the precision of workpiece punch process is reduced.As shown in Figure 1, Z-direction precision stamping mechanism 3 to link installation to motion 2 in conjunction with X by the present invention, realize the X of Z-direction precision stamping mechanism 3 to motion, workpiece realizes Y-direction motion by Y-direction motion 1, Z-direction precision stamping mechanism 3 and workpiece respectively respective X to or Y-direction on relative motion, shorten the run duration that station is aimed at, improve work pieces process efficiency, and X disturbs to the motion of Y-direction is irrelevant, without the need to the movement that workpiece is multi-faceted, reduce deviations, improve the precision of workpiece punch process, Z-direction precision stamping mechanism 3 and X install to the interlock of motion 2 and make overall structure simpler.
Preferably, described Z-direction precision stamping mechanism 3 comprises Z-direction motion platform 301, Z-direction governor motion and micro-punching mechanism, and described Z-direction governor motion and described micro-punching mechanism are installed on described Z-direction motion platform 301;
Described Z-direction governor motion comprises driving 303, Z-direction guide rail 304, ball screw 311, feed screw nut 312 and nut seat 313, described driving 303 and described Z-direction guide rail 304 are fixed on described Z-direction motion platform 301, and described ball screw 311 to be installed on described Z-direction motion platform 301 and to be fixedly connected with described X & Z linkage platform 205 with described nut seat 313 by described feed screw nut 312;
The rotation that described micro-punching mechanism controls described ball-screw 311 by described driving 303 drives described Z-direction motion platform 301 and described X & Z linkage platform 205 to realize the adjustment in Z-direction position in the relative motion of Z-direction.
As shown in Figure 3, Z-direction governor motion in Z-direction precision stamping mechanism makes Z-direction motion platform 301 produce the relative motion of Z phase with X & Z linkage platform 205 by driving 303 in conjunction with the mode of ball screw 311, and then drive micro-punching mechanism to complete the adjustment of Z-direction position, structure is simple, and controlling is strong.As shown in Figure 3, drive 303 to be fixed on Z-direction motion platform 301 by electric machine support 302, ball-screw is fixed on Z-direction motion platform 301 by ball-screw supporting seat 310,314.Feed screw nut 312 is fixed in X & Z linkage platform 205 by nut seat 313.
Preferably, described micro-punching mechanism comprises film group 321, knife rest 322, drive motors 323 and micro-staking punch 308, described drive motors 323 is fixed on described Z-direction motion platform 301, the mover of described drive motors 323 is connected with described knife rest 322 and drives described knife rest 322 in micro-translation of Z-direction, and described micro-staking punch 308 is fixed on described knife rest 322.Z-direction precision stamping mechanism can adjust dynamic characteristic according to different punching press frequency, obtains consistent dynamic response performance, and can realize virial switching complex controll, realizes the consistency processing of micro structure array.
As shown in Figure 4, micro-punching mechanism drives the knife rest 322 with micro-staking punch 308 to complete punching course by drive motors 323.
Preferably, described micro-punching mechanism also comprises film pretightning force adjusting bolt 307, and matrix and described film group 321 junction of described Z-direction motion platform 301 are provided with strip hole slot 325, and described film pretightning force adjusting bolt 307 is in described hole slot 325.The prestressing force in film group 321 can be changed by the film pretightning force adjusting bolt 307 adjusted in micro-punching mechanism, and then change the dynamics of micro-punching mechanism, mate different operating modes and technological requirement.
Preferably, described micro-punching mechanism is also provided with capacitive displacement transducer.Z maintenance and operation for measuring knife rest 322 is moved.
Preferably, described film group 321 and described knife rest 322 adopt one processing mode to be embedded in described Z-direction motion platform 301.Obtained through the mode such as milling, spark machined by whole block material, avoid the rigging error of part, Platform movement precision can be improved.
Preferably, described driving 303 is servomotor or hand power screw adjusting device.Servomotor makes control rate and positional precision all very accurate, and volume is little, and response is fast, and speed is high, can be used for the rotation controlling ball screw 311.Use hand power screw adjusting device, reduce mechanical manipulation, the movement inertia of machinery can be reduced further, improve the accuracy of punching press.
Preferably, described Y-direction motion 1 comprises base 101, Y-direction guide rail 102, Y-direction motion platform 105, Y-direction driving, Y-direction guide rail slide block 104, described Y-direction guide rail 102 is fixed on described base 101, described Y-direction motion platform 105 is installed on the mover 106 of described Y-direction driving by connecting plate 107, the stator 103 that described Y-direction drives is fixed on described base 101, described Y-direction motion platform 105 by described Y-direction guide rail slide block 104 and Y-direction guide rail by its motion in Y-direction of described Y-direction drived control.As shown in Figure 2, the stator 103 that Y-direction drives is installed on X to support, drives the Y-direction of Y-direction motion to move by its mover 106, and quality is light, and vibration kinetic energy is little, and frequency is fast.
Preferably, described X direction guiding rail 203 is fixed on described X to support 201, and described X is fixed on described X to support to the stator 202 driven, and described X is fixed in described X & Z linkage platform 205 to the mover 204 driven.As shown in Figure 2, X is installed on X to support to the stator 202 driven, and is driven the motion of X & Z linkage platform by its mover 204, and quality is light, and vibration kinetic energy is little, and frequency is fast.
Preferably, described Y-direction motion also comprises the Y-direction grating scale be fixed on described base 101, and described X also comprises to motion and is fixed on the X of described X to support 201 to grating scale.Be respectively used to the X of the Y-direction position and X & Z linkage platform and Z-direction precision stamping mechanism measuring Y-direction motion platform to position.
Below know-why of the present invention is described in conjunction with specific embodiments.These describe just in order to explain principle of the present invention, and can not be interpreted as limiting the scope of the invention by any way.Based on explanation herein, those skilled in the art does not need to pay performing creative labour can associate other embodiment of the present invention, and these modes all will fall within protection scope of the present invention.

