CN104480449B - A kind of adjustable plated film imitation surface shape frock of repetition - Google Patents
A kind of adjustable plated film imitation surface shape frock of repetition Download PDFInfo
- Publication number
- CN104480449B CN104480449B CN201410838053.0A CN201410838053A CN104480449B CN 104480449 B CN104480449 B CN 104480449B CN 201410838053 A CN201410838053 A CN 201410838053A CN 104480449 B CN104480449 B CN 104480449B
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- Prior art keywords
- adjustable
- microscope base
- plated film
- frock
- shape
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Abstract
A kind of adjustable plated film imitation surface shape frock of repetition, belong to optical coating field, solve prior art imitation surface clamp to be difficult to simulate the film plating substrate of various radius of curvature and different bores, in heating repeatedly, coating process, be susceptible to the technical problem for deforming；The present invention includes planetary plate, multiple adjustable microscope bases and film plating substrate；Multiple adjustable microscope bases pass through screw rod and the connected mode of nut is arranged from planetary plate central authorities with helical radiation shape, and film plating substrate is on adjustable microscope base；The present invention is simulated to heavy caliber curved surface elements in the experiment of imitation surface shape plated film, is capable of the radius of curvature and plated film bore of unrestricted choice institute falseface shape, and a set of frock can simulate the curved surface face shape of any bore and radius of curvature, and frock cost has been saved in reuse；As the angle of each microscope base can be adjusted, therefore efficiently avoid due to frock deformation caused by rotation, heating etc..
Description
Technical field
The invention belongs to optical coating field, and in particular to a kind of adjustable plated film imitation surface shape frock of repetition.
Background technology
With developing rapidly for opto-electronics so that the importance of optical element is increasingly lifted.Plated film is used as optical manufacturing
Final step, institute's quality of film plating layer is highly important for the optical property of optical element.In heavy caliber curved surface elements
In plated film, on whole curved surface, the uniform film thickness concordance of plated film is one of difficult point, needs many experiments simulation to be optimized.
There is following defect in the aspect shape plated film frock for using at present:The size of imitation surface clamp is fixed, it is difficult to mould
Intend the film plating substrate of various radius of curvature and different bores；In heating repeatedly, coating process, imitation surface clamp is susceptible to
Deformation.
The content of the invention
It is an object of the invention to provide a kind of adjustable plated film imitation surface shape frock of repetition, solves prior art imitation surface clevis
Tool is difficult to the film plating substrate for simulating various radius of curvature and different bores, in heating repeatedly, coating process, is susceptible to become
The technical problem of shape.
A kind of adjustable plated film imitation surface shape frock of repetition of the present invention includes planetary plate, multiple adjustable microscope bases and plated film base
Piece；
Multiple adjustable microscope bases pass through screw rod and the connected mode of nut is arranged from planetary plate central authorities with helical radiation shape, plating
Film substrate is on adjustable microscope base.
The planetary plate is disc, the uniform four grooves hook of planetary plate side surface circumference, four groove hooks and plated film
Machine suspension arrangement is attached, and is distributed multiple connecting holes with helical radiation shape in disk.
The adjustable microscope base includes connecting screw rod, connecting elements, connection clamp nut, angular adjustment nut and microscope base；
Microscope base is fixedly connected by angular adjustment nut respectively with four connecting elements, four connecting screw rods respectively with four connecting elements
It is fixedly connected by clamp nut；Angular adjustment nut is used for the angle of regulating lens holder；The plurality of connecting hole is connecting screw rod
Connecting hole.
The angle of inclination of the plurality of adjustable microscope base is different, the angle of inclination of different adjustable microscope base and corresponding big mouth
The face shape angle of footpath curved surface elements relevant position is identical.
The quantity of the plurality of adjustable microscope base is according to the bore of the heavy caliber curved surface elements of simulation experiment and is tested
The position step-length of the film plating substrate of simulation determines.
The Advantageous Effects of the present invention：The present invention is simulated to heavy caliber curved surface elements in the experiment of imitation surface shape plated film,
It is capable of the radius of curvature and plated film bore of unrestricted choice institute falseface shape, a set of frock can simulate any bore and curvature half
The curved surface face shape in footpath, reduces frock cost；As the angle of each microscope base can be adjusted, therefore efficiently avoid
Due to frock deformation caused by rotation, heating etc..
