CN204303757U - A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching - Google Patents
A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching Download PDFInfo
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- CN204303757U CN204303757U CN201420724099.5U CN201420724099U CN204303757U CN 204303757 U CN204303757 U CN 204303757U CN 201420724099 U CN201420724099 U CN 201420724099U CN 204303757 U CN204303757 U CN 204303757U
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- 230000003044 adaptive Effects 0.000 title claims abstract description 16
- 238000004080 punching Methods 0.000 claims abstract description 36
- 239000002131 composite material Substances 0.000 claims abstract description 5
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 3
- 238000003754 machining Methods 0.000 abstract description 9
- 230000004044 response Effects 0.000 abstract description 3
- 238000004904 shortening Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 9
- 238000003825 pressing Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000036545 exercise Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Abstract
A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching; comprise Y-direction motion, X to motion and Z-direction precision stamping mechanism; described X is fixed on base on by X to support to motion, and described Z-direction precision stamping mechanism is by X & amp; Z linkage platform and X & amp; Z composite guide rails slide block is installed on the X direction guiding rail of described X to motion, and realizes X to motion under described X drives to the X of motion to driving; Workpiece is placed on the Y-direction motion platform of described Y-direction motion, and realizes Y-direction motion by described Y-direction motion.Z-direction precision stamping mechanism according to different punching press frequency to dynamic characteristic intense adjustment, can obtain consistent dynamic response performance, and can realize virial switching complex controll, realizes the uniformity processing of micro structure array.The utility model proposes a kind of shortening position aligning time, reduce movement warp, improve the micro-press machine of precision of working (machining) efficiency and machining accuracy.
Description
Technical field
The utility model relates to precision movement platform, particularly relates to a kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching.
Background technology
In field of semiconductor package, often need some accurate micro-structurals of processing and manufacturing on workpiece.Precision stamping lathe is a kind of process equipment completing above-mentioned operation.Current pressing equipment Problems existing has: the punching precision of (1) stamping machine is limited; (2) working (machining) efficiency of stamping machine is not high; (3) process adjustments of pressing equipment is comparatively complicated.In micro-press machine of prior art, a GeZXiang precision stamping mechanism is set on conventional XY platform, in Z-direction precision stamping mechanism, adopts piezoelectric ceramic actuator and elastic device etc. to drive micro-staking punch on workpiece, process micro-shape structure.Wherein, Z-direction punching course adopts position control system.Prior art is owing to being set up Z-direction precision stamping mechanism on the XY platform of routine, comparatively heavy in overall structure.In addition, in prior art, Z-direction motion adopts position control system, and staking punch is changing greatly with stamping press in the contact punching stroke of workpiece, and displacement-control mode can cause actual punching precision limited.And be reach high punching precision, often need to carry out comparatively complicated technique adjustment process in prior art, and usually can sacrifice working (machining) efficiency.
Utility model content
The purpose of this utility model is to propose a kind of shortening position aligning time, reduces movement warp, improves the micro structure array precision finishing machine of the dynamic characteristic Adaptive matching of working (machining) efficiency and machining accuracy.
For reaching this object, the utility model by the following technical solutions:
A kind of accurate micro-press machine, comprise Y-direction motion, X to motion and Z-direction precision stamping mechanism, described X is fixed on base on by X to support to motion, described Z-direction precision stamping mechanism is installed on the X direction guiding rail of described X to motion by X & Z linkage platform and X & Z composite guide rails slide block, and realizes X to motion under described X drives to the X of motion to driving;
Workpiece is placed on the Y-direction motion platform of described Y-direction motion, and realizes Y-direction motion by described Y-direction motion 1.
Preferably, described Z-direction precision stamping mechanism comprises Z-direction motion platform, Z-direction governor motion and micro-punching mechanism, and described Z-direction governor motion and described micro-punching mechanism are installed on described Z-direction motion platform;
Described Z-direction governor motion comprises driving, Z-direction guide rail, ball screw, feed screw nut and nut seat, described driving and described Z-direction guide rail are fixed on described Z-direction motion platform, and described ball screw to be installed on described Z-direction motion platform and to be fixedly connected with described X & Z linkage platform with described nut seat by described feed screw nut;
Described micro-punching mechanism drives described Z-direction motion platform and described X & Z linkage platform to realize the adjustment in Z-direction position in the relative motion of Z-direction by the rotation of ball-screw described in described drived control.
Preferably, described micro-punching mechanism comprises film group, knife rest, drive motors and micro-staking punch, described drive motors is fixed on described Z-direction motion platform, the mover of described drive motors is connected with described knife rest and drives described knife rest in micro-translation of Z-direction, and described micro-staking punch is fixed on described knife rest.