Claims (10)

1. a micro structure array precision finishing machine for dynamic characteristic Adaptive matching, comprises Y-direction motion, X to motion and Z-direction precision stamping mechanism, it is characterized in that:
Described X is fixed on base on by X to support to motion, described Z-direction precision stamping mechanism is installed on the X direction guiding rail of described X to motion by X & Z linkage platform and X & Z composite guide rails slide block, and realizes X to motion under described X drives to the X of motion to driving;
Workpiece is placed on the Y-direction motion platform of described Y-direction motion 1, and realizes Y-direction motion by described Y-direction motion.
2. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 1, it is characterized in that: described Z-direction precision stamping mechanism comprises Z-direction motion platform, Z-direction governor motion and micro-punching mechanism, described Z-direction governor motion and described micro-punching mechanism are installed on described Z-direction motion platform;
Described Z-direction governor motion comprises driving, Z-direction guide rail, ball screw, feed screw nut and nut seat, described driving and described Z-direction guide rail are fixed on described Z-direction motion platform, and described ball screw to be installed on described Z-direction motion platform and to be fixedly connected with described X & Z linkage platform with described nut seat by described feed screw nut;
Described micro-punching mechanism drives described Z-direction motion platform and described X & Z linkage platform to realize the adjustment in Z-direction position in the relative motion of Z-direction by the rotation of ball-screw described in described drived control.
3. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 2, it is characterized in that: described micro-punching mechanism comprises film group, knife rest, drive motors and micro-staking punch, described drive motors is fixed on described Z-direction motion platform, the mover of described drive motors is connected with described knife rest and drives described knife rest in micro-translation of Z-direction, and described micro-staking punch is fixed on described knife rest.
4. the micro-press machine of precision according to claim 3, it is characterized in that: described micro-punching mechanism also comprises film pretightning force adjusting bolt, matrix and the described film group junction of described Z-direction motion platform are provided with strip hole slot, and described film pretightning force adjusting bolt is in described hole slot.
5. the micro structure array precision finishing machine of the dynamic characteristic Adaptive matching according to claim 3 or 4, is characterized in that: described micro-punching mechanism is also provided with capacitive displacement transducer.
6. the micro-press machine of precision according to claim 3, is characterized in that: described film group and described knife rest adopt one processing mode to be embedded in described Z-direction motion platform.
7. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 2, is characterized in that: described driving is servomotor or hand power screw adjusting device.
8. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 1, it is characterized in that: described Y-direction motion comprises base, Y-direction guide rail, Y-direction motion platform, Y-direction driving, Y-direction guide rail slide block, described Y-direction guide rail is fixed on described base, described Y-direction motion platform is installed on the mover of described Y-direction driving by connecting plate, the stator that described Y-direction drives is fixed on described base, described Y-direction motion platform by described Y-direction guide rail slide block and Y-direction guide rail by its motion in Y-direction of described Y-direction drived control.
9. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 1, it is characterized in that: described X direction guiding rail is fixed on described X to support, described X is fixed on described X to support to the stator driven, and described X is fixed in described X & Z linkage platform to the mover driven.
10. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 1, it is characterized in that: described Y-direction motion also comprises the Y-direction grating scale be fixed on described base, described X also comprises to motion and is fixed on the X of described X to support to grating scale.
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CN107471504A (en) * 2017-08-22 2017-12-15 广东工业大学 A kind of micro-structural hits the regulation platform and its adjusting method of a machining tool light-conducting board mold
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CN111320132A (en) * 2020-02-18 2020-06-23 杭州电子科技大学 Method and device for preparing multi-scale functional microstructure with high-hardness surface
CN113070390A (en) * 2021-03-31 2021-07-06 安徽中佳自动化科技有限公司 High-efficient numerical control die-cutting mechanism

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CN113070390B (en) * 2021-03-31 2023-08-18 安徽中佳自动化科技有限公司 High-efficient numerical control die-cut mechanism

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