Description of the drawings
Fig. 1 is the structure chart that a kind of adjustable plated film imitation surface shape frock of repetition of the invention carries out plated film to element；
Fig. 2 is a kind of knot of the adjustable microscope base in horizontality of the adjustable plated film imitation surface shape frock of repetition of the invention
Composition；
Fig. 3 is a kind of knot of the adjustable microscope base in heeling condition of the adjustable plated film imitation surface shape frock of repetition of the invention
Composition；
Fig. 4 is a kind of structure chart of the planetary plate of the adjustable plated film imitation surface shape frock of repetition of the invention；
Wherein, 1, planetary plate, 101, groove hook, 102, connecting hole, 2, attaching nut, 3, film plating substrate, 4, adjustable
Microscope base, 401, connecting screw rod, 402, connecting elements, 403, clamp nut, 404, angular adjustment nut, 405, microscope base.
Specific embodiment
The present invention is further elaborated below in conjunction with the accompanying drawings.
Referring to accompanying drawing 1, accompanying drawing 2, accompanying drawing 3 and accompanying drawing 4, a kind of adjustable plated film imitation surface shape frock of repetition of the invention includes
Planetary plate 1, multiple adjustable microscope bases 4 and film plating substrate 3；
Multiple adjustable microscope bases 4 pass through screw rod and the connected mode of nut is arranged from 1 central authorities of planetary plate with helical radiation shape,
Film plating substrate 3 is on adjustable microscope base 4.
The planetary plate 1 is disc, and the uniform four grooves hook 101 of 1 side surface circumference of planetary plate, four grooves are linked up with
101 are attached with coater suspension arrangement, are distributed multiple connecting holes 102, four groove hooks 101 with helical radiation shape in disk
It is attached with coater suspension arrangement.
The adjustable microscope base 4 includes connecting screw rod 401, connecting elements 402, connection clamp nut 403, angular adjustment spiral shell
Mother 404 and microscope base 405；Microscope base 405 is fixedly connected by angular adjustment nut 404 respectively with four connecting elements 402, four companies
Connect screw rod 401 to be fixedly connected by being connected clamp nut 403 with four connecting elements 402 respectively；Angular adjustment nut 404 is used for
The angle of regulating lens holder 405；Connecting hole 102 of the plurality of connecting hole 102 for connecting screw rod 401.
The angle of inclination of the plurality of adjustable microscope base 4 is different, and the angle of inclination of different adjustable microscope bases 4 is big with corresponding
The face shape angle of bore curved surface elements relevant position is identical.
The quantity of the plurality of adjustable microscope base 4 is removed the bore of curved surface elements according to the heavy caliber of simulation experiment and carries out reality
The position for testing the film plating substrate 3 of simulation determines.
The plating membrane sample is cylinder, and a diameter of 1 inch, thickness is between 1mm-5mmm.
This frock carry out heavy caliber curved surface elements imitation surface shape plated film experiment overall process be：The big mouth simulated as needed
The bore of footpath curved surface elements and need to carry out 3 position of film plating substrate of experimental simulation, it is determined that place the quantity of adjustable microscope base 4,
Position and step-length.
The heavy caliber curved surface elements radius of simulation is 200mm, and step-length is 40mm, i.e., a piece of film plating substrate 3 is placed per 40mm
The face shape of curved surface elements at this is simulated, that is, is selected away from planetary plate 1 center 0mm, 40mm, 80mm, 120mm, 160mm, 200mm six
Position, and then position and the quantity of connecting hole 102 are determined, connecting hole 102 is arranged from 1 center of planetary plate with helical radiation shape.
The angle of adjustable microscope base 4 is horizontal direction, as the face shape of the center of heavy caliber curved surface elements is level
Direction, therefore the angle of adjustable microscope base 4 is horizontal direction.Four connecting screw rods 401 of the adjustable microscope base 4 are adjusted, four are made
The length of connecting screw rod 401 is identical, four adjusting screw rods is fastened on connecting elements 402 by clamp nut 403, by microscope base
405 are connected on connection framework by angular adjustment nut 404, and four connecting screw rods 401 are inserted corresponding company on planetary plate 1
Connect in hole 102, and respectively four screw rods are fastened on planetary plate 1 with attaching nut 22.
The angle of adjustable microscope base 4 is inclined when being, due to margin location of the heavy caliber curved surface elements in addition to middle position
The face shape put be it is inclined, so adjustable microscope base 4 is also for inclined.Projection position according to film plating substrate 3 on planetary plate 1
Put the inclination angle of the adjustable microscope base of curvature radius calculation 4 of distance and heavy-calibre element curved surface apart from 1 central point of planetary plate
Degree, so as to calculate the different length of four connecting screw rods 401, four connecting screw rods 401 is connected to by clamp nut 403
On connecting elements 402, and mirror microscope base 405 is fastened on connecting elements 402 by angular adjustment nut 404；Spiral shell is adjusted by four
On bar correspondence insertion planetary plate 1 on corresponding connecting hole 102, and four adjusting screw rods are fastened on by attaching nut 2 respectively
On planetary plate 1.