Preferably, described micro-punching mechanism also comprises film pretightning force adjusting bolt, and matrix and the described film group junction of described Z-direction motion platform are provided with strip hole slot, and described film pretightning force adjusting bolt is in described hole slot.
Preferably, described micro-punching mechanism is also provided with capacitive displacement transducer.
Preferably, described film group and described knife rest adopt one processing mode to be embedded in described Z-direction motion platform.
Preferably, described driving is servomotor or hand power screw adjusting device.
Preferably, described Y-direction motion comprises base, Y-direction guide rail, Y-direction motion platform, Y-direction driving, Y-direction guide rail slide block, described Y-direction guide rail is fixed on described base, described Y-direction motion platform is installed on the mover of described Y-direction driving by connecting plate, the stator that described Y-direction drives is fixed on described base, described Y-direction motion platform by described Y-direction guide rail slide block and Y-direction guide rail by its motion in Y-direction of described Y-direction drived control.
Preferably, described X direction guiding rail is fixed on described X to support, and described X is fixed on described X to support to the stator driven, and described X is fixed in described X & Z linkage platform to the mover driven.
Preferably, described Y-direction motion also comprises the Y-direction grating scale be fixed on described base, and described X also comprises to motion and is fixed on the X of described X to support to grating scale.
The beneficial effects of the utility model:
1, the setting of X & Z interlock, drives Z-direction precision stamping mechanism to complete X to motion, and Y-direction motion drives workpiece to complete Y-direction motion, shortens position aligning time, and minimizing movement warp, improves working (machining) efficiency and machining accuracy;
2, the Z-direction governor motion in Z-direction precision stamping mechanism makes Z-direction motion platform and X & Z linkage platform produce Z-direction relative motion by servomotor and ball-screw mode, and then drives micro-punching mechanism to complete the adjustment of Z-direction position, realizes punching press;
3, the prestressing force in film group can be changed by the film pretightning force adjusting bolt in the micro-punching mechanism of adjustment, and then change the dynamics of micro-punching mechanism, mate different operating modes and technological requirement.
Accompanying drawing explanation
Fig. 1 is the structural representation of an embodiment of the present utility model;
Fig. 2 is that the structure of an embodiment of the present utility model splits schematic diagram;
Fig. 3 is the Z-direction precision stamping mechanism structural representation of an embodiment of the present utility model;
Fig. 4 is micro-punching mechanism structural representation of an embodiment of the present utility model.
Wherein: Y-direction motion 1, X is to motion 2, Z-direction precision stamping mechanism 3, base 101, Y-direction guide rail 102, the stator 103 that Y-direction drives, Y-direction guide rail slide block 104, Y-direction motion platform 105, the mover 106 that Y-direction drives, connecting plate 107, X is to support 201, X is to the stator 202 driven, X direction guiding rail 203, X is to the mover 204 driven, X & Z linkage platform 205, X & Z composite guide rails slide block 206, Z-direction motion platform 301, drive 303, Z-direction guide rail 304, film pretightning force adjusting bolt 307, micro-staking punch 308, ball screw 311, feed screw nut 312, nut seat 313, film group 321, knife rest 322, drive motors 323, hole slot 325.
Detailed description of the invention
The technical solution of the utility model is further illustrated by detailed description of the invention below in conjunction with accompanying drawing.
A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching, comprise Y-direction motion 1, X to motion 2 and Z-direction precision stamping mechanism 3, described X is fixed on base 101 on by X to support 201 to motion 2, described Z-direction precision stamping mechanism 3 is installed on the X direction guiding rail 203 of described X to motion 2 by X & Z linkage platform 205 and X & Z composite guide rails slide block 206, and realizes X to motion under described X drives to the X of motion 2 to driving;
Workpiece is placed on the Y-direction motion platform 105 of described Y-direction motion 1, and realizes Y-direction motion by described Y-direction motion 1.
Prior art sets up Z-direction precision stamping mechanism on the XY platform of routine, workpiece need be done exercises below Z-direction precision stamping mechanism to motion and Y-direction by the X of XY platform, by Z-direction precision stamping, mechanism completes stamping procedure, overall structure is comparatively heavy, required run duration is longer, reduces working (machining) efficiency, in addition, the conversion of XY direction motion causes motion platform easily to occur deviation when mobile, and the precision of workpiece punch process is reduced.As shown in Figure 1, the utility model to be linked installation to motion 2 in conjunction with X at Z-direction precision stamping mechanism 3, realize the X of Z-direction precision stamping mechanism 3 to motion, workpiece realizes Y-direction motion by Y-direction motion 1, Z-direction precision stamping mechanism 3 and workpiece respectively respective X to or Y-direction on relative motion, shorten the run duration that station is aimed at, improve work pieces process efficiency, and X disturbs to the motion of Y-direction is irrelevant, without the need to the movement that workpiece is multi-faceted, reduce deviations, improve the precision of workpiece punch process, Z-direction precision stamping mechanism 3 and X install to the interlock of motion 2 and make overall structure simpler.