The like, all adjustable microscope bases 405 are fastened on planetary plate 1 behind corresponding position, it is all adjustable
Section formula microscope base 4 is to be arranged with helical radiation shape from 1 central authorities of planetary plate, the corresponding big mouth in position of different adjustable microscope bases 4
The face shape angle of footpath curved surface elements relevant position.Film plating substrate 3 is put in adjustable microscope base 4, then by planetary plate 1 by recessed
Groove hook 101 is suspended on coater, you can carry out plated film experiment.
Claims (3)
1. the adjustable plated film imitation surface shape frock of a kind of repetition, it is characterised in that including planetary plate (1), multiple adjustable microscope bases
And film plating substrate (3) (4)；
Multiple adjustable microscope bases (4) are arranged with helical radiation shape from planetary plate (1) central authorities by the connected mode of screw rod and nut,
Film plating substrate (3) is on adjustable microscope base (4)；
The planetary plate (1) is disc, and uniform four grooves hook (101) of planetary plate (1) side surface circumference, four grooves are linked up with
(101) it is attached with coater suspension arrangement, multiple connecting holes (102) is distributed with helical radiation shape in disk, four grooves is hung
Hook (101) is attached with coater suspension arrangement；
The angle of inclination of the plurality of adjustable microscope base (4) is different, and the angle of inclination of different adjustable microscope bases (4) is big with corresponding
The face shape angle of bore curved surface elements relevant position is identical.
2. the adjustable plated film imitation surface shape frock of a kind of repetition according to claim 1, it is characterised in that described adjustable
Microscope base (4) including connecting screw rod (401), connecting elements (402), connection clamp nut (403), angular adjustment nut (404) and
Microscope base (405)；Microscope base (405) is fixedly connected by angular adjustment nut (404) respectively with four connecting elements (402), four
Connecting screw rod (401) is fixedly connected by being connected clamp nut (403) with four connecting elements (402) respectively；Angular adjustment spiral shell
The angle of female (404) for regulating lens holder (405)；Connecting hole of the plurality of connecting hole (102) for connecting screw rod (401)
(102)。
3. the adjustable plated film imitation surface shape frock of a kind of repetition according to claim 1, it is characterised in that it is the plurality of can
The quantity of mode microscope base (4) is removed the bore of curved surface elements according to the heavy caliber of simulation experiment and carries out the film plating substrate of experimental simulation
(3) position determines.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410838053.0A CN104480449B (en) | 2014-12-30 | 2014-12-30 | A kind of adjustable plated film imitation surface shape frock of repetition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410838053.0A CN104480449B (en) | 2014-12-30 | 2014-12-30 | A kind of adjustable plated film imitation surface shape frock of repetition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104480449A CN104480449A (en) | 2015-04-01 |
| CN104480449B true CN104480449B (en) | 2017-04-05 |
Family
ID=52755048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410838053.0A Expired - Fee Related CN104480449B (en) | 2014-12-30 | 2014-12-30 | A kind of adjustable plated film imitation surface shape frock of repetition |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104480449B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106929815B (en) * | 2015-12-29 | 2020-08-21 | 中国科学院长春光学精密机械与物理研究所 | Plating machine planet dish loading and unloading anchor clamps |
| CN106835059B (en) * | 2017-02-27 | 2019-05-03 | 江阴市中兴光电实业有限公司 | Coating machine diaphragm rotating mechanism with adjustable angle planetary plate |
| CN108277464B (en) * | 2018-02-05 | 2019-09-10 | 信利光电股份有限公司 | A kind of coating apparatus, film plating process and the readable storage medium storing program for executing of curved surface cover board |
| CN109023254B (en) * | 2018-08-13 | 2020-10-16 | 中国科学院光电技术研究所 | Vacuum coating machine for preparing large-caliber optical film element |
| CN113897586A (en) * | 2021-08-27 | 2022-01-07 | 上海现代先进超精密制造中心有限公司 | Mirror surface simulation frock of adjustable different curvatures |
| CN114657529A (en) * | 2022-03-25 | 2022-06-24 | 中国工程物理研究院激光聚变研究中心 | Free-form surface coating clamping equipment |
| DE102023200603A1 (en) * | 2023-01-26 | 2024-08-01 | Carl Zeiss Smt Gmbh | Method for producing a mirror arrangement, and coating system |
-
2014
- 2014-12-30 CN CN201410838053.0A patent/CN104480449B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN104480449A (en) | 2015-04-01 |
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Granted publication date: 20170405 Termination date: 20191230 |