Preferably, described Z-direction precision stamping mechanism 3 comprises Z-direction motion platform 301, Z-direction governor motion and micro-punching mechanism, and described Z-direction governor motion and described micro-punching mechanism are installed on described Z-direction motion platform 301;
Described Z-direction governor motion comprises driving 303, Z-direction guide rail 304, ball screw 311, feed screw nut 312 and nut seat 313, described driving 303 and described Z-direction guide rail 304 are fixed on described Z-direction motion platform 301, and described ball screw 311 to be installed on described Z-direction motion platform 301 and to be fixedly connected with described X & Z linkage platform 205 with described nut seat 313 by described feed screw nut 312;
The rotation that described micro-punching mechanism controls described ball-screw 311 by described driving 303 drives described Z-direction motion platform 301 and described X & Z linkage platform 205 to realize the adjustment in Z-direction position in the relative motion of Z-direction.
As shown in Figure 3, Z-direction governor motion in Z-direction precision stamping mechanism makes Z-direction motion platform 301 produce the relative motion of Z phase with X & Z linkage platform 205 by driving 303 in conjunction with the mode of ball screw 311, and then drive micro-punching mechanism to complete the adjustment of Z-direction position, structure is simple, and controlling is strong.As shown in Figure 3, drive 303 to be fixed on Z-direction motion platform 301 by electric machine support 302, ball-screw is fixed on Z-direction motion platform 301 by ball-screw supporting seat 310,314.Feed screw nut 312 is fixed in X & Z linkage platform 205 by nut seat 313.
Preferably, described micro-punching mechanism comprises film group 321, knife rest 322, drive motors 323 and micro-staking punch 308, described drive motors 323 is fixed on described Z-direction motion platform 301, the mover of described drive motors 323 is connected with described knife rest 322 and drives described knife rest 322 in micro-translation of Z-direction, and described micro-staking punch 308 is fixed on described knife rest 322.Z-direction precision stamping mechanism can adjust dynamic characteristic according to different punching press frequency, obtains consistent dynamic response performance, and can realize virial switching complex controll, realizes the uniformity processing of micro structure array.
As shown in Figure 4, micro-punching mechanism drives the knife rest 322 with micro-staking punch 308 to complete punching course by drive motors 323.
Preferably, described micro-punching mechanism also comprises film pretightning force adjusting bolt 307, and matrix and described film group 321 junction of described Z-direction motion platform 301 are provided with strip hole slot 325, and described film pretightning force adjusting bolt 307 is in described hole slot 325.The prestressing force in film group 321 can be changed by the film pretightning force adjusting bolt 307 adjusted in micro-punching mechanism, and then change the dynamics of micro-punching mechanism, mate different operating modes and technological requirement.
Preferably, described micro-punching mechanism is also provided with capacitive displacement transducer.Z maintenance and operation for measuring knife rest 322 is moved.
Preferably, described film group 321 and described knife rest 322 adopt one processing mode to be embedded in described Z-direction motion platform 301.Obtained through the mode such as milling, spark machined by whole block material, avoid the rigging error of part, Platform movement precision can be improved.
Preferably, described driving 303 is servomotor or hand power screw adjusting device.Servomotor makes control rate and positional precision all very accurate, and volume is little, and response is fast, and speed is high, can be used for the rotation controlling ball screw 311.Use hand power screw adjusting device, reduce mechanical manipulation, the movement inertia of machinery can be reduced further, improve the accuracy of punching press.
Preferably, described Y-direction motion 1 comprises base 101, Y-direction guide rail 102, Y-direction motion platform 105, Y-direction driving, Y-direction guide rail slide block 104, described Y-direction guide rail 102 is fixed on described base 101, described Y-direction motion platform 105 is installed on the mover 106 of described Y-direction driving by connecting plate 107, the stator 103 that described Y-direction drives is fixed on described base 101, described Y-direction motion platform 105 by described Y-direction guide rail slide block 104 and Y-direction guide rail by its motion in Y-direction of described Y-direction drived control.As shown in Figure 2, the stator 103 that Y-direction drives is installed on X to support, drives the Y-direction of Y-direction motion to move by its mover 106, and quality is light, and vibration kinetic energy is little, and frequency is fast.
Preferably, described X direction guiding rail 203 is fixed on described X to support 201, and described X is fixed on described X to support to the stator 202 driven, and described X is fixed in described X & Z linkage platform 205 to the mover 204 driven.As shown in Figure 2, X is installed on X to support to the stator 202 driven, and is driven the motion of X & Z linkage platform by its mover 204, and quality is light, and vibration kinetic energy is little, and frequency is fast.
Preferably, described Y-direction motion also comprises the Y-direction grating scale be fixed on described base 101, and described X also comprises to motion and is fixed on the X of described X to support 201 to grating scale.Be respectively used to the X of the Y-direction position and X & Z linkage platform and Z-direction precision stamping mechanism measuring Y-direction motion platform to position.
Below know-why of the present utility model is described in conjunction with specific embodiments.These describe just in order to explain principle of the present utility model, and can not be interpreted as the restriction to the utility model protection domain by any way.Based on explanation herein, those skilled in the art does not need to pay performing creative labour can associate other detailed description of the invention of the present utility model, and these modes all will fall within protection domain of the present utility model.
Claims (10)
1. a micro structure array precision finishing machine for dynamic characteristic Adaptive matching, comprises Y-direction motion, X to motion and Z-direction precision stamping mechanism, it is characterized in that:
Described X is fixed on base on by X to support to motion, described Z-direction precision stamping mechanism is installed on the X direction guiding rail of described X to motion by X & Z linkage platform and X & Z composite guide rails slide block, and realizes X to motion under described X drives to the X of motion to driving;
Workpiece is placed on the Y-direction motion platform of described Y-direction motion 1, and realizes Y-direction motion by described Y-direction motion.
2. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 1, it is characterized in that: described Z-direction precision stamping mechanism comprises Z-direction motion platform, Z-direction governor motion and micro-punching mechanism, described Z-direction governor motion and described micro-punching mechanism are installed on described Z-direction motion platform;
Described Z-direction governor motion comprises driving, Z-direction guide rail, ball screw, feed screw nut and nut seat, described driving and described Z-direction guide rail are fixed on described Z-direction motion platform, and described ball screw to be installed on described Z-direction motion platform and to be fixedly connected with described X & Z linkage platform with described nut seat by described feed screw nut;
Described micro-punching mechanism drives described Z-direction motion platform and described X & Z linkage platform to realize the adjustment in Z-direction position in the relative motion of Z-direction by the rotation of ball-screw described in described drived control.
3. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 2, it is characterized in that: described micro-punching mechanism comprises film group, knife rest, drive motors and micro-staking punch, described drive motors is fixed on described Z-direction motion platform, the mover of described drive motors is connected with described knife rest and drives described knife rest in micro-translation of Z-direction, and described micro-staking punch is fixed on described knife rest.
4. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 3, it is characterized in that: described micro-punching mechanism also comprises film pretightning force adjusting bolt, matrix and the described film group junction of described Z-direction motion platform are provided with strip hole slot, and described film pretightning force adjusting bolt is in described hole slot.
5. the micro structure array precision finishing machine of the dynamic characteristic Adaptive matching according to claim 3 or 4, is characterized in that: described micro-punching mechanism is also provided with capacitive displacement transducer.
6. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 3, is characterized in that: described film group and described knife rest adopt one processing mode to be embedded in described Z-direction motion platform.
7. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 2, is characterized in that: described driving is servomotor or hand power screw adjusting device.
8. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 1, it is characterized in that: described Y-direction motion comprises base, Y-direction guide rail, Y-direction motion platform, Y-direction driving, Y-direction guide rail slide block, described Y-direction guide rail is fixed on described base, described Y-direction motion platform is installed on the mover of described Y-direction driving by connecting plate, the stator that described Y-direction drives is fixed on described base, described Y-direction motion platform by described Y-direction guide rail slide block and Y-direction guide rail by its motion in Y-direction of described Y-direction drived control.
9. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 1, it is characterized in that: described X direction guiding rail is fixed on described X to support, described X is fixed on described X to support to the stator driven, and described X is fixed in described X & Z linkage platform to the mover driven.
10. the micro structure array precision finishing machine of dynamic characteristic Adaptive matching according to claim 1, it is characterized in that: described Y-direction motion also comprises the Y-direction grating scale be fixed on described base, described X also comprises to motion and is fixed on the X of described X to support to grating scale.
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| CN201420724099.5U CN204303757U (en) | 2014-11-26 | 2014-11-26 | A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching |
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| CN201420724099.5U CN204303757U (en) | 2014-11-26 | 2014-11-26 | A kind of micro structure array precision finishing machine of dynamic characteristic Adaptive matching |
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| CN204303757U true CN204303757U (en) | 2015-04-29 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104485290A (en) * | 2014-11-26 | 2015-04-01 | 广东工业大学 | Dynamic characteristic self-adapting matching micro structure array precise processing machine tool |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104485290A (en) * | 2014-11-26 | 2015-04-01 | 广东工业大学 | Dynamic characteristic self-adapting matching micro structure array precise processing machine tool |
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Granted publication date: 20150429 Effective date of abandoning: 20171027 |